JP2016191800A - Optical scanner, image display device, and head-mounted display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner that can easily obtain a predetermined shape and regulate excessive displacement of a movable part to prevent damage thereto, an image display device, and a head-mounted display.SOLUTION: An optical scanner 3 includes: a movable layer 38 having a swing part 30 and a support part 33 which supports the swing part 30; a fixed layer 39 disposed so as to overlap with the support part 33; and a regulation part 35 that is positioned between the swing part 30 and the support part 33, and regulates displacement of the swing part 30 with respect to the support part 33. The fixed layer 39 has a projection part 391 projecting from the support part 33, and the regulation part 35 is disposed on the projection part 391. An end 35a of the regulation part 35 overlaps with a tip 391a of the projection part 391.SELECTED DRAWING: Figure 3

Description

  The present invention relates to an optical scanner, an image display device, and a head mounted display.

  For example, Patent Document 1 discloses an optical scanner having a mirror portion having a reflecting surface, a torsion bar that supports the mirror portion so as to be swingable, and a support portion that supports the torsion bar. Further, the optical scanner of Patent Document 1 has an impact relaxation portion provided in a gap between the mirror portion and the support portion, and the impact relaxation portion prevents the mirror portion from colliding with the support portion and being damaged. Has been. These parts are integrally formed by patterning a silicon substrate using an etching technique.

JP 2013-109359 A

  However, in the optical scanner of Patent Document 1, the space around the mirror portion varies. That is, the space between the mirror part and the impact relaxation part is smaller than the space between the mirror part and the support part, and the shape of the impact relaxation part is very fine with respect to the other parts. For this reason, when the silicon substrate is patterned by etching, variations in the processing amount due to the difference in the etching opening size occur at various locations on the silicon substrate, making it difficult to manufacture an optical scanner.

  More specifically, the etching time becomes long if the impact relaxation portion is to be formed accurately. If it does so, a mirror part and a torsion bar will be etched too much, and a mirror part will become small or a torsion bar will become thin. On the contrary, if the mirror part and the torsion bar are to be formed accurately, the etching time is shortened. In this case, the etching may end before the impact relaxation portion is formed.

  An object of the present invention is to provide an optical scanner, an image display device, and a head-mounted display that can easily obtain a predetermined shape and can suppress damage by restricting excessive displacement of a movable part.

Such an object is achieved by the following invention.
An optical scanner according to the present invention includes a movable portion including a light reflecting portion that reflects light, and a swinging portion including a first shaft portion that swingably supports the movable portion around a first axis;
A support portion for supporting the first shaft portion;
A fixing part on which the support part is supported;
A regulating part located between the rocking part and the support part and regulating displacement of the rocking part;
The restricting portion is provided on a support surface on which the support portion of the fixed portion is supported,

In the plan view of the light reflecting portion, the contour of the restricting portion is located within the support surface.
Thereby, since the excessive displacement of the rocking | swiveling part can be controlled by the control part, it becomes an optical scanner which can suppress damage to a rocking | swiveling part. In addition, variations in the space around the swinging portion can be suppressed. That is, since it is not necessary to form an excessively fine portion between the swinging portion and the support portion, the optical scanner can easily obtain a predetermined shape by dry etching or the like.

In the optical scanner according to the aspect of the invention, the region of the support surface where the restricting portion is provided is provided in a protruding portion that is located closer to the swinging portion than the support portion of the fixed portion in plan view of the light reflecting portion. It is preferred that
Thereby, there is no need to form an excessively small portion between the swinging portion and the support portion, so that the optical scanner can easily obtain a predetermined shape by dry etching or the like.

In the optical scanner according to the aspect of the invention, it is preferable that the protruding portion is separated from the vibrating portion in a plan view of the light reflecting portion.
Thereby, since the rocking | swiveling part and a protrusion part can be spaced apart in planar view of a light reflection part, a control part can be formed easily.

In the optical scanner according to the aspect of the invention, it is preferable that the restriction portion is in contact with the support portion.
Thereby, since a control part can be supported by a support part, separation of a control part etc. can be controlled more effectively, for example.

In the optical scanner according to the aspect of the invention, it is preferable that the restriction portion is separated from the support portion.
Thereby, for example, since it can bend in the separation direction of the restricting portion, the restricting portion can be more easily deformed. For this reason, it is possible to increase the impact absorbability of the restricting portion.

In the optical scanner according to the aspect of the invention, it is preferable that the restricting portion has elasticity.
Thereby, the impact absorbability of a control part can be improved.

In the optical scanner according to the aspect of the invention, it is preferable that the restriction portion is made of resin.
Thereby, a soft control part can be obtained easily.

In the optical scanner according to the aspect of the invention, it is preferable that the restricting portion restricts the displacement of the movable portion by contacting the movable portion when an impact is applied to the optical scanner.
As a result, excessive displacement of the swinging portion can be restricted, and damage to the optical scanner can be reduced.

In the optical scanner according to the aspect of the invention, it is preferable that the restricting portion restricts the displacement of the first shaft portion by contacting the first shaft portion when an impact is applied to the optical scanner.
As a result, excessive displacement of the swinging portion can be restricted, and damage to the optical scanner can be reduced.

In the optical scanner of the present invention, the movable part is
A first movable part;
A frame-like second movable part provided so as to surround the first movable part;
The first movable portion and the second movable portion are connected, and the first movable portion is swung around a second axis that intersects the first axis with respect to the second movable portion. A second shaft portion that supports the second shaft portion;
It is preferable to have.
Thereby, the movable part can be swung around the two axes of the first and second axes.

