JP2021189323A - Movable device, deflection device, distance measuring device, image projection device, and vehicle - Google Patents

Abstract

To provide a highly reliable movable device.SOLUTION: A movable device according to an embodiment of the present invention includes: a movable part; a first beam part connected to the movable part at a predetermined position, the first beam part rocking the movable part; a second beam part connected to the movable part at another position, the second beam part rocking the movable part; a first support part for supporting the first beam part; a second support part for supporting the second beam part; and a fixing part for fixing the first support part and the second support part. The first support part has a first hole part, the second support part has a second hole part, and the fixing part has a third hole part corresponding to the first hole part and a fourth hole part corresponding to the second hole part. Between the first and third hole parts and between the second and fourth hole parts, there is a positioning member.SELECTED DRAWING: Figure 1

Description

The present invention relates to a movable device, a deflection device, a distance measuring device, an image projection device, and a vehicle.

Conventionally, a MEMS (Micro Electro Mechanical Systems) device manufactured by microfabricating silicon or glass by a micromachining technology applying a semiconductor manufacturing technology is known.

Further, as a MEMS device, a movable part provided with a reflective surface and an elastic beam are integrally formed on a wafer, and the movable part is swung by a drive beam formed by superimposing a thin-film piezoelectric material on the elastic beam. With the device
A support portion provided with an open portion is disclosed (see, for example, Patent Document 1).

However, since the movable device of Patent Document 1 is configured to include two support portions by providing an open portion, the resonance frequency of the movable device may change or the movable device may change due to a change in the distance between the two support portions. May be damaged.

An object of the present invention is to provide a movable device having excellent reliability.

The movable device according to one aspect of the present invention is movable at a position different from the movable portion, the first beam portion that is connected to the movable portion at a predetermined location and swings the movable portion, and the predetermined location. A second beam portion that is connected to the portion and swings the movable portion, a first support portion that supports the first beam portion, and a second support portion that supports the second beam portion. The first support portion is provided with a fixing portion for fixing the first support portion and the second support portion, the first support portion is provided with a first hole portion, and the second support portion is provided with a second hole. The fixing portion includes a third hole portion provided so as to correspond to the first hole portion, and a fourth hole portion provided to correspond to the second hole portion. , And a positioning member is provided between the first hole and the third hole, and between the second hole and the fourth hole.

According to the present invention, it is possible to provide a movable device having excellent reliability.

It is a top view which shows the whole structure example of the movable device which concerns on 1st Embodiment. It is a figure which shows the structural example of the movable device which concerns on 1st Embodiment, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of a fixed part. It is a figure which shows the structural example of the movable device which concerns on a comparative example. It is a top view which shows the whole structure example of the movable device which concerns on 1st modification. It is a figure which shows the structural example of the movable device which concerns on 1st modification, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of the fixed part. It is a top view which shows the whole structure example of the movable device which concerns on 2nd Embodiment. It is a figure which shows the structural example of the movable device which concerns on 2nd Embodiment, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of a fixed part. It is a top view which shows the whole structure example of the movable device which concerns on 2nd modification. It is a figure which shows the structural example of the movable device which concerns on 2nd modification, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of the fixed part. It is a figure which shows the structural example of the movable device which concerns on 3rd Embodiment, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of a fixed part. It is a figure which shows the structural example of the movable device which concerns on 3rd modification, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of the fixed part. It is a figure which shows the structural example of the movable device which concerns on 4th Embodiment, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of a fixed part. It is a figure which shows the structural example of the movable device which concerns on 4th modification, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of the fixed part. It is a figure which shows the whole structure example of the movable device which concerns on 5th Embodiment. It is a figure which shows the structural example of the movable device which concerns on 5th Embodiment, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of a fixed part. It is a figure which shows the structural example of the movable device which concerns on 5th modification, (a) is the figure which shows the structure of the main body part, (b) is the figure which shows the structure of the fixed part. It is a schematic diagram of an example of an optical scanning system. It is a hardware block diagram of an example of an optical scanning system. It is a functional block diagram of an example of a control device. It is a flowchart of an example of the process which concerns on an optical scanning system. It is a schematic diagram of an example of an automobile equipped with a head-up display device. It is a schematic diagram of an example of a head-up display device. It is a schematic diagram of an example of an image forming apparatus equipped with an optical writing apparatus. It is a schematic diagram of an example of an optical writing device. It is a schematic diagram of an example of an automobile equipped with a rider device. It is a schematic diagram of an example of a rider device. It is a schematic diagram explaining an example of the structure of a laser headlamp. It is a schematic perspective view which shows an example of the structure of a head-mounted display. It is a figure which shows an example of a part of the structure of a head-mounted display. It is a schematic diagram which shows an example of the packaged movable device.

Hereinafter, embodiments for carrying out the invention will be described with reference to the drawings. In each drawing, the same components are designated by the same reference numerals, and duplicate description will be omitted as appropriate. Further, the embodiments shown below exemplify a movable device for embodying the technical idea of the present invention, and the present invention is not limited to the embodiments shown below. The dimensions, materials, shapes, relative arrangements, etc. of the components described below are not intended to limit the scope of the present invention to the specific description, but are intended to be exemplified. It is a thing. In addition, the size and positional relationship of the members shown in the drawings may be exaggerated in order to clarify the explanation.

In each of the drawings shown below, for convenience, the direction orthogonal to the swing axis of the movable device is defined as the X-axis direction, the direction parallel to the swing axis is defined as the Y-axis direction, and the directions orthogonal to the X-axis and the Y-axis are respectively. (Height direction) is the Z-axis direction.

[First Embodiment]
<Configuration example of movable device 100>
FIG. 1 is a diagram showing an example of the overall configuration of the movable device 100 according to the first embodiment. The cross section 100P in FIG. 1 shows a cross section taken along the line CC'of the movable device 100.

As shown in FIG. 1, the movable device 100 has a main body portion 120 represented by a solid line in the right figure of FIG. 1 and a fixed portion 130 represented by a broken line in the right figure of FIG. Further, the main body portion 120 has a movable portion 101, spring portions 102A and 102B, drive portions 103A and 103B, and support portions 106A and 106B.

The spring portion 102A is an example of a first beam portion that is connected to the movable portion 101 at a predetermined position and swings the movable portion 101. The spring portion 102B is an example of a second beam portion that is connected to the movable portion 101 at a location different from the above-mentioned predetermined location and swings the movable portion 101. The spring portions 102A and 102B each have a beam portion having a meander structure (folded structure), and the movable portion 101 is swung around the E axis of FIG. 1 corresponding to the swing axis.

