JP2005341788A5 - - Google Patents

Claims (15)

The base,
A first comb electrode supported by the base;
A movable part comprising a second comb electrode facing the first comb electrode, and at least one reinforcing rib projecting in the direction of the base;
An elastic support part for supporting the movable part so that the movable part can be displaced with respect to the base;
The microactuator, wherein a height of the second comb electrode and a height of the at least one reinforcing rib are different from each other.   The microactuator according to claim 1, wherein a height of the at least one reinforcing rib is higher than a height of the second comb electrode. The second comb electrode includes a plurality of comb teeth.
2. The microactuator according to claim 1, wherein a thickness of the at least one reinforcing rib is greater than a thickness of each of the plurality of comb teeth portions. The second comb electrode includes a plurality of comb teeth,
The plurality of comb teeth and the at least one reinforcing rib protrude from the back surface of the second comb electrode toward the substrate,
2. The microactuator according to claim 1, wherein a position of the highest point of the plurality of comb teeth portions and a position of the highest point of the at least one reinforcing rib are different from each other. The length from the position of the highest point of the at least one reinforcing rib to the back surface of the second comb electrode is longer than the length from the position of the highest point of the plurality of comb teeth portions to the back surface of the second comb electrode. The microactuator according to claim 4, which is also long. The second comb electrode includes a plurality of comb teeth.
Wherein the plurality of comb teeth, the are from the inside of the movable portion extending along a direction toward the outside the micro-actuator of claim 1 or 4. The second comb electrode includes a plurality of comb teeth.
The microactuator according to claim 1 or 4 , wherein the plurality of comb teeth have a concentric shape. Wherein the at least one reinforcing rib is provided on the outer periphery of the movable portion, the micro-actuator of claim 1 or 4. The second comb electrode includes a plurality of comb teeth.
Wherein the said at least one reinforcing rib plurality of comb-tooth portions extending along the same direction, the micro-actuator of claim 1 or 4. The second comb electrode includes a plurality of comb teeth.
It said plurality of said at least one reinforcing rib and the comb-tooth portion extends along mutually perpendicular directions, the micro-actuator of claim 1 or 4. The height of the second comb electrodes, said that from the inside of the movable portion is lower in a direction toward the outside the micro-actuator of claim 1 or 4. The second comb electrode includes a plurality of comb teeth.
The thickness of each of the plurality of comb teeth, the are from the inside of the movable portion becomes thinner along a direction outward, the micro-actuator of claim 1 or 4. The elastic support portion, the tilting of two axes for supporting the movable portion so as to be relative to the base of the movable part, the micro-actuator of claim 1 or 4. The elastic support portion supports the movable portion so as to enable tilting of two axes with respect to the displacement, and the base in the vertical direction relative to the base of the movable part, the micro-actuator of claim 1 or 4 . The movable unit comprises a light reflecting surface, the micro-actuator of claim 1 or 4.