An optical scanner according to the present invention includes a movable portion including a light reflecting portion that reflects light, a swinging portion including a first shaft portion that swingably supports the movable portion around a first axis, and the first shaft. A movable layer having a support part for supporting the part,
A fixed layer provided with the support,
A regulating part located between the rocking part and the support part and regulating displacement of the rocking part;
The fixed layer has a protruding portion located on the swinging portion side from the support portion in a plan view of the movable layer,
The restricting portion is disposed on the protruding portion,
In the plan view of the movable layer, the end of the swinging portion of the restricting portion overlaps the tip of the protruding portion, or is positioned closer to the support portion than the tip of the protruding portion. To do.
Thereby, since the excessive displacement of the rocking | swiveling part can be controlled by the control part, it becomes an optical scanner which can suppress damage to a rocking | swiveling part. In addition, variations in the space around the swinging portion can be suppressed. That is, since it is not necessary to form an excessively fine portion between the swinging portion and the support portion, the optical scanner can easily obtain a predetermined shape by dry etching or the like.

The image display apparatus of the present invention includes the optical scanner of the present invention.
Thereby, a highly reliable image display apparatus can be obtained.

The head-mounted display of the present invention includes the optical scanner of the present invention,
And a frame mounted on the head of the observer.
Thereby, a highly reliable head mounted display is obtained.

1 is a configuration diagram illustrating an image display device according to a first embodiment of the present invention. It is a top view of the optical scanner with which the image display apparatus shown in FIG. 1 is provided. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is sectional drawing which shows the drive means with which the optical scanner shown in FIG. 2 is provided. It is a top view explaining the function of the control part with which the optical scanner shown in FIG. 2 is provided. It is sectional drawing which shows the modification of the control part with which the optical scanner shown in FIG. 2 is provided. It is sectional drawing for demonstrating the manufacturing method of a control part. It is sectional drawing for demonstrating the manufacturing method of a control part. It is sectional drawing for demonstrating the manufacturing method of the control part which concerns on 2nd Embodiment of this invention. It is sectional drawing for demonstrating the manufacturing method of the control part which concerns on 2nd Embodiment of this invention. It is sectional drawing of the optical scanner which the image display apparatus concerning 3rd Embodiment of this invention has. It is a block diagram which shows the image display apparatus concerning 4th Embodiment of this invention. It is a top view of the optical scanner which the image display apparatus shown in FIG. 13 has. It is CC sectional view taken on the line in FIG. It is a top view of the optical scanner with which the image display apparatus concerning 5th Embodiment of this invention is provided. It is the DD sectional view taken on the line in FIG. It is a perspective view which shows the head up display to which the optical scanner of this invention is applied. It is a perspective view which shows the head mounted display to which the optical scanner of this invention is applied.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an optical scanner, an image display device, and a head mounted display according to the invention will be described with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a configuration diagram illustrating an image display apparatus according to a first embodiment of the present invention. FIG. 2 is a top view of the optical scanner provided in the image display apparatus shown in FIG. 3 is a cross-sectional view taken along line AA in FIG. 4 is a cross-sectional view taken along line BB in FIG. FIG. 5 is a cross-sectional view showing driving means provided in the optical scanner shown in FIG. FIG. 6 is a plan view for explaining the function of the restricting unit provided in the optical scanner shown in FIG. FIG. 7 is a cross-sectional view showing a modified example of the restricting portion provided in the optical scanner shown in FIG. 8 and 9 are cross-sectional views for explaining a method for manufacturing the restricting portion. Hereinafter, for convenience of explanation, the + Z-axis side is also referred to as “upper”, and the −Z-axis side is also referred to as “lower”.

  As shown in FIG. 1, the image display apparatus 1 is an apparatus that displays an image by two-dimensionally scanning a drawing laser beam LL on an object 10 such as a screen or a wall surface.

  Such an image display device 1 includes a drawing light source unit 2 that emits a drawing laser beam LL, and two optical scanners 3 that scan the drawing laser beam LL. In the image display device 1, the two optical scanners 3 are arranged so that the scanning direction of the drawing laser beam LL (or a first axis J1 described later) is orthogonal. For example, when one optical scanner 3 scans the drawing laser beam LL in the horizontal direction and the other optical scanner 3 scans the drawing laser beam LL in the vertical direction, a two-dimensional image is displayed on the object 10. It can be displayed. Hereinafter, the optical scanner 3 that scans the drawing laser beam LL in the horizontal direction is also referred to as “horizontal scanning optical scanner 3 ′”, and the optical scanner 3 that scans the drawing laser beam LL in the vertical direction is “vertical scanning”. It is also referred to as an optical scanner 3 ".

≪Light source unit for drawing≫
As shown in FIG. 1, the drawing light source unit 2 includes red, green, blue, and laser light sources (light source units) 21R, 21G, and 21B for each color and collimators provided corresponding to the laser light sources 21R, 21G, and 21B. Meter lenses 22R, 22G, and 22B and dichroic mirrors 23R, 23G, and 23B.