Further, the surface of the movable portion 101 is a reflecting surface that reflects incident light. The movable device 100 can scan the light reflected by the reflecting surface in the direction orthogonal to the E axis (X-axis direction) by swinging the movable portion 101 around the E axis. As the reflective surface, the surface of the movable portion 101 itself may be used as the reflective surface, or the reflective surface may be formed on the surface of the movable portion 101.

The drive unit 103A is a thin-film piezoelectric material provided on the spring unit 102A. By deforming the spring portion 102A in response to the driving voltage, a driving force for swinging the movable portion 101 is supplied. The drive unit 103B is a thin-film piezoelectric material provided on the spring unit 102B. By deforming the spring portion 102B in response to the driving voltage, a driving force for swinging the movable portion 101 is supplied. Examples of the piezoelectric material include PZT (lead zirconate titanate) and the like, but other piezoelectric materials may be used, and any type may be used.

The support portion 106A is an example of a first support portion that supports the spring portion 102A. The support portion 106B is an example of a second support portion that supports the spring portion 102B. The fixing portion 130 is a fixing portion for fixing the support portion 106A and the support portion 106B.

The fixing portion 130 fixes the support portion 106A via the positioning member 110A, and also fixes the support portion 106B via the positioning member 110B. The fixing portion 130 can fix the support portions 106A and 106B by the adhesive 111. As the adhesive 111, any resin material-based adhesive such as epoxy-based, acrylate-based, and silicone-based adhesives can be used. Further, a filling member smaller than between the support portions 106A and 10B and the fixing portion 130 may be mixed.

2A and 2B are views showing an example of the configuration of the movable device 100, FIG. 2A is a diagram showing the configuration of the main body portion 120, and FIG. 2B is a diagram showing the configuration of the fixed portion 130. The cross section 120P in FIG. 2A shows the cross section taken along the line AA'of the main body portion 120, and the cross section 130P in FIG. 2B shows the cross section taken along the line BB'of the fixed portion 130.

As shown in FIG. 2A, the movable device 100 is provided with an open portion 105, and has an open configuration in which there is no obstruction on both sides of the movable portion 101 along the direction orthogonal to the swing axis.

Further, the support portion 106A of the movable device 100 is formed with a hole portion 107A as an example of the first hole portion. The hole 107A may be a through hole or a recess provided on the surface of the fixing portion 130 facing the fixing portion 130 when the supporting portion 106A is fixed. The hole portion 107A is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

Further, the support portion 106B is formed with a hole portion 107B as an example of the second hole portion. The hole 107B may be a through hole or a recess provided on the surface of the fixing portion 130 facing the fixing portion 130 when the support portion 106B is fixed. Further, the hole portion 107B is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 107A and the hole 107B are provided at positions that are substantially symmetrical with respect to the movable portion 101.

Further, as shown in FIG. 2B, the hole portion 108A and the hole portion 108B are formed in the fixing portion 130. The hole 108A is an example of a third hole provided so as to correspond to the hole 107A. The hole 108A may be a through hole, or may be a recess provided on the surface of the fixing portion 130 facing the support portion 106A when fixing the support portion 106A. Further, the hole portion 108A is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 108B is an example of a fourth hole provided so as to correspond to the hole 107B. The hole 108B may be a through hole or a recess provided on the surface of the fixing portion 130 facing the support portion 106B when fixing the support portion 106B. Further, the hole portion 108B is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The positioning member 110A (see FIG. 1) is provided between the hole 107A and the hole 108A, and the positioning member 110B (see FIG. 1) is provided between the hole 107B and the hole 108B. As the positioning members 110A and 110B, various shapes can be used according to the shapes of the holes 107A, 107B, 108A and 108B.

For example, when the cross-sectional shapes of the holes 107A, 107B, 108A and 108B are circular, the positioning members 110A and 110B are provided with a spherical member, a spheroidal member, or conical portions at both ends. Cylindrical members and the like can be used.

When the cross-sectional shapes of the holes 107A, 107B, 108A, and 108B are equilateral triangles, spherical members, spheroidal members, or conical portions are provided at both ends as the positioning members 110A and 110B. In addition to the columnar member, a regular hexahedron-shaped member, a triangular columnar member provided with regular tetrahedrons at both ends, and the like can be used.

Further, when the cross-sectional shapes of the holes 107A, 107B, 108A and 108B are equilateral triangles and the positional relationship between the holes 107A, 107B, 108A and 108B is rotated 180 degrees around the center of gravity of the equilateral triangles, the positioning members 110A and 110B are used. , Spheroidal members, spheroidal members, columnar members with conical portions at both ends, equilateral dodecaural members, and the like can be used.

When the cross-sectional shapes of the holes 107A, 107B, 108A and 108B are square, the positioning members 110A and 110B include a spherical member, a spheroidal member, and a columnar member having conical portions at both ends. A regular octahedron-shaped member and a square columnar member provided with quadrangular pyramids at both ends can be used.

When the cross-sectional shapes of the holes 107A, 107B, 108A, and 108B are regular pentagons, and the positional relationship between the holes 107A, 107B, 108A, and 108B is rotated 180 degrees around the center of gravity of the regular pentagons, the positioning members 110A and 110B are used. , Spheroidal members, spheroidal members, columnar members with conical portions at both ends, regular dodecahedron members, regular icosahedron members, and the like can be used.

By providing the positioning member 110A between the hole 107A and the hole 108A, the positioning member 110A fits into both the hole 107A and the hole 108A, and the center of each of the hole 107A, the hole 108A, and the positioning member 110A. Or the center of gravity is lined up in a straight line.

Further, by providing the positioning member 110B between the hole portion 107B and the hole portion 108B, the positioning member 110B fits into both the hole portion 107B and the hole portion 108B, and each of the hole portion 107B, the hole portion 108B, and the positioning member 110B is provided. The center or center of gravity is aligned approximately in a straight line.

By providing the positioning members 110A and 110B in this way, the fixed portion 130 and the support portion 106A can be aligned, and the fixed portion 130 and the support portion 106B can be aligned.

Here, satisfies _{d 1} the diameter of the spherical member in the positioning member 110A and 110B, holes 107A, 107B, the cross-sectional shape of 108A and 108B to the diameter when it is circular and _{d 2,} the following equation (1) It is preferable to do so. Note that d ₁ also corresponds to the diameter of the spheroidal member in the positioning members 110A and 110B, or the cylindrical member provided with conical portions at both ends.

Further, when the cross-sectional shapes of the holes 107A, 107B, 108A and 108B are polygons, and the length of one side of the polygon is a ₁ and the number of sides is n, the following equation (2) is obtained. It is preferable to be satisfied.

Further, a positioning member 110A and 11B, holes 107A, 107B, if the respective cross-sectional shape in 108A and 108B is a regular polyhedron is the length of the regular polyhedron side _{a 2,} holes 107A, 107B, 108A and when each of the length of one side of the regular polygon of 108B and a _3, it is preferable to satisfy the following equation (3).

