JP2020101588A - Movable device, distance measuring device, image projection device, vehicle, and seating - Google Patents

Abstract

To increase the angle of scanning of light by a movable device.SOLUTION: The movable device according to the technique of an embodiment of the disclosure includes: a movable unit having a reflection surface; a pair of drive beams, with the movable unit in between, the drive beams rotatably supporting the movable unit around a predetermined axis of rotation; a supporting unit supporting the pair of drive beams; and a seating unit including side wall members to which the supporting unit is fixed. The side wall members are located on both sides of the movable unit in the direction crossing the axis of rotation in a flat surface along the reflection surface when the movable unit is not rotating, and are provided with a light transmission unit for transmitting light reflected by the reflection surface.SELECTED DRAWING: Figure 27

Description

The present invention relates to a movable device, a distance measuring device, an image projection device, a vehicle, and a pedestal.

2. Description of the Related Art In recent years, with the development of micromachining technology to which semiconductor manufacturing technology is applied, development of MEMS (Micro Electro Mechanical Systems) devices manufactured by microfabrication of silicon or glass has been advanced.

As a MEMS device, a movable part having a reflecting surface and an elastic beam are integrally formed on a wafer, and the movable beam is driven (rotated) by a drive beam configured by stacking a thinned piezoelectric material on the elastic beam. Movable devices are known.

In addition, a movable device that scans the light reflected by the reflecting surface by rotating the movable portion, and includes a support frame that surrounds the movable portion and rotatably supports the movable portion, and the support frame is separated. Is disclosed (for example, see Patent Document 1).

By the way, in the case of a movable device including a support frame surrounding the movable part, since the movable part and the support frame are close to each other, when the rotation angle of the movable part becomes large, a part of the light scanned by the reflecting surface is partially supported by the support frame. There was a case where the scanning angle of light was restricted due to being blocked by. In the device described in Patent Document 1, the support frame is not separated in the direction intersecting the rotation axis, and the relationship between the separated position and the scan angle is not disclosed, so that the scan angle is limited. Can not be solved.

The present invention has been made in view of the above points, and an object thereof is to increase the scanning angle of light by a movable device.

A movable device according to an aspect of the disclosed technique includes: a movable portion having a reflecting surface; and a pair of drive beams that rotatably support the movable portion with a predetermined rotation axis with the movable portion interposed therebetween. A support portion that supports the pair of drive beams, and a pedestal portion that includes a side wall member to which the support portion is fixed are provided, and the support portion extends along the reflecting surface in a state where the movable portion is not rotated. A light passage portion that allows the light reflected by the reflection surface to pass is provided on the side wall member on both sides of the movable portion in the plane in the direction intersecting the rotation axis.

According to the disclosed technology, the scanning angle of light by the movable device can be increased.

1 is a schematic diagram of an example of an optical scanning system. It is a hardware block diagram of an example of an optical scanning system. It is a functional block diagram of an example of a control device. It is a flow chart of an example of processing concerning an optical scanning system. It is a schematic diagram of an example of a car carrying a head-up display device. It is a schematic diagram of an example of a head-up display device. FIG. 3 is a schematic view of an example of an image forming apparatus equipped with an optical writing device. It is a schematic diagram of an example of an optical writer. It is a schematic diagram of an example of a car carrying a lidar device. It is a schematic diagram of an example of a lidar device. It is a schematic diagram explaining an example of composition of a laser headlamp. It is a schematic perspective view which shows an example of a structure of a head mounted display. It is a figure which shows an example of a part of structure of a head mounted display. It is the schematic which shows an example of the packaged movable device. It is a top view when an example of a movable device is seen from the +Z direction. It is sectional drawing of the movable device described in FIG. 15, (a) is LL' sectional drawing of FIG. 15, (b) is NN' sectional drawing of FIG. 15, (c) is a figure. FIG. 15 is a sectional view taken along line MM′ of 15; It is a schematic diagram which represented typically the deformation|transformation of the drive beam of a movable device. (A) is an example of the waveform of the drive voltage A applied to the piezoelectric drive part group A of a movable device. (B) is an example of a waveform of the drive voltage B applied to the piezoelectric drive unit group B of the movable device. (C) is a diagram in which the waveform of the drive voltage in (a) and the waveform of the drive voltage in (b) are superimposed. It is a figure explaining the structure of the movable device of a comparative example, (a) is a top view, (b) is a PP' sectional drawing of (a) explaining the case where the deflection angle of a movable part is small. , (C) are sectional views taken along the line P-P' of (a) for explaining a case where the deflection angle of the movable portion is large. It is a top view explaining an example of composition of a movable device of modification 1 of a 1st embodiment. It is a top view explaining an example of composition of a movable device of modification 2 of a 1st embodiment. It is a figure explaining a mode that a movable part rotates according to bending deformation of a drive beam. It is a top view explaining an example of composition of a movable device of modification 3 of a 1st embodiment. It is a top view explaining an example of composition of a mobile of a 2nd embodiment. It is a top view explaining an example of composition of a moveable device of a 3rd embodiment. FIG. 26 is a sectional view taken along line QQ′ of FIG. 25. It is a perspective view explaining an example of composition of a moveable device of a 4th embodiment. It is a perspective view explaining an example of composition of a pedestal part of a 4th embodiment. It is a figure explaining an example of a mode when a movable part rotates. It is a flowchart which shows an example of the manufacturing method of the movable device of 4th Embodiment. 9A and 9B are perspective views illustrating an example of a method for manufacturing a movable device according to a fourth embodiment, FIG. 9A is a diagram illustrating an adhesive application step, FIG. 8B is a diagram illustrating a positioning member installation step, and FIG. FIG. 4A is a diagram illustrating a process of fixing the support portion to the pedestal portion, and FIG. 8D is a diagram illustrating a movable device after the manufacturing process is completed. It is a figure explaining an example of the modification of the movable device of a 4th embodiment.

Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In each drawing, the same reference numerals are given to the same components, and duplicate description may be omitted.

[Optical scanning system]
First, an optical scanning system to which the movable device according to the embodiment is applied will be described in detail with reference to FIGS.

FIG. 1 shows a schematic diagram of an example of the optical scanning system. As shown in FIG. 1, the optical scanning system 10 is a system that optically scans a surface 15 to be scanned by deflecting the light emitted from the light source device 12 under the control of the control device 11 by the reflecting surface 14 of the movable device 13. is there.

The optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13 having a reflecting surface 14.

The control device 11 is an electronic circuit unit including, for example, a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The movable device 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflective surface 14 and capable of moving the reflective surface 14. The light source device 12 is, for example, a laser device that emits a laser. The scanned surface 15 is, for example, a screen.

The control device 11 generates a control command for the light source device 12 and the movable device 13 based on the acquired optical scanning information, and outputs a drive signal to the light source device 12 and the movable device 13 based on the control command.

The light source device 12 irradiates the light source based on the input drive signal. The movable device 13 moves the reflecting surface 14 in at least one of the uniaxial direction and the biaxial direction based on the input drive signal.

As a result, for example, by the control of the control device 11 based on the image information which is an example of the optical scanning information, the reflecting surface 14 of the movable device 13 is reciprocally moved in the biaxial direction within a predetermined range and is incident on the reflecting surface 14. By deflecting the irradiation light from the light source device 12 around a certain axis and scanning the light, an arbitrary image can be projected on the surface 15 to be scanned. The details of the movable device of the embodiment and the control by the control device will be described later.

Next, a hardware configuration of an example of the optical scanning system 10 will be described with reference to FIG. FIG. 2 is a hardware configuration diagram of an example of the optical scanning system 10. As shown in FIG. 2, the optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13, which are electrically connected to each other. Of these, the control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23, an external I/F 24, a light source device driver 25, and a movable device driver 26.

The CPU 20 is an arithmetic device that reads programs and data from a storage device such as the ROM 22 onto the RAM 21 and executes processing to realize the overall control and functions of the control device 11.

The RAM 21 is a volatile storage device that temporarily holds programs and data.

The ROM 22 is a non-volatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10. There is.

The FPGA 23 is a circuit that outputs a control signal suitable for the light source device driver 25 and the movable device driver 26 according to the processing of the CPU 20.

The external I/F 24 is an interface with, for example, an external device or a network. The external device includes, for example, a host device such as a PC (Personal Computer) and a storage device such as a USB memory, an SD card, a CD, a DVD, an HDD, and an SSD. The network is, for example, a CAN (Controller Area Network) of a car, a LAN (Local Area Network), the Internet, or the like. The external I/F 24 may have a configuration that enables connection or communication with an external device, and the external I/F 24 may be prepared for each external device.

The light source device triber is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 according to the input control signal.

The movable device driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the movable device 13 in accordance with the input control signal.

In the control device 11, the CPU 20 acquires optical scanning information from an external device or a network via the external I/F 24. It should be noted that the CPU 20 may be configured to acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or the FPGA 23 in the control device 11, or the control device 11 may be newly provided with an SSD or the like. A storage device may be provided and the optical scanning information may be stored in the storage device.

Here, the optical scanning information is information indicating how the surface to be scanned 15 is optically scanned. For example, when an image is displayed by optical scanning, the optical scanning information is image data. Further, for example, when optical writing is performed by optical scanning, the optical scanning information is write data indicating the writing order and the writing location. In addition, for example, when the distance measurement is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and the irradiation range of the distance measuring light.

The control device 11 can realize the functional configuration described below by the instruction of the CPU 20 and the hardware configuration shown in FIG.

