JP5086580B2 - 照明装置 - Google Patents

照明装置 Download PDF

Info

Publication number
JP5086580B2
JP5086580B2 JP2006212763A JP2006212763A JP5086580B2 JP 5086580 B2 JP5086580 B2 JP 5086580B2 JP 2006212763 A JP2006212763 A JP 2006212763A JP 2006212763 A JP2006212763 A JP 2006212763A JP 5086580 B2 JP5086580 B2 JP 5086580B2
Authority
JP
Japan
Prior art keywords
illumination
optical element
grooves
groove
illuminance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006212763A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008040038A5 (de
JP2008040038A (ja
Inventor
健太郎 山▲崎▼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2006212763A priority Critical patent/JP5086580B2/ja
Priority to DE102007033916.1A priority patent/DE102007033916B4/de
Priority to US11/878,015 priority patent/US7554739B2/en
Publication of JP2008040038A publication Critical patent/JP2008040038A/ja
Priority to US12/470,684 priority patent/US7672054B2/en
Publication of JP2008040038A5 publication Critical patent/JP2008040038A5/ja
Application granted granted Critical
Publication of JP5086580B2 publication Critical patent/JP5086580B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/0944Diffractive optical elements, e.g. gratings, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0972Prisms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2006212763A 2006-08-04 2006-08-04 照明装置 Expired - Fee Related JP5086580B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006212763A JP5086580B2 (ja) 2006-08-04 2006-08-04 照明装置
DE102007033916.1A DE102007033916B4 (de) 2006-08-04 2007-07-20 Optisches Element zur Beleuchtungshomogenisierung
US11/878,015 US7554739B2 (en) 2006-08-04 2007-07-20 Illumination homogenizing optical element
US12/470,684 US7672054B2 (en) 2006-08-04 2009-05-22 Illumination homogenizing optical element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006212763A JP5086580B2 (ja) 2006-08-04 2006-08-04 照明装置

Publications (3)

Publication Number Publication Date
JP2008040038A JP2008040038A (ja) 2008-02-21
JP2008040038A5 JP2008040038A5 (de) 2009-09-17
JP5086580B2 true JP5086580B2 (ja) 2012-11-28

Family

ID=38922311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006212763A Expired - Fee Related JP5086580B2 (ja) 2006-08-04 2006-08-04 照明装置

Country Status (3)

Country Link
US (2) US7554739B2 (de)
JP (1) JP5086580B2 (de)
DE (1) DE102007033916B4 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10180234B2 (en) 2014-07-24 2019-01-15 Olympus Corporation Illumination optical system, illumination apparatus, and illumination optical element

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5086580B2 (ja) * 2006-08-04 2012-11-28 オリンパス株式会社 照明装置
US9529126B2 (en) 2014-01-09 2016-12-27 Wisconsin Alumni Research Foundation Fresnel zone plate
CN106970027B (zh) * 2016-01-13 2019-10-15 德律科技股份有限公司 光学测量系统以及光学成像系统
WO2017180697A1 (en) * 2016-04-13 2017-10-19 Thomas & Betts International Llc Reflector and led assembly for emergency lighting head
KR20170137364A (ko) * 2016-06-03 2017-12-13 삼성전자주식회사 전자기파 집속장치 및 이를 포함하는 광학장치