When the holes 107A, 107B, 108A and 108B are not through holes, the respective depths of the holes 107A and 108A are such that when the positioning member 110A comes into contact with the inlets of the holes 107A and 108A, the holes are formed. It is preferable that the depth is such that the positioning member 110A does not come into contact with the bottom portions of the portions 107A and 108A.

Similarly, the respective depths of the holes 107B and 108B are such that the positioning member 110B does not contact the bottoms of the holes 107B and 108B when the positioning member 110B contacts the inlets of the holes 107B and 108B. It is preferable to have.

On the other hand, when each of the holes 107A, 107B, 108A and 108B is made into a through hole, the fixing portion 130 is positioned for the package member or the like to be adhered to the surface opposite to the surface facing the support portions 106A and 10B. It is suitable because the holes 107A, 107B, 108A and 108B can be used.

<Action and effect of the movable device 100>
In recent years, the development of a movable device manufactured by MEMS technology has been progressing as a small optical scanning means mounted on an image display device typified by a projector or the like and a distance measuring device such as LiDAR (Light Detection And Ranging). In these movable devices, the movable portion including the reflecting surface is swung around the swing axis, and the light incident on the reflecting surface is scanned in the direction orthogonal to the swing axis. Further, in order to increase the scanning angle of the scanning light by the movable device, the size of the reflective surface in the movable device is 1 mm or more in diameter in the case of a circular reflective surface and 1 mm or more in the side length in the case of a rectangular reflective surface. In some cases, a large size such as is required. Further, as the swing angle of the movable portion, a large swing angle such as 10 degrees or more may be required.

Here, FIG. 3 shows the configuration of the movable device 100X according to the comparative example. Similar to the movable device 100, the movable device 100X also has the spring portion 102AX connected to the movable portion 101X at a predetermined location, and the spring portion 102BX is connected to the movable portion 101X at a location different from the above predetermined location. Is configured to be swingable around the E axis in FIG. The movable device 100X can scan the light incident on the surface of the movable portion 101X as the reflecting surface in the direction orthogonal to the E axis.

However, in the movable device 100X, the support portion 106X is provided so as to surround the movable portion 101X, the spring portion 102AX, and the spring portion 102BX. If the size of the reflective surface of the movable portion 101X is increased in this configuration, the size of the reflective surface may be limited because the movable portion 101X collides with the side portion 105X of the movable portion 101X in the support portion 106X. Further, when the swing angle of the movable portion 101X is increased, the scanning angle of the light by the movable device 100X may be limited because the light reflected by the movable portion 101X is blocked by the side portion 105X of the support portion 106X.

In the present embodiment, since the open portions 105 are provided on both sides of the movable portion 101 along the direction orthogonal to the swing axis (see FIG. 2A), even if the size of the reflective surface in the movable portion 101 is increased. The support portion does not collide with the movable portion 101. Further, even if the swing angle of the movable portion 101 is increased, the support portion does not block the light reflected by the movable portion 101. As a result, the size of the reflective surface of the movable portion 101 can be increased, and the swing angle of the movable portion 101 can be increased.

On the other hand, in the movable device 100, by providing the open portion 105, the support portion is divided into two parts, the support portion 106A and the support portion 106B, with the movable portion 101 interposed therebetween. In the configuration in which the support portion is divided, the distance between the support portion 106A and the support portion 106B changes when the movable device 100 is manufactured or when the ambient environmental temperature changes when the movable device 100 is used. There is. Due to such a change in distance, the resonance frequency of the movable device 100 may change or the breaking (damage) angle of the movable device 100 may decrease, and there is room for improvement in terms of reliability.

In the present embodiment, the support portion 106A (first support portion) and the support portion 106B (second support portion) are fixed by the fixing portion 130. Further, a positioning member 110A is provided between the hole 107A (first hole) provided in the support 106A and the hole 108A (third hole) provided in the fixing 130, and the support 106B is provided with a positioning member 110A. A positioning member 110B is provided between the hole 107B (second hole) provided and the hole 108B (fourth hole) provided in the fixing 130.

By fixing the fixing portion 130, the change in the distance between the support portion 106A and the support portion 106B can be suppressed, and the distance between the support portion 106A and the support portion 106B defined by the positioning members 110A and 110B can be maintained. can.

Further, when the movable device 100 is manufactured by a semiconductor process using a silicon wafer or an SOI ((Silicon on Insulator)) wafer, a hole 107A is formed in the support portion 106A with a high dimensional accuracy of several μm or less, and the support portion 106B is formed. Since the hole 107B can be formed, the distance between the support 106A and the support 106B can be accurately defined.

Further, when the fixed portion 130 is formed by using a silicon wafer or an SOI wafer made of the same material as the support portions 106A and 106B, the linear expansion coefficients of the support portions 106A and 106B and the fixed portion 130 become equal, so that the ambient temperature and the like are equal. It is possible to suppress the change in the distance between the support portion 106A and the support portion 106B due to the above.

Further, when silicon or SOI is used as the material of the fixing portion 130, the fixing portion 130 can be manufactured by the semiconductor process, so that the fixing portion 130 can be manufactured with high accuracy. However, the material of the fixing portion 130 is not limited to silicon or SOI, and a material such as silicon oxide or ceramic having a small difference in linear expansion coefficient from the support portions 106A and 106B using silicon or SOI as a material is used. The fixed portion 130 can also be used. It is desirable that the difference in linear expansion coefficient between the material forming the support portions 106A and 106B and the material forming the fixed portion 130 is 10 ppm or less.

Here, in the present embodiment, the configuration of the movable device 100 including the rectangular movable portion 101 and the spring portions 102A and 102B of the meander structure is illustrated, but the present invention is not limited to this, and various modifications are possible. Is. An example is shown below.

<Structure example of the movable device 200 according to the modified example>
FIG. 4 is a diagram showing an example of the overall configuration of the movable device 200 according to the modified example. The cross section 200P in FIG. 4 shows a cross section taken along the line CC'of the movable device 200. It should be noted that the description of the parts having the same configuration and functions as those of the movable device 100 will be omitted as appropriate.

As shown in FIG. 4, the movable device 200 has a main body portion 220 and a fixing portion 230. Further, the main body 220 has a movable portion 201, spring portions 202A and 202B, drive portions 203A and 203B, and support portions 206A and 206B.

The spring portion 202A is an example of a first beam portion that is connected to the movable portion 201 at a predetermined position and swings the movable portion 201. The spring portion 202B is an example of a second beam portion that is connected to the movable portion 201 at a location different from the above-mentioned predetermined location and swings the movable portion 201. The spring portions 202A and 202B swing the movable portion 201 around the E axis in FIG.

