JP2018054781A - Optical scanner, image display device, head-mounted display, and head-up display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner that features superior swing characteristics, and to provide a highly reliable image display device, head-mounted display, and head-up display having the same.SOLUTION: An optical scanner comprises: a first movable unit with a light reflective part having light reflectivity; a frame-like second movable unit that surrounds the first movable unit; first shaft sections that connect the first movable unit and the second movable unit to support the first movable unit in a way that allows the first movable unit to swing about a first axis; second shaft sections that are connected to the second movable unit to support the second movable unit in a way that allows the second movable unit to swing about a second axis that crosses the first axis; and a permanent magnet disposed on the first movable unit, the permanent magnet being magnetized in a direction at angles with the first and second axes. The permanent magnet is subjected to a magnetic field to swing the first movable unit about the first axis and the second movable unit about the second axis.SELECTED DRAWING: Figure 2

Description

  The present invention relates to an optical scanner, an image display device, a head mounted display, and a head up display.

  For example, Patent Document 1 discloses a gimbal type optical scanner. Such an optical scanner connects a first movable part having a light reflecting part, a frame-shaped second movable part in which the first movable part is located inside, the first movable part and the second movable part, A first shaft portion that supports the first movable portion so as to be swingable about the first axis; a second shaft portion that supports the second movable portion so as to be swingable about the second axis that intersects the first axis; And a permanent magnet provided in the second movable portion so as to be inclined with respect to both the first axis and the second axis. When a magnetic field is applied to the permanent magnet, the second movable part swings around the second axis in a non-resonant manner, and the first movable part swings around the first axis in a resonant manner. The movable part swings around both the first axis and the second axis.

JP2013-216922A

  However, in the optical scanner having such a configuration, since the second movable part has a frame shape and a large mass, and the second movable part is provided with a permanent magnet, the moment of inertia of the second movable part is increased. growing. When the moment of inertia increases, the Q value of resonance vibration (a value that indicates the ease of generation of resonance vibration, and the greater the Q value, the easier resonance occurs) increases. There is a risk that resonance vibrations may be superimposed on the supposed second movable part. As a result, the swing characteristics of the optical scanner may be degraded.

  An object of the present invention is to provide an optical scanner capable of exhibiting excellent swing characteristics, and further to provide a highly reliable image display device, head-mounted display, and head-up display having the optical scanner. There is.

  Such an object is achieved by the following invention.

The optical scanner of the present invention includes a first movable part including a light reflecting part having light reflectivity,
A frame-shaped second movable part in which the first movable part is located inside;
A first shaft portion that connects the first movable portion and the second movable portion, and supports the first movable portion so as to be swingable about a first axis;
A second shaft portion connected to the second movable portion and supporting the second movable portion so as to be swingable about a second axis intersecting the first axis;
A permanent magnet provided in the first movable part and magnetized in a direction inclined with respect to both the first axis and the second axis;
By applying a magnetic field to the permanent magnet, the first movable part swings around the first axis, and the second movable part swings around the second axis.

  Thereby, since the moment of inertia of the second movable part is reduced, the optical scanner can exhibit excellent swing characteristics.

  In the optical scanner according to the aspect of the invention, it is preferable that the second movable portion swings around the second axis when a driving force is transmitted from the first movable portion to the second movable portion.

  Thereby, the 1st movable part can be rock | fluctuated around both the 1st axis | shaft and the 2nd axis | shaft more reliably.

  In the optical scanner according to the aspect of the invention, it is preferable that the direction of magnetization of the permanent magnet is inclined within a range of 10 ° to 60 ° with respect to the first axis.

  Thereby, the first movable part and the second movable part can be swung around the respective axes more reliably.

In the optical scanner according to the aspect of the invention, it is preferable that the optical scanner has a rib provided on the first movable portion.
Thereby, the dynamic bending of a 1st movable part can be suppressed.

In the optical scanner according to the aspect of the invention, it is preferable that the rib is provided at a connection portion of the first movable portion with the first shaft portion.
Thereby, the dynamic bending of a 1st movable part can be suppressed more effectively.

In the optical scanner of the present invention, it is preferable that the permanent magnet is positioned by the rib.
Thereby, it becomes easy to arrange a permanent magnet in the correct position.

In the optical scanner according to the aspect of the invention, it is preferable that a pair of the ribs is provided with the permanent magnet interposed therebetween.
Thereby, it becomes easy to arrange | position a permanent magnet by the correct position.