Next, the functional configuration of the control device 11 of the optical scanning system 10 will be described with reference to FIG. FIG. 3 is a functional block diagram of an example of a control device of the optical scanning system.

As shown in FIG. 3, the control device 11 has a control unit 30 and a drive signal output unit 31 as functions.

The control unit 30 is realized by, for example, the CPU 20, the FPGA 23, and the like, acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs the control signal to the drive signal output unit 31. For example, the control unit 30 acquires image data as optical scanning information from an external device or the like, generates a control signal from the image data by a predetermined process, and outputs the control signal to the drive signal output unit 31.

The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, and the like, and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. For example, in the light source device 12, it is a drive voltage that controls the irradiation timing and irradiation intensity of the light source. Further, for example, in the movable device 13, it is a drive voltage for controlling the timing and the movable range in which the reflecting surface 14 of the movable device 13 is moved.

Next, a process in which the optical scanning system 10 optically scans the surface 15 to be scanned will be described with reference to FIG. FIG. 4 is a flowchart of an example of processing related to the optical scanning system.

In step S11, the control unit 30 acquires optical scanning information from an external device or the like.

In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31.

In step S13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the movable device 13 based on the input control signal.

In step 14, the light source device 12 irradiates light based on the input drive signal. The movable device 13 also moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, light is deflected in an arbitrary direction and optically scanned.

In the optical scanning system 10, one control device 11 has a device and a function for controlling the light source device 12 and the movable device 13. However, a control device for the light source device and a control device for the movable device, It may be provided separately.

Further, in the above optical scanning system 10, one control device 11 is provided with the functions of the control unit 30 of the light source device 12 and the movable device 13 and the function of the drive signal output unit 31, but these functions exist separately. Alternatively, the drive signal output device having the drive signal output unit 31 may be provided separately from the control device 11 having the control unit 30, for example. In the above optical scanning system 10, the movable device 13 having the reflecting surface 14 and the control device 11 may constitute an optical deflection system for performing optical deflection.

[Image projection device]
Next, an image projection device to which the movable device according to the embodiment is applied will be described in detail with reference to FIGS. 5 and 6.

FIG. 5 is a schematic diagram according to an embodiment of an automobile 400 equipped with a head-up display device 500, which is an example of an image projection device. Further, FIG. 6 is a schematic view of an example of the head-up display device 500.

The image projection device is a device that projects an image by optical scanning, and is, for example, a head-up display device.

As shown in FIG. 5, the head-up display device 500 is installed, for example, near a windshield (a windshield 401 or the like) of an automobile 400 which is an example of a “vehicle”. The projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and travels to the observer (driver 402) who is the user. Accordingly, the driver 402 can visually recognize the image projected by the head-up display device 500 as a virtual image. A combiner may be installed on the inner wall surface of the windshield to allow the user to visually recognize the virtual image by the projection light reflected by the combiner.

As shown in FIG. 6, the head-up display device 500 emits laser light from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incident optical system including collimating lenses 502, 503, 504 provided for each laser light source, two dichroic mirrors 505, 506, and a light amount adjusting unit 507, and It is deflected by the movable device 13 having the reflecting surface 14. Then, the deflected laser light is projected on the screen through a projection optical system including a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511. In the head-up display device 500, the laser light sources 501R, 501G and 501B, the collimating lenses 502, 503 and 504, and the dichroic mirrors 505 and 506 are unitized by the optical housing as the light source unit 530.

The head-up display device 500 projects the intermediate image displayed on the intermediate screen 510 onto the windshield 401 of the automobile 400 to cause the driver 402 to visually recognize the intermediate image as a virtual image.

The laser light of each color emitted from the laser light sources 501R, 501G, 501B is made into substantially parallel light by the collimating lenses 502, 503, 504, respectively, and is combined by the two dichroic mirrors 505, 506. The combined laser light is two-dimensionally scanned by the movable device 13 having the reflecting surface 14, after the light amount is adjusted by the light amount adjusting unit 507. The projection light L two-dimensionally scanned by the movable device 13 is reflected by the free-form surface mirror 509 to correct the distortion, and then is condensed on the intermediate screen 510 to display an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are two-dimensionally arranged, and magnifies the projection light L incident on the intermediate screen 510 in units of microlenses.

The movable device 13 reciprocally moves the reflecting surface 14 in two axial directions, and two-dimensionally scans the projection light L incident on the reflecting surface 14. The drive control of the movable device 13 is performed in synchronization with the emission timing of the laser light sources 501R, 501G, and 501B.

The head-up display device 500 as an example of the image projection device has been described above, but the image projection device may be any device that projects an image by performing optical scanning with the movable device 13 having the reflecting surface 14. .. For example, a projector placed on a desk or the like, which projects an image on a display screen, or a mounting member mounted on an observer's head or the like, is projected on a reflection/transmission screen of the mounting member, or an eyeball is used as a screen. The present invention can be similarly applied to a head mounted display device that projects an image.

Further, the image projection device is not limited to the vehicle and the mounting member, and is, for example, a moving body such as an aircraft, a ship, or a mobile robot, or a work robot that operates a driving target such as a manipulator without moving from the place. It may be mounted on a non-moving body.

[Optical writing device]
Next, an optical writing device to which the movable device 13 of the embodiment is applied will be described in detail with reference to FIGS. 7 and 8.

FIG. 7 is an example of an image forming apparatus incorporating the optical writing device 600. FIG. 8 is a schematic diagram of an example of the optical writing device.

As shown in FIG. 7, the optical writing device 600 is used as a constituent member of an image forming apparatus represented by a laser printer 650 or the like having a printer function using laser light. In the image forming apparatus, the optical writing device 600 performs optical writing on the photosensitive drum by optically scanning the photosensitive drum, which is the surface to be scanned 15, with one or a plurality of laser beams.

As shown in FIG. 8, in the optical writing device 600, the laser light from the light source device 12 such as a laser element passes through an image forming optical system 601 such as a collimator lens, and then is moved by the movable device 13 having the reflecting surface 14 It is deflected axially or biaxially. Then, the laser light deflected by the movable device 13 then passes through a scanning optical system 602 including a first lens 602a, a second lens 602b, and a reflection mirror section 602c, and then a surface to be scanned 15 (for example, a photosensitive drum or a photosensitive paper). ) To perform optical writing. The scanning optical system 602 forms a light beam in a spot shape on the surface 15 to be scanned. The movable device 13 having the light source device 12 and the reflecting surface 14 is driven under the control of the control device 11.

As described above, the optical writing device 600 can be used as a constituent member of an image forming apparatus having a printer function using laser light. Further, by making the scanning optical system different so that the optical scanning can be performed not only in the one-axis direction but also in the two-axis direction, the laser beam is deflected to the thermal medium, optically scanned, and heated to print a laser label device. Can be used as a constituent member of the image forming apparatus.

The movable device 13 having the reflecting surface 14 applied to the above-mentioned optical writing device consumes less power for driving than a rotary polygon mirror using a polygon mirror or the like. It is advantageous. Further, since the wind noise when the movable device 13 vibrates is smaller than that of the rotary polygon mirror, it is advantageous for improving the quietness of the optical writing device. The optical writing device requires a much smaller installation space than the rotary polygon mirror, and the amount of heat generated by the movable device 13 is small, so that the optical writing device can be easily downsized, which is advantageous for downsizing the image forming apparatus. is there.

[Distance measuring device]
Next, a distance measuring device to which the movable device of the above embodiment is applied will be described in detail with reference to FIGS. 9 and 10.

FIG. 9 is a schematic diagram of an automobile equipped with a LiDAR (Laser Imaging Detection and Ranging) device which is an example of a distance measuring device. Further, FIG. 10 is a schematic diagram of an example of a lidar device.

The distance measuring device is a device that measures the distance in the target direction, and is, for example, a lidar device.

As shown in FIG. 9, the lidar device 700 is mounted on, for example, an automobile 701, which is an example of a “vehicle”, optically scans a target direction, and receives reflected light from a target object 702 existing in the target direction. Thus, the distance of the object 702 is measured.

As shown in FIG. 10, the laser light emitted from the light source device 12 is reflected by an incident optical system including a collimator lens 703, which is an optical system that makes divergent light into substantially parallel light, and a plane mirror 704. The movable device 13 having the surface 14 scans in a uniaxial or biaxial direction. Then, the object 702 in front of the apparatus is irradiated with light through a light projecting lens 705 which is a light projecting optical system. The drive of the light source device 12 and the movable device 13 is controlled by the control device 11. The reflected light reflected by the object 702 is detected by the photodetector 709. That is, the reflected light is received by the image sensor 707 through the condenser lens 706, which is an incident light detection and light receiving optical system, and the image sensor 707 outputs a detection signal to the signal processing circuit 708. The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal, and outputs the result to the distance measuring circuit 710.

The distance measuring circuit 710 uses the time difference between the timing at which the light source device 12 emits the laser light and the timing at which the photodetector 709 receives the laser light, or the phase difference for each pixel of the image pickup element 707 that receives the object. The presence or absence of 702 is recognized, and the distance information to the object 702 is calculated.

Since the movable device 13 having the reflecting surface 14 is less likely to be damaged than the polygon mirror and is small in size, it is possible to provide a small radar device having high durability. Such a lidar device is attached to, for example, a vehicle, an aircraft, a ship, a robot, or the like, and can optically scan a predetermined range to measure the presence or absence of an obstacle and the distance to the obstacle. The mounting position of the rider device 700 is not limited to the front of the upper part of the automobile 701 and may be mounted on the side or the rear.