Further, the movable portion 201 is formed in a circular shape, and a reflective surface for reflecting incident light is formed on the surface thereof. The movable device 200 can scan the light reflected by the reflecting surface of the movable portion 201 in the direction orthogonal to the E axis by swinging the movable portion 201 around the E axis. The reflective surface may be the surface of the movable portion 201 itself as the reflective surface, or the reflective surface may be formed on the surface of the movable portion 201.

The drive portion 203A is a thin-film piezoelectric material provided in the shape of the spring portion 202A. By deforming the spring portion 202A in response to the driving voltage, a driving force for swinging the movable portion 201 is supplied. The drive unit 203B is a thin-film piezoelectric material provided on the spring unit 202B. By deforming the spring portion 202B in response to the driving voltage, a driving force for swinging the movable portion 201 is supplied. Examples of the piezoelectric material include PZT (lead zirconate titanate) and the like, but other piezoelectric materials may be used, and any type may be used.

The support portion 206A is an example of a first support portion that supports the spring portion 202A. The support portion 206B is an example of a second support portion that supports the spring portion 202B. The fixing portion 230 is a fixing portion for fixing the support portion 206A and the support portion 206B.

The fixing portion 230 fixes the support portion 206A via the positioning member 210A, and also fixes the support portion 206B via the positioning member 210B. The fixing portion 230 can fix the support portions 206A and 206B by the adhesive 211.

5A and 5B are views showing an example of the configuration of the movable device 200, FIG. 5A is a diagram showing the configuration of the main body portion 220, and FIG. 5B is a diagram showing the configuration of the fixed portion 230. The cross section 220P in FIG. 5A shows the cross section taken along the line AA'of the main body 220, and the cross section 230P in FIG. 5B shows the cross section taken along the line BB'of the fixed portion 230.

As shown in FIG. 5A, the movable device 200 is provided with an open portion 205, and has an open configuration in which there is no obstruction on both sides of the movable portion 201 along the direction orthogonal to the swing axis. The support portion 206A of the movable device 200 is formed with a hole portion 207A as an example of the first hole portion, and the support portion 206B is formed with a hole portion 207B as an example of the second hole portion.

Further, as shown in FIG. 5 (b), the hole portion 208A and the hole portion 208B are formed in the fixing portion 230. The hole 208A is an example of a third hole provided so as to correspond to the hole 207A. The hole 108B is an example of a fourth hole provided so as to correspond to the hole 207B.

The movable device 200 configured in this way can also obtain the same effect as that of the movable device 100.

[Second Embodiment]
Next, the movable device 100a according to the second embodiment will be described. It should be noted that the description of the portion that overlaps with the movable device 100 according to the first embodiment will be omitted as appropriate. This point shall be the same in other embodiments shown below.

<Configuration example of movable device 100a>
FIG. 6 is a diagram showing an example of the overall configuration of the movable device 100a. The cross section 100aP in FIG. 6 shows the cross section of the movable device 100a viewed from the arrow C-C'. As shown in FIG. 6, the movable device 100a has a main body portion 120a and a fixing portion 130a.

The fixing portion 130a fixes the support portion 106A via the positioning member 110Aa, and also fixes the support portion 106B via the positioning member 110Ba. The fixing portion 130a can fix the support portions 106A and 106B by the adhesive 111.

7A and 7B are views showing an example of the configuration of the movable device 100a, FIG. 7A is a diagram showing the configuration of the main body portion 120a, and FIG. 7B is a diagram showing the configuration of the fixed portion 130a. The cross section 120aP in FIG. 7A shows the cross section taken along the line AA'of the main body portion 120a, and the cross section 130aP in FIG. 7B shows the cross section taken along the line BB'of the fixed portion 130a.

As shown in FIG. 7A, the support portion 106A of the movable device 100a is formed with a hole portion 107Aa as an example of the first hole portion. The hole 107Aa is composed of three holes. Each of the three holes in the hole 107Aa may be a through hole, or may be a recess provided on the surface of the fixing portion 130a facing the fixing portion 130a when fixing the support portion 106A. good. The hole portion 107Aa is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected. In this embodiment, an example in which the hole portion 107Aa is composed of three holes is shown, but the number is not limited to this, and any number may be used as long as it is two or more.

Further, the support portion 106B is formed with a hole portion 107Ba as an example of the second hole portion. The hole 107Ba is also composed of three holes. Each of the three holes in the hole 107Ba may be a through hole, or may be a recess provided on the surface of the fixing portion 130a facing the fixing portion 130a when fixing the support portion 106B. good. Further, the hole portion 107Ba is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole portion 107Aa and the hole portion 107Ba are provided at positions that are substantially symmetrical with respect to the movable portion 101. Further, the three holes in the hole 107Aa and the three holes in the hole 107Ba are provided at positions that are substantially symmetrical with respect to the E axis.

Further, as shown in FIG. 7 (b), the hole portion 108Aa and the hole portion 108Ba are formed in the fixing portion 130a. The hole 108Aa is an example of a third hole provided so as to correspond to the hole 107Aa. It is composed of three holes corresponding to the hole 107Aa. The hole 108Aa may be a through hole, or may be a recess provided on the surface of the fixing portion 130a facing the support portion 106A when fixing the support portion 106A. Further, the hole portion 108Aa is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 108Ba is an example of a fourth hole provided so as to correspond to the hole 107Ba. It is composed of three holes corresponding to the hole 107Ba. The hole 108Ba may be a through hole or a recess provided on the surface of the fixing portion 130a facing the support portion 106B when the support portion 106B is fixed. Further, the hole portion 108Ba is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The positioning member 110Aa (see FIG. 6) is provided between the hole portion 107Aa and the hole portion 108Aa. The positioning member 110Aa is composed of three members corresponding to the respective numbers of the hole portion 107Aa and the hole portion 108Aa. Further, the positioning member 110Ba (see FIG. 6) is provided between the hole portion 107Ba and the hole portion 108Ba. The positioning member 110Ba is composed of three members corresponding to the respective numbers of the hole portion 107Ba and the hole portion 108Ba.

The positioning member 110Aa is the same member as the positioning member 110A except that the number is changed to three, and the positioning member 110Ba is also the same member as the positioning member 110B except that the number is changed to three. be. Therefore, here, overlapping description regarding the functions and shapes of the positioning members 110Aa and 110Ba will be omitted.

<Action and effect of movable device 100a>
As described above, in the present embodiment, the holes 107Aa and 107Ba are each composed of a plurality of holes (three in the present embodiment), and the holes 108Aa and 108Ba correspond to the number of holes 107Aa and 107Ba. Is composed of a plurality of holes. Further, each of the positioning members 110Aa and 110Ba is composed of a plurality of members corresponding to the number of holes 107Aa, 107Ba, 108Aa and 108Ba.