In the optical scanner according to the aspect of the invention, it is preferable that the permanent magnet does not protrude from the first movable portion in a plan view as viewed from the overlapping direction of the first movable portion and the permanent magnet.
Thereby, generation | occurrence | production of a stray light can be suppressed.

In the optical scanner according to the aspect of the invention, it is preferable that the permanent magnet is located on the opposite side of the light reflecting portion with the first movable portion interposed therebetween.
Thereby, a light reflection part can be arrange | positioned without being disturbed by a permanent magnet.

In the optical scanner according to the aspect of the invention, the first movable portion swings around the first axis by resonance,
It is preferable that the second movable portion swings around the second axis in a non-resonant manner.
Thereby, the two-dimensional swing of the first movable part is suitable for image drawing.

The image display apparatus of the present invention includes the optical scanner of the present invention.
Thereby, the effect of the optical scanner mentioned above can be enjoyed and an image display apparatus with high reliability can be obtained.

The head-mounted display of the present invention includes the optical scanner of the present invention,
And a frame mounted on the head of the observer.

  Thereby, the effect of the optical scanner mentioned above can be enjoyed and a highly reliable head mounted display is obtained.

  A head-up display according to the present invention includes the optical scanner according to the present invention.

  Thereby, the effect of the optical scanner mentioned above can be enjoyed and a highly reliable head-up display can be obtained.

1 is a configuration diagram of an image display device according to a first embodiment of the present invention. It is a top view of the optical scanner which the image display apparatus shown in FIG. 1 has. It is the sectional view on the AA line in FIG. It is a bottom view of the 1st movable part which the optical scanner shown in FIG. 2 has. It is a block diagram of the voltage application part which the optical scanner shown in FIG. 2 has. It is a figure which shows the waveform of the 1st voltage produced | generated by the voltage application part shown in FIG. It is a figure which shows the waveform of the 2nd voltage produced | generated by the voltage application part shown in FIG. It is a top view which shows the optical scanner which concerns on 2nd Embodiment of this invention. It is the BB sectional view taken on the line in FIG. It is a perspective view which shows the head-up display of this invention. It is a perspective view which shows the head mounted display of this invention.

  Hereinafter, preferred embodiments of an optical scanner, an image display device, a head-mounted display, and a head-up display according to the present invention will be described with reference to the accompanying drawings.

<First Embodiment>
FIG. 1 is a configuration diagram of an image display apparatus according to the first embodiment of the present invention. FIG. 2 is a plan view of an optical scanner included in the image display apparatus shown in FIG. 3 is a cross-sectional view taken along line AA in FIG. FIG. 4 is a bottom view of the first movable part of the optical scanner shown in FIG. FIG. 5 is a block diagram of a voltage application unit included in the optical scanner shown in FIG. FIG. 6 is a diagram illustrating a waveform of the first voltage generated by the voltage application unit illustrated in FIG. 5. FIG. 7 is a diagram illustrating a waveform of the second voltage generated by the voltage application unit illustrated in FIG. 5. In the following, for convenience of explanation, the front side of the sheet in FIG. 2 is also referred to as “upper” and the rear side of the sheet is also referred to as “lower”.

  As shown in FIG. 1, the image display apparatus 1 is an apparatus that displays an image (video) by two-dimensionally scanning a drawing laser LL on an object 10 such as a screen or a wall surface. Such an image display device 1 includes a modulated light generator 2 that generates a drawing laser (modulated light) LL, and an optical scanner 3 that two-dimensionally scans the drawing laser LL generated by the modulated light generator 2. And a mirror 11 that reflects the drawing laser LL scanned by the optical scanner 3. The configuration of the image display device 1 is not particularly limited as long as it has the optical scanner 3. For example, the mirror 11 may be omitted or other components (members) may be added. Good. Hereinafter, the image display apparatus 1 will be described in detail.

<< Modulated light generator >>
As shown in FIG. 1, the modulated light generation unit 2 includes a plurality of light sources 21R, 21G, and 21B having different wavelengths, drive circuits 22R, 22G, and 22B that drive the light sources 21R, 21G, and 21B, and light sources 21R, 21G, Collimator lenses 24R, 24G, and 24B that collimate the light emitted from 21B, a light combining unit 23, and a condenser lens 26 are provided.

