JP2005341788A5 - - Google Patents

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Publication number
JP2005341788A5
JP2005341788A5 JP2005118473A JP2005118473A JP2005341788A5 JP 2005341788 A5 JP2005341788 A5 JP 2005341788A5 JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005118473 A JP2005118473 A JP 2005118473A JP 2005341788 A5 JP2005341788 A5 JP 2005341788A5
Authority
JP
Japan
Prior art keywords
comb
reinforcing rib
actuator
micro
comb teeth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005118473A
Other languages
English (en)
Japanese (ja)
Other versions
JP4761810B2 (ja
JP2005341788A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005118473A priority Critical patent/JP4761810B2/ja
Priority claimed from JP2005118473A external-priority patent/JP4761810B2/ja
Publication of JP2005341788A publication Critical patent/JP2005341788A/ja
Publication of JP2005341788A5 publication Critical patent/JP2005341788A5/ja
Application granted granted Critical
Publication of JP4761810B2 publication Critical patent/JP4761810B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2005118473A 2004-04-26 2005-04-15 マイクロアクチュエータ Expired - Fee Related JP4761810B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004129281 2004-04-26
JP2004129281 2004-04-26
JP2005118473A JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Publications (3)

Publication Number Publication Date
JP2005341788A JP2005341788A (ja) 2005-12-08
JP2005341788A5 true JP2005341788A5 (de) 2008-03-13
JP4761810B2 JP4761810B2 (ja) 2011-08-31

Family

ID=35494726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005118473A Expired - Fee Related JP4761810B2 (ja) 2004-04-26 2005-04-15 マイクロアクチュエータ

Country Status (1)

Country Link
JP (1) JP4761810B2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2045645A1 (de) 2006-07-06 2009-04-08 Nikon Corporation Mikroaktuator, optische einheit, belichtungsvorrichtung und geräteherstellungsverfahren
JP5103876B2 (ja) * 2006-11-16 2012-12-19 株式会社デンソー ２次元光走査装置
JP5133814B2 (ja) 2008-08-13 2013-01-30 ラピスセミコンダクタ株式会社 可変容量素子
JP5696686B2 (ja) 2011-08-30 2015-04-08 株式会社豊田中央研究所 半導体装置
JP5988592B2 (ja) * 2012-01-19 2016-09-07 キヤノン株式会社 可動ミラー、波面補正デバイスおよび眼底検査装置
EP3186189A4 (de) * 2014-08-04 2018-05-09 Ba-Tis, Faez Elektrostatischer mikroaktuator mit mems-kolben-rohr mit drei freiheitsgraden
CN112204449B (zh) * 2018-06-14 2022-06-17 奥林巴斯株式会社 光偏转器及扫描型激光显微镜
CN117270192B (zh) * 2023-11-22 2024-04-02 苏州亿波达微系统技术有限公司 一种mems微镜结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5465627A (en) * 1977-10-31 1979-05-26 Kuretake Kougiyou Kk Capillary rod appropriate as pen
US5986381A (en) * 1997-03-14 1999-11-16 Hewlett-Packard Company Electrostatic actuator with spatially alternating voltage patterns
JPH11136961A (ja) * 1997-10-24 1999-05-21 Citizen Watch Co Ltd 静電ウォブルモータ
JP2930946B1 (ja) * 1998-08-26 1999-08-09 勲 劔持 ゴルフ練習台
JP4072743B2 (ja) * 1998-11-13 2008-04-09 日本ビクター株式会社 光偏向器及びこれを用いた表示装置
JP4837839B2 (ja) * 2001-05-30 2011-12-14 三浦 秀巳 平行平板型静電アクチュエータ、ヘッドスライダ、ヘッド組立体及び磁気ディスク装置
JP3595515B2 (ja) * 2001-06-26 2004-12-02 三菱重工業株式会社 静電チャック
JP4409811B2 (ja) * 2001-08-20 2010-02-03 株式会社リコー 光走査装置、光書込装置、画像形成装置、振動ミラーチップ及び光走査モジュール

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