By positioning the main body portion 120a and the fixing portion 130a using a plurality of holes, the support portion 106A is used when the movable device 100a is manufactured or when the ambient temperature changes when the movable device 100a is used. It is possible to more preferably suppress the change in the distance between the support portion 106B and the support portion 106B.

Further, in the present embodiment, a plurality of holes in each of the holes 107Aa, 107Ba, 108Aa and 108Ba are arranged at positions that are line-symmetric with respect to the E axis, which is the swing axis. As a result, stress is evenly generated with respect to the change in the distance between the support portion 106A and the support portion 106B, so that it is possible to prevent the movable device 100a from being destroyed or damaged due to the stress being concentrated at a specific location.

The effects other than the above are the same as those described in the first embodiment.

<Structure example of the movable device 200a according to the modified example>
Here, FIG. 8 is a diagram showing an example of the overall configuration of the movable device 200a according to the modified example. The cross section 200aP in FIG. 8 shows the cross section of the movable device 200a viewed from the arrow C-C'. It should be noted that duplicate explanations will be omitted as appropriate for parts having the same configurations and functions as those described in the above-described embodiments and modifications. This point also applies to the case where the movable device according to the modified example will be described below.

As shown in FIG. 8, the movable device 200a has a main body portion 220a and a fixing portion 230a. The fixing portion 230a fixes the support portion 206A via the positioning member 210Aa, and also fixes the support portion 206B via the positioning member 210Ba. The fixing portion 230a can fix the support portions 206Aa and 206Ba by the adhesive 211.

9A and 9B are views showing an example of the configuration of the movable device 200a, FIG. 9A is a diagram showing the configuration of the main body portion 220a, and FIG. 9B is a diagram showing the configuration of the fixed portion 230a. The cross section 220aP in FIG. 9A shows the cross section taken along the line AA'of the main body portion 220a, and the cross section 230aP in FIG. 9B shows the cross section taken along the line BB'of the fixed portion 230a.

As shown in FIG. 9A, the support portion 206A of the movable device 200a is formed with a hole portion 207Aa as an example of the first hole portion, and the support portion 206B is formed as an example of the second hole portion. The hole portion 207Ba of the above is formed. The holes 207Aa and 207Ba are each composed of three holes.

Further, as shown in FIG. 9B, the hole portion 208Aa and the hole portion 208Ba are formed in the fixing portion 230a. The hole 208Aa is an example of a third hole provided so as to correspond to the hole 207Aa. It is composed of three holes corresponding to the hole portion 207Aa. The hole 208Ba is an example of a fourth hole provided so as to correspond to the hole 207Ba. It is composed of three holes corresponding to the hole 207Ba.

Even with the movable device 200a configured in this way, the same effect as that of the movable device 100a can be obtained.

[Third Embodiment]
Next, the movable device 100b according to the third embodiment will be described.

<Configuration example of movable device 100b>
10A and 10B are views showing an example of the configuration of the movable device 100b, FIG. 10A is a diagram showing the configuration of the main body portion 120b, and FIG. 10B is a diagram showing the configuration of the fixed portion 130b. The cross section 120bP in FIG. 10A shows the cross section taken along the line AA'of the main body portion 120b, and the cross section 130bP in FIG. 10B shows the cross section taken along the line BB'of the fixed portion 130b.

As shown in FIG. 10A, the support portion 106A of the movable device 100b is formed with a hole portion 107Ab as an example of the first hole portion. The hole 107Ab is composed of three holes. Each of the three holes in the hole 107Ab may be a through hole, or may be a recess provided on the surface of the fixing portion 130b facing the fixing portion 130b when fixing the support portion 106A. good. The hole portion 107Ab is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected. In this embodiment, an example in which the hole portion 107Ab is composed of three holes is shown, but the number is not limited to this, and any number may be used as long as it is one or more.

Further, the support portion 106B is formed with a hole portion 107Bb as an example of the second hole portion. The hole 107Bb is also composed of three holes. Each of the three holes in the hole 107Bb may be a through hole, or may be a recess provided on the surface of the fixing portion 130b facing the fixing portion 130b when fixing the support portion 106B. good. Further, the hole portion 107Bb is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole portion 107Ab and the hole portion 107Bb are provided at positions symmetrical with respect to the movable portion 101. Further, the three holes in the hole portion 107Aa and the hole portion 107Ba are provided at positions symmetrical with respect to the E axis.

Further, as shown in FIG. 10B, the hole portion 108Ab and the hole portion 108Bb are formed in the fixing portion 130b. The hole 108Ab is an example of a third hole provided so as to correspond to the hole 107Ab. It is composed of three holes corresponding to the hole 107Ab. The hole portion 108Ab may be a through hole, or may be a recess provided on the surface of the fixing portion 130b on the side facing the support portion 106A when the support portion 106A is fixed. Further, the hole portion 108Ab is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 108Bb is an example of a fourth hole provided so as to correspond to the hole 107Bb. It is composed of three holes corresponding to the holes 107Bb. The hole portion 108Bb may be a through hole, or may be a recess provided on the surface of the fixing portion 130b on the side facing the support portion 106B when the support portion 106B is fixed. Further, the hole portion 108Bb is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

Here, the portion of the fixing portion 130b for fixing the support portion 106A is formed in a shape corresponding to the support portion 106A. The shape corresponding to the support portion 106A is, for example, the same shape as the support portion 106A. However, the shapes do not have to be exactly the same, and differences to the extent generally recognized as manufacturing errors are acceptable.

Similarly, the portion of the fixing portion 130b for fixing the support portion 106B is formed in a shape corresponding to the support portion 106B. The shape corresponding to the support portion 106B is, for example, the same shape as the support portion 106B. However, the shapes do not have to be exactly the same, and differences to the extent generally recognized as manufacturing errors are acceptable.

Similar to those described in the first and second embodiments, positioning members are provided between the hole 107Aa and the hole 108Aa, and between the hole 107Ba and the hole 108Ba, respectively. The function and shape of the positioning member are the same as those described in the first and second embodiments.

<Action and effect of movable device 100b>
As described above, in the present embodiment, the portion of the fixing portion 130b for fixing the support portion 106A is formed in a shape corresponding to the support portion 106A, and the portion of the fixing portion 130b for fixing the support portion 106B is the support portion. It is formed in a shape corresponding to 106B.

By doing so, when the movable device 100b after the fixing portion 130b fixes the main body portion 120b is mounted on a package member, a circuit board, or the like, the surface of the fixing portion 130b facing the support portions 106A and 106B Can bond the entire opposite surface to a package member or circuit board. As a result, it is not necessary to provide the package member or the circuit board with an uneven shape or the like for arranging the fixing portion 130b, and the configuration of the package member or the circuit board can be simplified. Further, since the adhesive area between the fixed portion 130b and the supporting portions 106A and 106B becomes large, the supporting portions 106A and 106B are less likely to be deformed, and are affected by changes in the ambient environmental temperature during manufacturing and use. It can be made difficult.