In the above distance measuring device, the lidar device 700 as an example has been described. However, the distance measuring device performs optical scanning by controlling the movable device 13 having the reflecting surface 14 by the control device 11, and uses the photodetector. The device is not limited to the above-described embodiment as long as it is a device that measures the distance of the object 702 by receiving the reflected light.

For example, the object information such as the shape is calculated from the distance information obtained by optically scanning the hand or face, and the object is recognized by referring to the record, and the invading object is recognized by the optical scanning to the object range. Similarly, it can be applied to a security sensor, a constituent member of a three-dimensional scanner that calculates and recognizes object information such as a shape from distance information obtained by optical scanning, and outputs it as three-dimensional data.

[Laser headlamp]
Next, a laser headlamp 50 in which the movable device of the above embodiment is applied to a headlight of an automobile will be described with reference to FIG. FIG. 11 is a schematic diagram illustrating an example of the configuration of the laser headlamp 50.

The laser headlamp 50 includes a control device 11, a light source device 12b, a movable device 13 having a reflecting surface 14, a mirror 51, and a transparent plate 52.

The light source device 12b is a light source that emits blue laser light. The light emitted from the light source device 12b enters the movable device 13 and is reflected by the reflecting surface 14. The movable device 13 moves the reflection surface in the XY directions based on the signal from the control device 11, and two-dimensionally scans the blue laser light from the light source device 12b in the XY directions.

The scanning light from the movable device 13 is reflected by the mirror 51 and enters the transparent plate 52. The transparent plate 52 has a front surface or a back surface covered with a yellow phosphor. When the blue laser light from the mirror 51 passes through the coating of the yellow phosphor on the transparent plate 52, it changes to white within the range legally stipulated as the color of the headlight. As a result, the front of the vehicle is illuminated with white light from the transparent plate 52.

The scanning light from the movable device 13 is scattered a predetermined amount when passing through the phosphor of the transparent plate 52. As a result, glare on the illumination target in front of the vehicle is reduced.

When the movable device 13 is applied to an automobile headlight, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. For example, the light source device 12b may be near-ultraviolet light, and the transparent plate 52 may be covered with a mixture of the phosphors of the three primary colors of light, that is, blue, green, and red. Even in this case, the light passing through the transparent plate 52 can be converted to white, and the front of the vehicle can be illuminated with white light.

[Head mounted display]
Next, a head mounted display 60 to which the movable device according to the above embodiment is applied will be described with reference to FIGS. Here, the head-mounted display 60 is a head-mounted display that can be mounted on a human head, and may have a shape similar to glasses, for example. The head mounted display is abbreviated as HMD hereinafter.

FIG. 12 is a perspective view illustrating the appearance of the HMD 60. In FIG. 12, the HMD 60 is composed of a front 60a and a temple 60b which are provided substantially symmetrically one by one on the left and right. The front 60a can be configured by, for example, the light guide plate 61, and the optical system, the control device, and the like can be built in the temple 60b.

FIG. 13 is a diagram partially illustrating the configuration of the HMD 60. Note that FIG. 13 illustrates the configuration for the left eye, but the HMD 60 has the same configuration for the right eye.

The HMD 60 includes a control device 11, a light source unit 530, a light amount adjustment unit 507, a movable device 13 having a reflection surface 14, a light guide plate 61, and a half mirror 62.

As described above, the light source unit 530 is a unit in which the laser light sources 501R, 501G, and 501B, the collimating lenses 502, 503, and 504, and the dichroic mirrors 505 and 506 are unitized by an optical housing. In the light source unit 530, the laser lights of three colors from the laser light sources 501R, 501G, and 501B are combined by the dichroic mirrors 505 and 506. The combined parallel light is emitted from the light source unit 530.

The light from the light source unit 530 is incident on the movable device 13 after the light amount is adjusted by the light amount adjusting unit 507. The movable device 13 moves the reflecting surface 14 in the XY directions based on the signal from the control device 11, and two-dimensionally scans the light from the light source unit 530. The drive control of the movable device 13 is performed in synchronization with the emission timing of the laser light sources 501R, 501G, and 501B, and a color image is formed by the scanning light.

The scanning light from the movable device 13 enters the light guide plate 61. The light guide plate 61 guides the scanning light to the half mirror 62 while reflecting the scanning light on the inner wall surface. The light guide plate 61 is formed of a resin or the like that is transparent to the wavelength of the scanning light.

The half mirror 62 reflects the light from the light guide plate 61 to the back side of the HMD 60 and emits the light toward the eye of the wearer 63 of the HMD 60. The half mirror 62 has, for example, a free-form surface shape. An image formed by the scanning light is focused on the retina of the wearer 63 by being reflected by the half mirror 62. Alternatively, an image is formed on the retina of the wearer 63 due to the reflection at the half mirror 62 and the lens effect of the crystalline lens in the eyeball. In addition, the spatial distortion of the image is corrected by the reflection on the half mirror 62. The wearer 63 can observe the image formed by the light scanned in the XY directions.

Since 62 is a half mirror, the wearer 63 observes the image formed by the light from the outside and the image formed by the scanning light in a superimposed manner. By providing a mirror instead of the half mirror 62, it is possible to eliminate the light from the outside and to observe only the image by the scanning light.

[Packaging]
Next, packaging of the movable device according to the embodiment will be described with reference to FIG.

FIG. 14 is a schematic diagram of an example of a packaged movable device.

As shown in FIG. 14, the movable device 13 is mounted on a mounting member 802 arranged inside the package member 801, and a part of the package member 801 is covered with a transparent member 803 to be hermetically sealed. To be done. Further, the package is sealed with an inert gas such as nitrogen. As a result, deterioration of the movable device 13 due to oxidation is suppressed, and the durability against changes in the environment such as temperature is further improved.

[First Embodiment]
The movable device of the first embodiment used in the optical deflection system, the optical scanning system, the image projection device, the optical writing device, and the distance measuring device described above will be described.

<Structure of the movable device of the first embodiment>
The configuration of the movable device according to the first embodiment will be described with reference to FIGS. 15 and 16.

FIG. 15 is a plan view of a both-end-type movable device that can deflect light in one axis direction. 16 is a cross-sectional view of the movable device. (a) is a LL′ cross-sectional view of FIG. 15, (b) is a MM′ cross-sectional view of FIG. 15, and (c) is a N-N of FIG. 15. 'It is a sectional view.

As shown in FIG. 15, the movable device 13 includes a rectangular reflecting surface 14 that reflects incident light, a movable portion 120 on which the reflecting surface 14 is formed, and a movable portion 120. Drive beams 130a and 130b for driving the part 120 around an E axis parallel to the X axis, a support part 140 for supporting the drive beam, and an electrode connection part 150 electrically connected to the drive beam and the control device. ..

In addition, a wiring portion 123 for transmitting a current or voltage signal applied via the electrode connecting portion 150 is provided on a region other than the reflecting surface 14 on the movable portion 120 surface and on the driving beam 130 a and 130 b surfaces. There is.

Here, the E-axis is an example of a “rotating shaft”, and the drive beams 130a and 130b are an example of “a pair of drive beams”. Further, although FIG. 15 shows an example in which the reflecting surface 14 is a rectangular reflecting surface, the present invention is not limited to this, and the reflecting surface may have another shape such as a circle or an ellipse. Good.

The movable device 13 is formed by, for example, molding one SOI (Silicon On Insulator) substrate by etching or the like, and the reflecting surface 14, the piezoelectric driving units 131a to 131d, 132a to 132d, the electrode connecting unit 150, etc. on the molded substrate. By forming the above, each component is integrally formed. Note that the above-described components may be formed after the SOI substrate is molded or may be formed during the molding of the SOI substrate. The piezoelectric drive units 131a to 131d and 132a to 132d are examples of "beam portions".

In the SOI substrate, a silicon oxide layer is provided on a first silicon layer made of single crystal silicon (Si), and a second silicon layer made of single crystal silicon is further provided on the silicon oxide layer. The substrate. Hereinafter, the first silicon layer will be referred to as a silicon support layer, and the second silicon layer will be referred to as a silicon active layer.

Since the silicon active layer has a small thickness in the Z-axis direction with respect to the X-axis direction or the Y-axis direction, the member composed of only the silicon active layer has a function as an elastic portion having elasticity.

Note that the SOI substrate does not necessarily have to be planar and may have a curvature or the like. The member used for forming the movable device 13 is not limited to the SOI substrate as long as it is a substrate that can be integrally formed by etching or the like and can have elasticity partially.

As shown in FIG. 16A, the movable portion 120 includes a silicon active layer 121, an interlayer insulating film 122 formed on the +Z side surface of the silicon active layer 121, and a +Z side surface of the interlayer insulating film 122. The wiring portion 123 and the protective film 124 are formed, and the reflection surface 14 is formed on the +Z side surface of the protective film 124. Further, the movable portion 120 has a BOX (Buried Oxide) layer 125 on the −Z side surface of the silicon active layer 121 and a silicon support layer 126 formed on the −Z side surface of the BOX layer 125. ing.

The interlayer insulating film 122 is made of silicon oxide or the like, the wiring portion 123 is made of aluminum (Al) or the like, the protective film 124 is made of silicon oxide or photosensitive polyimide, and the reflecting surface 14 is made of aluminum, gold, silver. It is composed of a metal thin film including the above. The protective film 124 is transparent.

