JP2005266074A - Optical scanner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To more surely prevent a link portion from being excessively deformed in a simple structure, to drive an optical scanner stably with a little power and to prevent an incidence angle or reflection angle range of light from being limited. <P>SOLUTION: In an optical scanner which varies the angle of a reflection plate 40 to a frame 22 by twisting and deforming a pair of link portions 45, 46, 1st to 4th regulation pieces 23e, 23f, 24e, 24f extending toward the reflection plate 40 while overlapping with the link portions 45, 46 are provided at predetermined intervals from one side and opposite side of the frame 22 to the link portions 45, 46, thereby directly regulating the longitudinal movement of the link portions 45, 46 of more than a predetermined distance. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical scanner in which a reflection plate arranged in a frame is rotatably supported via a connecting portion that can be twisted and deformed, and a reflection optical axis of light incident on the reflection plate can be changed. TECHNICAL FIELD The present invention relates to a technique for preventing damage to a connecting portion caused by the above.

  For example, in a variable wavelength light source, light emitted from a laser diode is diffracted by a diffraction grating, the diffracted light is reflected to the diffraction grating by a reflection plate of an optical scanner, and the diffracted light corresponding to the reflected light is returned to the laser diode. The resonance wavelength is varied by oscillating the laser diode in the external resonance mode and changing the angle of the reflection plate with respect to the diffraction grating.

  In the optical spectrum analyzer, incident light is diffracted by a diffraction grating, the diffracted light is reflected to the diffraction grating by the reflection plate of the optical scanner, and the diffracted light corresponding to the reflected light is received by the light receiving element and reflected by the diffraction grating. The intensity of light having a wavelength corresponding to the angle of the plate is obtained, and the intensity of light for each wavelength is obtained by changing the angle of the reflecting plate with respect to the diffraction grating.

  In recent years, optical scanners used for such purposes are often formed by etching a covalently bonded crystal substrate such as a semiconductor substrate.

  FIG. 11 shows a basic structure of a conventional optical scanner 10 formed by etching a covalently bonded crystal substrate.

  In this optical scanner 10, a rectangular reflecting plate 12 is arranged inside a frame 11 formed in a rectangular shape by an upper plate 11a, a lower plate 11b, and side plates 11c, 11d, and from an intermediate portion of the inner edge of the upper plate 11a of the frame 11. A structure in which the middle part of the upper edge of the reflecting plate 12 and the middle part of the inner edge of the lower plate 11b of the frame 11 are connected by the connecting parts 13 and 14 to the middle part of the lower edge of the reflecting plate 12. have.

  Since the connecting portions 13 and 14 are formed so as to have flexibility in the twisting direction, a force in a direction perpendicular to the surface of the frame 11 is applied to the end portion of the reflector 12 by a driving unit (not shown). The reflecting plate 12 can be rotated about the center line of the connecting portions 13 and 14, and light incident on the reflecting plate 12 can be emitted at different reflection angles according to the rotation.

  In the optical scanner 10 having such a structure, the thinly formed connecting portions 13 and 14 are not only twisted but also bent or stretched in a direction along the surface of the frame 11 or in a direction perpendicular to the surface. It has flexibility.

  For this reason, for example, as shown in FIG. 12A, when the external force F is suddenly applied to the entire optical scanner 10 from below, the reflecting plate 12 moves downward due to inertia, the connecting portion 13 is pulled, and the connecting portion. 14 shrinks.

  Further, for example, as shown in FIG. 12B, when the external force F is suddenly applied to the entire optical scanner 10 from the left side, the reflector 12 moves to the left due to inertia, and the connecting portions 13 and 14 are inclined. Pulled on.

  Further, for example, as shown in FIG. 12C, when the external force F is suddenly applied to the optical scanner 10 from the lower left corner, the left end of the reflector 12 moves downward, the right end moves upward, and the connecting portion 13 , 14 are curved.