The effects other than the above are the same as those described in the first and second embodiments.

<Structure example of the movable device 200b according to the modified example>
Here, FIG. 11 is a diagram showing an example of the configuration of the movable device 200b according to the modified example, (a) is a diagram showing the configuration of the main body portion 220b, and (b) is a diagram showing the configuration of the fixed portion 230b. be. The cross section 220bP in FIG. 11A shows the cross section taken along the line AA'of the main body portion 220b, and the cross section 230bP in FIG. 11B shows the cross section taken along the line BB'of the fixed portion 230b.

As shown in FIG. 11A, the support portion 206A of the movable device 200b is formed with a hole portion 207Ab as an example of the first hole portion, and the support portion 206B is formed as an example of the second hole portion. The hole portion 207Bb of the above is formed. The holes 207Ab and 207Bb are each composed of three holes.

Further, as shown in FIG. 11B, the hole portion 208Ab and the hole portion 208Bb are formed in the fixed portion 230b. The hole 208Ab is an example of a third hole provided so as to correspond to the hole 207Ab. It is composed of three holes corresponding to the hole 207Ab. The hole 208Bb is an example of a fourth hole provided so as to correspond to the hole 207Bb. It is composed of three holes corresponding to the holes 207Bb.

Here, the portion of the fixing portion 230b for fixing the support portion 206A is formed in a shape corresponding to the support portion 206A. The shape corresponding to the support portion 206A is, for example, the same shape as the support portion 206A. However, the shapes do not have to be exactly the same, and differences to the extent generally recognized as manufacturing errors are acceptable.

Similarly, the portion of the fixing portion 230b for fixing the support portion 206B is formed in a shape corresponding to the support portion 206B. The shape corresponding to the support portion 206B is, for example, the same shape as the support portion 206B. However, the shapes do not have to be exactly the same, and differences to the extent generally recognized as manufacturing errors are acceptable.

Even with the movable device 200b configured in this way, the same effect as that of the movable device 100b can be obtained.

[Fourth Embodiment]
Next, the movable device 100c according to the fourth embodiment will be described.

<Configuration example of movable device 100c>
12A and 12B are views showing an example of the configuration of the movable device 100c, FIG. 12A is a diagram showing the configuration of the main body portion 120c, and FIG. 12B is a diagram showing the configuration of the fixed portion 130c. The cross section 120cP in FIG. 12A shows the cross section taken along the line AA'of the main body portion 120c, and the cross section 130cP in FIG. 12B shows the cross section taken along the line BB'of the fixed portion 130c.

As shown in FIG. 12A, the support portion 106A of the movable device 100c is formed with a hole portion 107Ac as an example of the first hole portion. The hole 107Ac is composed of three holes. Each of the three holes in the hole 107Ac may be a through hole, or may be a recess provided on the surface of the fixing portion 130c facing the fixing portion 130c when fixing the support portion 106A. good. The hole portion 107Ac is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected. In this embodiment, an example in which the hole 107Ac is composed of three holes is shown, but the number is not limited to this, and any number may be used as long as it is one or more.

Further, the support portion 106B is formed with a hole portion 107Bc as an example of the second hole portion. The hole 107Bc is also composed of three holes. Each of the three holes in the hole 107Bc may be a through hole, or may be a recess provided on the surface of the fixing portion 130c facing the fixing portion 130c when fixing the support portion 106B. good. Further, the hole portion 107Bc is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole portion 107Ac and the hole portion 107Bc are provided at positions symmetrical with respect to the movable portion 101. Further, the three holes in the hole portion 107Ac and the hole portion 107Bc are provided at positions symmetrical with respect to the E axis.

Further, as shown in FIG. 12B, the hole portion 108Ac and the hole portion 108Bc are formed in the fixing portion 130c. The hole 108Ac is an example of a third hole provided so as to correspond to the hole 107Ac. It is composed of three holes corresponding to the hole 107Ac. The hole 108Ac may be a through hole, or may be a recess provided on the surface of the fixing portion 130c on the side facing the support portion 106A when fixing the support portion 106A. Further, the hole portion 108Ac is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 108Bc is an example of a fourth hole provided so as to correspond to the hole 107Bc. It is composed of three holes corresponding to the hole 107Bc. The hole portion 108Bc may be a through hole, or may be a recess provided on the surface of the fixing portion 130c on the side facing the support portion 106B when the support portion 106B is fixed. Further, the hole portion 108Bc is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

Here, in the fixed portion 130c, the portion facing the movable portion 101 when the fixed portion 130c fixes the support portions 106A and 106B is formed thinner than the other portions in the fixed portion 130c. In FIG. 12B, the facing portion 131 corresponds to a portion facing the movable portion 101 when the fixing portion 130c fixes the support portions 106A and 106B. _{The thickness w 1} of the facing portion 131 is formed to be thinner than _{the thickness w 2} of the other portion in the fixed portion 130c.

Similar to those described in the first and second embodiments, positioning members are provided between the hole 107Aa and the hole 108Aa, and between the hole 107Ba and the hole 108Ba, respectively. The function and shape of the positioning member are the same as those described in the first and second embodiments.

<Action and effect of movable device 100c>
As described above, in the present embodiment, in the fixed portion 130c, the portion facing the movable portion 101 when the fixed portion 130c fixes the support portions 106A and 106B is formed thinner than the other portions in the fixed portion 130c. ing.

By doing so, even if the swing angle of the movable portion 101 becomes large, the contact between the movable portion 101 and the fixed portion 130c can be avoided, and the decrease in the rigidity of the fixed portion 130c can be suppressed. Here, the distance from the rotation center Q of the movable portion 101 to the surface of the movable portion 101 facing the fixed portion 130c is t (see the partially enlarged view shown by the broken line circle R in FIG. 12A). Let H be the distance from the surface of the 101 facing the fixed portion 130c to the surface of the support portions 106A and 106B facing the fixed portion 130c (see FIG. 12A). Further, assuming that the maximum swing angle of the movable portion 101 is θ, it is preferable that the following equation (4) is satisfied.

By satisfying the equation (4), even if the swing angle of the movable portion 101 becomes large, the effect of avoiding the contact between the movable portion 101 and the fixed portion 130c and suppressing the decrease in the rigidity of the fixed portion 130c is further improved. It can be preferably obtained.

The effects other than the above are the same as those described in the first and second embodiments.