  The light source 21R emits red light, the light source 21G emits green light, and the light source 21B emits blue light. By using such three colors of light, a full-color image can be displayed. In addition, it does not specifically limit as light source 21R, 21G, 21B, For example, a laser diode, LED, etc. can be used.

  The drive circuit 22R drives the light source 21R, the drive circuit 22G drives the light source 21G, and the drive circuit 22B drives the light source 21B. The three lights emitted from the light sources 21R, 21G, and 21B driven by the drive circuits 22R, 22G, and 22B are collimated by the corresponding collimator lenses 24R, 24G, and 24B, respectively, and enter the light combining unit 23. Incident.

  The light combining unit 23 combines light from the light sources 21R, 21G, and 21B. Such a light combining unit 23 has two dichroic mirrors 231 and 232. The dichroic mirror 231 has a function of transmitting red light and reflecting green light, and the dichroic mirror 232 has a function of transmitting red light and green light and reflecting blue light. By using such dichroic mirrors 231 and 232, it is possible to synthesize light of three colors, red light, green light and blue light from the light sources 21R, 21G and 21B. Therefore, the drawing laser LL of a predetermined color is generated by independently modulating the intensity of light from the light sources 21R, 21G, and 21B. The generated drawing laser LL is made to have a desired NA (numerical aperture) by the condenser lens 26 and then enters the optical scanner 3.

  Although the modulated light generation unit 2 has been described above, the configuration of the modulated light generation unit 2 is not limited to the configuration of the present embodiment as long as the drawing laser LL can be generated.

≪Optical scanner≫
The optical scanner 3 has a function of two-dimensionally scanning the drawing laser LL generated by the modulated light generator 2. As shown in FIG. 2, such an optical scanner 3 includes a first movable portion 31 including a light reflecting portion 311 having light reflectivity, and a frame-shaped second movable portion in which the first movable portion 31 is located inside. 32, the first movable portion 31 and the second movable portion 32 are connected to each other, and the first movable portion 31 is supported by the first movable portion 32 so as to be swingable around the first axis J1. A second shaft portion 34 connected to the second movable portion 32 so as to be swingable about a second axis J2 intersecting the first axis J1, and provided on the first movable portion 31; A permanent magnet 391 magnetized in a direction inclined with respect to both axes of the two axes J2, and by applying a magnetic field to the permanent magnet 391, the first movable part 31 swings around the first axis J1. The second movable part 32 is configured to swing (turn) around the second axis J2. According to such a configuration, since the permanent magnet 391 is not provided in the second movable portion 32, the configuration in which the permanent magnet 391 is provided in the second movable portion 32 as in the related art is not changed. The moment of inertia of the second movable part 32 is reduced. Therefore, unnecessary vibration (particularly resonance vibration) hardly occurs in the second movable portion 32, and the optical scanner 3 can exhibit excellent swing characteristics. Hereinafter, such an optical scanner 3 will be described in detail.

  As shown in FIGS. 2 and 3, the optical scanner 3 includes a second movable portion on the inside in addition to the first movable portion 31, the second movable portion 32, the first shaft portion 33, and the second shaft portion 34 described above. In addition to the permanent magnet 391 and the structure 30 including the support portion 35 that is positioned and connected to the second shaft portion 34 via the second shaft portion 34, a magnetic field that acts on the permanent magnet 391 is applied. A drive mechanism 39 including a generated coil 392 and a voltage application unit 393 connected to the coil 392 is included.

  The first movable part 31 has a plate shape. Moreover, the planar view shape of the 1st movable part 31 is circular. However, the shape of the first movable portion 31 in plan view is not particularly limited, and may be an ellipse, an oval, a triangle, a quadrangle, or a pentagon or more polygon in addition to a circle.

  The upper surface (one main surface) of the first movable portion 31 is provided with a light reflecting portion 311 whose surface is a light reflecting surface. The light reflecting portion 311 reflects the drawing laser LL. Is done. Such a light reflecting portion 311 can be formed by depositing a metal material such as aluminum on the upper surface of the first movable portion 31, for example. However, the configuration of the light reflecting portion 311 is not particularly limited as long as it can reflect the drawing laser LL. For example, when the upper surface of the first movable unit 31 has light reflectivity, the upper surface of the first movable unit 31 may function as the light reflecting unit 311.