The BOX layer 125 is made of silicon oxide or the like. The BOX layer 125 and the silicon support layer 126 can act as reinforcing ribs that suppress the distortion of the reflecting surface 14 caused by the movement.

In addition, as shown in FIG. 16B, the support 140 is a support that includes a silicon support layer 161, a silicon oxide layer 162, a silicon active layer 163, and the like, and that sandwiches the movable section 120 and the drive beams 130a and 130b. is there.

However, as shown in FIG. 15, the support portion 140 is arranged in the Y direction in the drawing (the direction intersecting the E axis in the plane along the reflecting surface 14 when the movable portion 120 is not rotated). Light passing portions 16 and 17 are provided on both sides of the movable portion 120 so that a part of the support portion 140 is opened (removed) and the light reflected by the reflecting surface 14 passes when the movable portion 120 rotates.

By providing the light passage portions 116 and 17, the portion of the support portion 140 connected to the drive beam 130 a and the portion of the support portion 140 connected to the drive beam 130 b sandwich the light passage portions 116 and 17. It has a separate structure.

In addition, the light passage portions 116 and 17 are formed in a shape in which the width in the direction along the E-axis increases in a taper shape with increasing distance from the E-axis.

In addition, in the present embodiment, an example in which the supporting portion 140 is a frame-shaped supporting body including the light passing portions 116 and 17 is shown, but the supporting portion 140 is not limited to this. If the light passing portions 116 and 17 are provided, the support portion 140 may be a beam-shaped support body that sandwiches the movable portion 120 and the drive beams 130a and 130b with two beams.

Further, in the above-described example, the light passage portions 16 and 17 are shown to have a shape in which the width in the direction along the E axis increases in a taper shape with increasing distance from the E axis, but the present invention is not limited to this. It is not something that will be done. The shapes of the light passing portions 16 and 17 may be arbitrary as long as the light reflected by the reflecting surface 14 can pass when the movable portion 120 rotates.

Furthermore, in the above-described example, the light passage portions 16 and 17 are formed by opening (removing) a part of the support portion 140, but the present invention is not limited to this. For example, a member (transparent member) that is transparent to the light reflected by the reflecting surface 14 constitutes both sides of the movable portion 120 of the support 140, and the light reflected by the reflecting surface 14 is transmitted through the transparent member. May be. In other words, the light passing portions 16 and 17 include not only a light passing portion but also a light transmitting portion that allows the light reflected by the reflecting surface 14 to pass through the transparent member.

Next, the drive beams 130a and 130b are composed of a plurality of piezoelectric drive units 131a to 131d and 132a to 132d connected so as to be folded back, and one ends of the drive beams 130a and 130b are connected to the outer peripheral portion of the movable unit 120. The other end is connected to the inner peripheral part of the support part 140. At this time, the connection point between the drive beam 130a and the movable section 120, the connection point between the drive beam 130b and the movable section 120, the connection point between the drive beam 130a and the support section 140a, and the connection point between the drive beam 130b and the support section 140b are , Is symmetrical with respect to the center of the reflecting surface 14.

As shown in FIG. 16C, the drive beams 130a and 130b have the interlayer insulating film 122, the lower electrode 201, the piezoelectric portion 202, the upper electrode 203, and the interlayer on the +Z side surface of the silicon active layer 121 that is the elastic portion. The insulating film 204, the wiring part 123, and the protective film 124 are formed in this order.

The upper electrode 203 and the lower electrode 201 are made of, for example, gold (Au) or platinum (Pt). The piezoelectric portion 202 is made of, for example, PZT (lead zirconate titanate) which is a piezoelectric material.

The electrode connecting portion 150 has a positive electrode connecting portion 150a to which a positive voltage is applied, a GND connecting portion 150b to be connected to GND, and a negative electrode connecting portion 150c to which a negative voltage is applied, each of which is It is formed on the +Z side surface of the support 140.

The electrode connecting portion 150 is electrically connected to the upper electrodes 203 and the lower electrodes 201 of the piezoelectric driving portions 131a to 131d and 132a to 132d via the wiring portion 123, and also via electrode wiring such as aluminum. It is electrically connected to the control device 11. The upper electrode or the lower electrode may be directly connected to the electrode connecting portion, or may be indirectly connected by connecting the electrodes to each other.

The wiring portion 123 has a positive voltage wiring portion 123a for transmitting a positive voltage signal, a GND wiring portion 123b connected to GND, and a negative voltage wiring portion 123c for transmitting a negative voltage signal. The positive voltage wiring portion 123a is connected to the positive electrode connecting portion 150a, the GND wiring portion 123b is connected to the GND connecting portion 150b, and the negative voltage wiring portion 123c is connected to the negative electrode connecting portion 150c.

More specifically, the GND wiring part 123b is connected to the upper electrodes 203 of the piezoelectric drive parts 131a to 131d and 132a to 132d. Further, the positive voltage wiring part 123a is connected to the lower electrodes 201 of the piezoelectric driving parts 132d, 132b, 131a, and 131c, and a positive voltage signal can be transmitted to these to apply a positive driving voltage. In this case, the positive voltage wiring part 123a passes through the piezoelectric drive parts 132c, 132a, 131b, and 131d without being connected to the lower electrode 201.

On the other hand, the negative voltage wiring part 123c is connected to the lower electrodes 201 of the piezoelectric driving parts 132c, 132a, 131b, and 131d, and a negative voltage signal can be transmitted to these to apply a negative driving voltage. In this case, the negative voltage wiring portion 123c passes through the piezoelectric driving portions 132d, 132b, 131a, and 131c without being connected to the lower electrode 201.

In this way, the wiring part 123 can transmit the voltage signal applied via the electrode connecting part 150 to the piezoelectric driving parts 131a to 131d and 132a to 132d to apply the driving voltage. The wiring portion 123 may transmit a current signal instead of the voltage signal.

The operation of the piezoelectric drive unit by applying the drive voltage will be described separately with reference to FIG.

Here, in the interlayer insulating film 204 provided with the wiring portion 123, the insulating film is partially removed or an insulating film is formed as an opening portion only in a connection spot where the upper electrode 203 or the lower electrode 201 and the electrode wiring are connected. It may be configured not to. As a result, the degree of freedom in designing the drive beams 130a and 130b and the electrode wiring can be increased, and a short circuit due to contact between electrodes can be suppressed. The silicon oxide film forming the interlayer insulating film 204 and the like also has a function as an antireflection material.

Note that, in the present embodiment, the case where the piezoelectric portion 202 is formed only on one surface (the surface on the +Z side) of the silicon active layer 121 that is the elastic portion has been described as an example, but the other surface of the elastic portion (for example, -Z). It may be provided on one surface and the other surface of the elastic portion.

Further, the shape of each component is not limited to the shape of the embodiment as long as the movable portion 120 can be driven around the E axis.

<Control Method of Mobile Device of First Embodiment>
Next, details of the control of the control device that drives the drive beam of the movable device will be described.

When a positive or negative voltage is applied in the polarization direction, the piezoelectric portion 202 of the drive beams 130a and 130b is deformed (for example, expanded or contracted) in proportion to the potential of the applied voltage, and exhibits a so-called inverse piezoelectric effect. The drive beams 130a and 130b move the movable part 120 by utilizing the above-mentioned inverse piezoelectric effect.

At this time, an angle formed by the reflecting surface 14 and the XY plane when the reflecting surface 14 of the movable portion 120 is tilted in the +Z direction or the −Z direction with respect to the XY plane is called a deflection angle. At this time, the +Z direction is a positive deflection angle and the −Z direction is a negative deflection angle.

The control of the control device for driving the drive beam will be described with reference to FIG.

FIG. 17 is a schematic diagram schematically showing driving of the drive beam 130b of the movable device 13. The movable portion 120 and the like are represented by dotted lines. The right direction toward the paper surface is the +X direction, the upward direction toward the paper surface is the +Y direction, and the front side is the +Z direction.

As shown in FIG. 17A, the deflection angle due to the drive beam is zero when the drive voltage is not applied to the drive beam 130b.

Among the plurality of piezoelectric drive units 131a to 131d included in the drive beam 130a, even-numbered piezoelectric drive units, that is, the piezoelectric drive units 131b and 131d counting from the piezoelectric drive unit (131a) closest to the movable unit 120, are piezoelectrically driven. Group A. Further, among the plurality of piezoelectric drive units 132a to 132d included in the drive beam 130b, an odd-numbered piezoelectric drive unit counting from the piezoelectric drive unit (132a) closest to the movable unit 120, that is, the piezoelectric drive units 132a and 132c. Is similarly defined as a piezoelectric drive unit group A. When the drive voltage is applied in parallel (simultaneously) to the piezoelectric drive unit group A, the piezoelectric drive unit group A is bent and deformed in the same direction as shown in FIG. 17B, and the movable unit 120 is moved in the −Z direction. Moves around the E axis.

In addition, among the plurality of piezoelectric drive units 131a to 131d included in the drive beam 130a, an odd-numbered piezoelectric drive unit, that is, the piezoelectric drive units 131a and 131c counting from the piezoelectric drive unit (131a) closest to the movable unit 120, is provided. A piezoelectric drive unit group B is used. Further, among the plurality of piezoelectric drive units 132a to 132d included in the drive beam 130b, even-numbered piezoelectric drive units, that is, 132b and 132d, counting from the piezoelectric drive unit (132a) closest to the movable unit 120, are the same. And a piezoelectric drive unit group B. When a driving voltage is applied in parallel to the piezoelectric drive unit group B, the piezoelectric drive unit group B bends and deforms in the same direction as shown in FIG. 17D, and the movable unit 120 moves around the E axis in the +Z direction. Move to.

As shown in FIGS. 17B and 17D, in the drive beam 130a or 130b, the plurality of piezoelectric sections 202 included in the piezoelectric drive section group A or the plurality of piezoelectric sections 202 included in the piezoelectric drive section group B are simultaneously bent and deformed. By doing so, the movable amount due to bending deformation can be accumulated, and the swing angle of the movable portion 120 around the E axis can be increased.

For example, as shown in FIG. 15, the drive beams 130a and 130b are connected to the movable portion 120 in point symmetry with respect to the center point of the movable portion 120. Therefore, when a drive voltage is applied to the piezoelectric drive unit group A, a drive force for moving the movable portion 120 and the drive beam 130a in the +Z direction is generated at the connection portion between the movable portion 120 and the drive beam 130a, and a drive beam 130b causes the movable portion 120 and the drive beam 130b to move. A driving force for moving the connecting portion in the −Z direction is generated, and the movable amount is accumulated, so that the swing angle of the movable portion 120 around the E axis can be increased.

Further, as shown in FIG. 17C, when the movable amount of the movable unit 120 by the piezoelectric driving unit group A by voltage application and the movable amount of the movable unit 120 by the piezoelectric drive group B by voltage application are balanced, shake The angle is zero.

The movable portion 120 can be driven around the E axis by applying a drive voltage to the piezoelectric drive portion so as to continuously repeat FIGS. 17B to 17D.

The drive voltage applied to the drive beam is controlled by the controller.

The drive voltage applied to the piezoelectric drive unit group A (hereinafter, drive voltage A) and the drive voltage applied to the piezoelectric drive unit group B (hereinafter, drive voltage B) will be described with reference to FIG.

FIG. 18A is an example of a waveform of the drive voltage A applied to the piezoelectric drive unit group A of the movable device 13. FIG. 18B is an example of the waveform B of the drive voltage applied to the piezoelectric drive unit group B of the movable device. FIG. 18C is a diagram in which the waveform of the drive voltage A and the waveform of the drive voltage B are superimposed.

As shown in FIG. 18A, the drive voltage A applied to the piezoelectric drive unit group A is, for example, a drive voltage having a sawtooth waveform, and the frequency is, for example, 60 HZ. Further, the waveform of the drive voltage A is TrA, which is the time width of the rising period in which the voltage value increases from the minimum value to the next maximum value, and the falling period in which the voltage value decreases from the maximum value to the next minimum value. When the time width of TfA is TfA, for example, a ratio of TrA:TfA=9:1 is set in advance. At this time, the ratio of TrA to one cycle is called symmetry of the drive voltage A.

As shown in FIG. 18B, the drive voltage B applied to the piezoelectric drive unit group B is, for example, a drive voltage having a sawtooth waveform, and the frequency is, for example, 60 HZ. The waveform of the drive voltage B is TrB, which is the time width of the rising period in which the voltage value increases from the minimum value to the next maximum value, and the falling period in which the voltage value decreases from the maximum value to the next minimum value. When the time width of TfB is TfB, for example, a ratio of TfB:TrB=9:1 is set in advance. At this time, the ratio of TfB to one cycle is called the symmetry of the drive voltage B. Further, as shown in FIG. 18C, for example, the cycle TA of the waveform of the drive voltage A and the cycle TB of the waveform of the drive voltage B are set to be the same.

The sawtooth waveforms of the drive voltage A and the drive voltage B are generated by superposition of sine waves. Further, in the embodiment, the drive voltage of the sawtooth waveform is used as the drive voltages A and B, but the drive voltage is not limited to this, and the drive voltage of the waveform with the apex of the sawtooth waveform or the sawtooth waveform is used. It is also possible to change the waveform according to the device characteristics of the movable device, such as a drive voltage having a waveform with a linear region as a curve.

<Effects of the movable device according to the first embodiment>
Next, the effect of the movable device of the present embodiment will be described. First, the movable device of the comparative example will be described.

19A and 19B are diagrams illustrating a configuration of a movable device of a comparative example, FIG. 19A is a plan view, and FIG. 19B illustrates a case where a swing angle of a movable portion is small. It is sectional drawing, (c) is PP' sectional drawing of (a) explaining the case where a deflection angle of a movable part is large.

As shown in FIG. 19A, in the movable device 300 of the comparative example, the movable portion 320 including the reflecting surface 314, the support portion 340 that supports the movable portion 320 to be rotatable about the E axis, and the electrode connection portion. And 350.

FIG. 19B shows a state in which the incident light 301 is incident on the reflecting surface 314 of the movable portion 320 in the −Z direction and is reflected by the reflecting surface 314 of the rotated movable portion 320. In this case, since the deflection angle (rotation angle) of the movable portion 320 is small, the reflected light of the reflection surface 314 is not blocked by the support portion 340 that is present on the +Y side of the movable portion 320.

Similarly, FIG. 19C also shows that the incident light 301 is incident on the reflecting surface 314 of the movable portion 320 in the −Z direction and is reflected by the reflecting surface 314 of the rotated movable portion 320. In this case, since the swing angle of the movable portion 320 is large, the reflected light of the reflection surface 314 is blocked by the support portion 340 that is present on the +Y side of the movable portion 320.

As described above, in the movable device 300 of the comparative example, when the deflection angle of the movable portion 320 becomes large, the supporting portion 340 existing on the ±Y side of the movable portion 320 blocks the reflected light of the reflecting surface 314, so that the movable portion is movable. The scanning angle of light by 320 is limited, and a large scanning angle cannot be obtained.

On the other hand, in the present embodiment, as described above, in the support portion 140, in the plane along the reflecting surface 14 when the movable portion 120 is not rotated, the direction intersecting the E axis (see the figure). Light passing portions 16 and 17 are provided on both sides of the movable portion 120 in the ±Y direction of 19. Since no member such as a support portion exists on the ±Y side of the movable portion 120, even if the deflection angle of the movable portion 120 becomes large, the reflected light of the reflecting surface 14 is not blocked. Thereby, the scanning angle of the light of the movable part 120 is not limited, and a large scanning angle can be obtained.

When the movable device 13 is used in the distance measuring device such as the LiDAR device described in FIGS. 9 to 10, the movable device 13 scans the laser beam in the horizontal direction and spreads (diverges) the laser beam in the vertical direction. As a result, an object in front of the vehicle may be detected in a two-dimensional plane that intersects the traveling direction of the vehicle. In this case, when the deflection angle of the movable part 120 becomes large, the laser beam that spreads in the X direction parallel to the E axis may be blocked by the support part 140, and the spread angle may be limited.

On the other hand, in the present embodiment, as described with reference to FIG. 15, the light passage portions 16 and 17 are formed in a shape in which the width in the direction along the E axis becomes wider as the distance from the E axis increases. ing. Since the light passage portions 16 and 17 have a shape in which the width is tapered wide along the light that spreads in the ±X directions, it is possible to relax the limitation on the spread angle of the light in the ±X directions.

On the other hand, like the movable device 300 shown in FIG. 19A, in order to apply the drive voltage to the drive beams provided at the positions in the ±X direction with the movable portion 320 interposed, the E axis of the support portion 340 is applied. The electrode connecting portion 350 may be provided on one side portion having the longitudinal direction as the longitudinal direction. In this case, the reflected light of the reflection surface 314 may be blocked by the side portion of the support portion 340 provided with the electrode connection portion 350, and the light scanning angle by the movable portion 320 may be limited.

On the other hand, in the present embodiment, the wiring portion 123 that transmits the current or voltage signal applied via the electrode connection portion 150 is provided in the regions other than the reflective surface 14 on the movable portion 120 and the drive beams 130a and 130b. Provided on each drive beam. As a result, even when the electrode connecting portion 150 is provided on the side portion having the longitudinal direction in the direction intersecting the E axis of the supporting portion 140 (see FIG. 15), the electrode connecting portion 150 is provided at the positions in the ±X direction with the movable portion 120 interposed therebetween. A drive voltage can be applied to both drive beams 130a and 130b. Since it is not necessary to dispose a member such as a support portion on the ±Y side of the movable portion 120, a large scanning angle can be obtained without limiting the light scanning angle of the movable portion 120.

Further, by providing the wiring portion 123, unevenness may be formed on the surface of the movable portion 120. Therefore, when the wiring portion 123 is formed in the area where the reflecting surface 14 is provided, the light incident on the reflecting surface 14 is diffused by the unevenness of the wiring portion 123, and the reflection of the light on the reflecting surface 14 is disturbed. There are cases. Therefore, in the present embodiment, as shown in FIG. 16A, the wiring portion 123 is formed on the surface of the movable portion 120 in the area near the outer periphery where the reflection surface 14 is not provided (the area other than the reflection surface). doing. This prevents the reflection of light on the reflecting surface 14 from being hindered. Further, in the present embodiment, since the wiring portion 123 is covered with the protective film 124, it is possible to prevent a short circuit due to adhesion of dust or water on the conductor, a disconnection due to contact with a member, or the like.

<Modification>
Next, a modified example of the first embodiment will be described. The description of the same components as those in the above-described embodiments may be omitted.

Here, in the movable devices of the modified examples and the embodiments described below, the movable part 120 and the wiring part 123 on the drive beams 130a and 130b are provided as in the movable device 13 of the first embodiment. However, these illustrations are omitted below for the sake of clarity.

(Modification 1)
In the first modification, an example will be described in which the light passage portion is formed in a shape in which the width in the direction along the E axis widens non-linearly as the distance from the E axis increases.

20: is a top view explaining an example of a structure of the movable device of the modified example 1. FIG. As shown in FIG. 20, the movable device 13a has a movable portion 120 in the Y direction (a direction intersecting the E axis in a plane along the reflecting surface 14 when the movable portion 120 is not rotated) in the drawing. Has support portions 140a provided with the light passage portions 16a and 17a on both sides of the support portion 140a.

The light passage portions 16a and 17a are formed in a shape in which the width in the direction along the E axis widens non-linearly as the distance from the E axis increases. In other words, as shown by the curved surface portion 141 in FIG. 20, the width in the direction along the E axis is formed in a shape in which the width of the curved surface becomes wider as the distance from the E axis increases.

Here, when the movable device is arranged in a device such as a LiDAR device, the movable device is fixed to the base of the LiDAR device by adhesion or the like, with the surface of the support portion as a fixed portion. Therefore, when the area of the support portion is small, the contact area between the fixed portion and the base is small, and thus the adhesive strength is reduced, and the fixing stability may be lacking.

When the support part 140 includes the light passage parts 16 and 17 as in the movable device 13 of the first embodiment, the adhesion area of the support part 140 is reduced by the area of the light passage parts 16 and 17.

Therefore, in this modification, the widths of the light passage portions 16a and 17a in the direction along the E-axis are formed to have a shape that widens non-linearly as the distance from the E-axis increases. The adhesive area of 140 is increased.

Accordingly, when the deflection angle of the movable portion 120 becomes large, the light passing portions 16a and 17a prevent the reflected light from being blocked by the support portion 140a, and the adhesion area of the support portion 140a to the base is increased. It is possible to secure and improve the stability of fixing the movable device 13a.

Further, by making the shape to widen non-linearly as it goes away from the E-axis, even if the beam spot shape of the laser light on the reflecting surface 14 is a curved surface or an elliptical shape, the reflected light is blocked by the supporting portion 140a. While avoiding the above, it is possible to secure the adhesion area of the support portion 140a to the base and improve the stability of the movable device 13a.

(Modification 2)
21: is a top view explaining an example of a structure of the movable device of the modified example 2. FIG. As shown in FIG. 21, the movable device 13b has a drive beam 133a and a drive beam 133b.

The drive beams 133a and 133b include a meandering beam (meander structure) in which a plurality of piezoelectric drive portions each having a length in a direction intersecting with the E axis are connected at a folded portion, and the piezoelectric drive portions 134a and 134a adjacent to the movable portion 120 are provided. The portion 134b is connected to the movable portion 120 at one end side in the direction intersecting with the E axis, and cutout shapes 20a and 20b including a straight portion are formed at the other end side in the direction intersecting with the E axis.

Here, FIG. 22 is a diagram for explaining the manner in which the movable portion 120 of the movable device 13 rotates in accordance with the bending deformation of the drive beam 130b, as described with reference to FIG. When the movable portion 120 rotates, the portion of the piezoelectric drive portion 132a adjacent to the movable portion 120 that is connected to the movable portion 120 moves together with the movable portion 120, but the portion that is not connected to the movable portion 120 moves. It may move away from section 120. In this case, the other end portion 21, which is on the opposite side of the one end side where the piezoelectric drive portion 132a is connected to the movable portion 120, has the longest distance from the movable portion 120. When the movable portion 120 is separated from the movable portion 120, a part of the other end portion 21 may enter the optical path of the reflected light on the reflecting surface 14 of the movable portion 120 and block the reflected light.

In this modification, the other end 21 is formed with the cutout shapes 20a and 20b to prevent the other end 21 from blocking the light reflected by the reflecting surface 14. Accordingly, it is possible to suppress the limitation of the scanning angle of the light of the movable section 120 and obtain a large scanning angle. In addition, although the cutout shapes 20a and 20b include the linear portions in FIG. 21, the cutout shapes may include the curved portions.

(Modification 3)
FIG. 23 is a plan view illustrating an example of the configuration of the movable device of Modification 3. As shown in FIG. 23, the movable device 13c has a drive beam 135a and a drive beam 135b.

As described in Modification 2, a part of the other end 21 of the piezoelectric drive unit adjacent to the movable unit 120 may enter the optical path of the reflected light of the reflective surface 14 of the movable unit 120 and block the reflected light. ..

Therefore, in the present modification, the drive beams 135a and 135b include a meandering beam in which a plurality of piezoelectric drive portions each having a length in a direction intersecting with the E axis are connected by a folded portion, and the piezoelectric drive portions adjacent to the movable portion 120 are provided. The distance 21a between the movable portion 120 and the portion 136a is larger than the distance 22a between the adjacent piezoelectric driving portions, and the distance 21b between the piezoelectric driving portion 136b and the movable portion 120 adjacent to the movable portion 120 is adjacent to the piezoelectric driving portion. It is made larger than the interval 22b between them. As a result, a part of the other end portion 21 of the piezoelectric drive unit adjacent to the movable unit 120 is suppressed from blocking the reflected light of the reflective surface 14 of the movable unit 120. Then, it is possible to suppress the limitation of the scanning angle of the light of the movable portion 120 and obtain a large scanning angle. The intervals 22a and 22b between the adjacent piezoelectric drive units are examples of the "interval between the beam portions".

[Second Embodiment]
Next, the movable device of the second embodiment will be described with reference to FIG. The description of the same components as those of the above-described embodiment may be omitted.

FIG. 24 is a plan view illustrating an example of the configuration of the movable device according to this embodiment. As shown in FIG. 24, the movable device 13d has a support portion 140d and a movable portion 120d.

The support portion 140d includes light passing portions 16d and 17d on both sides of the movable portion 120d in the direction intersecting the E axis within a plane along the reflecting surface 14 when the movable portion 120 is not rotated. There is. The light passage portions 16d and 17d are formed such that the width of the light passage portions 16d and 17d in the direction along the E axis is larger than the width of the movable portion 120d in the direction along the E axis.

Further, the outer peripheral surface 120pa of the movable portion 120d along the E axis and the outer peripheral surface 140pa of the supporting portion 140d along the E axis are formed in a parallel (flat) state without a step. In other words, the outer peripheral surface 120pa and the outer peripheral surface 140pa are formed so as to be arranged in the same plane.

Similarly, the outer peripheral surface 120pb of the movable portion 120d along the E axis and the outer peripheral surface 140pb of the supporting portion 140d along the E axis are formed in a parallel state without a step. In other words, the outer peripheral surface 120pa and the outer peripheral surface 140pa are formed so as to be arranged in the same plane. However, this “state without steps and parallel state” does not mean a state in which there are no steps, but steps that are generally recognized as processing errors are allowed.

The outer peripheral surface 120pa is an example of the “first movable portion outer peripheral surface”, and the outer peripheral surface 140pa is an example of the “first support portion outer peripheral surface”. The outer peripheral surface 120pb is an example of the “second movable portion outer peripheral surface”, and the outer peripheral surface 140pb is an example of the “second support portion outer peripheral surface”.

With this configuration, since members such as a support portion do not exist on the ±Y side of the movable portion 120d, the reflected light of the reflecting surface 14 is not blocked even if the deflection angle of the movable portion 120d becomes large. Absent. Thereby, the scanning angle of the light of the movable part 120d is not limited, and a large scanning angle can be obtained.

Further, since the parallel state without steps is a state in which it is easy to process by a processing method such as etching, the processing efficiency can be increased and the productivity of the movable device 13d can be improved.

Furthermore, since the movable part 120d and the support part 140 can be made the same size in the direction intersecting the E axis (Y direction), the size of the movable device 13d can be reduced, or the size of the reflecting surface 14 can be increased.

By reducing the size of the movable device 13d, the degree of freedom in arranging the movable device 13d can be increased. In addition, since the material forming the movable device 13d can be reduced, the cost of the movable device 13d can be reduced, and the number of movable devices 13d that can be manufactured from one wafer substrate can be increased. Can be improved.

On the other hand, by increasing the size of the reflecting surface 14, it is possible to prevent the incident light from deviating from the reflecting surface 14 due to the vibration of the movable device 13d or the like.

The effects other than those described above are the same as those described in the first embodiment.

[Third Embodiment]
Next, the configuration of the movable device according to the third embodiment will be described with reference to FIGS. 25 and 26. FIG. 25 is a plan view illustrating an example of the configuration of the movable device according to this embodiment. 26 is a cross-sectional view taken along the line QQ' of FIG.

The movable device 13e has a movable portion 120e and drive beams 110a and 110b for driving the movable portion 120e around an E axis parallel to the X axis. In addition, on the surface of the movable portion 120e other than the reflection surface 14e and on the surfaces of the drive beams 110a and 110b, the wiring portion 127 that transmits a current or voltage signal applied via the electrode connection portion 150. Is provided. Here, the drive beams 110a and 110b are examples of “a pair of drive beams”.

The movable portion 120e has a base and a reflecting surface 14e formed on the +Z side surface of the base. The base is composed of a silicon active layer 163 and the like. The reflecting surface 14e is made of a metal thin film containing aluminum, gold, silver or the like. Further, the movable portion 120e may have a rib for reinforcing the reflection surface 14e formed on the −Z side surface of the base body. The rib is composed of the silicon support layer 161 and the silicon oxide layer 162, and can suppress the distortion of the reflecting surface 14e caused by the movement. Although the reflecting surface 14e has been described as an example having a circular shape, it may have another shape such as an ellipse or a rectangle.

One end of each of the drive beams 110a and 110b is connected to the movable portion 120e, and each of the torsion bars 111a and 111b extends in the E-axis direction and rotatably supports the movable portion 120e, and one end on the +X side is the torsion bar 111a. To the torsion bar 111b and one end on the -X side is connected to the torsion bar 111b, and the other end is connected to the inner peripheral part of the support part 140. It is composed of piezoelectric drive units 112b and 113b connected to each other.

The torsion bars 111a and 111b are composed of a silicon active layer 163 and the like. The piezoelectric driving units 112a, 113a, 112b, and 113b are formed by sequentially forming the lower electrode 201, the piezoelectric unit 202, and the upper electrode 203 on the +Z side surface of the silicon active layer 163 that is the elastic unit.

The upper electrode 203 and the lower electrode 201 are made of gold, platinum or the like. The piezoelectric section 202 is made of PZT or the like, which is a piezoelectric material.

Note that, in the present embodiment, the case where the piezoelectric portion 202 is formed only on one surface (the surface on the +Z side) of the silicon active layer 163 that is the elastic portion has been described as an example, but the other surface of the elastic portion (for example, -Z). It may be provided on one surface and the other surface of the elastic portion.

Further, the shape of each component is not limited to the shape of this embodiment as long as the movable portion 120e can be driven around the E axis. The torsion bars 111a and 111b and the piezoelectric driving units 112a, 113a, 112b, and 113b may have a curved shape.

The wiring portion 127 has a positive voltage wiring portion 127a for transmitting a positive voltage signal, a GND wiring portion 127b connected to GND, and a negative voltage wiring portion 127c for transmitting a negative voltage signal. The positive voltage wiring portion 127a is connected to the positive electrode connecting portion 150a, the GND wiring portion 127b is connected to the GND connecting portion 150b, and the negative voltage wiring portion 127c is connected to the negative electrode connecting portion 150c.

More specifically, the GND wiring part 127b is connected to the respective upper electrodes 203 of the piezoelectric driving parts 112a, 113a, 112b, and 113b. Further, the positive voltage wiring part 127a is connected to the lower electrodes 201 of the piezoelectric driving parts 112a and 112b, and a positive voltage signal can be transmitted to these to apply a positive driving voltage.

On the other hand, the negative voltage wiring part 127c is connected to the lower electrodes 201 of the piezoelectric driving parts 113a and 113b, and a negative voltage signal can be transmitted to these to apply a negative driving voltage.

In this way, the wiring unit 127 can transmit the voltage signal applied via the electrode connection unit 150 to the piezoelectric driving units 112a, 113a, 112b, and 113b, and apply the driving voltage. The wiring unit 127 may transmit a current signal instead of the voltage signal.

The operation and the like of the piezoelectric drive unit by applying the drive voltage are the same as those of the drive beams 130a and 130b described above.

In the present embodiment, in the support portion 140, the movable portion in the direction intersecting the E axis (±Y direction in FIG. 25) in the plane along the reflecting surface 14e when the movable portion 120e is not rotated. Light passing portions 16 and 17 are provided on both sides of 120e, respectively. Since no member such as a support portion exists on the ±Y side of the movable portion 120e, the reflected light of the reflecting surface 14e is not blocked even if the deflection angle of the movable portion 120e becomes large. Thereby, the scanning angle of the light of the movable part 120e is not limited, and a large scanning angle can be obtained.

Further, the respective effects of the light passing parts 16 and 17, the electrode connecting part 150, and the wiring part 127 are the same as those described in the first embodiment.

[Fourth Embodiment]
<Structure of Movable Device of Fourth Embodiment>
Next, the movable device of the fourth embodiment will be described with reference to FIGS. 27 to 32. First, FIG. 27 is a perspective view illustrating an example of the configuration of the movable device according to the present embodiment.

As shown in FIG. 27, the movable device 13f has a pedestal portion 70, and the movable device 13e of the third embodiment is fixed to the +Z side surface of the pedestal portion 70. However, the movable device 13f may be configured by fixing the movable devices 13, 13a, 13b, 13c, and 13d described in the above embodiment to the +Z side surface of the pedestal portion 70. Hereinafter, the movable device 13f will be described as including the movable device 13e as a part of the configuration. The movable device 13e fixed to the pedestal portion 70 is an example of the “light deflection element”.

FIG. 28 is a perspective view illustrating an example of the configuration of the pedestal portion. As shown in FIG. 28, the pedestal portion 70 has side wall members 71 a and 71 b and a bottom member 72. Here, the pedestal portion 70 is an example of a “pedestal”.

The side wall member 71a is a member having a U-shaped cross section orthogonal to the Z axis, and the open side of the U-shape faces the +X direction so that the +Z side of the bottom member 72, which is a plate-shaped member, is provided. It is fixed to the surface by adhesion or the like. Similarly, the side wall member 71b is also a member having a U-shaped cross section orthogonal to the Z-axis, and is bonded to the +Z-side surface of the bottom member 72 so that the open side of the U-shaped faces the −X direction. It is fixed.

However, the side wall members 71a and 71b and the bottom member 72 may be integrated members. When a metal material is used, such a member can be manufactured by casting, cutting, metal injection molding, or the like. When a resin-based material is used, such a member can be manufactured by injection molding, a 3D printer, or the like.

The side wall members 71a and 71 can fix the support portion 140 of the movable device 13e on the +Z side surface. Here, the +Z side surfaces of the side wall members 71a and 71b are an example of “one end surface”, and the −Z side surfaces of the side wall members 71a and 71 are an example of “the other end surface”.

The side wall member 71a and the side wall member 71b are arranged with a space in the X direction, whereby a light passage portion 73 is formed on the −Y side of the pedestal portion 70, and a light passage portion on the +Y side of the pedestal portion 70. 74 are formed. The light passage portions 73 and 74 are an example of a light passage portion that opens a part of the side wall members including the side wall members 71a and 71b, respectively.

Here, FIG. 29 is a diagram illustrating an example of a state in which the movable portion 120e rotates (drives). In FIG. 29, the movable device 13e is fixed to the +Z side surfaces of the side wall members 71a and 71b. The movable portion 120e of the movable device 13e rotates around the E axis, and the light incident on the reflecting surface 14e in the direction indicated by the thick solid arrow 81 is reflected by the reflecting surface 14e in the direction indicated by the thick broken arrow 82. There is.

By forming the light passage portions 73 and 74 on the ±Y side of the pedestal portion 70, as shown in FIG. 29, there is no member that blocks the reflected light of the reflecting surface 14e on the ±Y side of the movable portion 120e. Become. As a result, a space for passing the light reflected by the reflecting surface 14e is secured. Further, by fixing the supporting portion 140 to the +Z side surfaces of the side wall members 71a and 71b, a space for allowing the reflected light of the reflecting surface 14e to pass through within a predetermined angle range is secured on the −Z side of the movable portion 120e. ing.

In this way, the light passing portions 73 and 74 can pass the reflected light of the reflecting surface 14e even when the movable portion 120e is largely rotated. In addition, in order to pass the reflected light of the reflecting surface 14e, it is preferable that the widths of the light passing portions 73 and 74 in the X direction be wider than the width of the reflecting surface 14e in the X direction.

Further, in the present embodiment, the example in which the U-shaped members are used as the side wall members 71a and 71b has been shown, but the present invention is not limited to this. A flat plate member or the like may be used for at least one of the side wall members 71a and 71b as long as the light passage portions 73 and 74 can be formed.

<The manufacturing method of the movable device of 4th Embodiment>
Next, a method of manufacturing the movable device 13f will be described with reference to FIGS. 30 and 31.

FIG. 30 is a flowchart showing an example of a method of manufacturing the movable device 13f. 31A and 31B are perspective views illustrating an example of a method of manufacturing the movable device 13f, FIG. 31A illustrates an adhesive application step, FIG. 31B illustrates a positioning member installation step, and FIG. FIG. 8A is a diagram illustrating a step of fixing the movable device 13e to the pedestal portion, and FIG. 8D is a diagram illustrating the movable device after the manufacturing process is completed. In the description of FIGS. 30 and 31, the pedestal portion 70 is already assembled, and the movable device 13e fixed to the pedestal portion 70 is already processed by the etching process of the SOI substrate or the like as described above. I shall.

In FIG. 30, first, in step S301, the adhesive 75 is applied to the +Z side surface of the pedestal portion 70 (side wall members 71a and 71b) (see FIG. 31(a)). As the adhesive 75, a conductive metal paste such as a silver paste or a thermosetting adhesive such as an epoxy resin adhesive or a silicone resin adhesive can be used. Silicone is a compound obtained by reducing silicon dioxide to silicon, and then binding an organic compound, and has both organic and inorganic characteristics.

Subsequently, in step S303, the positioning member 76 is installed so as to come into contact with at least three of the ±X side surfaces and the ±Y side surfaces of the pedestal portion 70. In this case, as shown in FIG. 31B, a part of the surface of each positioning member 76 in the Z direction is brought into contact with the surfaces of the side wall members 71a and 71b of the pedestal part 70, and the other parts of the Z direction are rearward. It is necessary to keep the surfaces of the side wall members 71a and 71b of the pedestal portion 70 out of contact so that the outer peripheral surface of the support portion 140 of the movable device 13e can be abutted in the step of. In order to adjust the height of the positioning member 76 in the Z direction, a block member or the like whose height in the Z direction is defined may be prepared, and the positioning member 76 may be installed on the block member or the like.

Returning to FIG. 30, the description will be continued.

In step S305, the support portion 140 is placed on the +Z side surface of the pedestal portion 70 while abutting the outer peripheral surface of the support portion 140 of the movable device 13e against the surface of the positioning member 76 (see FIG. 31C). As a result, the movable device 13f is in a temporary arrangement state.

Then, in step S307, the positioning member 76 is removed.

Subsequently, in step S309, the movable device 13f in the temporarily arranged state is installed in the heat treatment furnace and heated. As a result, the support portion 140 of the movable device 13e is bonded and fixed to the +Z side surface of the pedestal portion 70.

Subsequently, in step S311, the movable device 13f is taken out of the heat treatment furnace.

In this way, the movable device 13f can be manufactured.

<Effect of Mobile Device of Fourth Embodiment>
As described above, in the present embodiment, by providing the light passage portions 73 and 74 on the ±Y side of the pedestal portion 70, the light is reflected within a predetermined angle range of the ±Y side and the −Z side of the movable portion 120e. There is no member that blocks the reflected light from the surface 14e. As a result, even if the deflection angle of the movable portion 120e becomes large, the reflected light of the reflecting surface 14 is not blocked, so that the scanning angle of the light of the movable portion 120e is not limited and a large scanning angle can be obtained. .. For example, in the case where the light scanning angle by the reflecting surface 14e is set to an angle range of 180 degrees from the −Y direction to the +Y direction in FIG. 29, in the present embodiment, a scanning angle of 180 degrees or more can be realized. ..

On the other hand, when the movable device 13f is manufactured or used, the movable device 13e included in the movable device 13f may expand or contract in the X direction due to a temperature change around the movable device 13f. In addition, the bottom member 72 of the pedestal portion 70 may expand or contract in the X direction depending on the ambient temperature change. In this case, if there is a difference in the expansion rate or the contraction rate between the movable device 13e and the bottom member 72, stress is generated at the place where the two are bonded, and the movable part 120e cannot rotate as desired. There are cases.

On the other hand, in the present embodiment, the bottom member 72 is made of the same material as that of the support portion 140 of the movable device 13e, the movable portion 120e, and the drive beams 110a and 110b, or a material having a similar thermal expansion coefficient. There is. Thereby, the difference in the expansion rate or the contraction rate in the X direction between the support member 140, the movable portion 120e, and the drive beams 110a and 110b and the bottom member 72 due to the temperature change around the movable device 13f is reduced, The movable part 120e can be rotated as desired.

Specifically, since the support portion 140, the movable portion 120e, and the drive beams 110a and 110b of the movable device 13e are made of Si as described above, the bottom member 72 has the same Si or thermal expansion. It is preferable to use Tempax glass having a coefficient close to Si as a material.

Alternatively, the entire pedestal portion 70 may be made of a material having a small thermal expansion coefficient. Specifically, a material having a linear thermal expansion coefficient of 0.0 to 5.0 (10 ⁻⁶ /K) in a temperature range of 293 K (Kelvin) to 2473 K is suitable. When the side wall members 71a and 71b are integrally formed with the bottom member 72, silicon or Tempax glass or the like is cut to manufacture a member in which the side wall members 71a and 71b and the bottom member 72 are integrated. You may. Further, a member having the side wall members 71a and 71b and the bottom member 72 integrated may be manufactured by casting or cutting a metal having a low coefficient of thermal expansion (Invar or the like).

<Modification>
Here, FIG. 32 is a diagram illustrating an example of a modification of the movable device according to the fourth embodiment.

In the movable device 13g, the inclined surface 74g is formed on the surface of the side wall member 71a forming the light passage portion 74. Further, the inclined surface 74g is formed such that the width in the X-axis direction of the light passage portion 74 becomes wider as the distance from the E-axis increases.

Similarly, the side wall member 71b forming the light passing portion 74, the surface of the side wall member 71a forming the light passing portion 73, and the surface of the side wall member 71b forming the light passing portion 73 are also provided with inclined surfaces, respectively. There is.

With this configuration, it is possible to prevent light reflected by the reflecting surface 14e that spreads in the ±X directions from being blocked by the pedestal portion, and thus it is possible to suppress restrictions on the spread angle and obtain a large scanning angle.

Further, the light passing portions 16 and 17 described in the first to third embodiments are connected or filled with a light-transmitting optical material such as glass or a transparent resin material to block the reflected light from the reflecting surface 14e. It is possible to obtain a large scanning angle. In the first to third embodiments, a decrease in rigidity of the movable device caused by providing the light passing portions 16 and 17 is suppressed, and positions such as a distance between the opposing support portions 140 separated by the light passing portions 16 and 17 are suppressed. It is possible to prevent changes in relationships. This makes it possible to easily handle the movable device in the packaging step of adhering the movable device to the package member.

Further, by connecting or filling the light passing portions 73 and 74 described in the fourth embodiment with a light transmitting optical material such as glass or a transparent resin material, the light reflected by the reflecting surface 14e is not blocked. A large scanning angle can be obtained. A decrease in rigidity of the movable device caused by providing the light passing portions 73 and 74 is suppressed, and a change in the positional relationship such as a distance between the side wall members 71a and 71b facing each other separated by the light passing portions 73 and 74 is suppressed. Can be prevented. This makes it possible to easily handle the movable device in the packaging step of adhering the movable device to the package member.

Although the example of the embodiment of the present invention has been described above, the present invention is not limited to such a specific embodiment, and various modifications are possible within the scope of the gist of the present invention described in the claims. It can be modified and changed.

10 Optical Scanning System 11 Control Device 12, 12b Light Source Device 13, 13a, 13b, 13c, 13d, 13e, 13f, 13g Movable Device 14, 14e Reflective Surface 15 Scanned Surface 16, 16a, 17, 17a Light Passing Portion 20a, 20b Notch shape 21a, 21b Interval between piezoelectric drive section and movable section adjacent to movable section 22a, 22b Interval between adjacent piezoelectric drive sections (an example of interval between beam sections)
25 light source device driver 26 movable device driver 30 control unit 31 drive signal output unit 50 laser head lamp 51 mirror 52 transparent plate 60 head mount display 60a front 60b temple 61 light guide plate 62 half mirror 63 wearer 70, 70g pedestal part (of pedestal) One case)
71a, 71b Side wall member 72 Bottom member 73, 74 Light passage part 74g Inclined surface 75 Adhesive 76 Positioning member 110a, 110b Drive beam (an example of a pair of drive beams)
111a, 111b Torsion bar 112a, 112b, 113a, 113b Piezoelectric drive part 120, 120d, 120e Movable part 120pa, 120pb Outer peripheral surface 121 along the rotation axis of the movable part 121 Silicon active layer 122 Interlayer insulating film 123, 127 Wiring part 124 Protective film 125 BOX layer 126 Silicon support layers 130a, 130b Driving beams (an example of a pair of driving beams)
134a, 134b Piezoelectric drive parts 140, 140a, 140d adjacent to the movable part, Support parts 140pa, 140pb Outer peripheral surface 141 along the rotation axis of the support part 141 Curved part 150 Electrode connection part 161 Silicon support layer 162 Silicon oxide layer 163 Silicon Active layer 201 Lower electrode 202 Piezoelectric unit 203 Upper electrode 204 Interlayer insulating film 400 Automobile (an example of vehicle)
500 Head-up display device (an example of an image projection device)
650 laser printer 700 lidar device (an example of distance measuring device)
701 automobile (an example of vehicle)
702 Target object 801 Package member 802 Mounting member 803 Transparent member E axis One example of rotation axis

Japanese Patent No. 3552601

Claims (8)

A movable part having a reflective surface,
A pair of drive beams that rotatably support the movable portion around a predetermined rotation axis with the movable portion interposed therebetween;
A support portion that supports the pair of drive beams,
A pedestal portion including a side wall member to which the support portion is fixed,
In the plane along the reflection surface when the movable portion is not rotated, the side wall members on both sides of the movable portion in the direction intersecting the rotation axis are reflected by the reflection surface. A movable device that is provided with a light passage portion that allows light to pass therethrough. The movable device according to claim 1, wherein the light passage portion is formed in a shape in which a width in a direction along the rotation axis becomes wider as the distance from the rotation axis increases. The movable device according to claim 1 or 2, wherein the pedestal portion is made of a material different from that of the side wall member, and includes a bottom member that fixes the side wall member at the other end surface of the side wall member. Silicon is included in the constituent materials of the movable portion, the pair of drive beams, and the support portion,
The movable device according to claim 1, wherein the pedestal portion is made of silicon or Tempax glass, and includes a bottom member that fixes the side wall member at the other end surface of the side wall member. A distance measuring device comprising the movable device according to any one of claims 1 to 4. An image projection device comprising the movable device according to claim 1. A vehicle having at least one of the distance measuring device according to claim 5 and the image projecting device according to claim 6. A movable part having a reflective surface,
A pair of drive beams that rotatably support the movable portion around a predetermined rotation axis with the movable portion interposed therebetween;
A support portion that supports the pair of drive beams,
A pedestal to which an optical deflection element having can be fixed,
A side wall member to which the support section is fixed, and on both sides of the movable section in a direction intersecting the rotation axis in a plane along the reflection surface when the movable section is not rotated. A pedestal in which the side wall member is provided with a light passage portion for transmitting the light reflected by the reflection surface.

Images