<Structure example of the movable device 200c according to the modified example>
Here, FIG. 13 is a diagram showing an example of the configuration of the movable device 200c according to the modified example, (a) is a diagram showing the configuration of the main body portion 220c, and (b) is a diagram showing the configuration of the fixed portion 230c. be. The cross section 220cP in FIG. 13A shows the cross section taken along the line AA'of the main body portion 220c, and the cross section 230cP in FIG. 13B shows the cross section taken along the line BB'of the fixed portion 230c.

As shown in FIG. 13A, the support portion 206A of the movable device 200c is formed with the hole portion 207Ac as an example of the first hole portion, and the support portion 206B is formed with the hole portion 206B as an example of the second hole portion. The hole portion 207Bc of the above is formed.

Further, as shown in FIG. 13B, the hole portion 208Ac and the hole portion 208Bc are formed in the fixing portion 230c. The hole 208Ac is an example of a third hole provided so as to correspond to the hole 207Ac. The hole 208Bc is an example of a fourth hole provided so as to correspond to the hole 207Bc.

Here, in the fixed portion 230c, the portion facing the movable portion 201 when the fixed portion 230c fixes the support portions 206A and 206B is formed thinner than the other portions in the fixed portion 230c. In FIG. 13B, the facing portion 231 corresponds to the portion facing the movable portion 201. _{The thickness x 1} of the facing portion 231 is thinner than _{the thickness x 2} of the other portion in the fixed portion 230c.

Even with the movable device 200c configured in this way, the same effect as that of the movable device 100c can be obtained.

[Fifth Embodiment]
Next, the movable device 100d according to the fifth embodiment will be described.

<Configuration example of movable device 100d>
FIG. 14 is a diagram showing an example of the overall configuration of the movable device 100d. The cross section 100dP in FIG. 14 shows the cross section of the movable device 100d as seen from the arrow C-C'. As shown in FIG. 14, the movable device 100d has a main body portion 120d and a fixing portion 130d.

The fixing portion 130d fixes the support portion 106A via the positioning member 110Ad, and also fixes the support portion 106B via the positioning member 110Bd. The fixing portion 130d can fix the support portions 106A and 106B by the adhesive 111. The functions and shapes of the positioning members 110Ad and 110Bd are the same as those described in the first and second embodiments.

15A and 15B are views showing an example of the configuration of the movable device 100d, FIG. 15A is a diagram showing the configuration of the main body portion 120d, and FIG. 15B is a diagram showing the configuration of the fixed portion 130d. The cross section 120dP in FIG. 15A shows the cross section taken along the line AA'of the main body portion 120d, and the cross section 130dP in FIG. 15B shows the cross section taken along the line BB'of the fixed portion 130d.

As shown in FIG. 15A, the support portion 106A of the movable device 100d is formed with a hole portion 107Ad as an example of the first hole portion. The hole 107Ad may be a through hole, or may be a recess provided on the surface of the fixing portion 130d facing the fixing portion 130d when fixing the support portion 106A. The hole portion 107Ad is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

Further, the support portion 106B is formed with a hole portion 107Bd as an example of the second hole portion. The hole 107Bd may be a through hole, or may be a recess provided on the surface of the fixing portion 130d facing the fixing portion 130d when fixing the support portion 106B. Further, the hole portion 107Bd is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 107Ad and the hole 107Bd are provided at symmetrical positions with the movable portion 101 interposed therebetween.

Further, as shown in FIG. 15B, the hole portion 108Ad and the hole portion 108Bd are formed in the fixing portion 130d. The hole 108Ad is an example of a third hole provided so as to correspond to the hole 107Ad. The hole 108Ad may be a through hole or a recess provided on the surface of the fixing portion 130d facing the support portion 106A when the support portion 106A is fixed. The hole portion 108Ad is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

The hole 108Bd is an example of a fourth hole provided so as to correspond to the hole 107Bd. The hole 108Bd may be a through hole, or may be a recess provided on the surface of the fixing portion 130d facing the support portion 106B when the support portion 106B is fixed. The hole portion 108Bd is a hole portion having a rectangular cross-sectional shape, but the cross-sectional shape is not limited to this, and the cross-sectional shape can be appropriately selected.

Here, the adhesive region 132 for adhering each of the support portions 106A and 106B in the fixed portion 130d is formed so as to be higher than the region other than the adhesive region 132 in the fixed portion 130d. Further, in the fixed portion 130d, the facing region 133 facing the movable portion 101 when the fixed portion 130d fixes the support portions 106A and 106B is formed so as to be lower than the region other than the facing region 133 in the fixed portion 130d. ..

Further, in the movable portion 101, a rib structure 108 for suppressing deformation of the movable portion 101 is formed on a surface facing the fixed portion 130d when the fixed portion 130d fixes the support portions 106A and 106B.

<Action and effect of movable device 100d>
As described above, in the present embodiment, the adhesive region 132 for adhering each of the support portions 106A and 106B in the fixed portion 130d is formed to be higher than the region other than the adhesive region 132 in the fixed portion 130d. As a result, even when the swing angle of the movable portion 101 becomes large, it is possible to prevent the movable portion 101 and the spring portions 102A and 102B from coming into contact with the fixed portion 130d.

Further, as in the present embodiment, when the rib structure 108 is formed on the surface of the movable portion 101 facing the fixed portion 130d when the fixed portion 130d fixes the support portions 106A and 106B, the movable portion 101 of the movable portion 101. When the swing angle is increased, the movable portion 101 and the spring portions 102A and 102B may come into contact with the fixed portion 130d. The contact may change the resonance frequency of the movable device 100d, damage the movable portion 101, or raise a concern in terms of reliability.

In the present embodiment, in the fixed portion 130d, the facing region 133 facing the movable portion 101 when the fixed portion 130d fixes the support portions 106A and 106B is lower than the region other than the facing region 133 in the fixed portion 130d. Form. As a result, even if the swing angle of the movable portion 101 is increased, contact between the movable portion 101 and the spring portions 102A and 102B and the fixed portion 130d can be avoided, and the reliability can be improved.

In the rib structure 108, when the fixing portion 130d fixes the support portions 106A and 106B, the surface 109 facing the fixing portion 130d, and in the support portions 106A and 106B, the fixing portion 130d fixes the support portions 106A and 106B. If the height of the surface 110 facing the fixed portion 130d when are the same, the difference of H ₂ height of the bonding region 132 and the opposing region 133 preferably satisfies the following equation (5).

なお、上記以外の効果については、第１実施形態で説明したものと同様である。

The effects other than the above are the same as those described in the first embodiment.

<Structure example of the movable device 200d according to the modified example>
Here, FIG. 16 is a diagram showing an example of the configuration of the movable device 200d according to the modified example, (a) is a diagram showing the configuration of the main body portion 220d, and (b) is a diagram showing the configuration of the fixed portion 230d. .. The cross section 220dP in FIG. 16A shows the cross section taken along the line AA'of the main body portion 220d, and the cross section 230dP in FIG. 16B shows the cross section taken along the line BB'of the fixed portion 230d.