  Each of the laser light sources 21R, 21G, and 21B has a light source and a drive circuit (not shown). The laser light source 21R emits red laser light RR, the laser light source 21G emits green laser light GG, and the laser light source 21B emits blue laser light BB. The laser beams RR, GG, and BB are emitted in response to drive signals transmitted from a control unit (not shown), and are converted into parallel light or substantially parallel light by the collimator lenses 22R, 22G, and 22B. As the laser light sources 21R, 21G, and 21B, for example, a semiconductor laser such as an edge emitting semiconductor laser or a surface emitting semiconductor laser can be used. By using a semiconductor laser, the laser light sources 21R, 21G, and 21B can be downsized.

  Dichroic mirrors 23R, 23G, and 23B are arranged following the arrangement of the laser light sources 21R, 21G, and 21B. The dichroic mirror 23R has a characteristic of reflecting the laser light RR. The dichroic mirror 23G has a characteristic of reflecting the laser beam GG and transmitting the laser beam RR. The dichroic mirror 23B has a characteristic of reflecting the laser beam BB and transmitting the laser beams RR and GG. By these dichroic mirrors 23R, 23G, and 23B, the laser beams RR, GG, and BB of the respective colors are combined to become a drawing laser beam LL.

≪Optical scanner≫
The optical scanner 3 shown in FIGS. 2 to 5 includes a structure 300, a driving unit 34, and a restricting unit 35. In addition, the structure 300 includes a movable portion 31 having a light reflecting portion M and a pair of shaft portions (first shaft portions) 321 and 322 that support the movable portion 31 so as to be swingable around the first axis J1. It has a movable layer 38 having an oscillating portion 30 provided, a support portion 33 that supports the shaft portions 321 and 322, and a fixed layer (fixed portion) 39 fixed to the support portion 33.

  Hereinafter, the optical scanner 3 will be described in detail. For convenience of explanation, the three axes orthogonal to each other are defined as the X axis, the Y axis, and the Z axis, and the Z axis direction is the thickness of the movable portion 31 (structure 300). It is assumed that it coincides with the direction (stacking direction of the movable layer 38 and the fixed layer 39) and the X-axis direction coincides with the first axis J1. A plan view viewed from the Z-axis direction is also simply referred to as “plan view”.

  The movable portion 31 has a plate shape, and a light reflecting portion M having light reflectivity is provided on the upper surface thereof. The light reflection part M can be comprised by metal films, such as aluminum, for example. As shown in FIG. 1, the drawing laser beam LL is incident on such a movable portion 31, and the incident drawing laser beam LL is reflected by the light reflecting portion M, and the light reflecting portion M (movable portion 31). Scanning is performed in a direction corresponding to the posture.

  The shaft portions 321 and 322 are disposed to face each other with the movable portion 31 interposed therebetween. Each of the shaft portions 321 and 322 extends along the first axis J1, and has one end connected to the movable portion 31 and the other end connected to the support portion 33. Each of the shaft portions 321 and 322 supports the movable portion 31 so as to be swingable around the first axis J1, and is torsionally deformed as the movable portion 31 swings around the first axis J1. Note that the shapes of the shaft portions 321 and 322 are not limited to the shapes described above, and may include, for example, a bent or curved portion or a branched portion at at least one position in the middle. Further, each of the shaft portions 321 and 322 may be divided into two shaft portions.

  The support portion 33 has a frame shape and is disposed so as to surround the movable portion 31 in plan view. However, the shape of the support portion 33 is not limited to a frame shape, and the support portion 33 may be divided into two portions on the shaft portion 321 side and the shaft portion 322 side. Hereinafter, for convenience of explanation, an opening formed between the support portion 33 and the swinging portion 30 is also referred to as a “gap S”.

  As shown in FIGS. 3 and 4, the fixed layer 39 is disposed so as to overlap the support portion 33 in the plan view of the structure 300, and supports (fixes) the support portion 33. By providing such a fixed layer 39, the strength of the support portion 33 can be increased, and the movable portion 31 and the shaft portions 321, 322 can be supported more stably.

  Further, the fixed layer 39 has a protruding portion 391 that protrudes into the gap S from the support portion 33 toward the swinging portion 30 in a plan view of the movable layer 38. And the control part 35 is arrange | positioned on the upper surface of such a protrusion part 391. FIG. Thus, by providing the protruding portion 391 and providing the restricting portion 35 thereon, the restricting portion 35 can be easily disposed between the support portion 33 and the swinging portion 30.

As described in the manufacturing method described later, for example, as shown in FIGS. 3 and 4, the structure 300 has an SOI substrate 300 </ _b > A [first Si layer (device layer) 301, SiO ₂ layer ( The box layer) 302 and the second Si layer (handle layer) 303 are laminated in this order] by etching using various etching techniques such as wet etching, reactive ion etching (RIE), and the like. Is formed. Specifically, in the structure 300, the movable layer 38 can be composed of the first Si layer 301 and the SiO ₂ layer 302, and the fixed layer 39 can be composed of the second Si layer 303. Thus, by forming the structure 300 with the SOI substrate 300A, the vibration characteristics of the optical scanner 3 can be made excellent. Further, since the SOI substrate 300A can be finely processed by etching, the dimensional accuracy can be improved by forming the structure 300 using the SOI substrate 300A. The size of the scanner 3 can be reduced.

  Further, as shown in FIG. 5, the driving unit 34 includes a permanent magnet 341 provided on the lower surface of the movable portion 31 and a coil 342 disposed to face the permanent magnet 341. The permanent magnet 341 is arranged so that the S pole and the N pole are located on the opposite side across the first axis J1. As the permanent magnet 341, for example, a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, a bond magnet, or the like can be suitably used. In such a driving unit 34, the movable part 31 can be swung around the first axis J <b> 1 by applying an alternating voltage to the coil 342.

