JP5053194B2 - 可動構造体及びそれを用いた光走査ミラー - Google Patents

可動構造体及びそれを用いた光走査ミラー Download PDF

Info

Publication number
JP5053194B2
JP5053194B2 JP2008186189A JP2008186189A JP5053194B2 JP 5053194 B2 JP5053194 B2 JP 5053194B2 JP 2008186189 A JP2008186189 A JP 2008186189A JP 2008186189 A JP2008186189 A JP 2008186189A JP 5053194 B2 JP5053194 B2 JP 5053194B2
Authority
JP
Japan
Prior art keywords
movable plate
stopper portion
movable
optical scanning
fixed frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008186189A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010026162A (ja
JP2010026162A5 (de
Inventor
英喜 上田
宏 野毛
清彦 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2008186189A priority Critical patent/JP5053194B2/ja
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to EP09770219.5A priority patent/EP2299584A4/de
Priority to DE09770219T priority patent/DE09770219T8/de
Priority to KR1020107029073A priority patent/KR101183915B1/ko
Priority to US13/001,197 priority patent/US20110188104A1/en
Priority to SG2013024815A priority patent/SG189738A1/en
Priority to SG2013024781A priority patent/SG189737A1/en
Priority to PCT/JP2009/061583 priority patent/WO2009157509A1/ja
Priority to CN2009801237280A priority patent/CN102067433A/zh
Publication of JP2010026162A publication Critical patent/JP2010026162A/ja
Publication of JP2010026162A5 publication Critical patent/JP2010026162A5/ja
Application granted granted Critical
Publication of JP5053194B2 publication Critical patent/JP5053194B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2008186189A 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー Active JP5053194B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2008186189A JP5053194B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー
CN2009801237280A CN102067433A (zh) 2008-06-25 2009-06-25 可动结构体及使用它的光扫描反射镜
KR1020107029073A KR101183915B1 (ko) 2008-06-25 2009-06-25 가동 구조체 및 이것을 사용한 광주사 미러
US13/001,197 US20110188104A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
SG2013024815A SG189738A1 (en) 2008-06-25 2009-06-25 Semiconductor mechanical structure
SG2013024781A SG189737A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
EP09770219.5A EP2299584A4 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit
DE09770219T DE09770219T8 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit
PCT/JP2009/061583 WO2009157509A1 (ja) 2008-06-25 2009-06-25 可動構造体及びそれを用いた光走査ミラー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008186189A JP5053194B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Publications (3)

Publication Number Publication Date
JP2010026162A JP2010026162A (ja) 2010-02-04
JP2010026162A5 JP2010026162A5 (de) 2012-06-07
JP5053194B2 true JP5053194B2 (ja) 2012-10-17

Family

ID=41732069

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008186189A Active JP5053194B2 (ja) 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Country Status (1)

Country Link
JP (1) JP5053194B2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009033191A1 (de) * 2009-07-07 2011-01-13 Technische Universität Dresden Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen
WO2014010243A1 (ja) * 2012-07-13 2014-01-16 住友精密工業株式会社 半導体装置
EP3186189A4 (de) * 2014-08-04 2018-05-09 Ba-Tis, Faez Elektrostatischer mikroaktuator mit mems-kolben-rohr mit drei freiheitsgraden
JP6414516B2 (ja) * 2015-06-24 2018-10-31 京セラドキュメントソリューションズ株式会社 光偏向器及び該光偏向器を備えた画像形成装置
JP2021021676A (ja) 2019-07-30 2021-02-18 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3666370B2 (ja) * 2000-07-06 2005-06-29 株式会社村田製作所 外力検知センサ
JP2005266074A (ja) * 2004-03-17 2005-09-29 Anritsu Corp 光スキャナ
CN1906119A (zh) * 2004-04-22 2007-01-31 松下电器产业株式会社 执行器
JP2007052256A (ja) * 2005-08-18 2007-03-01 Fujifilm Corp 回転変位型光変調素子及びこれを用いた光学装置

Also Published As

Publication number Publication date
JP2010026162A (ja) 2010-02-04

Similar Documents

Publication Publication Date Title
WO2009157509A1 (ja) 可動構造体及びそれを用いた光走査ミラー
KR101264136B1 (ko) 가동 구조체을 사용한 마이크로 미러 소자
JP5049904B2 (ja) 可動構造体及びそれを用いた光走査ミラー
JP5783568B2 (ja) マイクロスキャナ
JP4984117B2 (ja) ２次元光スキャナ、それを用いた光学装置および２次元光スキャナの製造方法
EP3070508A1 (de) Optischer ablenker mit spiegel mit erweiterter, an den hervorstehenden teilen eines torsionsstabs gekoppelter verstärkungsrippe
KR102591487B1 (ko) 광학 디바이스
JP4385938B2 (ja) アクチュエータ
JP5757034B2 (ja) マイクロスキャナ
JP5038732B2 (ja) 光走査ミラー
JP5053194B2 (ja) 可動構造体及びそれを用いた光走査ミラー
JP6390508B2 (ja) 光走査装置
JP4765840B2 (ja) チルトミラー素子
JP2005137102A (ja) アクチュエータ
JP2006115683A (ja) 静電アクチュエータ及び光走査装置
JP2010008609A (ja) 可動構造体及びそれを用いたマイクロミラー素子
JP5039431B2 (ja) 可動構造体、同構造体を用いた光走査ミラー素子、及び可動構造体の製造方法
JP4988655B2 (ja) 半導体機械構造体
JP2008086067A (ja) 可動構造体及びそれを備えた光学素子
JP2010085735A (ja) 可動構造体、それを用いた光走査ミラー及び可動構造体の製造方法
JP2005279863A (ja) アクチュエータの製造方法およびアクチュエータ
JP6506891B1 (ja) 光学デバイス
JP2011053570A (ja) 光スキャナ
JP6130374B2 (ja) 半導体装置
JP2008052218A (ja) 可動構造体の製造方法及び同構造体を備えた光学素子

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110323

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A712

Effective date: 20120112

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120413

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20120413

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20120425

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120501

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120626

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120717

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120725

R150 Certificate of patent or registration of utility model

Ref document number: 5053194

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150803

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250