  Further, for example, as shown in FIG. 13A, when an external force F is suddenly applied to the entire optical scanner 10 from the back side, the reflecting plate 12 moves rearward and the connecting portions 13 and 14 are pulled rearward. Further, as shown in FIG. 13B, when an external force F is suddenly applied to the upper portion of the optical scanner 10 from the rear side, the upper portion of the reflector 12 moves rearward and the connecting portion 13 is pulled rearward to reflect. The lower portion of the plate 12 moves forward, and the connecting portion 14 is pulled forward.

  Further, for example, as shown in FIG. 14, when the external force F is suddenly applied to the optical scanner 10 from the front of the left end, the left end of the reflector 12 moves forward, the right end moves rearward, and the connecting portions 13 and 14 are twisted. Deform.

  As described above, the connecting portions 13 and 14 of the optical scanner 10 are deformed by the sudden application of the external force F, and when the external force is small, the elastic scanner can return to the original state with its own elastic restoring force. If a large external force is applied, it will be deformed or break.

  The external force F described above is not only applied directly to the optical scanner 10 but also indirectly due to a rapid change in speed during transportation, that is, acceleration (including acceleration in the rotational direction). There is also a case of force.

  Therefore, in the optical scanner 10 having the above structure, it is necessary to restrict the connecting portions 13 and 14 from being excessively deformed when receiving the external force as described above.

  As a prior art for restricting the excessive deformation of the connecting portions 13 and 14, the following Patent Document 1 discloses that over the central upper portion and lower central portion of the reflector 12 on one surface side of the frame 11 as shown in FIG. The wrapping restricting portions 15a and 15b and the restricting portions 15c to 15f overlapping at the four corners of the reflecting plate 12 are provided, and these restricting portions 15a to 15f are also provided on the back side of the frame, The movement of a predetermined distance or more is restricted. Further, restriction parts 15g and 15h are provided on both sides of the reflection plate 12, and restriction parts 15i to 15l are provided above and below both ends of the reflection plate 12, so A technique for restricting movement of a predetermined distance or more in the left-right direction is disclosed.

JP 2002-40354 A

  However, the technology for restricting the movement of the reflecting plate 12 as described above requires a total of 18 restricting portions, and there is a problem that the structure becomes complicated.

  Moreover, in the above-described conventional technology, since the structure prevents the excessive deformation of the connecting portion indirectly by restricting the movement of the reflecting plate, the unexpected deformation of the connecting portion may not be prevented.

  In addition, since the restricting portions 15c to 15h are provided close to both ends of the reflecting plate 12, when the reflecting plate 12 is swung back and forth at high speed, a large air resistance is generated at both ends by these restricting portions, and stable. There is a problem in that a simple sweep cannot be performed and a large electric power is required for driving.

  In addition, since the restricting portion overlaps the central upper portion, the lower portion, and the four corners on the surface side of the reflecting plate 12, the effective reflecting surface of the reflecting plate 12 becomes narrow, and the incident angle of light and the reflection angle range are reduced. There was a problem that was limited.

  The present invention solves these problems, can prevent the excessive deformation of the connecting portion more reliably with a simple structure, can be driven stably and with less power, and has a light incident angle and reflection angle range. It aims to provide an optical scanner that is not limited.