  Here, for the horizontal scanning optical scanner 3 ′ of the two optical scanners 3, an alternating voltage having a frequency equal to the torsional resonance frequency of the oscillating part composed of the movable part 31 and the shaft parts 321 and 322 is applied to the coil 342. It is preferable to apply and drive the movable portion 31 to resonance. Thereby, the rocking | swiveling angle around the 1st axis | shaft J1 of the movable part 31 can be enlarged. The frequency of such an alternating voltage is not particularly limited, but is preferably about 10 to 40 kHz, for example. Moreover, the waveform of the alternating voltage is not particularly limited, but a waveform such as a sine wave is preferable.

  On the other hand, for the vertical scanning optical scanner 3 ″, an alternating voltage having a frequency different from the torsional resonance frequency of the oscillating part composed of the movable part 31 and the shaft parts 321 and 322 is applied to the coil 342, and the movable part 31 is made non-resonant. The frequency of such an alternating voltage is not particularly limited, but is preferably, for example, about 30 to 120 Hz (about 60 Hz), and the waveform of the alternating voltage is not particularly limited. The waveform is preferably a sawtooth waveform.

  As shown in FIGS. 3 and 4, the restricting portion 35 is provided on the upper surface of the protruding portion 391 of the fixed layer 39 (the surface on the movable layer 38 side; the support surface on which the support portion 33 of the fixed portion is supported) It is located between the part 33 and the swing part 30. Further, when the restricting portion 35 is viewed in plan (when the light reflecting portion M is viewed in plan), the contour of the restricting portion 35 is located in the support surface. In other words, the restricting portion 35 is formed in a region where a perpendicular that can be drawn on the upper surface of the protruding portion 391 in a plan view is formed. Such a restricting portion 35 allows the movable portion 31 to move in the XY plane in the XY plane while allowing the movable portion 31 to move normally as described above (oscillation of the movable portion 31 around the first axis J1). It has a function to suppress. By providing such a restricting portion 35, the displacement of the swinging portion 30 in the XY plane direction is restricted, and breakage (damage or tearing) of the swinging portion 30 can be suppressed.

  Such a restricting portion 35 is disposed to face the movable portion 31 and faces the movable portion restricting portion 351 for restricting excessive displacement of the movable portion 31 in the XY plane direction, and the shaft portions 321 and 322. And a shaft portion restricting portion 352 that restricts excessive deformation of the shaft portions 321 and 322 in the XY plane direction. In other words, the restricting portion 35 is formed in the same plane (particularly in the plane facing the surface on which the light reflecting portion M of the movable portion 31 is formed) when the movable portion 31 is viewed in plan from the light reflecting portion M direction. Yes.

  Further, the movable portion restricting portion 351 has a portion facing the movable portion 31 in the X-axis direction and a portion facing the movable portion 31 in the Y-axis direction. In other words, the movable portion restricting portion 351 is formed along the contour of the movable portion 31 when the movable portion 31 is viewed in plan from the light reflecting portion M direction.

  On the other hand, the shaft restricting portion 352 has a portion facing the shaft portions 321 and 322 in the Y-axis direction. In other words, the shaft restricting portion 352 is formed along the axial direction (X-axis direction) of the shaft portions 321 and 322 when the shaft portions 321 and 322 are viewed in a plan view from the light reflecting portion M direction.

  In this embodiment, the movable portion restricting portion 351 and the shaft portion restricting portion 352 are integrally formed. However, the movable portion restricting portion 351 and the shaft portion restricting portion 352 are formed separately. Either one of them may be omitted.

  According to such a restricting portion 35, for example, when excessive acceleration is applied in the −Y axis direction, the swinging portion 30 is displaced in the + Y axis direction as shown in FIG. Hit part 35. Thereby, the further displacement (deformation | transformation of the axial parts 321 and 322) of the rocking | swiveling part 30 is controlled. Similarly, for example, when an excessive speed is applied in the −X-axis direction, the swinging unit 30 is displaced in the + X-axis direction and collides with the regulating unit 35 as shown in FIG. As a result, further displacement of the swinging portion 30 (extension and contraction of the shaft portions 321 and 322) is restricted. In this manner, since the excessive displacement of the swinging portion 30 is restricted by the restricting portion 35, damage to the swinging portion 30 (particularly damage to the shaft portions 321 and 323) is suppressed, and mechanical strength (shock resistance) is suppressed. A high-performance optical scanner 3 is obtained.

  Here, when the swinging part 30 hits the restricting part 35, even if both the phenomenon that the movable part 31 hits the restricting part 351 for the movable part and the phenomenon that the shaft parts 321 and 322 hit the restricting part 352 for the shaft part occur. Good or only one may occur. By generating at least one of them, excessive displacement of the swinging part 30 is suppressed, and damage to the swinging part 30 can be suppressed. When both occur, both may occur simultaneously, or one may occur later than the other. Note that FIG. 6A described above shows a state in which both occur simultaneously.

