JP2010026162A5 - - Google Patents
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- JP2010026162A5 JP2010026162A5 JP2008186189A JP2008186189A JP2010026162A5 JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5 JP 2008186189 A JP2008186189 A JP 2008186189A JP 2008186189 A JP2008186189 A JP 2008186189A JP 2010026162 A5 JP2010026162 A5 JP 2010026162A5
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- JP
- Japan
- Prior art keywords
- movable plate
- movable
- stopper portion
- movable structure
- structure according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000002265 prevention Effects 0.000 claims description 2
- 230000003287 optical Effects 0.000 claims 1
Description
上記目的を達成するため、請求項１の発明は、可動板と、それぞれ前記可動板に一端部が接続され前記可動板の１つの揺動軸を構成する一対のヒンジと、前記可動板の周囲に配置され、前記一対のヒンジのそれぞれの他端部が接続されており、前記ヒンジを支持するフレーム部と、前記可動板の一部及びそれと対向する前記フレーム部の一部に互いに噛み合うように形成され前記可動板を前記フレーム部に対し揺動させる櫛歯電極とを備えた可動構造体において、前記可動板が側方へ変位するときに、前記櫛歯電極を除く可動構造体の他の部位に接触するように配置されたストッパ部をさらに備え、それにより、前記可動板の側方への変位量が制限され、前記ストッパ部は、前記可動板が側方へ変位するときに当該ストッパ部に接触する可動構造体の他の部位と同電位になるように構成されているものである。 In order to achieve the above object, the invention of claim 1 is directed to a movable plate, a pair of hinges each having one end connected to the movable plate and constituting one swing shaft of the movable plate, and a periphery of the movable plate. And the other end of each of the pair of hinges is connected so that the frame part supporting the hinges, a part of the movable plate and a part of the frame part opposed to the frame part engage with each other. A movable structure including a comb-shaped electrode that is formed and swings the movable plate with respect to the frame portion; when the movable plate is displaced laterally, other movable structure other than the comb-shaped electrode is provided. A stopper portion disposed so as to come into contact with the part, whereby the amount of displacement of the movable plate in the lateral direction is limited, and the stopper portion is configured to stop the movable plate when the movable plate is displaced laterally. Movable to touch the part Are those configured such that the other parts the same potential of the concrete body.
請求項４の発明は、請求項１乃至請求項３のいずれか一項の発明において、前記ストッパ部の少なくとも一部には、当該ストッパ部に接触したものとの間でスティッキングが発生しないように、スティッキング防止膜又は突起部が形成されているものである。 According to a fourth aspect of the present invention, in the invention according to any one of the first to third aspects, at least a part of the stopper portion is prevented from sticking to a portion in contact with the stopper portion. A sticking prevention film or a protrusion is formed .
請求項５の発明は、請求項１乃至請求項４のいずれか一項に記載の可動構造体を有し、前記可動板の上面に、入射した光を反射するミラー面を設けたものである。 According to a fifth aspect of the present invention, the movable structure according to any one of the first to fourth aspects is provided, and a mirror surface that reflects incident light is provided on the upper surface of the movable plate. .
Claims (5)
それぞれ前記可動板に一端部が接続され前記可動板の１つの揺動軸を構成する一対のヒンジと、
前記可動板の周囲に配置され、前記一対のヒンジのそれぞれの他端部が接続されており、前記ヒンジを支持するフレーム部と、
前記可動板の一部及びそれと対向する前記フレーム部の一部に互いに噛み合うように形成され前記可動板を前記フレーム部に対し揺動させる櫛歯電極とを備えた可動構造体において、
前記可動板が側方へ変位するときに、前記櫛歯電極を除く可動構造体の他の部位に接触するように配置されたストッパ部をさらに備え、それにより、前記可動板の側方への変位量が制限され、
前記ストッパ部は、前記可動板が側方へ変位するときに当該ストッパ部に接触する可動構造体の他の部位と同電位になるように構成されていることを特徴とする可動構造体。 A movable plate,
A pair of hinges each having one end connected to the movable plate and constituting one swing axis of the movable plate;
A frame portion disposed around the movable plate, connected to the other end of each of the pair of hinges, and supporting the hinges;
In a movable structure including a comb-shaped electrode that is formed so as to mesh with a part of the movable plate and a part of the frame part facing the movable plate and swings the movable plate with respect to the frame part,
When the movable plate is displaced laterally, it further comprises a stopper portion arranged so as to come into contact with other parts of the movable structure excluding the comb-shaped electrode, thereby to the side of the movable plate. The amount of displacement is limited ,
The movable structure, wherein the stopper portion is configured to have the same potential as other portions of the movable structure that come into contact with the stopper portion when the movable plate is displaced laterally .