In order to achieve the object, an optical scanner according to claim 1 of the present invention comprises:
A frame (21);
A reflector (40) disposed inside the frame;
A pair of connecting portions (45, 46) extending inward from opposing positions on the inner edge of the frame and connecting to the outer edge of the reflector, respectively, and having flexibility in the torsional direction; In an optical scanner that varies the angle of the reflector with respect to the frame by torsional deformation of a pair of connecting portions,
Extending in the direction of the reflector plate with a predetermined gap from one side of the frame to the one connecting part and overlapping with the one connecting part, the one connecting part being more than a predetermined distance to the one surface side of the frame A first restricting portion (23e) for restricting movement;
Extending in the direction of the reflector plate with a predetermined gap from the one surface side of the frame and overlapping the other connecting portion, and having a predetermined distance or more to the one surface side of the frame of the other connecting portion. A second restricting portion (23f) for restricting movement;
Extending in the direction of the reflector from the opposite surface side of the frame in a state of overlapping the one connection portion with a predetermined gap with respect to the one connection portion, and a predetermined distance from the one connection portion to the opposite surface side of the frame A third restricting portion (24e) for restricting the above movement;
Extending in the direction of the reflector from the opposite surface side of the frame to the other connecting portion with a predetermined gap and overlapping with the other connecting portion, a distance equal to or longer than the predetermined distance from the other connecting portion to the opposite side of the frame And a fourth restricting portion (24f) for restricting the movement of the head.

The optical scanner according to claim 2 of the present invention is the optical scanner according to claim 1,
A first projecting portion (41) and a second projecting portion (42) projecting in the frame direction from positions on both sides of the one connecting portion at the outer edge of the reflecting plate and in the vicinity of the one connecting portion; ,
A third projecting portion (43) and a fourth projecting portion (44) projecting in the frame direction from positions on both sides of the other connecting portion at the outer edge of the reflecting plate and in the vicinity of the other connecting portion; ,
The inner edge of the frame extends in the direction of the reflector with a predetermined gap between the outer edge of the first and second protrusions of the reflector, and the first and second protrusions A fifth restricting portion (22e) for restricting a predetermined movement or more in a plane along the surface of the frame, a sixth restricting portion (22f),
The inner edge of the frame extends in the direction of the reflector with a predetermined gap between the outer edge of the third protrusion and the fourth protrusion of the reflector, and the third protrusion and the fourth protrusion. A seventh restricting portion (22g) and an eighth restricting portion (22h) for restricting a predetermined movement or more in a plane along the surface of the frame are provided.

  As described above, in the optical scanner of the present invention, the first to fourth restricting portions extending so as to overlap the connecting portion directly restrict the movement of the connecting portion in the front-rear direction by a predetermined distance. Thus, excessive deformation of the connecting portion can be surely prevented.

  In addition, since the reflecting plate is provided with a protruding portion, and the movement of the protruding portion in the direction along the frame surface is controlled by the fifth to eighth restricting portions, the number of restricting portions of the connecting portion is reduced. Excessive deformation can be prevented and the structure can be simplified. In addition, since each protrusion of the reflector is provided in the vicinity of the connecting part, even when the reflector is reciprocally swept at high speed, the air resistance is small, stable sweep can be performed, and rotation drive can be performed with low power. Can do.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 and 2 show the appearance of an optical scanner 20 to which the present invention is applied, and FIG. 3 shows an exploded view thereof.

  As shown in these drawings, the optical scanner 20 includes a rectangular frame-shaped frame 21, a reflection plate 40 disposed inside the frame, and a pair of connecting portions 45 that rotatably support the reflection plate 40. 46, and as shown in FIG. 3, the intermediate plate 22, the front plate 23, and the rear plate 24 are overlapped and integrated.

  The middle plate 22 is formed in a rectangular frame that forms a part of the frame 21 by connecting both ends of the upper plate 22a and the lower plate 22b that are parallel to each other by the side plates 22c and 22d. Plates 40 are arranged concentrically. At least one surface side of the reflecting plate 40 forms a reflecting surface 40a that reflects light.

  The intermediate portion of the inner edge of the upper plate 22 a of the middle plate 22 and the intermediate portion of the upper edge of the reflecting plate 40 are connected via a connecting portion 45. Further, between the intermediate portion of the inner edge of the lower plate 22b facing the inner edge of the upper plate 22a of the middle plate 22 and the intermediate portion of the lower edge of the reflecting plate 40, a connecting portion 46 aligned with the connecting portion 45 is interposed. Are connected.