  On the other hand, as shown in FIG. 4, a rib 312 is provided on the lower surface of the first movable portion 31. That is, the optical scanner 3 has a rib 312 provided on the first movable portion 31. The rib 312 has a function as a reinforcing portion that reinforces the mechanical strength of the first movable portion 31. By providing such a rib 312, the first movable portion 31 is difficult to bend, and the dynamic deflection of the first movable portion 31 (for example, vibration in the thickness direction of the first movable portion 31) can be suppressed. As a result, the first movable part 31 can be swung around the first axis J1 more accurately and smoothly.

  Further, the rib 312 is provided at a connection portion of the first movable portion 31 with the first shaft portion 33. Specifically, a pair of ribs 312 are provided along the longitudinal direction of the first shaft portion 33, and one of the ribs 312 serves as a connection portion with a first beam portion 331 described later of the first movable portion 31. The other rib 312 is provided at a connection portion of the first movable portion 31 with a first beam portion 332 described later. In this way, by reinforcing the connecting portion of the first movable portion 31 with the first shaft portion 33 by the rib 312, dynamic deflection can be more effectively suppressed.

  Further, the rib 312 has a fan shape having an arc-shaped portion along the outer periphery of the first movable portion 31. However, the shape of the rib 312 is not particularly limited, and may vary depending on the shape of the first movable portion 31. For example, the rib 312 may have an arch shape in which a central portion of the fan shape is omitted.

  The second movable portion 32 has a frame shape, and is a plan view (hereinafter also simply referred to as “plan view”) viewed from the thickness direction of the structure 30 (the first movable portion 31 when stationary). One movable part 31 is provided so as to surround it. That is, the first movable part 31 is provided inside the second movable part 32. Here, the “frame shape” includes not only an annular shape as in the present embodiment but also a configuration in which a part of the frame in the circumferential direction is missing, for example, a C shape.

  A rib 321 is provided on the lower surface of the second movable portion 32. The rib 321 has a function as a reinforcing portion that reinforces the mechanical strength of the second movable portion 32. However, the rib 321 may be omitted. For example, when the mechanical strength of the second movable portion 32 is sufficient, there is an advantage that the inertia moment of the second movable portion 32 can be further reduced by omitting the rib 321.

  The support portion 35 has a frame shape and is provided surrounding the second movable portion 32 in plan view. That is, the second movable part 32 is provided inside the support part 35. Moreover, the support part 35 is formed thicker than the other parts (the first and second movable parts 31 and 32 and the first and second shaft parts 33 and 34). Thereby, the mechanical strength of the support part 35 can be increased, and the rigidity of the support part 35 can be increased. The configuration of the support portion 35 is not particularly limited as long as the second movable portion 32 can be supported via the second shaft portion 34. For example, the support portion 35 may not have a frame shape, and may be plural. It may be divided.

  The first shaft portion 33 supports the first movable portion 31 so as to be swingable about the first axis J1 with respect to the second movable portion 32. Such a first shaft portion 33 is provided so as to support the first movable portion 31 from both sides along the first axis J1. Specifically, the first shaft portion 33 is located on one side of the first movable portion 31, and is located on the other side of the first beam portion 331 extending along the first axis J1. A first beam portion 332 extending along J1, and the first movable portion 31 is supported at both ends by the first beam portions 331 and 332; Such a first shaft portion 33 is elastically deformable, and twists and deforms as the first movable portion 31 swings around the first axis J1.

  The second shaft portion 34 supports the second movable portion 32 so as to be swingable about the second axis J2 with respect to the support portion 35. Such a second shaft portion 34 is provided so as to support the second movable portion 32 from both sides along the second axis J2. Specifically, the second shaft portion 34 is located on one side of the second movable portion 32, is located on the other side with the second beam portion 341 extending along the second axis J2, and is disposed on the second shaft. And a second beam portion 342 extending along J2, and the second movable portion 32 is supported at both ends by the second beam portions 341 and 342. Such a second shaft portion 34 is elastically deformable, and twists and deforms as the second movable portion 32 swings around the second axis J2.

  The structure 30 has been described above. Such a structure 30 includes, for example, an SOI substrate [first silicon layer 30a (device layer), silicon oxide layer 30b (box layer), and second silicon layer 30c (handle layer) stacked in this order. The substrate] can be integrally formed by patterning by etching. Specifically, for example, the first and second movable portions 31 and 32 and the first and second shaft portions 33 and 34 are formed by the first silicon layer 30a, and the first silicon layer 30a, the silicon oxide layer 30b, and the first The support portion 35 can be formed by the two silicon layers 30c, and the ribs 312 and 321 can be formed by the silicon oxide layer 30b and the second silicon layer 30c. However, the structure 30 may not be formed from an SOI substrate, and the material is not limited to silicon.

  Next, the drive mechanism 39 will be described. The drive mechanism 39 is a mechanism that swings the first movable portion 31 around both the first axis J1 and the second axis J2. As described above, the drive mechanism 39 includes the permanent magnet 391 provided on the first movable portion 31. And a coil 392 that generates a magnetic field that acts on the permanent magnet 391, and a voltage application unit 393 connected to the coil 392.

  The permanent magnet 391 is fixed to the lower surface of the first movable portion 31 with an adhesive, for example. That is, the permanent magnet 391 is located on the opposite side to the light reflecting portion 311 with the first movable portion 31 interposed therebetween. Thereby, the light reflecting portion 311 can be arranged without being obstructed by the permanent magnet 391. In addition, as shown in FIG. 4, the permanent magnet 391 does not protrude from the first movable portion 31 in a plan view (a plan view seen from the overlapping direction of the first movable portion 31 and the permanent magnet 391). That is, the entire area of the permanent magnet 391 is included in the first movable portion 31 in plan view. Thereby, for example, the drawing laser LL that has fallen off the light reflecting portion 311 is less likely to hit the permanent magnet 391, and the generation of stray light can be suppressed. However, a part of the permanent magnet 391 may protrude from the first movable portion 31, and in this case, a measure for preventing stray light is taken, such as providing an antireflection film on the protruding portion. Just keep it.

  Such a permanent magnet 391 has a rod shape (longitudinal shape) in which one end side is an S pole and the other end side is an N pole, and both end portions (both poles) are opposite to the center of the first movable portion 31. It is arranged to be located on the side. Further, the permanent magnet 391 is disposed to be inclined with respect to both the first axis J1 and the second axis J2. Although not particularly limited, the direction of magnetization of the permanent magnet 391 (the direction of the magnetic lines passing through the permanent magnet 391: the direction indicated by the chain line a in FIG. 4) is 10 ° or more and 60 ° with respect to the first axis J1. It is preferable to incline within the following range, and it is more preferable to incline within the range of 30 ° or more and 45 ° or less. That is, θ in FIG. 4 is preferably 10 ° ≦ θ ≦ 60 °, and more preferably 30 ° ≦ θ ≦ 45 °. Thereby, the 1st movable part 31 and the 2nd movable part 32 can be rock | fluctuated around each axis | shaft more reliably.

  The permanent magnet 391 as described above is not particularly limited, and, for example, a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, a bonded magnet, or the like can be suitably used.

  Here, as described above, the pair of ribs 312 is provided on the lower surface of the first movable portion 31. The permanent magnet 391 is positioned by the rib 312. Specifically, as shown in FIG. 4, each of the pair of ribs 312 has a side surface 312a facing the side surface of the permanent magnet 391, and the permanent magnet 391 is brought close to or in contact with the side surface 312a. Thus, the permanent magnet 391 is positioned. Thus, by using the rib 312 for reinforcing the first movable portion 31 for positioning the permanent magnet 391, the permanent magnet 391 can be easily arranged at a correct position. In particular, in the present embodiment, a pair of ribs 312 is provided with the permanent magnet 391 interposed therebetween. Therefore, the permanent magnet 391 may be disposed between the pair of ribs 312 and the permanent magnet 391 can be easily disposed at a correct position. In the present embodiment, one permanent magnet 391 is arranged, but the present invention is not limited to this, and a plurality of permanent magnets may be arranged.

  As shown in FIG. 2, the coil 392 is located immediately below the permanent magnet 391 and is disposed to face the permanent magnet 391. The coil 392 is electrically connected to the voltage application unit 393. When a voltage is applied from the voltage application unit 393 to the coil 392, a magnetic field is generated from the coil 392, and this magnetic field is applied to the permanent magnet 391. It comes to work. Note that the coil 392 may have a magnetic core. In the illustrated configuration, the coil 392 is disposed below the permanent magnet 391, but is not limited thereto, and the coil 392 may be joined to the lower surface of the support portion 35, for example. However, it may be built in or integrated with the support portion 35. In other words, the coil 391 may be disposed as long as the permanent magnet 391 is positioned on the magnetic path of the lines of magnetic force generated by the coil 392.

  The voltage application unit 393 includes a first voltage for swinging the first movable unit 31 about the first axis J1, a second voltage for swinging the second movable unit 32 about the second axis J2, and Is applied to the coil 392. Accordingly, the second movable portion 32 can be swung around the second axis J2 while the first movable portion 31 is swung around the first axis J1, and as a result, the first movable portion 31 is moved to the first axis. It can be swung around both the axis J1 and the second axis J2.

  As shown in FIG. 5, the voltage application unit 393 includes a first voltage generation unit 393a (main scanning driver) that generates a first voltage V1 for swinging the first movable unit 31 around the first axis J1, and A second voltage generator 393b (sub-scanning driver) that generates a second voltage V2 for swinging the second movable part 32 about the second axis J2 is superimposed on the first voltage V1 and the second voltage V2. A voltage superimposing unit 393c, and a voltage superimposed by the voltage superimposing unit 393c is applied to the coil 392.

  The first voltage generator 393a generates a first voltage V1 (main scanning voltage) that periodically changes in a cycle T1. As shown in FIG. 6, the first voltage V1 is, for example, a sine wave. Moreover, it is preferable that the frequency of the 1st voltage V1 is 10-40 kHz, for example. The frequency of the first voltage V <b> 1 is set to be equal to the torsional resonance frequency of the first oscillating system mainly including the first movable portion 31 and the first shaft portion 33. Thereby, since the 1st movable part 31 can be rock | fluctuated by resonance around the 1st axis | shaft J1, the rocking | fluctuation angle of the 1st movable part 31 can be enlarged.

  On the other hand, the second voltage generator 393b generates a second voltage V2 (sub-scanning voltage) that periodically changes at a period T2 different from the period T1. The second voltage V2 is, for example, a sawtooth wave as shown in FIG. Moreover, it is preferable that the frequency of the 2nd voltage V2 is 30-120 Hz (especially about 60 Hz), for example. The frequency of the second voltage V2 is different from the torsional resonance frequency of the second oscillating system mainly including the first movable part 31, the first shaft part 33, the second movable part 32, and the second shaft part 34. Is set. As a result, the second movable portion 32 can be swung around the second axis J2 in a non-resonant manner, so that the swing of the second movable portion 32 can correspond to the waveform of the second voltage V2. (That is, it can be swung slowly to one side and quickly swung to the other side).

  When the torsional resonance frequency of the first oscillating system is f1 [Hz] and the torsional resonance frequency of the second oscillating system is f2 [Hz], the relationship f2 <f1 is preferably satisfied, and f2 ≦ f1 It is more preferable to satisfy the relationship of / 10. In this way, by sufficiently separating f1 and f2, it is possible to effectively suppress the second movable portion 32 from being swung by resonance by the first voltage V1.

  The voltage superimposing unit 393c includes an adder 393d for applying a voltage to the coil 392. The adder 393d receives the first voltage V1 from the first voltage generator 393a and the second voltage V2 from the second voltage generator 393b, and superimposes these voltages and applies them to the coil 392.

  When a superimposed voltage V obtained by superimposing the first voltage V1 and the second voltage V2 is applied to the coil 392, a magnetic field corresponding to the superimposed voltage V is generated from the coil 392, and this magnetic field acts on the permanent magnet 391. Then, the first movable portion 31 swings around the first axis J1, and the second movable portion 32 swings around the second axis J2. As a result, the first movable portion 31 moves to the first axis J1 and the first axis J1. It swings two-dimensionally around both axes of the two axes J2. In addition, since the permanent magnet 391 is provided in the 1st movable part 31, when the driving force is transmitted from the 1st movable part 31 to the 2nd movable part 32, the 2nd movable part 32 turns around the 2nd axis | shaft J2. It can be said that it swings. As described above, the driving force is transmitted from the first movable portion 31 to the second movable portion 32, so that the second movable portion 32 swings around the second axis J2 more efficiently. Therefore, the first movable part 31 can be swung around both the first axis J1 and the second axis J2 more reliably.

  Here, as described above, the first movable portion 31 swings around the first axis J1 with resonance, and the second movable portion 32 swings around the second axis J2 with no resonance. Therefore, the first movable portion 31 can be swung around the first axis J1 with a large swing angle, and can be swung around the second axis J2 with a desired waveform. Therefore, for example, the two-dimensional swing of the first movable portion 31 is suitable for image drawing, and a clearer image can be displayed.

  According to the optical scanner 3 as described above, since the permanent magnet 391 is provided in the first movable portion 31, compared with the configuration in which the conventional permanent magnet 391 is provided in the second movable portion 32. The mass of the first movable part 31 can be increased, and the mass of the second movable part 32 can be reduced. Therefore, the inertia moment of the 1st movable part 31 can be enlarged, and conversely, the inertia moment of the 2nd movable part 32 can be made small. The greater the moment of inertia, the greater the Q value of resonance vibration (the value that represents the ease with which resonance occurs, and the greater the Q value, the more likely resonance occurs). The Q value of the part 31 (first oscillating system) can be increased, and the Q value of the second movable part 32 (second oscillating system) that is oscillated non-resonantly can be decreased. Therefore, the second movable portion 32 can be swung around the second axis J2 in a non-resonant manner while the first movable portion 31 is swung around the first axis J1 with more certainty. Further, since the generation of the resonance vibration of the second movable part 32 is suppressed, it is possible to effectively suppress the resonance vibration from being superimposed on the second movable part 32 as an unnecessary vibration. The movable part 32 can be rocked more stably around the second axis J2.

  Since the image display apparatus 1 having the optical scanner 3 as described above can enjoy the effects of the optical scanner 3, it is an image display apparatus with high reliability.

Second Embodiment
Next, an optical scanner according to a second embodiment of the invention will be described.

  FIG. 8 is a plan view showing an optical scanner according to the second embodiment of the present invention. 9 is a cross-sectional view taken along line BB in FIG.

  Hereinafter, the optical scanner according to the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The optical scanner according to the second embodiment of the present invention is substantially the same as the first embodiment described above except that the configuration of the first movable portion is different. In addition, the same code | symbol is attached | subjected to the structure similar to embodiment mentioned above.

  As shown in FIGS. 8 and 9, the first movable portion 31 includes a base portion 31A to which the first shaft portion 33 is connected, and a plate-shaped mirror holding that is spaced from the base portion 31A in the plate thickness direction. It has a part 31B and a columnar connecting part 31C that is located between the base part 31A and the mirror holding part 31B and connects them. Further, the mirror holding portion 31B is provided so as to overlap a part of the base portion 31A and the first shaft portion 33 in plan view. A permanent magnet 391 is provided on the lower surface of the base portion 31A, and a light reflecting portion 311 is provided on the upper surface of the mirror holding portion 31B.

  According to such a configuration, for example, the following effects can be exhibited. That is, the base portion 31A can be made smaller than the first movable portion 31 of the first embodiment as much as it is not necessary to provide the light reflecting portion 311, and the planar size of the structure 30 is reduced accordingly. be able to. Further, since the mirror holding portion 31B is separated from the second movable portion 32 in the thickness direction, the mirror holding portion 31B can be enlarged without hindering the swinging of the second movable portion 32, Accordingly, the light reflecting portion 311 can be enlarged. Thus, according to the present embodiment, it is possible to reduce the size of the optical scanner 3 while increasing the size of the light reflecting portion 311.

  According to the second embodiment as described above, the same effect as that of the first embodiment described above can be exhibited.

<Third Embodiment>
Next, the head-up display of the present invention will be described.
FIG. 10 is a perspective view showing the head-up display of the present invention.

  As shown in FIG. 10, in the head-up display system 1000, the image display device 1 is mounted on the dashboard of the automobile so as to constitute the head-up display 1100. With the head-up display 1100, a predetermined image such as a guidance display to the destination can be displayed on the windshield 1200, for example. Note that the head-up display system 1000 can be applied not only to automobiles but also to aircrafts, ships, and the like.

  Such a head-up display 1100 has an image display device 1 (optical scanner 3). Therefore, the effect of the optical scanner 3 described above can be enjoyed, and a highly reliable head-up display 1100 can be obtained.

<Fourth embodiment>
Next, the head mounted display of the present invention will be described.
FIG. 11 is a perspective view showing the head mounted display of the present invention.

  As shown in FIG. 11, the head mounted display 2000 includes an image display device 1 (optical scanner 3), a frame 2100 that mounts the image display device 1 (optical scanner 3), and is attached to an observer's head. have. Then, the image display device 1 displays a predetermined image visually recognized by one eye on a display unit (light reflecting layer material) 2200 provided in a portion that is originally a lens of the frame 2100.

  Display unit 2200 may be transparent or opaque. When the display unit 2200 is transparent, information from the image display device 1 can be used by being superimposed on information from the real world. The display unit 2200 only needs to reflect at least part of incident light, and for example, a half mirror can be used.

  Such a head mounted display 2000 includes the image display device 1 (optical scanner 3). Therefore, the effect of the optical scanner 3 described above can be enjoyed, and a highly reliable head mounted display 2000 can be obtained. The configuration of the head-mounted display 2000 is not particularly limited. For example, the two image display devices 1 are provided on the head-mounted display 2000, and images that can be viewed with both eyes are displayed on the two display units 2200. You may make it do.

  The optical scanner, the image display device, the head mounted display, and the head up display of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is the same. It can be replaced with any configuration having the above function. In addition, any other component may be added to the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Image display apparatus, 10 ... Object, 11 ... Mirror, 2 ... Modulated light production | generation part, 21B, 21G, 21R ... Light source, 22B, 22G, 22R ... Drive circuit, 23 ... Photosynthesis part, 231, 232 ... Dichroic mirror 24B, 24G, 24R ... collimator lens, 26 ... condensing lens, 3 ... optical scanner, 30 ... structure, 30a ... first silicon layer, 30b ... silicon oxide layer, 30c ... second silicon layer, 31 ... first Movable part, 31A ... base part, 31B ... mirror holding part, 31C ... coupling part, 311 ... light reflecting part, 312 ... rib, 312a ... side face, 32 ... second movable part, 321 ... rib, 33 ... first shaft part, 331, 332: first beam portion, 34: second shaft portion, 341, 342 ... second beam portion, 35 ... support portion, 39 ... drive mechanism, 391 ... permanent magnet, 392 ... coil, 393 ... voltage application portion, 3 3a: first voltage generator, 393b: second voltage generator, 393c: voltage superposition unit, 393d: adder, 1000: head-up display system, 1100: head-up display, 1200: windshield, 2000: head-mounted display 2100 ... Frame, 2200 ... Display, J1 ... First axis, J2 ... Second axis, LL ... Drawing laser, T1, T2 ... Cycle, V ... Superimposed voltage, V1 ... First voltage, V2 ... Second voltage

Claims (13)

A first movable part including a light reflecting part having light reflectivity;
A frame-shaped second movable part in which the first movable part is located inside;
A first shaft portion that connects the first movable portion and the second movable portion, and supports the first movable portion so as to be swingable about a first axis;
A second shaft portion connected to the second movable portion and supporting the second movable portion so as to be swingable about a second axis intersecting the first axis;
A permanent magnet provided in the first movable part and magnetized in a direction inclined with respect to both the first axis and the second axis;
An optical scanner, wherein a magnetic field is applied to the permanent magnet, whereby the first movable part swings around the first axis, and the second movable part swings around the second axis.   The optical scanner according to claim 1, wherein a driving force is transmitted from the first movable part to the second movable part, whereby the second movable part swings around the second axis.   3. The optical scanner according to claim 1, wherein a direction of magnetization of the permanent magnet is inclined within a range of 10 ° to 60 ° with respect to the first axis.   The optical scanner according to claim 1, further comprising a rib provided on the first movable portion.   The optical scanner according to claim 4, wherein the rib is provided at a connection portion between the first movable portion and the first shaft portion.   The optical scanner according to claim 4, wherein the permanent magnet is positioned by the rib.   The optical scanner according to claim 4, wherein a pair of the ribs are provided with the permanent magnet interposed therebetween.   8. The optical scanner according to claim 1, wherein the permanent magnet does not protrude from the first movable part in a plan view as viewed from the overlapping direction of the first movable part and the permanent magnet. 9.   9. The optical scanner according to claim 1, wherein the permanent magnet is located on the opposite side of the light reflecting portion with the first movable portion interposed therebetween. The first movable part swings by resonance around the first axis,
The optical scanner according to claim 1, wherein the second movable portion swings around the second axis in a non-resonant manner.   An image display device comprising the optical scanner according to claim 1. An optical scanner according to any one of claims 1 to 10,
A head-mounted display comprising: a frame on which the optical scanner is mounted and which is mounted on an observer's head.   A head-up display comprising the optical scanner according to claim 1.

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