Hereinafter, the configuration of the restricting portion 35 will be described in detail.
As shown in FIGS. 3B and 4B, the restricting portion 35 is provided on the upper surface of the protruding portion 391, and the tip (end on the swinging portion 30 side) 35 a is formed on the side surface of the swinging portion 30. Opposite. Thereby, when the swing part 30 is displaced in the XY plane direction, the swing part 30 can be brought into contact with the restricting part 35 more reliably. Note that the distance between the regulating portion 35 and the side surface of the swinging portion 30 (the distance D1 between the movable portion 31 and the movable portion regulating portion 351, the distance D2 between the shaft portions 321, 322 and the shaft portion regulating portion 352). ) Is not particularly limited, and varies depending on the size of the optical scanner 3, but is preferably about 5 μm or more and 30 μm or less, more preferably about 5 μm or more and 10 μm or less. Thereby, the displacement to the XY plane direction of the rocking | swiveling part 30 can be suppressed more effectively.

  Note that the distance D1 between the movable portion 31 and the movable portion restricting portion 351 coincides with the distance between the movable portion 31 and the tip 391a of the protruding portion 391, and the shaft portions 321, 322, the shaft portion restricting portion 352, and the like. The distance D2 is equal to the distance between the shaft portions 321 and 322 and the tip 391a of the projecting portion 391 when the light reflecting portion M is viewed in plan view.

  In other words, the tip 35a of the restricting portion 35 coincides with the tip 391a of the protruding portion 391 in plan view of the movable layer 38 (including the surface including the tip 35a of the restricting portion 35 and the tip 391a of the protruding portion 391). Surface is formed on the same plane). In this way, by making the tip 35a of the restricting portion 35 coincide with the tip of the tip 391a of the projecting portion 391, the restricting portion 35 can be easily formed by the manufacturing method described later, and the restricting portion 35 can be swung. The separation distances D1 and D2 from the part 30 can be controlled with higher accuracy. Note that the position of the tip 35a of the restricting portion 35 is not limited to the case where the tip 35a coincides with the tip 391a of the protrusion 391. As shown in FIG. 7, the base of the protrusion 391 is more than the tip 391a of the protrusion 391. You may be located in the end side (the support part 33 side in planar view).

  Further, the restricting portion 35 is joined to the inner surface of the support portion 33 in addition to the upper surface of the protruding portion 391. Thereby, the joining area of the structure 300 and the control part 35 can be enlarged, and the joining strength of the structure 300 and the control part 35 can be raised. Further, when the swinging portion 30 hits the restricting portion 35, the support portion 33 serves as a support for the restricting portion 35, so that separation (peeling) of the restricting portion 35 from the structure 300 can be effectively suppressed. .

Such a restricting portion 35 may be softer than the support portion 33, but preferably has elasticity. Thereby, the control part 35 becomes soft and can exhibit high shock absorption. Therefore, breakage of the swinging part 30 due to the swinging part 30 hitting the restricting part 35 can be more effectively suppressed, and unnecessary vibration of the swinging part 30 caused by the collision can be suppressed. In addition, as a constituent material of the regulation part 35, it is preferable to use various resin materials, such as a silicone resin, an epoxy resin, an acrylic resin, and a phenol resin. Thereby, the regulation part 35 which is sufficiently soft and has elasticity can be easily formed. However, the constituent material of the restricting portion 35 is not limited to the resin material as long as the above-described effects can be exhibited. For example, a metal brazing material such as gold brazing, silver brazing, copper brazing, or solder may be used. Various metal materials may be used.
The configuration of the optical scanner 3 has been described in detail above.

Next, the manufacturing method of the control part 35 is demonstrated.
The regulation part 35 is manufactured by a first step of preparing the SOI substrate 300A, a second step of patterning the first Si layer 301 and the SiO ₂ layer 302 of the SOI substrate 300A to obtain the movable layer 38, and the movable layer. 38, a third step of placing the resin 350 in the void S, a fourth step of patterning the second Si layer 303 of the SOI substrate 300A to obtain the fixed layer 39, and removing a part of the resin 350 in the void S. And a fifth step of obtaining the restricting portion 35. Hereinafter, each of these steps will be described in detail.

[First step]
First, as shown in FIG. 8A, an SOI substrate 300A formed by laminating a first Si layer 301, a SiO ₂ layer 302, and a second Si layer 303 is prepared.

[Second step]
Next, the first Si layer 301 and the SiO ₂ layer 302 of the SOI substrate 300A are patterned by using a photolithography technique and a wet etching technique or a dry etching technique, and as shown in FIG. And the movable layer 38 which has the support part 33 is formed.

[Third step]
Next, as shown in FIG. 8C, a resin 350 is disposed on the movable layer 38. In this embodiment, a “positive type” photosensitive resin from which an exposed portion is removed is used as the resin 350. Next, the resin 350 is exposed from the first Si layer 301 side. At this time, the exposure light is irradiated to the resin 350 on the movable layer 38, and the intensity and irradiation time of the exposure light are controlled so that the exposure light does not reach the resin 350 in the gap S. Then, by removing the exposed portion of the resin 350, the resin 350 remains in the gap S as shown in FIG.

[Fourth step]
Next, the second Si layer 303 of the SOI substrate 300A is patterned by using a photolithography technique and a wet etching technique or a dry etching technique to form the fixed layer 39 as shown in FIG. 9B.

[Fifth step]
Next, by removing the portion of the resin 350 that protrudes from the fixed layer 39 in a plan view of the SOI substrate 300A, as shown in FIG. 9C, the restricting portion 35 made of the resin 350 is formed. Specifically, first, the resin 350 is irradiated with exposure light from the second Si layer 303 side, and only the portion protruding from the fixed layer 39 is exposed (the portion overlapping the fixed layer 39 is the fixed layer 39). Will not be exposed as a mask). Then, when the exposed portion is removed, only the portion overlapping the fixed layer 39 remains, and this portion becomes the restricting portion 35.
As described above, the restricting portion 35 is obtained.