  The connecting portions 45 and 46 are formed to be thin with flexibility in the torsional direction, and the reflection plate 40 can be rotated with respect to the frame portion of the intermediate plate 22 by the torsional deformation of the connecting portions 45 and 46. So that it is supported.

  On the upper edge of the reflection plate 40, projecting pieces 41 and 42 extending outward (in the direction of the upper plate 22 a) with a predetermined width are formed in the vicinity of the connecting portion 45 and symmetrically across the connecting portion 45. .

  In addition, projecting pieces 43 and 44 having the same width as the projecting pieces 41 and 42 and extending outward (in the direction of the lower plate 22b) are also provided in the vicinity of the connecting portion 46 and on the lower edge of the reflecting plate 40. They are formed at symmetrical positions. These protruding pieces 41 to 44 form the first to fourth protruding portions of this embodiment, and the width thereof is sufficiently wider than the width of the connecting portions 45 and 46.

  The middle plate 22 has regulation pieces 22e to 22h extending from the inner edges of the upper plate 22a and the lower plate 22b so as to approach the outer sides of the protruding pieces 41 to 44 formed on the reflection plate 40, respectively. Is provided.

  These restricting pieces 22e to 22h form the fifth to eighth restricting portions of this embodiment, and the gaps between the restricting pieces 22e to 22h and the projecting pieces 41 to 44 are set to several tens of micrometers, for example. The movement of the projecting pieces 41 to 44 beyond the gap in the direction along the frame surface is restricted.

  As shown in FIG. 4, projections projecting in a semicircular shape are formed on the inner edges of the respective regulation pieces 22 e to 22 h, and the narrow gaps described above are formed between the projection pieces 41 to 44 by the projections. Forming.

  Of the intermediate plate 22, the reflecting plate 40, the protruding pieces 41 to 44, the connecting portions 45 and 46, and the regulating pieces 22e to 22h are frame forming portions (upper plate 22a, lower plate 22b, side plates 22c and 22d). It is made thinner.

  On the other hand, the front plate 23 arranged on one side (front side) of the middle plate 22 and the rear plate 24 arranged on the opposite side (back side) include an upper plate 22a, a lower plate 22b, The upper plate 23a, 24a, the lower plate 23b, 24b, and the side plate 23c, 23d, 24c, 24d are overlapped with the side plate 22c, 22d to form a frame 21 having a predetermined thickness.

  At the center of the inner edge of the front plate 23 on the upper plate 23a side, it extends in the direction of the reflecting plate 40 in a state where it overlaps the connecting portion 45 with a predetermined gap. A restricting piece 23e (first restricting portion) that restricts movement beyond the distance is provided.

  Similarly, in the center of the inner edge of the front plate 23 on the lower plate 23b side, the connecting plate 46 extends in the direction of the reflector 40 with a predetermined gap, and a predetermined distance to the one surface side of the frame 21 of the connecting portion 46. A restricting piece 23f (second restricting portion) for restricting the above movement is provided.

  Further, at the center of the inner edge of the rear plate 24 on the upper plate 24a side, it extends in the direction of the reflecting plate 40 in a state of overlapping the connecting portion 45 with a predetermined gap, and the opposite surface side (rear side) of the frame 21 of the connecting portion 45. A restricting piece 24e (third restricting portion) that restricts movement beyond a predetermined distance to the connecting plate 46 is similarly provided at the center of the inner edge of the rear plate 24 on the lower plate 24b side. A restricting piece 24f (fourth restricting portion) that extends in the direction of the reflecting plate 40 in an overlapping state and restricts the movement of the connecting portion 46 to the opposite surface side of the frame 21 by a predetermined distance or more is provided.

  The width of each of the restricting pieces 23e, 23f, 24e, 24f has a width that overlaps with the connecting portions 45, 46, the protruding pieces 41-44 on both sides thereof, and the restricting pieces 22e-22h. It overlaps with the reflector 40.

