JP5054901B2 - 超高速均一プラズマ処理装置 - Google Patents
超高速均一プラズマ処理装置 Download PDFInfo
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- JP5054901B2 JP5054901B2 JP2005204419A JP2005204419A JP5054901B2 JP 5054901 B2 JP5054901 B2 JP 5054901B2 JP 2005204419 A JP2005204419 A JP 2005204419A JP 2005204419 A JP2005204419 A JP 2005204419A JP 5054901 B2 JP5054901 B2 JP 5054901B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
- H01J37/32633—Baffles
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Description
Claims (9)
- プラズマを用いて基板を処理するための装置であって、
第1の電極と、
第2の電極と、
該第1の電極に直接接触し、該第1の電極と該第2の電極との間に延在する側壁を形成する該第2の電極に直接接触する管状分離部材であって、該管状分離部材と該第1の電極と該第2の電極とはプロセス領域を形成し、該管状分離部材は、該第1の電極と該第2の電極とを電気的に絶縁可能な誘電材と、該プロセス領域を大気圧で空気から絶縁している該プロセス領域内の圧力に曝されている第1表面とを備える該管状分離部材と、
該プロセス領域へ処理用ガスを導入するための処理用ガスポートと、
該プロセス領域内の処理用ガスからプラズマを発生させるのに適した大気圧より低い圧力にすべく、該プロセス領域を排気するための真空ポートと、
電気的導電性を有し、該管状分離部材と該第1の電極と該第2の電極とを囲む導電性容器と、
該導電性容器と、該第1の電極、該第2の電極および該管状分離部材と、の間に配置される大気圧空間と、
を備えていることを特徴とする装置。 - 請求項1に記載の装置であって、前記装置はさらに、
該真空ポートに結合された真空マニホールドであって、該第1の電極および該第2の電極に対して電気的に絶縁されているような真空マニホールドを備えていることを特徴とする装置。 - 請求項2に記載の装置であって、該真空マニホールドは、該真空ポートに近接した閉じた空間を有し、
この装置はさらに、
電気絶縁材料から作られ、該閉じた空間内に配置されるインサートであって、前記真空マニホールドを前記真空ポートに結合させる複数の第1の流路を有しているような前記インサートを備えていることを特徴とする装置。 - 請求項3に記載の装置であって、
該真空ポートは、前記第1の電極を通って延在する複数の第2の流路により画定され、前記複数の第1の流路に位置合わせされていることを特徴とする装置。 - 請求項1から4のいずれか一項に記載の装置であって、
該導電性容器はさらに、ベースと、該プロセス領域にアクセスするために開閉位置間を可動な蓋とを備え、該蓋は該ベースに対して該第1の電極を移動させることを特徴とする装置。 - 請求項5に記載の装置であって、
前記装置には、さらに、該第1の電極と該第2の電極とを冷やすために、該大気圧空間に冷媒の供給を行う冷媒ポートを該蓋に備えていることを特徴とする装置。 - 請求項1から6のいずれか一項に記載の装置であって、
該第1の電極は真空ポートを有し、該第2の電極はプロセスガスポートを有することを特徴とする装置。 - 請求項1から7のいずれか一項に記載の装置であって、
該第2の電極は、該プロセス領域を閉じる第1位置と、該プロセス領域へ又は該プロセス領域から基材を移送するための該第2位置と、の間を該第1の電極に対して可動であって、
該管状分離部材は、該第2の電極が該第1位置にあるときに、前記第1の電極と該第2の電極との間に真空シールを形成することを特徴とする装置。 - 複数の基板をプラズマ処理するための装置であって、
第1の電極と、
該第1の電極に対して離して配置された第2の電極と、
該第1の電極と該第2の電極との間に配置された第3の電極と、
該第1の電極に直接接触し、該第1の電極と該第2の電極との間に延在する第1側壁を形成する該第3の電極に直接接触する第1管状分離部材であって、該第1管状分離部材と該第1の電極と該第3の電極とは第1プロセス領域を形成し、該第1の電極はプラズマ処理のための該第1プロセス領域において複数の基板の一つを支持するようになっていて、該第1管状分離部材は、該第1の電極を該第3の電極から電気的に絶縁可能な誘電材と、大気から絶縁され、該第1プロセス領域の内部に暴露される第1表面とを備える該第1管状分離部材と、
該第2の電極に直接接触し、該第2の電極と該第3の電極との間に延在する第2側壁を形成する該第3の電極に直接接触する第2管状分離部材であって、該第2管状分離部材と該第1の電極と該第3の電極とは第2プロセス領域を形成し、該第3の電極はプラズマ処理のための該第2プロセス領域において複数の基板の一つを支持するようになっていて、該第2管状分離部材は、該第2の電極を該第3の電極から電気的に絶縁可能な誘電材と、大気から絶縁され、該第2プロセス領域の内部に暴露される第2表面とを備える該第2管状分離部材と、
該第1のプロセス領域と第2のプロセス領域とへ処理用ガスを導入するための少なくともひとつの処理用ガスポートと、
該第1のプロセス領域および該第2のプロセス領域の中を処理用ガスからプラズマを発生させるに適した大気圧より低い圧力とするための該プロセス領域を排気するための真空ポートと、
電気的導電性を有し、該第1の電極と該第2の電極と該第3の電極と該第1管状分離部材と該第2管状分離部材とを囲む導電性容器と、
該導電性容器と、該第1の電極、該第2の電極、該第3の電極、該第1管状分離部材および該第2管状分離部材と、の間に配置される大気圧空間と、
を備えていることを特徴とする装置。
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Application Number | Priority Date | Filing Date | Title |
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US10/710,457 | 2004-07-13 | ||
US10/710,457 US7845309B2 (en) | 2004-07-13 | 2004-07-13 | Ultra high speed uniform plasma processing system |
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JP2006032344A JP2006032344A (ja) | 2006-02-02 |
JP2006032344A5 JP2006032344A5 (ja) | 2010-08-12 |
JP5054901B2 true JP5054901B2 (ja) | 2012-10-24 |
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US (1) | US7845309B2 (ja) |
EP (1) | EP1617457B1 (ja) |
JP (1) | JP5054901B2 (ja) |
CN (1) | CN1728916B (ja) |
SG (2) | SG137851A1 (ja) |
TW (1) | TWI392402B (ja) |
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TWI392402B (zh) | 2013-04-01 |
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JP2006032344A (ja) | 2006-02-02 |
CN1728916B (zh) | 2011-06-01 |
SG137851A1 (en) | 2007-12-28 |
EP1617457A3 (en) | 2006-10-18 |
US7845309B2 (en) | 2010-12-07 |
US20060011299A1 (en) | 2006-01-19 |
EP1617457B1 (en) | 2011-12-28 |
CN1728916A (zh) | 2006-02-01 |
SG119365A1 (en) | 2006-02-28 |
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