  According to such a manufacturing method, it is possible to easily form the restricting portion 35 in which the tip 35a coincides with the tip 391a of the protruding portion 391. In the fifth step, when the exposure light wraps around or when the wraparound is intentionally generated, the distal end 35a is positioned closer to the proximal end of the protruding portion 391 than the distal end 391a of the protruding portion 391. The restricting portion 35 (see FIG. 7) can be easily formed.

  Further, according to such a manufacturing method, the separation distances D <b> 1 and D <b> 2 between the swing part 30 and the restriction part 35 can be controlled by the gap G between the swing part 30 and the fixed layer 39. Since the oscillating part 30 and the fixed layer 39 are formed from different layers of the SOI substrate 300A, the gap G can be reduced easily and accurately. Therefore, the separation distances D1 and D2 can be made sufficiently small.

  Further, according to such a manufacturing method, the width d of the gap S (the separation distance between the movable portion 31 and the support portion 33, the separation distance between the shaft portions 321, 322 and the support portion 33) is set to the separation distances D1 and D2. Since there is no influence, the space S can be designed sufficiently wide. Therefore, the movable layer 38 can be patterned with higher accuracy in the second step described above. The width d is not particularly limited. For example, when the thickness of the first Si layer 301 is T, it is preferable that the relationship d ≧ T is satisfied.

Second Embodiment
10 and 11 are cross-sectional views for explaining a method for manufacturing a restricting portion according to the second embodiment of the present invention.

  Hereinafter, the image display apparatus according to the second embodiment will be described focusing on the differences from the above-described embodiment, and description of similar matters will be omitted.

  The image display apparatus according to the second embodiment of the present invention is the same as that of the first embodiment described above except that the manufacturing method of the restricting portion of the optical scanner is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

The manufacturing method of the regulation part 35 of the present embodiment includes a first step of preparing the SOI substrate 300A, and a second step of obtaining the movable layer 38 by patterning the first Si layer 301 and the SiO ₂ layer 302 of the SOI substrate 300A. And a third step of patterning the second Si layer 303 of the SOI substrate 300A to obtain the fixed layer 39, and a fourth step of forming the restricting portion 35 on the fixed layer 39. Hereinafter, each of these steps will be described in detail.

[First step]
First, as shown in FIG. 10A, an SOI substrate 300A formed by laminating a first Si layer 301, a SiO ₂ layer 302, and a second Si layer 303 is prepared.

[Second step]
Next, the first Si layer 301 and the SiO ₂ layer 302 of the SOI substrate 300A are patterned by using a photolithography technique and a wet etching technique or a dry etching technique, and as shown in FIG. The movable layer 38 having the portion 30 and the support portion 33 is formed. Note that the resist mask RM used as a mask in this step is left without being removed.

[Third step]
Next, the second Si layer 303 of the SOI substrate 300A is patterned by using a photolithography technique and a wet etching technique or a dry etching technique to form the fixed layer 39 as shown in FIG. In addition, this process may be performed prior to the second process or may be performed simultaneously with the second process.

[Fourth step]
Next, as illustrated in FIG. 11A, a metal film 350 </ b> A is formed on the movable layer 38 and the protruding portion 391 from the movable layer 38 side by using, for example, a sputtering method. Thereby, the regulation part 35 which consists of 350 A of metal films is formed. Next, by removing (lifting off) the metal film 350A on the movable layer 38 together with the resist mask RM, as shown in FIG. 11B, only the portion that becomes the restricting portion 35 of the metal film 350A remains. Become.
As described above, the restricting portion 35 is obtained.

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Third Embodiment>
FIG. 12 is a cross-sectional view of an optical scanner included in the image display apparatus according to the third embodiment of the present invention.

  Hereinafter, the image display apparatus according to the third embodiment will be described focusing on the differences from the above-described embodiment, and description of similar matters will be omitted.

  The image display apparatus of the third embodiment of the present invention is the same as that of the first embodiment described above except that the configuration of the optical scanner is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

  As shown in FIG. 12, in the optical scanner 3 of the present embodiment, the restricting portion 35 is separated from the support portion 33. That is, a gap S <b> 1 is formed between the restriction portion 35 and the side surface of the support portion 33. Therefore, when the swinging part 30 hits the restricting part 35, the restricting part 35 is easily deformed, and the shock absorption of the restricting part 35 can be enhanced. Therefore, breakage of the swinging portion 30 can be more effectively suppressed.

  Also according to the third embodiment, the same effects as those of the first embodiment described above can be exhibited.

<Fourth embodiment>
FIG. 13 is a configuration diagram showing an image display apparatus according to the fourth embodiment of the present invention. FIG. 14 is a top view of an optical scanner included in the image display apparatus shown in FIG. 15 is a cross-sectional view taken along the line CC in FIG.

  Hereinafter, the image display apparatus according to the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The image display apparatus according to the fourth embodiment of the present invention is the same as that of the first embodiment described above except that the number and configuration of optical scanners are different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

  As shown in FIG. 13, the image display apparatus 1 according to the present embodiment scans with a drawing light source unit 2 that emits a drawing laser beam LL, an optical scanner 3 that scans the drawing laser beam LL, and an optical scanner 3. And a mirror 11 for reflecting the drawn laser beam LL. The mirror 11 may be provided as necessary and may be omitted.

