JP2010026162A5 - - Google Patents
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- Publication number
- JP2010026162A5 JP2010026162A5 JP2008186189A JP2008186189A JP2010026162A5 JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5 JP 2008186189 A JP2008186189 A JP 2008186189A JP 2008186189 A JP2008186189 A JP 2008186189A JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- movable
- stopper portion
- movable structure
- structure according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims description 2
- 230000003287 optical Effects 0.000 claims 1
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008186189A JP5053194B2 (ja) | 2008-07-17 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
KR1020107029073A KR101183915B1 (ko) | 2008-06-25 | 2009-06-25 | 가동 구조체 및 이것을 사용한 광주사 미러 |
SG2013024781A SG189737A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
PCT/JP2009/061583 WO2009157509A1 (ja) | 2008-06-25 | 2009-06-25 | 可動構造体及びそれを用いた光走査ミラー |
US13/001,197 US20110188104A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
CN2009801237280A CN102067433A (zh) | 2008-06-25 | 2009-06-25 | 可动结构体及使用它的光扫描反射镜 |
EP09770219.5A EP2299584A4 (de) | 2008-06-25 | 2009-06-25 | Bewegliche struktur und lichtabtastspiegel damit |
SG2013024815A SG189738A1 (en) | 2008-06-25 | 2009-06-25 | Semiconductor mechanical structure |
DE09770219T DE09770219T8 (de) | 2008-06-25 | 2009-06-25 | Bewegliche struktur und lichtabtastspiegel damit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008186189A JP5053194B2 (ja) | 2008-07-17 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010026162A JP2010026162A (ja) | 2010-02-04 |
JP2010026162A5 true JP2010026162A5 (de) | 2012-06-07 |
JP5053194B2 JP5053194B2 (ja) | 2012-10-17 |
Family
ID=41732069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008186189A Active JP5053194B2 (ja) | 2008-06-25 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5053194B2 (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009033191A1 (de) * | 2009-07-07 | 2011-01-13 | Technische Universität Dresden | Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen |
JP6130374B2 (ja) * | 2012-07-13 | 2017-05-17 | 住友精密工業株式会社 | 半導体装置 |
WO2016020716A1 (en) * | 2014-08-04 | 2016-02-11 | Ba-Tis Faez | 3-dof mems piston-tube electrostatic microactuator |
JP6414516B2 (ja) * | 2015-06-24 | 2018-10-31 | 京セラドキュメントソリューションズ株式会社 | 光偏向器及び該光偏向器を備えた画像形成装置 |
JP2021021676A (ja) | 2019-07-30 | 2021-02-18 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3666370B2 (ja) * | 2000-07-06 | 2005-06-29 | 株式会社村田製作所 | 外力検知センサ |
JP2005266074A (ja) * | 2004-03-17 | 2005-09-29 | Anritsu Corp | 光スキャナ |
US20090153935A1 (en) * | 2004-04-22 | 2009-06-18 | Osamu Kajino | Actuator |
JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
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2008
- 2008-07-17 JP JP2008186189A patent/JP5053194B2/ja active Active
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