前記可動板の上面に、入射した光を反射するミラー面を設けたことを特徴とする光走査ミラー。An optical scanning mirror characterized in that a mirror surface for reflecting incident light is provided on the upper surface of the movable plate.
Priority Applications (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008186189A JP5053194B2 (en) | 2008-07-17 | 2008-07-17 | Movable structure and optical scanning mirror using the same |
| US13/001,197 US20110188104A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
| KR1020107029073A KR101183915B1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
| SG2013024815A SG189738A1 (en) | 2008-06-25 | 2009-06-25 | Semiconductor mechanical structure |
| CN2009801237280A CN102067433A (en) | 2008-06-25 | 2009-06-25 | Movable structure and optical scanning mirror using same |
| DE09770219T DE09770219T8 (en) | 2008-06-25 | 2009-06-25 | MOVABLE STRUCTURE AND LIGHTING MIRRORS WITH IT |
| EP09770219.5A EP2299584A4 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using same |
| PCT/JP2009/061583 WO2009157509A1 (en) | 2008-06-25 | 2009-06-25 | Movable structure and optical scanning mirror using same |
| SG2013024781A SG189737A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008186189A JP5053194B2 (en) | 2008-07-17 | 2008-07-17 | Movable structure and optical scanning mirror using the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010026162A JP2010026162A (en) | 2010-02-04 |
| JP2010026162A5 true JP2010026162A5 (en) | 2012-06-07 |
| JP5053194B2 JP5053194B2 (en) | 2012-10-17 |
Family
ID=41732069
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008186189A Active JP5053194B2 (en) | 2008-06-25 | 2008-07-17 | Movable structure and optical scanning mirror using the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5053194B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009033191A1 (en) * | 2009-07-07 | 2011-01-13 | Technische Universität Dresden | Reduction of the dynamic deformation of translation mirrors with the aid of inert masses |
| WO2014010243A1 (en) * | 2012-07-13 | 2014-01-16 | 住友精密工業株式会社 | Semiconductor device |
| EP3186189A4 (en) * | 2014-08-04 | 2018-05-09 | Ba-Tis, Faez | 3-dof mems piston-tube electrostatic microactuator |
| JP6414516B2 (en) * | 2015-06-24 | 2018-10-31 | 京セラドキュメントソリューションズ株式会社 | Optical deflector and image forming apparatus provided with the optical deflector |
| JP2021021676A (en) | 2019-07-30 | 2021-02-18 | セイコーエプソン株式会社 | Inertia sensor, electronic apparatus, and moving body |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3666370B2 (en) * | 2000-07-06 | 2005-06-29 | 株式会社村田製作所 | External force detection sensor |
| JP2005266074A (en) * | 2004-03-17 | 2005-09-29 | Anritsu Corp | Optical scanner |
| WO2005102909A1 (en) * | 2004-04-22 | 2005-11-03 | Matsushita Electric Industrial Co., Ltd. | Actuator |
| JP2007052256A (en) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | Rotational displacement type optical modulator and optical apparatus using the same |
-
2008
- 2008-07-17 JP JP2008186189A patent/JP5053194B2/en active Active
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