≪Light source unit for drawing≫
Since the drawing light source unit 2 has the same configuration as that of the first embodiment described above, description thereof is omitted.

≪Optical scanner≫
The optical scanner 3 has a function of two-dimensionally scanning the drawing laser beam LL emitted from the drawing light source unit 2.

  As shown in FIG. 14, the optical scanner 3 includes a movable body 31 having a light reflecting portion M, a structure 300 having a support portion 33 and shaft portions 321 and 322, and driving means 34 for swinging the movable portion 31. And a restricting portion 35 that restricts excessive displacement of the movable portion 31 and excessive deformation of the shaft portions 321, 322.

  The movable portion 31 includes a first movable portion 311 having a light reflecting portion M provided on the upper surface, a frame-shaped second movable portion 312 disposed so as to surround the first movable portion 311, A pair of shaft portions that connect the first movable portion 311 and the second movable portion 312 and support the first movable portion 311 so as to be swingable about a second axis J2 orthogonal to the first axis J1. (Second shaft portion) 313 and 314. The pair of shaft portions 313 and 314 are arranged so as to face each other via the first movable portion 311 and extend in a direction along the second axis J2.

  Further, as shown in FIG. 15, a rib 312a is provided on the lower surface of the second movable portion 312 and a permanent magnet 341 is disposed on the lower surface of the rib 312a. The rib 312a functions as a reinforcing portion that reinforces the mechanical strength of the second movable portion 312 and secures a space between the first movable portion 311 and the permanent magnet for preventing these contacts. And function as a gap material. The permanent magnet 341 has a rod shape in which one end side is an S pole and the other end side is an N pole, and is inclined with respect to both the first and second axes J1 and J2 in plan view. Yes.

  In the optical scanner 3 having such a configuration, the first movable portion 311, the shaft portions 313, 314, the second movable portion 312, the shaft portions 321, 322, and the permanent magnet 341 are used as the first movable portion 311. A first swinging portion that swings around the axis J1 is configured. Further, the first movable portion 311 and the shaft portions 313 and 314 constitute a second swinging portion that swings the first movable portion 311 around the second axis J2.

  Then, the first movable portion 311 is swung around the second axis J2 with respect to the second movable portion 312 and the second movable portion 312 is moved around the first axis J1 with respect to the support portion 33. By swinging, the first movable portion 311 can be swung around the two axes of the first and second axes J1 and J2. In the present embodiment, vertical scanning (sub-scanning) of the drawing laser beam LL is performed by swinging the first movable portion 311 around the first axis J1, and the second movable portion 311 has a second scan. The optical scanner 3 is arranged such that horizontal scanning (main scanning) of the drawing laser beam LL is performed by swinging around the axis J2.

  A coil 342 is provided below the permanent magnet 341. The coil 342 swings the first alternating voltage for swinging the first swing portion and the second swing portion. By applying a superimposed voltage obtained by superimposing the second alternating voltage for causing the first movable portion 311 to be swung, the first movable portion 311 can be swung around the two axes of the first and second axes J1 and J2. The first alternating voltage is not particularly limited. For example, the first alternating voltage can be the same as the alternating voltage applied to the vertical scanning optical scanner 3 ″ of the first embodiment described above, and the second alternating voltage can be used. The voltage is not particularly limited, and can be, for example, the same as the alternating voltage applied to the above-described horizontal scanning optical scanner 3 ′ of the first embodiment. Preferably, non-resonant driving is used, and the second swinging unit is resonantly driven.

  The optical scanner 3 of this embodiment has been described in detail above. According to the two-dimensional scanning type optical scanner 3 having a gimbal type as in this embodiment, the drawing laser beam LL can be two-dimensionally scanned with one apparatus. Compared with a configuration in which two such one-dimensional scanning optical scanners are combined to perform two-dimensional scanning with the drawing laser beam LL, the apparatus can be reduced in size and alignment can be easily adjusted.

  According to the fourth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Fifth Embodiment>
FIG. 16 is a top view of an optical scanner provided in the image display apparatus according to the fifth embodiment of the present invention. 17 is a cross-sectional view taken along the line DD in FIG.

  Hereinafter, the image display apparatus according to the fifth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The image display apparatus according to the fifth embodiment of the present invention is the same as that of the fourth embodiment described above except that the configuration of the optical scanner is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

  As shown in FIGS. 16 and 17, in the optical scanner 3 of the present embodiment, the first movable part 311 has a base 3111 and a holding part 3112 provided on the upper surface of the base 3111. A light reflecting portion M is provided on the upper surface of the holding portion 3112. The holding portion 3112 is provided so as to be separated from the shaft portions 313 and 314 in the Z-axis direction and overlap the base portion 3111 and the shaft portions 313 and 314 in plan view. Therefore, the area of the upper surface of the holding part 3112 (that is, the area of the light reflecting part M) can be increased while shortening the distance between the shaft parts 313 and 314. In addition, since the distance between the shaft portions 313 and 314 can be shortened, the second movable portion 312 can be downsized.

  According to the fifth embodiment, the same effect as that of the first embodiment described above can be exhibited.

<Sixth Embodiment>
Next, an example of a head-up display to which the optical scanner of the present invention is applied will be described.

  FIG. 18 is a perspective view showing a head-up display to which the optical scanner of the present invention is applied.

  As shown in FIG. 18, in the head-up display system 1000, the image display device 1 is mounted on the dashboard of the automobile so as to form the head-up display 1100. With the head-up display 1100, a predetermined image such as a guidance display to the destination can be displayed on the windshield 1200, for example. Note that the head-up display system 1000 can be applied not only to automobiles but also to aircrafts, ships, and the like.

<Seventh embodiment>
Next, an example of a head mounted display to which the optical scanner of the present invention is applied will be described.

  FIG. 19 is a perspective view showing a head mounted display to which the optical scanner of the present invention is applied.

  As shown in FIG. 19, the head mounted display 2000 includes a frame 2100 that is mounted on the observer's head and the image display device 1 that is mounted on the frame 2100. Then, the image display device 1 displays a predetermined image visually recognized by one eye on a display unit (light reflecting layer material) 2200 provided in a portion that is originally a lens of the frame 2100.

  Display unit 2200 may be transparent or opaque. When the display unit 2200 is transparent, information from the image display device 1 can be used by being superimposed on information from the real world. The display unit 2200 only needs to reflect at least part of incident light, and for example, a half mirror can be used.

  It should be noted that two image display devices 1 may be provided in the head mounted display 2000, and an image that can be viewed with both eyes may be displayed on the two display units 2200.

  The optical scanner, the image display device, and the head mounted display of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part has the same function. Any configuration can be substituted. In addition, any other component may be added to the present invention.

DESCRIPTION OF SYMBOLS 1 ... Image display device 10 ... Object 11 ... Mirror 2 ... Drawing light source unit 21B, 21G, 21R ... Laser light source 22B, 22G, 22R ... Collimator lens 23B, 23G, 23R ... Dichroic mirror 3 …… Optical scanner 3 ′ …… Horizontal scanning optical scanner 3 ″ …… Vertical scanning optical scanner 30 …… Oscillating portion 300 …… Structure 300A …… SOI substrate 301 …… First Si layer 302 …… SiO ₂ layer 303 …… second Si layer 31 …… movable portion 311 …… first movable portion 3111 …… base portion 3112 …… holding portion 312 …… second movable portion 312a …… ribs 313, 314 …… Shaft portion 321, 322 ...... Shaft portion 33 ...... Supporting portion 34 ...... Driving means 341 ...... Permanent magnet 342 ...... Coil 35 ...... Restriction portion 35 a ...... Tip 350 …… Fat 350A …… Metal film 351 …… Moving part regulating part 352 …… Shaft part regulating part 38 …… Moving layer 39 …… Fixed layer 391 …… Protruding part 391a …… Tip 1000 …… Head-up display system 1100… … Head-up display 1200 …… Front glass 2000 …… Head mounted display 2100 …… Frame 2200 …… Display unit BB, GG, RR …… Laser beam D1, D2 …… Separation distance G …… Gap J1 …… First Axis J2 …… Second axis LL …… Drawing laser beam M …… Light reflection part RM …… Resist mask S, S1 …… Void

Claims (13)

A movable portion including a light reflecting portion that reflects light, and a swinging portion including a first shaft portion that swingably supports the movable portion around a first axis;
A support portion for supporting the first shaft portion;
A fixing part on which the support part is supported;
A regulating part located between the rocking part and the support part and regulating displacement of the rocking part;
The restricting portion is provided on a support surface on which the support portion of the fixed portion is supported,

The optical scanner according to claim 1, wherein an outline of the restricting portion is located within the support surface in a plan view of the light reflecting portion.   2. The region according to claim 1, wherein the region of the support surface where the restricting portion is provided is provided in a protruding portion that is located closer to the swinging portion than the support portion of the fixed portion in a plan view of the light reflecting portion. Optical scanner.   The optical scanner according to claim 1, wherein the protruding portion is separated from the vibrating portion in a plan view of the light reflecting portion.   The optical scanner according to claim 1, wherein the restricting portion is in contact with the support portion.   The optical scanner according to claim 1, wherein the restricting portion is separated from the support portion.   The optical scanner according to claim 1, wherein the restricting portion has elasticity.   The optical scanner according to claim 6, wherein the restricting portion is made of resin.   8. The optical scanner according to claim 1, wherein when the impact is applied to the optical scanner, the regulating unit regulates displacement of the movable unit by contacting the movable unit. 9.   The said restriction | limiting part restrict | limits the displacement of a said 1st axial part by contacting with a said 1st axial part when an impact is added to the said optical scanner. Light scanner. The moving part is
A first movable part;
A frame-like second movable part provided so as to surround the first movable part;
The first movable portion and the second movable portion are connected, and the first movable portion is swung around a second axis that intersects the first axis with respect to the second movable portion. A second shaft portion that supports the second shaft portion;
The optical scanner according to claim 1, comprising: A movable portion including a light reflecting portion that reflects light, a swinging portion including a first shaft portion that supports the movable portion so as to be swingable about a first axis, and a support portion that supports the first shaft portion; A movable layer having
A fixed layer provided with the support,
A regulating part located between the rocking part and the support part and regulating displacement of the rocking part;
The fixed layer has a protruding portion located on the swinging portion side from the support portion in a plan view of the movable layer,
The restricting portion is disposed on the protruding portion,
In the plan view of the movable layer, the end of the swinging portion of the restricting portion overlaps the tip of the protruding portion, or is positioned closer to the support portion than the tip of the protruding portion. Light scanner.   An image display device comprising the optical scanner according to claim 1. An optical scanner according to any one of claims 1 to 10,
A head-mounted display comprising: a frame on which the optical scanner is mounted and which is mounted on an observer's head.

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