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07261125A (ja) * 1994-03-24 1995-10-13 Olympus Optical Co Ltd 投影型画像表示装置
EP1064570B1 (de) * 1999-01-14 2005-12-07 Minnesota Mining And Manufacturing Company Lichtstreuender optischer folienmaterial
CN100523945C (zh) * 2002-10-04 2009-08-05 日亚化学工业株式会社 用于面发光装置的导光板
JP4366948B2 (ja) * 2003-02-14 2009-11-18 株式会社ニコン 照明光学装置、露光装置および露光方法
JP2005215992A (ja) 2004-01-29 2005-08-11 Mitsumi Electric Co Ltd 画像検出装置
TWI364600B (en) * 2004-04-12 2012-05-21 Kuraray Co An illumination device an image display device using the illumination device and a light diffusing board used by the devices
US7408708B2 (en) * 2004-04-16 2008-08-05 Dai Nippon Printing Co., Ltd. Diffusing sheet, surface light source unit, and transmission type display
JP2006030535A (ja) 2004-07-15 2006-02-02 Seiko Epson Corp 照明装置及びプロジェクタ
WO2006011218A1 (ja) * 2004-07-29 2006-02-02 Mitsubishi Denki Kabushiki Kaisha フレネル光学素子、表示スクリーン及び投写型表示装置
JP4837325B2 (ja) * 2005-07-26 2011-12-14 オリンパス株式会社 顕微鏡照明装置
RU2297020C1 (ru) * 2005-09-16 2007-04-10 Самсунг Электромеканикс (СЕМКО) Микролинзовый массив, основанный на эффекте полного внутреннего отражения, для широкоугольных осветительных систем
JP2007311114A (ja) * 2006-05-17 2007-11-29 Olympus Corp 白色光を発する固体発光素子を用いた照明光学系、及びそれを備えた光学装置
JP5086580B2 (ja) * 2006-08-04 2012-11-28 オリンパス株式会社 照明装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10180234B2 (en) 2014-07-24 2019-01-15 Olympus Corporation Illumination optical system, illumination apparatus, and illumination optical element

Also Published As

Publication number Publication date
US20080030866A1 (en) 2008-02-07
DE102007033916B4 (de) 2016-02-18
JP2008040038A (ja) 2008-02-21
DE102007033916A1 (de) 2008-02-14
US7672054B2 (en) 2010-03-02
US7554739B2 (en) 2009-06-30
US20090231858A1 (en) 2009-09-17

Similar Documents

Publication Publication Date Title
JP5086580B2 (ja) 照明装置
JP6787135B2 (ja) 照射光学系およびプロジェクタ
KR100903908B1 (ko) 투사형 표시 장치
JP6370626B2 (ja) 照明光学系、照明装置、及び照明光学素子
US8102603B2 (en) Lens having extended depth of focus, method for designing the same, and optical system having the same
JPH1154426A (ja) 照明装置及びそれを用いた投影露光装置
JPS597359A (ja) 照明装置
KR102079181B1 (ko) 패턴광 조사 장치 및 방법
JP3640391B1 (ja) 照明光学装置
JP2017534918A (ja) 露光装置の調整装置及び調整方法
US8767200B2 (en) Luminous flux branching element and mask defect inspection apparatus
WO2015098242A1 (ja) 標本観察装置および標本観察方法
JPH10335224A (ja) 投影露光装置、投影露光方法、振幅収差評価用マスクパターン、振幅収差量評価方法および振幅収差除去フィルタ
JP6494259B2 (ja) 照明光学装置、およびデバイス製造方法
US20150286052A1 (en) Microscope and ghosting elimination method
WO2015146506A1 (ja) 位相フィルタ、撮像光学系、及び撮像システム
JP2009237321A (ja) 画像露光装置
JP2015219434A (ja) 照明光学系および画像投射装置
JP2010096999A (ja) 回折光学素子、回折光学部材及び光学系
JP2010145780A (ja) インテグレータ、このインテグレータを有する照明装置、及び、この照明装置を有する顕微鏡装置
JP6527725B2 (ja) 三次元形状測定装置
JP3811923B2 (ja) 照明光学系
JP2009157325A (ja) 露光照明装置及び露光パターンの位置ずれ調整方法
KR101838774B1 (ko) 투영 광학계와 투영 노광 장치
TWI709825B (zh) 照明光學系統、曝光裝置及物品製造方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090803

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090803

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110609

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110621

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110803

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120515

RD12 Notification of acceptance of power of sub attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7432

Effective date: 20120709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120710

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20120709

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120814

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120907

R151 Written notification of patent or utility model registration

Ref document number: 5086580

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150914

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees