JP7247553B2 - Mobile devices, image projection devices, head-up displays, laser headlamps, head-mounted displays, object recognition devices, and vehicles - Google Patents

Description

The present invention relates to mobile devices, image projection devices, head-up displays, laser headlamps, head-mounted displays, object recognition devices, and vehicles.

2. Description of the Related Art In recent years, with the development of micromachining technology applying semiconductor manufacturing technology, the development of MEMS (Micro Electro Mechanical Systems) devices manufactured by microfabrication of silicon or glass is progressing.

As a MEMS device, a movable part provided with a reflective surface and an elastic beam are integrally formed on a wafer, and the movable part is driven (rotated) by a drive beam configured by superimposing a thin piezoelectric material on the elastic beam. Mobile devices are known that allow

In such a movable device, it is necessary to secure a space for driving the movable portion under the movable portion, which sometimes complicates the structure of the package that accommodates the movable device. On the other hand, there has been disclosed a movable device in which a fixed support layer forms an internal space that accommodates the movable portion and allows the movable portion to be driven (see, for example, Patent Document 1).

However, in the device of Patent Document 1, the fixed support layer must be formed from glass wafers bonded in a wafer state, and multiple wafers made of different materials are used, which complicates the manufacturing process and increases the cost of the movable device. there was a case.

The present invention has been made in view of the above points, and an object of the present invention is to reduce the cost of a movable device.

A movable device according to an aspect of the technology disclosed herein includes a movable portion having a reflecting surface, and a pair of movable portions connected to the movable portion at one end thereof and rotatably supporting the movable portion with the movable portion sandwiched therebetween. and a fixed portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams, wherein the movable portion includes a support layer and the support layer. and a movable layer provided in the stacking direction, wherein the fixed portion surrounds the fixed support layer made of the same material as the support layer, and the movable portion and the pair of drive beams, and the fixed portions are respectively attached to the fixed support layer. and four frame sides including a support layer, wherein t1≧t2, where t1 is the thickness of the support layer, t2 is the thickness of the movable layer, and t3 is the thickness of the fixed support layer. , and t1<t3 , and the fixed support layer has a different thickness for each frame side .

According to the disclosed technique, the cost of the movable device can be reduced.

1 is a schematic diagram of an example optical scanning system; FIG. 1 is a hardware configuration diagram of an example of an optical scanning system; FIG. It is a functional block diagram of an example of a control device. 4 is a flowchart of an example of processing related to an optical scanning system; 1 is a schematic diagram of an example of a vehicle equipped with a head-up display device; FIG. 1 is a schematic diagram of an example of a head-up display device; FIG. 1 is a schematic diagram of an example of an image forming apparatus equipped with an optical writing device; FIG. 1 is a schematic diagram of an example of an optical writing device; FIG. 1 is a schematic diagram of an example vehicle equipped with a lidar device; FIG. 1 is a schematic diagram of an example lidar device; FIG. It is a schematic diagram explaining an example of composition of a laser headlamp. It is a schematic perspective view which shows an example of a structure of a head mounted display. It is a figure which shows an example of a part of structure of a head mounted display. 1 is a schematic diagram illustrating an example of a packaged mobile device; FIG. It is a top view showing an example of composition of a movable device of a 1st embodiment. It is a sectional view showing an example of composition of a movable device of a 1st embodiment. It is a sectional view showing composition of a movable device of a comparative example. FIG. 4 is a diagram showing an example of the relationship between the thickness ratio of the movable layer and the support layer and the position of the center of gravity of the movable portion. 1 is a schematic diagram of a packaged mobile device of the first embodiment; FIG. It is a sectional view showing an example of a movable device of a 2nd embodiment. FIG. 3 is a schematic diagram of a comparative example packaged mobile device; Fig. 3 is a schematic diagram of a packaged mobile device of the second embodiment; It is a sectional view showing an example of composition of a modification of a movable device of a 2nd embodiment. It is a perspective view showing an example of composition of a mobile of a 3rd embodiment. It is a sectional view showing an example of composition of a movable device of a 4th embodiment. It is a top view which shows an example of a structure of the movable apparatus of 5th Embodiment. It is a top view which shows an example of a structure of the modification of the movable apparatus of 5th Embodiment.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail.

[Optical scanning system]
First, an optical scanning system to which the movable device of this embodiment is applied will be described in detail with reference to FIGS. 1 to 4. FIG.

A schematic diagram of an example of an optical scanning system is shown in FIG. As shown in FIG. 1, an optical scanning system 10 is a system that optically scans a surface 15 to be scanned by deflecting light emitted from a light source device 12 by a reflecting surface 14 of a movable device 13 under the control of a control device 11 . be.

The optical scanning system 10 comprises a control device 11 , a light source device 12 and a movable device 13 having a reflecting surface 14 .

The control device 11 is an electronic circuit unit including, for example, a CPU (Central Processing Unit) and an FPGA (Field-Programmable Gate Array). The movable device 13 is, for example, a MEMS (Micro Electromechanical Systems) device having a reflecting surface 14 and capable of moving the reflecting surface 14 . The light source device 12 is, for example, a laser device that emits laser light. Note that the scanned surface 15 is, for example, a screen.

The control device 11 generates control commands for the light source device 12 and the movable device 13 based on the acquired optical scanning information, and outputs drive signals to the light source device 12 and the movable device 13 based on the control commands.

The light source device 12 irradiates the light source based on the input drive signal. The movable device 13 moves the reflecting surface 14 in at least one of the directions of one axis and the directions of two axes based on the input drive signal.

As a result, for example, the reflecting surface 14 of the movable device 13 is reciprocated in two axial directions within a predetermined range under the control of the control device 11 based on image information, which is an example of optical scanning information, and the light is incident on the reflecting surface 14 . An arbitrary image can be projected onto the surface 15 to be scanned by deflecting the irradiation light from the light source device 12 around a certain axis and performing optical scanning. In addition, the detail of the movable apparatus of this embodiment and the detail of control by a control apparatus are mentioned later.

Next, a hardware configuration of an example of the optical scanning system 10 will be described with reference to FIG. FIG. 2 is a hardware configuration diagram of an example of the optical scanning system 10. As shown in FIG. As shown in FIG. 2, the optical scanning system 10 includes a control device 11, a light source device 12 and a movable device 13, which are electrically connected to each other. Among these, the control device 11 includes a CPU 20 , a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA 23 , an external I/F 24 , a light source device driver 25 and a movable device driver 26 .

The CPU 20 is an arithmetic device that reads programs and data from a storage device such as the ROM 22 onto the RAM 21 and executes processing to achieve overall control and functions of the control device 11 .

The RAM 21 is a volatile storage device that temporarily holds programs and data.

The ROM 22 is a nonvolatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data that the CPU 20 executes to control each function of the optical scanning system 10 . there is

The FPGA 23 is a circuit that outputs control signals suitable for the light source device driver 25 and the movable device driver 26 according to the processing of the CPU 20 .

The external I/F 24 is, for example, an interface with an external device, network, or the like. External devices include, for example, host devices such as PCs (Personal Computers), and storage devices such as USB memories, SD cards, CDs, DVDs, HDDs, and SSDs. The network is, for example, a CAN (Controller Area Network) of an automobile, a LAN (Local Area Network), the Internet, or the like. The external I/F 24 may be configured to enable connection or communication with an external device, and the external I/F 24 may be prepared for each external device.

The light source device driver is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 according to the input control signal.

The mobile device driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the mobile device 13 according to the input control signal.

In the control device 11 , the CPU 20 acquires optical scanning information from an external device or network via the external I/F 24 . It should be noted that any configuration may be used as long as the CPU 20 can acquire the optical scanning information. A storage device may be provided and the optical scanning information may be stored in the storage device.

Here, the optical scanning information is information indicating how to optically scan the surface 15 to be scanned. For example, when an image is displayed by optical scanning, the optical scanning information is image data. Further, for example, when optical writing is performed by optical scanning, the optical scanning information is writing data indicating the writing order and writing location. In addition, for example, when object recognition is performed by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range of irradiation with light for object recognition.

The control device 11 can implement the functional configuration described below by means of commands from the CPU 20 and the hardware configuration shown in FIG.

Next, the functional configuration of the controller 11 of the optical scanning system 10 will be described with reference to FIG. FIG. 3 is a functional block diagram of an example of the controller of the optical scanning system.

As shown in FIG. 3, the control device 11 has a control section 30 and a drive signal output section 31 as functions.

The control unit 30 is realized by, for example, the CPU 20 and the FPGA 23 , acquires optical scanning information from an external device, converts the optical scanning information into control signals, and outputs the control signals to the drive signal output unit 31 . For example, the control unit 30 acquires image data as optical scanning information from an external device or the like, generates a control signal from the image data through predetermined processing, and outputs the control signal to the drive signal output unit 31 .
The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, etc., and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

The drive signal is a signal for controlling driving of the light source device 12 or the movable device 13 . For example, in the light source device 12, it is a driving voltage for controlling the irradiation timing and irradiation intensity of the light source. Further, for example, in the movable device 13 , it is a drive voltage for controlling the timing and movable range for moving the reflecting surface 14 of the movable device 13 .

Next, a process of optically scanning the surface 15 to be scanned by the optical scanning system 10 will be described with reference to FIG. FIG. 4 is a flowchart of an example of processing related to the optical scanning system.

In step S11, the control unit 30 acquires optical scanning information from an external device or the like.

In step S<b>12 , the control section 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output section 31 .

In step S13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the movable device 13 based on the input control signal.

In step 14, the light source device 12 performs light irradiation based on the input drive signal. Also, the movable device 13 moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, light is deflected in an arbitrary direction and optically scanned.

In the optical scanning system 10, one control device 11 has a device and functions for controlling the light source device 12 and the movable device 13. The control device for the light source device and the control device for the movable device, It may be provided separately.

In the optical scanning system 10, one control device 11 is provided with the functions of the control section 30 of the light source device 12 and the movable device 13 and the function of the drive signal output section 31, but these functions exist as separate entities. Alternatively, for example, a configuration in which a drive signal output device having a drive signal output section 31 is provided separately from the control device 11 having the control section 30 may be employed. In the optical scanning system 10, the movable device 13 having the reflecting surface 14 and the control device 11 may constitute an optical deflection system that deflects the light.

[Image projection device]
Next, an image projection device to which the movable device of this embodiment is applied will be described in detail with reference to FIGS. 5 and 6. FIG.

FIG. 5 is a schematic diagram of an embodiment of an automobile 400 equipped with a head-up display device 500, which is an example of an image projection device. Also, FIG. 6 is a schematic diagram of an example of the head-up display device 500 .

An image projection device is a device that projects an image by optical scanning, such as a head-up display device.

As shown in FIG. 5, the head-up display device 500 is installed near the windshield (windshield 401 etc.) of the automobile 400, for example. The projection light L emitted from the head-up display device 500 is reflected by the windshield 401 and travels toward the observer (driver 402) who is the user. Accordingly, the driver 402 can visually recognize the image or the like projected by the head-up display device 500 as a virtual image. A combiner may be installed on the inner wall surface of the windshield so that the user can visually recognize the virtual image by projected light reflected by the combiner.

As shown in FIG. 6, head-up display device 500 emits laser light from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incident optical system composed of collimator lenses 502, 503, and 504 provided for each laser light source, two dichroic mirrors 505 and 506, and a light amount adjustment section 507, It is deflected by a movable device 13 having a reflective surface 14 . The deflected laser light passes through a projection optical system composed of a free-form surface mirror 509, an intermediate screen 510, and a projection mirror 511, and is projected onto the screen. In the head-up display device 500, the laser light sources 501R, 501G and 501B, the collimator lenses 502, 503 and 504, and the dichroic mirrors 505 and 506 are unitized as a light source unit 530 by an optical housing.

The head-up display device 500 projects the intermediate image displayed on the intermediate screen 510 onto the windshield 401 of the automobile 400 so that the driver 402 can visually recognize the intermediate image as a virtual image.

Color laser beams emitted from laser light sources 501R, 501G, and 501B are collimated by collimator lenses 502, 503, and 504, respectively, and combined by two dichroic mirrors 505 and 506, respectively. The combined laser light is two-dimensionally scanned by the movable device 13 having the reflecting surface 14 after the light amount is adjusted by the light amount adjusting unit 507 . The projection light L that has been two-dimensionally scanned by the movable device 13 is reflected by the free-form surface mirror 509 and corrected for distortion, and then converged on the intermediate screen 510 to display an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are two-dimensionally arranged, and magnifies the projection light L incident on the intermediate screen 510 in microlens units.

The movable device 13 reciprocates the reflecting surface 14 in two axial directions, and two-dimensionally scans the projection light L incident on the reflecting surface 14 . The drive control of this movable device 13 is performed in synchronization with the light emission timings of the laser light sources 501R, 501G, and 501B.

The head-up display device 500 has been described above as an example of the image projection device, but the image projection device may be any device that projects an image by performing optical scanning with the movable device 13 having the reflecting surface 14. . For example, a projector that is placed on a desk or the like and projects an image onto a display screen, is mounted on a mounting member that is worn on the head of an observer, etc., and projects onto a reflective transmission screen that the mounting member has, or uses the eyeball as a screen. The same can be applied to a head-mounted display device or the like that projects an image.

In addition, the image projection device is used not only for vehicles and mounting members, but also for mobile objects such as aircraft, ships, and mobile robots, or working robots that operate objects to be driven such as manipulators without moving from the spot. It may be mounted on a non-moving object.

The head-up display device 500 is an example of the "head-up display" described in the claims. Also, the automobile 400 is an example of the "vehicle" described in the claims.

[Optical writing device]
Next, an optical writing device to which the movable device 13 of this embodiment is applied will be described in detail with reference to FIGS. 7 and 8. FIG.

FIG. 7 shows an example of an image forming apparatus in which the optical writing device 600 is incorporated. Also, FIG. 8 is a schematic diagram of an example of an optical writing device.

As shown in FIG. 7, the optical writing device 600 is used as a constituent member of an image forming apparatus typified by a laser printer 650 having a printer function using laser light. In the image forming apparatus, the optical writing device 600 performs optical writing on the photosensitive drum by optically scanning the photosensitive drum, which is the surface to be scanned 15, with one or more laser beams.

As shown in FIG. 8, in an optical writing device 600, a laser beam from a light source device 12 such as a laser element passes through an imaging optical system 601 such as a collimator lens, and then passes through a movable device 13 having a reflecting surface 14. Axially or biaxially deflected. The laser beam deflected by the movable device 13 then passes through a scanning optical system 602 consisting of a first lens 602a, a second lens 602b, and a reflecting mirror portion 602c, and passes through the surface to be scanned 15 (for example, a photosensitive drum or photosensitive paper). ) to perform optical writing. The scanning optical system 602 forms a spot-like light beam on the surface 15 to be scanned. Also, the movable device 13 having the light source device 12 and the reflecting surface 14 is driven based on the control of the control device 11 .

Thus, the optical writing device 600 can be used as a component of an image forming apparatus having a printer function using laser light. In addition, by making the scanning optical system different so that optical scanning can be performed not only in one axial direction but also in two axial directions, a laser label device or the like that prints by deflecting a laser beam onto a thermal medium, performing optical scanning, and heating the media. can be used as a component of the image forming apparatus.

The movable device 13 having the reflecting surface 14 applied to the optical writing device consumes less power for driving than a rotating polygonal mirror using a polygon mirror or the like, so it contributes to power saving of the optical writing device. Advantageous. In addition, since wind noise when the movable device 13 vibrates is smaller than that of the rotating polygon mirror, it is advantageous for improving the quietness of the optical writing device. The optical writing device requires an overwhelmingly smaller installation space than the rotary polygon mirror, and the amount of heat generated by the movable device 13 is also very small. be.

[Object recognition device]
Next, an object recognition device to which the movable device of the present embodiment is applied will be described in detail with reference to FIGS. 9 and 10. FIG.

FIG. 9 is a schematic diagram of a vehicle equipped with a LiDAR (Laser Imaging Detection and Ranging) device, which is an example of an object recognition device. Also, FIG. 10 is a schematic diagram of an example of a lidar device.

An object recognition device is a device that recognizes an object in a target direction, such as a lidar device.

As shown in FIG. 9, the lidar device 700 is mounted on, for example, an automobile 701, optically scans a target direction, and receives reflected light from a target object 702 existing in the target direction. to recognize

As shown in FIG. 10, the laser light emitted from the light source device 12 passes through an incident optical system composed of a collimating lens 703, which is an optical system that converts diverging light into substantially parallel light, and a plane mirror 704, and is reflected. A movable device 13 having a surface 14 is scanned in one or two axes. Then, the light is projected onto an object 702 in front of the device through a projection lens 705 or the like, which is a projection optical system. The light source device 12 and the movable device 13 are driven and controlled by the control device 11 . Reflected light reflected by the target object 702 is photodetected by a photodetector 709 . That is, the reflected light is received by an imaging element 707 via a condensing lens 706 or the like, which is an incident light detecting and receiving optical system, and the imaging element 707 outputs a detection signal to a signal processing circuit 708 . The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal and outputs the result to the distance measurement circuit 710 .

The distance measuring circuit 710 detects the target object based on the time difference between the timing at which the light source device 12 emits laser light and the timing at which the photodetector 709 receives the laser light, or the phase difference for each pixel of the image sensor 707 that receives the light. The presence or absence of the object 702 is recognized, and distance information to the target object 702 is calculated.

Since the movable device 13 having the reflecting surface 14 is less likely to be damaged than a polygonal mirror and is small, it is possible to provide a compact radar device with high durability. Such a lidar device is attached to, for example, a vehicle, an aircraft, a ship, a robot, or the like, and can recognize the presence or absence of an obstacle and the distance to the obstacle by optically scanning a predetermined range.

In the above object recognition device, the lidar device 700 has been described as an example. Any device may be used as long as it recognizes the target object 702 by receiving reflected light, and is not limited to the above-described embodiments.

For example, biometric authentication that recognizes an object by calculating object information such as shape from distance information obtained by optically scanning the hand or face, recording and referring to it, or recognizing an intruder by optically scanning the target range. The present invention can also be applied to a security sensor, a component of a three-dimensional scanner that calculates and recognizes object information such as shape from distance information obtained by optical scanning, and outputs it as three-dimensional data.

[Laser headlamp]
Next, a laser headlamp 50 in which the movable device of the present embodiment is applied to an automobile headlight will be described with reference to FIG. FIG. 11 is a schematic diagram illustrating an example of the configuration of the laser headlamp 50. As shown in FIG.

The laser headlamp 50 has a control device 11 , a light source device 12 b , a movable device 13 having a reflecting surface 14 , a mirror 51 and a transparent plate 52 .

The light source device 12b is a light source that emits blue laser light. Light emitted from the light source device 12 b enters the movable device 13 and is reflected by the reflecting surface 14 . The movable device 13 moves the reflecting surface in the XY directions based on a signal from the control device 11, and two-dimensionally scans the blue laser light from the light source device 12b in the XY directions.

The scanning light from the movable device 13 is reflected by the mirror 51 and enters the transparent plate 52 . The transparent plate 52 is coated with a yellow phosphor on its front or back surface. As the blue laser light from the mirror 51 passes through the yellow phosphor coating on the transparent plate 52, it changes to white within the legal headlight color range. As a result, the front of the automobile is illuminated with white light from the transparent plate 52 .

The scanning light from the movable device 13 undergoes predetermined scattering when passing through the phosphor of the transparent plate 52 . This alleviates the glare in the illuminated object in front of the vehicle.

When applying the movable device 13 to a headlight of a car, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. For example, the light source device 12b may be near-ultraviolet rays, and the transparent plate 52 may be coated with a uniform mixture of phosphors of the three primary colors of light: blue, green, and red. Even in this case, the light passing through the transparent plate 52 can be converted into white light, and the front of the automobile can be illuminated with white light.

[Head-mounted display]
Next, a head mounted display 60 to which the movable device of the present embodiment is applied will be described with reference to FIGS. 12 and 13. FIG. Here, the head-mounted display 60 is a head-mounted display that can be worn on a person's head, and can have a shape similar to eyeglasses, for example. The head-mounted display will hereinafter be abbreviated as HMD.

FIG. 12 is a perspective view illustrating the appearance of the HMD 60. FIG. In FIG. 12, the HMD 60 is composed of a front 60a and a temple 60b, which are provided approximately symmetrically in pairs on the left and right sides. The front 60a can be composed of, for example, a light guide plate 61, and the optical system, control device, and the like can be incorporated in the temple 60b.

FIG. 13 is a diagram partially illustrating the configuration of the HMD 60. As shown in FIG. Although FIG. 13 illustrates the configuration for the left eye, the HMD 60 has the same configuration for the right eye.

The HMD 60 has a control device 11 , a light source unit 530 , a light quantity adjusting section 507 , a movable device 13 having a reflecting surface 14 , a light guide plate 61 and a half mirror 62 .

The light source unit 530 unitizes the laser light sources 501R, 501G and 501B, the collimator lenses 502, 503 and 504, and the dichroic mirrors 505 and 506 with an optical housing as described above. In the light source unit 530, the three-color laser beams from the laser light sources 501R, 501G, and 501B are synthesized by the dichroic mirrors 505 and 506. Combined parallel light is emitted from the light source unit 530 .

The light from the light source unit 530 is incident on the movable device 13 after the light amount is adjusted by the light amount adjusting section 507 . The movable device 13 moves the reflecting surface 14 in the XY directions based on a signal from the control device 11 and two-dimensionally scans the light from the light source unit 530 . The driving control of the movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B, and a color image is formed by scanning light.

Scanning light from the movable device 13 enters the light guide plate 61 . The light guide plate 61 guides the scanning light to the half mirror 62 while reflecting it on the inner wall surface. The light guide plate 61 is made of resin or the like that is transparent to the wavelength of the scanning light.

The half mirror 62 reflects the light from the light guide plate 61 toward the back side of the HMD 60 and emits the light toward the eyes of the wearer 63 of the HMD 60 . The half mirror 62 has, for example, a free curved surface shape. An image of the scanning light is reflected by the half mirror 62 and formed on the retina of the wearer 63 . Alternatively, an image is formed on the retina of the wearer 63 by the reflection on the half mirror 62 and the lens effect of the crystalline lens in the eyeball. Further, the spatial distortion of the image is corrected by the reflection on the half mirror 62 . The wearer 63 can observe an image formed by light scanned in the XY directions.

Since 62 is a half mirror, the wearer 63 observes an image of light from the outside and an image of scanning light superimposed. By providing a mirror in place of the half mirror 62, the light from the outside may be eliminated and only the image by the scanning light may be observed.

[Packaging]
Next, the packaging of the movable device of this embodiment will be described with reference to FIG. 14 .

FIG. 14 is a schematic diagram of an example of a packaged mobile device.

As shown in FIG. 14, the movable device 13 is attached to an attachment member 802 arranged inside a package member 801, and a part of the package member 801 is covered with a transparent member 803 to be sealed. be done. Furthermore, the inside of the package is sealed with an inert gas such as nitrogen. As a result, deterioration due to oxidation of the movable device 13 is suppressed, and durability against environmental changes such as temperature is improved.

Details of the movable device of the present embodiment used in the optical deflection system, the optical scanning system, the image projection device, the optical writing device, the object recognition device, the laser headlamp, and the head mounted display described above are shown in the drawings below. will be described with reference to. In addition, in each drawing, the same code|symbol may be attached|subjected to the same component part, and the overlapping description may be abbreviate|omitted.

In the description of the embodiments, sub-scanning is optical scanning with the first axis as the center of rotation, and main scanning is optical scanning with the second axis as the center of rotation. Also, the terms "rotation", "swing" and "movability" in the terms of the embodiment are synonymous. Furthermore, among the directions indicated by the arrows, the X direction is the direction parallel to the first axis, the Y direction is the direction parallel to the second axis, and the Z direction is the direction perpendicular to the XY plane. Note that the Z direction is an example of the “stacking direction”.

[First Embodiment]
<Composition of movable device>
Drawing 15 is a top view showing an example of composition of a movable device of a 1st embodiment. The movable device 13 is a movable device of a double-supported type (both ends supported beam) capable of rotating around the first axis and the second axis.

As shown in FIG. 15 , the movable device 13 has a movable portion 110 , first drive beams 120 a and 120 b , a fixed portion 130 and electrode terminals 140 . The movable portion 110 also has a reflecting portion 112 including the reflecting surface 14, a supporting portion 113, connecting portions 114a and 114b, torsion bars 115a and 115b, and second driving beams 116a and 116b.

The reflective portion 112 is formed of a silicon active layer or the like. However, the material is not limited to this, and may be composed of an oxide material, an inorganic material, an organic material, or the like. The reflective surface 14 is formed on the positive Z-direction surface of the reflective portion 112 . The reflective surface 14 is formed in a circular shape using a metal thin film containing aluminum, gold, silver, or the like, or a multi-layered film thereof.

A rib for reinforcing the reflecting portion 112 is provided on the negative Z-direction surface of the reflecting portion 112 . The ribs are formed of a silicon support layer, a silicon oxide layer, or the like, and by providing the ribs, deformation strain of the reflecting portion 112 and the reflecting surface 14 that occurs during movement is suppressed.

The torsion bars 115a and 115b extend in the Y direction and are formed so as to sandwich the reflecting portion 112 in the Y direction. One end of the torsion bar 115 a is connected to the reflecting portion 112 and one end of the torsion bar 115 b is connected to the reflecting portion 112 . The reflector 112 is supported by torsion bars 115a and 115b.

The other end of the torsion bar 115a is connected to the second drive beam 116a, and the other end of the torsion bar 115b is connected to the second drive beam 116b. The second drive beams 116a and 116b are provided with piezoelectric portions on the positive Z-direction surfaces of the elastic beams. When a drive voltage is applied from the electrode terminals 140 to the second drive beam 116a through the laid-out electrical wiring, the second drive beam 116a bends and deforms to twist the torsion bar 115a.

Similarly, when a drive voltage is applied from the electrode terminal 140 to the second drive beam 116b through the electric wiring laid out, the second drive beam 116b bends and deforms to twist the torsion bar 115b.

Such twisting of the torsion bars 115a and 115b serves as a turning force, and the reflecting portion 112 turns around the second axis.

On the other hand, the supporting portion 113 is formed so as to surround the reflecting portion 112, the torsion bars 115a and 115b, and the second driving beams 116a and 116b from all sides. The support portion 113 is connected to the second drive beams 116a and 116b to support and restrain the second drive beams 116a and 116b. The support portion 113 indirectly supports the reflection portion 112 and the torsion bars 115a and 115b via the second drive beams 116a and 116b.

A connection portion 114a is formed at the upper right corner of the support portion 113 in the figure, and the support portion 113 is connected to the first drive beam 120a via the connection portion 114a. The connection portion 114 a extends in the negative X direction from the connection point with the first drive beam 120 a to connect the first drive beam 120 a and the support portion 113 .

A connection portion 114b is formed at the lower left corner of the support portion 113 in the drawing, and the support portion 113 is connected to the first driving beam 120b via the connection portion 114b. The connection portion 114 b extends in the positive X direction from the connection point with the first drive beam 120 b to connect the first drive beam 120 b and the support portion 113 .

The first drive beam 120a and the first drive beam 120b support the support portion 113 from both sides in the X direction by sandwiching the support portion 113 therebetween.

The first drive beam 120a has three folded portions and three connecting portions, and includes a meandering structure in which a plurality of elastic beams are connected. A piezoelectric section is provided on each of the positive Z-direction surfaces of the plurality of elastic beams. The end portion of the first drive beam 120a that is not connected to the connection portion 114a is connected to the fixing portion 130, and the fixing portion 130 fixes (supports and constrains) the first drive beam 120a.

Similarly, the first drive beam 120b has three folded portions and three connecting portions, and includes a meandering structure in which a plurality of elastic beams are connected. A piezoelectric section is provided on each of the positive Z-side surfaces of the plurality of elastic beams. The end portion of the first drive beam 120b that is not connected to the connection portion 114b is connected to the fixing portion 130, and the fixing portion 130 fixes (supports and constrains) the first drive beam 120b. The first drive beams 120a and 120b are an example of "a pair of drive beams."

As shown in FIG. 15, the fixed part 130 has a rectangular frame structure with four sides, and the four sides surround the movable part 110 and the first drive beams 120a and 120b from all sides. I'm in.

On the other hand, a drive voltage is applied to the piezoelectric portions provided on the first drive beams 120a and 120b through electrical wiring laid out from the electrode terminals 140. As shown in FIG.

Here, among the plurality of elastic beams of the first drive beam 120a, the piezoelectric units provided on the odd-numbered elastic beams counted from the one closest to the reflecting portion 112 are referred to as a piezoelectric drive unit group 150A. Among the plurality of elastic beams of the first drive beam 120b, the piezoelectric units provided on the even-numbered elastic beams counted from the one closest to the reflecting portion 112 are similarly referred to as a piezoelectric drive unit group 150A. The piezoelectric driving section group 150A bends and deforms in the same direction when drive voltages are simultaneously applied to the piezoelectric sections. Using this deformation as a turning force, the movable portion 110 turns around the first axis.

Among the elastic beams of the first drive beam 120a, the piezoelectric units provided on the even-numbered elastic beams counted from the one closest to the reflecting unit 112 are referred to as a piezoelectric drive unit group 150B. Further, among the elastic beams of the first drive beam 120b, the odd-numbered elastic beams counted from the one closest to the reflecting portion 112 are similarly defined as the piezoelectric drive portion group 150B. The piezoelectric driving section group 150B bends and deforms in the same direction when drive voltages are simultaneously applied to the piezoelectric sections. Using this deformation as a turning force, the movable part 110 turns around the first axis in a direction opposite to the turning by the piezoelectric driving part group 150A.

In the first drive beams 120a and 120b, the plurality of piezoelectric sections of the piezoelectric drive section groups 150A and 150B are bent and deformed simultaneously, thereby accumulating the amount of rotation caused by the bending deformation, and the deflection angle of the movable section 110 about the first axis. can be increased. When the amount of rotation of the movable portion 110 by the piezoelectric driving portion group 150A when the voltage is applied is balanced with the amount of rotation of the movable portion 110 by the piezoelectric driving portion group 150B when the voltage is applied, the deflection angle is becomes zero.

Here, a semiconductor such as an SOI (Silicon On Insulator) substrate can be used for the substrate (wafer) forming the movable device 13 . Each component of the movable device 13 can be integrally formed by processing with a semiconductor manufacturing technology. The first drive beams 120a and 120b and the second drive beams 116a and 116b may be formed after molding the SOI substrate or during molding of the SOI substrate.

<Method of driving the movable device>
Next, an example of a method for driving the movable device 13 will be described with reference to FIG. 15 . For rotation about the second axis, a drive voltage is applied to the second drive beams 116a and 116b at the resonance frequency of the integrated structure comprising the reflector 112, the torsion bars 115a and 115b, and the second drive beams 116a and 116b. applied. The resonance frequency is, for example, 20 kHz.

The piezoelectric portion of the second driving beam 116a to which one end of the torsion bar 115a is connected deforms when a driving voltage is applied through the upper electrode and the lower electrode. Due to the deformation of the piezoelectric portion, the second drive beam 116a is bent and deformed, and the torsion bar 115a is twisted.

Similarly, the piezoelectric portion of the second drive beam 116b to which one end of the torsion bar 115b is connected deforms when a drive voltage is applied through the upper electrode and the lower electrode. Due to the deformation of the piezoelectric portion, the second drive beam 116b is bent and deformed, and the torsion bar 115b is twisted.

The torsion of the torsion bars 115a and 115b acts as a turning force, and the reflecting portion 112 reciprocates around the second axis. The waveform of the drive voltage applied to the second drive beams 116a and 116b is a sine wave or the like. The reflecting portion 112 is resonatingly driven and reciprocatingly rotated at the cycle of the sinusoidal driving voltage waveform.

In the rotation about the first axis, the waveform of the driving voltage applied to the piezoelectric actuator group 150A includes, for example, a sawtooth waveform. Also, the frequency of the drive voltage is 60 Hz or the like. Assuming that the time width of the rising period during which the voltage value increases from the minimum value to the next maximum value is Tr, and the time width of the falling period during which the voltage value decreases from the maximum value to the next minimum value is Tf, the waveform of the drive voltage is: For example, a ratio of Tr:Tf=9:1 is set in advance. At this time, the ratio of Tr to one cycle is called the symmetry of the driving voltage.

The waveform of the driving voltage applied to the piezoelectric driving section group 150B similarly includes a waveform such as a sawtooth waveform. Also, the frequency of the drive voltage is 60 Hz or the like. For the waveform of the drive voltage, for example, a ratio of Tf:Tr=9:1 is set in advance.

Further, the period of the waveform of the driving voltage applied to the piezoelectric driving section group 150A and the period of the waveform of the driving voltage applied to the piezoelectric driving section group 150B are set to be the same.

The sawtooth waveform of the drive voltage is produced by superposition of sine waves. Here, in this embodiment, an example of using a sawtooth waveform as the waveform of the driving voltage is shown, but the present invention is not limited to this. The waveform may be changed according to the device characteristics of the movable device, such as a drive voltage having a saw-tooth waveform with rounded apexes or a saw-tooth waveform with a linear region curved.

The operation of the first drive beams 120a and 120b when the drive voltage is applied is as described above, and the bending deformation of the piezoelectric drive section groups 150A and 150B causes the movable section 110 to reciprocate around the first axis.

<Cross-sectional shape of the movable device>
Next, the cross-sectional shape of the movable device 13 will be described with reference to FIG. FIG. 16 is a cross-sectional view of cross-section AA indicated by a dashed line in FIG.

16 shows cross-sectional structures of the first drive beams 120a and 120b, the movable portion 110, and the fixed portion 130. FIG.

The first drive beams 120a and 120b have an active layer 303 and piezoelectric drive unit groups 150A and 150B formed on the surface of the active layer 303 on the positive Z direction side.

The active layer 303 is an elastic body that deforms according to the deformation of the piezoelectric actuator groups 150A and 150B, and is composed of a silicon active layer of an SOI substrate.

The piezoelectric actuator groups 150A and 150B include a lower electrode 201, a piezoelectric material 202, and an upper electrode 203, which are sequentially formed on the surface of the active layer 303 in the positive Z direction. The lower electrode 201 and the upper electrode 203 are composed of metal thin films such as gold (Au) or platinum (Pt), and the piezoelectric material 202 is composed of a piezoelectric material such as PZT (lead zirconate titanate).

Each of the piezoelectric drive units included in the piezoelectric drive unit groups 150A and 150B has the same layer structure as above. The piezoelectric actuator groups 150A and 150B may be covered with an insulating layer such as SiO2 (silicon oxide), and electrical wiring may be provided in the positive Z direction.

Next, the movable part 110 includes a support layer 351, an interlayer film 352 laminated on the positive Z-direction surface of the support layer 351, and a movable layer 353 laminated on the positive Z-direction surface of the interlayer film 352. have.

The support layer 351 is composed of single-crystal silicon of an SOI substrate, an inorganic material, an organic material, or the like, and the interlayer film 352 is composed of silicon oxide or the like. The movable layer 353 is an elastic body that deforms according to the deformation of the second drive beams 116a and 116b, and is composed of a silicon active layer of an SOI substrate or the like. Here, as shown in FIG. 16, the supporting layer 351 includes a reflecting surface supporting layer 351a on the negative Z direction side of the reflecting surface 14 and a supporting portion supporting layer 351b on the negative Z direction side of the supporting portion 113. and are included.

Next, the fixed part 130 includes a fixed support layer 361, an interlayer film 362 laminated on the positive Z-direction surface of the fixed support layer 361, and an active layer laminated on the positive Z-direction surface of the interlayer film 362. 363.

The fixed support layer 361 is composed of single crystal silicon of the SOI substrate, inorganic material, organic material, or the like, and the interlayer film 362 is composed of silicon oxide or the like. Also, the active layer 363 is composed of the silicon active layer of the SOI substrate.

The active layers 303 and 363 and the movable layer 353 are not limited to the silicon active layers of the SOI substrate, and may be made of an oxidizing agent, an inorganic material, an organic material, or the like. Also, the support layer 351 and the fixed support layer 361 may be made of an inorganic material, an organic material, or the like.

By the way, the second drive beams 116a and 116b (see FIG. 15) in the movable part 110 have a beam-like member and an upper electrode, a piezoelectric member, and a lower electrode on the beam-like member. The electrodes are covered with an insulating layer. Also, the insulating layer expands and contracts together with the piezoelectric member when the drive beam is driven.

Furthermore, one end of the second drive beam 116a is connected to the torsion bar 115a, the other end of the second drive beam 116a is connected to the movable frame (support portion 113), and at least one of the upper electrode and the lower electrode is connected. The corner of the tip of the second drive beam 116a on the one end side of the electrode has a chamfered shape (for example, an arc shape or a tapered shape).

Similarly, one end of the second drive beam 116b is connected to the torsion bar 115b, the other end of the second drive beam 116b is connected to the movable frame (support portion 113), and at least the upper electrode and the lower electrode are connected. The tip of one end of the second drive beam 116b of one electrode has a chamfered shape (for example, an arc shape or a tapered shape).

In this embodiment, the second drive beams 116a and 116b have a double-supported beam structure in which both ends are connected to the support portion 113. However, the second drive beams 116a and 116b have a cantilever structure. may be In the cantilever structure, one end of the second drive beam 116a is connected to the support portion 113 and the other end is connected to the torsion bar 115a. One end of the second drive beam 116b is connected to the support portion 113, and the other end is connected to the torsion bar 115b.

In the case of the cantilever structure, at least one of the upper electrode and the lower electrode provided on the second drive beams 116a and 116b has an arc-shaped or tapered corner on the side connected to the torsion bar. formed in More preferably, both the upper electrode and the lower electrode are similarly arc-shaped or tapered.

With the above configuration, even if the dielectric strength is lowered due to the driving of the second drive beams 116a and 116b, creeping discharge can be suppressed, and the durability of the movable device 13 can be improved.

Returning to FIG. 16, in the movable device 13 in this embodiment, the thickness of the support layer 351 of the movable portion 110 is _t1 , the thickness of the movable layer 353 of the movable portion 110 is _t2 , and the fixed support layer 361 of the fixed portion 130 is Each part is formed so as to satisfy the following equations (1) and (2), where _t3 is the thickness of .

_t1 ≧ _t2 (1)
t ₁ < t ₃ (2)
Further, in this embodiment, the movable device 13 is formed by a semiconductor manufacturing technology from a multi-layer SOI substrate (wafer) or the like composed of a silicon active layer, an interlayer film, and a silicon support layer. Since the support layer 351 and the fixed support layer 361 are formed from the same silicon support layer, the support layer 351 and the fixed support layer 361 are composed of the same material. Since the interlayer films 352 and 362 are also formed from the same layer, they are made of the same material, and the movable layer 353 and the active layers 303 and 363 are also made of the same silicon support layer, so they are made of the same material.

FIG. 17 shows a cross-sectional view of a mobile device 13G of a comparative example. In the mobile device 13G, the thickness _t1 and the thickness _t3 are equal. In contrast, in the movable device 13 of the present embodiment shown in FIG. 16, the thickness _t3 is larger (thick) than the thickness _t1 , and as a result, a gap is formed on the negative Z direction side of the movable portion 110. It is

By the way, when the thickness _t2 of the movable layer 353 of the movable section 110 becomes larger than the thickness _t1 of the support layer 351, the weight of the movable section 110 is increased, which causes the resonance frequency of the movable section 110 to decrease, or The beam breakage risk of the beams 120a and 120b and the second drive beams 116a and 116b may increase.

Further, when the center of gravity of the movable part 110 is lower than the surface of the movable layer 353 on the negative Z direction side, the movable part 110 and the like are easily translated in the Z direction, and the resistance to disturbance and the uniformity of scanning are improved. may decrease.

According to the present embodiment, by satisfying the relationship of formula (1), the position of the center of gravity of the movable part 110 can be maintained higher than the surface of the movable layer 353 on the negative Z direction side. As a result, it is possible to avoid the above-described decrease in resonance frequency, risk of beam breakage, decrease in resistance to disturbance, decrease in scanning uniformity, and the like.

Here, FIG. 18 is a diagram showing an example of the relationship between the ratio of the thickness t ₁ of the support layer 351 to the thickness t ₂ of the movable layer 353 in the movable section 110 and the position of the center of gravity of the movable section 110 . The horizontal axis of FIG. 18 indicates the ratio _t1 / _t2 between the thickness _t1 and the thickness _t2 , and the vertical axis indicates the position of the center of gravity of the movable portion. A state where the center of gravity is on the surface of the movable layer 353 on the negative Z direction side is defined as a state where the center of gravity is zero.

As shown in FIG. 18, when the ratio t ₁ /t ₂ is greater than 5, the position of the center of gravity of the movable part 110 is lower than the surface of the movable layer 353 on the negative Z direction side. Therefore, by setting the thickness _t1 to 5 times or less than the thickness _t2 , it is possible to maintain the position of the center of gravity of the movable part 110 higher than the surface of the movable layer 353 on the negative Z direction side, which is preferable. . That is, it is preferable to form the movable portion 110 so that t ₁ ≧t ₂ and t ₁ ≦5×t ₂ .

Returning to FIG. 16, by satisfying the relationship of formula (2), the thickness of the fixing support layer 361 of the fixing portion 130 is increased, so the rigidity of the fixing portion 130 is increased. Accordingly, the fixing part 130 can stably fix the first driving beams 120a and 120b. Further, by increasing the rigidity of the fixed portion 130, damage during handling of the movable device 13 can be suppressed, and stability during die bonding can be ensured.

Further, when the movable device 13 is packaged in a packaging member, if a space is not secured on the negative Z direction side of the movable portion 110, the movable portion 110 may collide with the bottom portion in the packaging member during rotation. There is Therefore, in order to secure a space on the negative Z direction side of the movable part 110, it was sometimes necessary to provide a counterbored hole or a spacer member at the bottom of the packaging member.

In the present embodiment, by satisfying the relationship of formula (2), a gap can be formed on the negative Z direction side of the movable part 110, so that a space for the movable part 110 to rotate can be secured. Since there is no need to provide counterbore holes, spacer members, etc., the cost of the packaged movable device 13 can be reduced.

FIG. 19 is a diagram showing an example of a configuration in which the movable device 13 is packaged in a housing. A space for the movable part 110 to rotate is secured on the Z direction side of .

Note that the packaging member 801 is an example of a "casing", and the packaging is an example of a "accommodation".

On the other hand, it is conceivable to form a movable device by combining different substrates such as a semiconductor substrate and a glass substrate, and to form a gap portion on the negative Z direction side of the movable portion 110 . The use of wafers may complicate the manufacturing process and increase the cost of the movable device.

In this embodiment, the movable device 13 is formed from a multi-layer SOI substrate (wafer) or the like composed of a silicon active layer, an interlayer film, and a silicon support layer by semiconductor manufacturing technology, and the support layer 351 and the fixed support layer 361 are made of the same material. Configure. Therefore, the movable device 13 can be manufactured without complicating the manufacturing process, and the cost of the movable device 13 can be reduced.

In the above description, an example in which the piezoelectric material is formed on the surface of the active layer 303 in the positive Z direction has been described. may be provided.

Further, the shape of each component is not limited to the shape described in this embodiment, as long as the reflecting portion 112 can be rotated around the first axis or around the second axis. For example, the torsion bars 115a and 115b, the first drive beams 120a and 120b, the second drive beams 116a and 116b, etc. may have a curved shape instead of a planar shape.

[Second embodiment]
Next, a movable device of a second embodiment will be described with reference to FIG. 20 . In addition, in the second embodiment, the description of the same components as those of the already described embodiment may be omitted.

As described above with reference to FIG. 14 , there is a case where the movable device 13 is packaged inside the package member 801 including the transmissive member 803 and light is scanned by the movable device 13 via the transmissive member 803 . In this case, the transparent member 803 and the movable device 13 are relatively inclined so that the light multiple-reflected by the transparent member 803 does not go out of the package member 801, and the movable device 13 is arranged in the package member 801. Sometimes.

FIG. 21 shows, as a comparative example, a case where the transmissive member 803 and the movable device 13 are relatively inclined. In this example, by attaching the transparent member 803 to the package member 801 at an angle, the transparent member 803 is inclined with respect to the movable device 13 arranged in the package member 801 . The inclination angle is set to such an angle that the light multiple-reflected between the reflecting surface 14 included in the movable device 13 and the transmitting member 803 does not go out of the package member 801 .

With such a configuration, image noise or the like due to multiple reflected light can be prevented. However, since a member for relatively tilting the transmissive member 803 and the movable device 13 is required, the cost of the packaged movable device 13 may increase.

Therefore, in the movable device 13A of the present embodiment, the fixed part 130A surrounds the movable part 110 and the first drive beams 120a and 120b and has four frame sides each including a fixed support layer. The layer thickness is different.

Drawing 20 is a sectional view showing an example of composition of mobile 13A of this embodiment. The plan view of the movable device 13A is the same as that shown in FIG. 15, and FIG. 20 is a sectional view showing the AA section in FIG.

13 A of movable apparatuses are provided with 130 A of fixing|fixed parts. The fixed part 130A has a rectangular frame structure having four sides like the fixed part 130, and the four sides surround the movable part 110 and the first drive beams 120a and 120b ( See Figure 15).

Of the four frame sides, the fixed support layer 361a on one of the two frame sides facing each other in the X direction and the fixed support layer 361b on the other frame side have different thicknesses, as shown in FIG. .

On the other hand, FIG. 22 is a diagram showing an example of a configuration when the movable device 13A is packaged inside a package member 801 including a transparent member 803. As shown in FIG.

Since the fixed support layer 361a and the fixed support layer 361b of the fixed part 130A have different thicknesses, when the movable device 13A is arranged at the bottom inside the package member 801, as shown in FIG. 13 A of movable apparatuses incline.

Thereby, the transmissive member 803 and the movable device 13 can be relatively inclined, and multiple reflected light can be suppressed. Since a member for relatively inclining the transmissive member 803 and the movable device 13 is not provided, it is possible to reduce the cost of the packaged movable device 13A.

Furthermore, FIG. 23 is sectional drawing which shows an example of a structure of mobile 13B which is a modification of the mobile of 2nd Embodiment. In the fixed portion 130B of the movable device 13B, the surfaces of the fixed support layers 361c and 361d on the negative Z direction side are inclined with respect to the stacking direction (thickness direction) of the active layer 363 and the like.

As a result, when the movable device 13B is arranged inside the package member 801 including the transparent member 803 and the movable device 13B is packaged, the movable device 13B can be tilted with respect to the transparent member 803, as described above. effect can be obtained.

The surfaces of the fixed support layers 361c and 361d on the negative Z direction side are an example of "surfaces inclined with respect to the stacking direction."

[Third Embodiment]
Next, a movable device of a third embodiment will be described with reference to FIG. 24 .

When light is scanned in the Y direction (see FIG. 15) by the movable device 13C, the distance between the reflecting surface 14 and the frame side is short in the Y direction. may be

Therefore, in the present embodiment, the thickness of the fixed support layer on the longer frame side of the four frame sides included in the fixed portion 130C is made thinner than the thickness of the fixed support layer on the shorter frame side. .

Drawing 24 is a perspective view showing an example of composition of mobile 13C of a 3rd embodiment.

As shown in FIG. 24, the thickness of the fixed support layer on the longer frame side is thinner than the thickness of the fixed support layer on the shorter frame side. The longer frame side is closer to the reflecting surface 14 than the shorter frame side. Further, by reducing the thickness of the frame side, the height of the light shielding portion on the frame side can be made closer to the height of the reflecting surface.

Accordingly, by making the thickness of the fixed support layer on the longer frame side thinner than the thickness of the fixed support layer on the shorter frame side, blocking of scanning light by the frame side is suppressed, and the amount of scanning light is reduced. reduction can be suppressed.

Note that the thickness of the fixed support layer on the longer frame side may be partially reduced.

[Fourth embodiment]
Next, a mobile device of a fourth embodiment will be described with reference to FIG. 25 .

In the packaged mobile device 13 , the fixed part 130 is adhered to the bottom of the package member 801 . In this case, when the entire bottom surface of the fixed part 130 (the surface on the negative Z direction side of the fixed support layer 361) contacts the package member 801, the connection parts 109a and 109b ( 15) may be directly affected by vibration applied to the package member 801 and electrical disturbance noise. As a result, the movable portion 110 may not rotate properly.

Therefore, in the movable device 13D of the present embodiment, the thickness of the fixed portion 130D is partially changed, and the noise transmission path from the bottom of the package member 801 to the connection portions 109a and 109b (see FIG. 15) is lengthened (in a roundabout way). are doing.

25 is a cross-sectional view showing an example of the BB cross section in FIG. 15. FIG.

As shown in FIG. 25, the fixed support layer 361D of the fixed part 130D is provided with a concave portion 361Da, and the thickness _t3 of the fixed support layer 361D is partially reduced to the thickness _t3D . Note that the recess 361Da is a groove penetrating the fixed support layer 501D in the Y direction. However, it is not limited to this, and may be a depression.

With this configuration, the noise transmission path from the bottom of the package member 801 to the connection portions 109a and 109b (see FIG. 15) is lengthened (detoured), and vibrations applied to the package member 801 and electrical disturbance noise are reduced. can suppress the influence of

Note that the location where the recessed portion 361Da is provided for partially changing the thickness is not limited to one location, and a plurality of locations may be provided. Moreover, you may provide recessed part 361Da by a post-process after manufacturing movable apparatus 13D.

[Fifth embodiment]
Drawing 26 is a top view showing an example of composition of movable device 13E of a 5th embodiment.

The movable device 13E has first drive beams 120a and 120b and a movable portion 110E having a reflecting surface 14, and is a uniaxial movable device rotatable only around the X axis.

Moreover, FIG. 27 is a top view which shows an example of a structure of the mobile device 13F which is a modification of the mobile device 13E of 5th Embodiment.

The movable device 13F has torsion bars 115a and 115b, second drive beams 116a and 116b, and a movable portion 110F having a reflecting surface 14, and is a uniaxial movable device capable of rotating only around the Y axis. be.

Also in such single-axis movable devices 13E and 13F, the above-described embodiments can be applied to obtain the above-described effects.

Although examples of embodiments of the present invention have been described above, the present invention is not limited to such specific embodiments, and various modifications can be made within the scope of the invention described in the scope of the claims. Transformation and change are possible.

REFERENCE SIGNS LIST 10 optical scanning system 11 control device 12, 12b light source device 13, 13A, 13B, 13C, 13D, 13E, 13F movable device 14 reflecting surface 15 surface to be scanned 25 light source device driver 26 movable device driver 30 control section 31 drive signal output section 50 laser headlamp 51 mirror 52 transparent plate 60 head mounted display 60a front 60b temple 61 light guide plate 62 half mirror 63 wearer 110 movable part 112 reflecting part 113 supporting part 114a, 114b connecting part 115a, 115b torsion bar 116a, 116b second Drive beams 120a, 120b First drive beam 130 Fixed part 140 Electrode terminal 150A, 150B Piezoelectric drive part group 201 Lower electrode 202 Piezoelectric material 203 Upper electrode 303 Active layer 351 Support layer 351a Reflective surface support layer 351b Support part support layer 352 Interlayer film 353 movable layer 361, 361a, 361b, 361c, 361d fixed support layer 362 interlayer film 363 active layer 400 automobile (an example of a vehicle)
500 head-up display device (an example of an image projection device, an example of a head-up display)
650 laser printer 700 lidar device (an example of an object recognition device)
702 target object 801 package member 802 attachment member 803 transparent member

Japanese Patent No. 6092590

Claims (12)

a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixed part includes a fixed support layer made of the same material as the support layer;
four frame sides surrounding the movable portion and the pair of drive beams, each including the fixed support layer;
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and
A movable device in which the fixed support layer has a different thickness for each of the frame sides. a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixing part includes a fixing support layer made of the same material as the support layer,
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and
The fixed part is a movable device having a surface inclined with respect to the stacking direction. A movable device that scans irradiated light,
a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixed part includes a fixed support layer made of the same material as the support layer;
four rectangular frame sides that surround the movable portion and the pair of drive beams and each include the fixed support layer;
The longer frame side of the four frame sides is provided at a position that intersects with the light scanning direction,
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and the four frame sides are The movable device in which the fixed support layer is thinner on the longer frame side than on the shorter frame side. a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixing part includes a fixing support layer made of the same material as the support layer,
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and
The movable device, wherein the fixed support layer has recesses with partially different thicknesses. a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixed part includes a fixed support layer made of the same material as the support layer;
four frame sides surrounding the movable portion and the pair of drive beams, each including the fixed support layer;
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and
A movable device in which thicknesses of two of the fixed support layers facing each other among the four sides of the frame are different. A movable device that scans irradiated light,
a movable portion comprising a reflective surface;
a pair of drive beams each having one end connected to the movable portion and rotatably supporting the movable portion with the movable portion therebetween;
a fixing portion connected to the other end of each of the pair of drive beams and fixing the pair of drive beams;
The movable portion includes a support layer and a movable layer provided in a stacking direction of the support layer,
The fixed part includes a fixed support layer made of the same material as the support layer;
four frame sides surrounding the movable portion and the pair of drive beams, each including the fixed support layer;
Among the four frame sides, the first frame side is provided at a position that intersects with the light scanning direction,
a distance between the first frame side and the movable portion is shorter than a distance between the movable portion and a second frame side provided in a direction intersecting the first frame side;
When the thickness of the support layer is t1, the thickness of the movable layer is t2, and the thickness of the fixed support layer is t3, t1≧t2 and t1<t3, and
The fixed support layer included in the first frame side is thinner than the fixed support layer included in the second frame side . An image projection device comprising the movable device according to any one of claims 1 to 6. A head-up display comprising the movable device according to any one of claims 1 to 6. A laser headlamp comprising a mobile device according to any one of claims 1 to 6. A head mounted display comprising the movable device according to any one of claims 1 to 6. An object recognition device comprising the movable device according to any one of claims 1 to 6. A vehicle comprising at least one of the head-up display according to claim 8, the laser headlamp according to claim 10, and the object recognition device according to claim 11.

Images