  Further, taper portions 30 and 31 projecting in a tapered shape toward the center line of the connecting portions 45 and 46 are provided on the inner surface side (connecting portions 45 and 46 side) of the restricting pieces 23e, 23f, 24e, and 24f. ing. The clearance between the tips of the tapered portions 30 and 31 and the connecting portions 45 and 46 is set to be about 10 μm.

  That is, the optical scanner 20 moves the pair of connecting portions 45 and 46 that rotatably support the reflecting plate 40 inside the frame 21 in a front-rear direction (a direction perpendicular to the surface of the frame 21) by a predetermined amount or more. The four regulating pieces 23e, 23f, 24e, 24f are directly regulated by the taper portions 30, 31.

  Further, in the vicinity of both sides of the pair of connecting portions 45, 46, each of the regulating pieces 22 e-protruding from the inner edge of the frame 22 with respect to the protruding pieces 41-44 protruding in the direction of the frame 22 from the outer edge of the reflecting plate 40. The movement in the direction along the surface of the frame is restricted by bringing 22h close.

For this reason, the excessive deformation | transformation of the connection parts 45 and 46 can be prevented reliably with few regulation parts.
In addition, since the restricting portions are concentrated in the vicinity of the connecting portions 45 and 46, the air resistance generated when the reflecting plate 40 is reciprocally rotated can be reduced, and high-speed operation is possible.

  Next, an example of a method for manufacturing the optical scanner 20 will be described with reference to FIGS. 5 to 8 show broken sections that cross the connecting portion 45, the regulating pieces 22e and 22f, and the protruding pieces 41 and 42 at the top of the optical scanner 20. FIG.

FIG. 5 shows a manufacturing process of the middle plate 22 portion. First, as a substrate material, an upper layer 100a and a lower layer 100b are sandwiched with an insulating layer (SiO ₂ ) 100c, and both surfaces are mask layers (SiO ₂ ) 100d, An SOI substrate 100 covered with 100e is prepared (step 1a).

  Then, after patterning the mask layer 100d, by performing dry etching, a part of the upper plate 22a, the lower plate 22b, the side plates 22c and 22d of the intermediate plate 22 and the respective regulating pieces 22e to 22h, the reflecting plate 40, and the protruding piece 41-44 and the part used as the connection parts 45 and 46 are formed (process 1b).

  Next, after patterning the mask layer 100e, the upper plate 22a, the lower plate 22b, and the side plates 22c and 22d are partially formed by wet etching (step 1c), and the surface insulating layer is removed (step 1c). Step 1d) Finally, a metal film 101 of titanium, platinum, gold or the like that reflects light and has conductivity is deposited (Step 1e) to complete the intermediate plate 22.

As shown in FIG. 6, the front plate 23 is prepared by preparing an SOI substrate 200 composed of an upper layer 200a, a lower layer 200b, an insulating layer (SiO ₂ ) 200c, and mask layers 200d and 200e (step 2a). ) After patterning the mask layer 200d, the upper plate 23a, the lower plate 23b, the side plates 23c and 23d, and the portions that become part of the restricting pieces 23e and 23f are formed by dry etching (step 2b). ).

  Next, after patterning the mask layer 200e, the upper plate 23a, the lower plate 23b, the side plates 23c and 23d of the front plate 23, and the portions to be the tapered portions 30 of the restricting pieces 23e and 23f are formed by wet etching. Step 2c).

  Then, the intermediate insulating layer 200c is removed and a process of covering with the insulating film 201 is performed (step 2d), and titanium, on the back side (lower side in the drawing) of the upper plate 23a, the lower plate 23b, and the side plates 23c, 23d, A metal film 202 for soldering such as platinum, gold, or tin is deposited (step 2e).

  When an electrostatic external force is applied from the front plate 23 to the reflection plate 40, the width of the side plates 23c and 23d is expanded inward as shown by the dotted lines in FIG. An electrode metal film 203 is deposited on the insulating layer 201 on the side.

In addition, as shown in FIG. 7, the back plate 24 is prepared by preparing an SOI substrate 300 including an upper layer 300a, a lower layer 300b, an insulating layer (SiO ₂ ) 300c, and mask layers 300d and 300e (step 3a). By patterning, portions of the upper layer 24a, the lower plate 24b, the side plates 24c and 24d, and the regulating pieces 24e and 24f of the rear plate 24 are left out of the mask layers 300d and 300e (step 3b).

  Next, the upper plate 24a, the lower plate 24b, the side plates 24c and 24d, the respective regulation pieces 24e and 24f, and the taper portion 31 thereof are formed by wet etching (step 3c).

  Then, the insulating layer 300c is removed (step 3d), and a metal film 301 for soldering such as titanium, platinum, gold, or tin is deposited on the surface of the rear plate 24 to complete the rear plate 24 (step 3e). ).

  Finally, as shown in FIG. 8, the intermediate plate 22, the front plate 23, and the rear plate 24 obtained in each of the above steps are overlapped and soldered (step 4a) to complete one optical scanner 20 ( Step 4b).

  Since the reflecting plate 40 of the optical scanner 20 has conductivity, a voltage is applied between the reflecting plate 40 and a fixed electrode (for example, the metal film 203 described above) facing the end of the reflecting plate 40. Thus, by applying an electrostatic force to the end of the reflecting plate 40, the reflecting plate 40 can be rotated about the connecting portions 45 and 46 to change the angle. Moreover, the reflector 40 can be reciprocally rotated by applying a voltage periodically, that is, by giving a signal in which the voltage periodically changes.

  Further, as a method of rotating the reflecting plate 40, there is a method of using a magnetic force in addition to the method of using the electrostatic force as described above. For example, a member or a film that is attracted by a magnetic force is provided on the reflecting plate 40 side, and a current is passed through the fixed coil facing the portion to rotate the reflecting plate 40 by the magnetic force of the fixed coil. On the contrary, the reflector 40 can be rotated by a magnetic force generated by providing a coil on the reflector 40 side or forming a pattern on the surface and passing a current through the coil.

  For example, as shown in FIG. 9A, when a large external force F is applied directly or directly from below to the optical scanner 20 thus configured, the reflector 40 is moved downward due to inertia. The connecting portion 45 is pulled and the connecting portion 46 is contracted, but the lower edge of the reflecting plate 40 abuts against the tips of the restricting pieces 22g and 22h and restricts movement beyond a predetermined distance. Deformation beyond the 46 limit does not occur. On the other hand, when a large external force is applied from above, the movement of the reflector 40 above the predetermined distance due to inertia is restricted by the restricting pieces 22e and 22f and exceeds the limit of the connecting portions 45 and 46. Deformation is prevented.

  Further, as shown in FIG. 9B, when a large external force F is suddenly applied to the optical scanner 20 from the left side, the reflector 40 moves to the left due to inertia, and the connecting portions 45 and 46 are pulled obliquely. However, since the protruding pieces 41 and 43 of the reflecting plate 40 abut against the restricting pieces 22e and 22g and restrict movement over a predetermined distance, deformation exceeding the limit of the connecting portions 45 and 46 does not occur. On the other hand, when a large external force is applied from the right side, the movement of the reflector 40 by the inertia to the right by a predetermined distance or more is restricted by the restriction pieces 22f and 22h, and the limit of the connecting portions 45 and 46 is exceeded. Excessive deformation is prevented.

  Further, as shown in FIG. 9C, when a large external force F is applied to the optical scanner 20 from the lower left corner (or upper right corner), the left end of the reflector 40 moves downward and the right end moves upward due to inertia. In this way, the connecting portions 45 and 46 are curved in a counterclockwise direction, but the projecting pieces 41 and 44 of the reflecting plate 40 abut against the regulating pieces 22e and 22h to restrict rotation of a predetermined angle or more. Deformation beyond the limits of the portions 45 and 46 does not occur. On the other hand, when a large external force is applied from the lower right corner (or upper left corner), rotation of the reflector 40 by the inertia more than a predetermined clockwise angle is regulated by the regulating pieces 22f and 22g, and the connecting portion 45, Deformation beyond 46 limits is prevented.

  Further, as shown in FIG. 10A, when an external force F is applied to the entire optical scanner 20 from the front side, the reflector 40 moves forward due to inertia, and the connecting portions 45 and 46 also move forward. The movement beyond the predetermined distance is restricted by abutting against the tips of the tapered portions 30 of the restricting pieces 23e and 23f of the front plate 23, so that deformation exceeding the limit of the connecting portions 45 and 46 does not occur. On the other hand, when a large external force is applied from the back side, the movement of the reflecting plate 40 beyond the predetermined distance due to inertia is restricted by the tapered portions 31 of the restricting pieces 24e and 24f of the rear plate 24, and the connecting portion Deformation beyond the limits of 45 and 46 is prevented.

  Also, as shown in FIG. 10B, when an external force F is applied to the upper portion of the optical scanner 20 from the front side, the upper portion of the reflecting plate 40 moves forward due to inertia, and the connecting portion 45 tries to move forward. The lower portion of the reflector 40 moves rearward and the connecting portion 46 tries to move rearward. The connecting portion 45 abuts on the tip of the tapered portion 30 of the regulating piece 23e of the front plate 23, and the connecting portion 46 Since the movement of a predetermined distance or more is restricted by coming into contact with the tip of the taper portion 31 of the restricting piece 24f of the plate 24, deformation exceeding the limit of the connecting portions 45 and 46 does not occur. Further, when a large external force is applied to the lower part of the optical scanner 20 from the front side, the lower part of the reflector 40 moves forward and the upper part tries to move backward due to inertia. 23 and the restriction piece 24e of the rear plate 24, and deformation beyond the limit of the connecting portions 45 and 46 is prevented.

  Although not shown, since the regulation pieces 23e, 23f, 24e, and 24f overlap the projecting pieces 41 to 44, the centers of the connecting portions 45 and 46 of the reflector 40 that have received excessive force F are pivoted. Can be controlled by the contact between the projecting pieces 41 to 44 and the regulating pieces 23e, 23f, 24e, 24f, and the limit of the connecting portions 45, 46 due to the rotation of the reflecting plate 40 by more than a predetermined angle. It can also prevent deformation beyond.

  As described above, the optical scanner 20 according to the embodiment directly moves the connecting portions 45 and 46 over a predetermined distance in the front-rear direction by the restricting pieces 23e, 23f, 24e, and 24f extending so as to overlap the connecting portions 45 and 46. Since it regulates, the excessive deformation | transformation of the connection parts 45 and 46 can be prevented reliably with few regulation parts.

  Moreover, since the protrusions 41-44 are provided in the outer edge of the reflecting plate 40, and the movement beyond the predetermined distance of the direction along the surface of the frame of the protrusions 41-44 is controlled by each control piece, there are few restrictions. Therefore, the connecting portions 45 and 46 can be prevented from being excessively deformed, and the structure can be simplified.

  Further, since each regulating piece is provided in the vicinity of the connecting portions 45 and 46, even when the reflector 40 is reciprocally swept at a high speed, the air resistance is small, stable sweeping can be performed, and rotation driving is performed with less power. can do.

  Further, since it is not necessary to overlap the restricting portion with the reflecting plate 40, a wide range of both surfaces of the reflecting plate 40 can be effectively used as the reflecting surface, and the incident angle of light and the reflecting angle range are not limited.

  Here, since a drive system is assumed in which a voltage is applied between the reflecting plate 40 and an electrode facing the end portion thereof, and the reflecting plate 40 is rotated by an electrostatic force generated therebetween, the reflecting plate 40 is assumed. The intermediate plate 22 including the connecting portions 45 and 46 is covered with a conductive metal material. However, this does not limit the present invention, and the reflector 40 is rotated by a magnetic force as described above. In the case of using a drive system, the surface of the reflection plate 40 is coated with a dielectric multilayer film to form a reflection surface, and a film or a coil that receives magnetic force is provided on the back surface of the end portion.

  In the optical scanner 20, the frame 21 and the reflecting plate 40 have been described as having a rectangular outer shape. However, these outer shapes are not limited to a rectangular shape, and may be an ellipse, a circle, a polygon, or the like. Good.

A perspective view of an embodiment of the present invention A perspective view of an embodiment of the present invention Exploded perspective view of an embodiment of the present invention Enlarged view of the main part of the embodiment Manufacturing process diagram of the main part of the embodiment Manufacturing process diagram of the main part of the embodiment Manufacturing process diagram of the main part of the embodiment Manufacturing process diagram of the embodiment Operation explanatory diagram of the embodiment Operation explanatory diagram of the embodiment Schematic configuration diagram of conventional equipment Operation explanatory diagram of conventional equipment Operation explanatory diagram of conventional equipment Operation explanatory diagram of conventional equipment Regulatory structure diagram of conventional equipment

Explanation of symbols

  20... Optical scanner, 21... Frame, 22... Middle plate, 22 e, 22 f, 22 g, 22 h... Restriction piece, 23 ... Front plate, 23 e, 23 f. , 24f ....... regulating piece, 30, 31 ... tapered portion, 40..reflecting plate, 41-44 .... projecting piece, 45, 46 .... connecting portion

Claims (2)

A frame (21);
A reflector (40) disposed inside the frame;
A pair of connecting portions (45, 46) extending inward from opposing positions on the inner edge of the frame and connecting to the outer edge of the reflector, respectively, and having flexibility in the torsional direction; In an optical scanner that varies the angle of the reflector with respect to the frame by torsional deformation of a pair of connecting portions,
Extending in the direction of the reflector plate with a predetermined gap from one side of the frame to the one connecting part and overlapping with the one connecting part, the one connecting part being more than a predetermined distance to the one surface side of the frame A first restricting portion (23e) for restricting movement;
Extending in the direction of the reflector plate with a predetermined gap from the one surface side of the frame and overlapping the other connecting portion, and having a predetermined distance or more to the one surface side of the frame of the other connecting portion. A second restricting portion (23f) for restricting movement;
Extending in the direction of the reflector from the opposite surface side of the frame in a state of overlapping the one connection portion with a predetermined gap with respect to the one connection portion, and a predetermined distance from the one connection portion to the opposite surface side of the frame A third restricting portion (24e) for restricting the above movement;
Extending in the direction of the reflector from the opposite surface side of the frame to the other connecting portion with a predetermined gap and overlapping with the other connecting portion, a distance equal to or longer than the predetermined distance from the other connecting portion to the opposite side of the frame And a fourth restricting portion (24f) for restricting movement of the optical scanner. A first projecting portion (41) and a second projecting portion (42) projecting in the frame direction from positions on both sides of the one connecting portion at the outer edge of the reflecting plate and in the vicinity of the one connecting portion; ,
A third projecting portion (43) and a fourth projecting portion (44) projecting in the frame direction from positions on both sides of the other connecting portion at the outer edge of the reflecting plate and in the vicinity of the other connecting portion; ,
The inner edge of the frame extends in the direction of the reflector with a predetermined gap between the outer edge of the first and second protrusions of the reflector, and the first and second protrusions A fifth restricting portion (22e) for restricting a predetermined movement or more in a plane along the surface of the frame, a sixth restricting portion (22f),
The inner edge of the frame extends in the direction of the reflector with a predetermined gap between the outer edge of the third protrusion and the fourth protrusion of the reflector, and the third protrusion and the fourth protrusion. The light according to claim 1, further comprising a seventh restricting portion (22g) and an eighth restricting portion (22h) for restricting a predetermined or more movement in a plane along the surface of the frame. Scanner.

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