As shown in FIG. 16A, the support portion 206A of the movable device 200d is formed with a hole portion 207Ad as an example of the first hole portion, and the support portion 206B is formed as an example of the second hole portion. The hole portion 207Bd of the above is formed.

Here, as shown in FIG. 16B, the adhesive region 232 for adhering each of the support portions 206A and 206B in the fixed portion 230d is formed so as to be higher than the region other than the adhesive region 232 in the fixed portion 230d. There is. Further, in the fixed portion 230d, the facing region 233 facing the movable portion 201 when the fixed portion 230d fixes the support portions 206A and 206B is formed so as to be lower than the region other than the facing region 233 in the fixed portion 230d. ..

Even with the movable device 200a configured in this way, the same effect as that of the movable device 100a can be obtained.

[Other preferred embodiments]
The movable device according to the embodiment can be applied to various systems and devices. Hereinafter, an example of application of the movable device according to the embodiment to various systems and devices will be described. Hereinafter, the movable device according to the embodiment will be described as the movable device 13, but any of the above-mentioned movable devices 100a to 100d and 200a to 200d can be applied to the movable device 13.

[Optical scanning system]
First, the optical scanning system to which the movable device of the embodiment is applied will be described in detail with reference to FIGS. 17 to 20.

FIG. 17 shows a schematic diagram of an example of an optical scanning system. As shown in FIG. 17, the optical scanning system 10 is a system in which the light emitted from the light source device 12 is deflected by the reflecting surface 14 of the movable device 13 under the control of the control device 11 to lightly scan the scanned surface 15. be.

The optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13 having a reflecting surface 14. Here, the movable device 13 is an example of a light deflector.

The control device 11 is an electronic circuit unit including a CPU (Central Processing Unit), an FPGA (Field-Programmable Gate Array), and the like. The movable device 13 is a MEMS (Micro Electromechanical Systems) device having a reflecting surface 14 and capable of moving the reflecting surface 14. The light source device 12 is a laser device or the like that irradiates a laser. The surface to be scanned 15 is a screen or the like.

The control device 11 generates a control command for the light source device 12 and the movable device 13 based on the acquired optical scanning information, and outputs a drive signal to the light source device 12 and the movable device 13 based on the control command.

The light source device 12 drives the light source based on the input drive signal. The movable device 13 moves the reflecting surface 14 in at least one of the uniaxial direction and the biaxial direction based on the input drive signal.

By controlling the control device 11 based on the image information which is an example of the optical scanning information, the reflective surface 14 of the movable device 13 is reciprocated in a predetermined range in the biaxial direction, and the light source device 12 incident on the reflective surface 14 is used. The irradiation light is deflected around a predetermined axis and light-scanned. This makes it possible to project an arbitrary image on the scanned surface 15. The details of the movable device of the embodiment and the details of the control by the control device will be described later.

Next, the hardware configuration of the optical scanning system 10 will be described with reference to FIG. FIG. 18 is a hardware configuration diagram of an example of the optical scanning system 10. As shown in FIG. 18, the optical scanning system 10 includes a control device 11, a light source device 12, and a movable device 13, each of which is electrically connected. Of these, the control device 11 includes a CPU 20, a RAM 21 (Random Access Memory), a ROM 22 (Read Only Memory), an FPGA (Field Programmable Gate Array) 23, an external I / F (Interface) 24, and a light source device driver. 25 and a movable device driver 26 are provided.

The CPU 20 is an arithmetic unit that reads programs and data from a storage device such as the ROM 22 onto the RAM 21 and executes processing to realize overall control and functions of the control device 11.

The RAM 21 is a volatile storage device that temporarily holds programs and data.

The ROM 22 is a non-volatile storage device that can retain programs and data even when the power is turned off, and stores processing programs and data executed by the CPU 20 to control each function of the optical scanning system 10. There is.

The FPGA 23 is a circuit that outputs a control signal suitable for the light source device driver 25 and the movable device driver 26 according to the processing of the CPU 20.

The external I / F 24 is an interface with an external device, a network, or the like. The external device includes a host device such as a PC (Personal Computer) and a storage device such as a USB memory, an SD card, a CD, a DVD, an HDD, and an SSD. The network is a CAN (Controller Area Network), a LAN (Local Area Network), the Internet, or the like of an automobile. The external I / F 24 may be configured to enable connection or communication with an external device, and an external I / F 24 may be prepared for each external device.

The light source device driver 25 is an electric circuit that outputs a drive signal such as a drive voltage to the light source device 12 according to the input control signal.

The movable device driver 26 is an electric circuit that outputs a drive signal such as a drive voltage to the movable device 13 according to an input control signal.

In the control device 11, the CPU 20 acquires optical scanning information from the external device or network via the external I / F 24. The configuration may be such that the CPU 20 can acquire the optical scanning information, and the optical scanning information may be stored in the ROM 22 or the FPGA 23 in the control device 11. Further, a storage device such as an SSD may be newly provided in the control device 11, and the optical scanning information may be stored in the storage device.

Here, the optical scanning information is information indicating how the surface to be scanned 15 is optical-scanned, and when the image is displayed by optical scanning, the optical scanning information is image data. Further, when optical writing is performed by optical scanning, the optical scanning information is write data indicating the writing order and the writing location. Further, when the distance is measured by optical scanning, the optical scanning information is irradiation data indicating the timing and irradiation range of irradiating the light for distance measurement.

The control device 11 can realize the functional configuration described below by the instruction of the CPU 20 and the hardware configuration shown in FIG.

Next, the functional configuration of the control device 11 of the optical scanning system 10 will be described with reference to FIG. FIG. 19 is a functional block diagram of an example of a control device for an optical scanning system.

As shown in FIG. 19, the control device 11 has a control unit 30 and a drive signal output unit 31 as functions.

The control unit 30 is realized by the CPU 20, FPGA 23, or the like, acquires optical scanning information from an external device, converts the optical scanning information into a control signal, and outputs the optical scanning information to the drive signal output unit 31. Specifically, the control unit 30 acquires image data as optical scanning information from an external device or the like, generates a control signal from the image data by a predetermined process, and outputs the control signal to the drive signal output unit 31.

The drive signal output unit 31 is realized by the light source device driver 25, the movable device driver 26, and the like, and outputs a drive signal to the light source device 12 or the movable device 13 based on the input control signal.

The drive signal is a signal for controlling the drive of the light source device 12 or the movable device 13. In the light source device 12, it is a drive voltage that controls the irradiation timing and the irradiation intensity of the light source. Further, in the movable device 13, it is a drive voltage that controls the timing and the movable range of moving the reflective surface 14 of the movable device 13.

Next, the process of optical scanning the surface to be scanned 15 by the optical scanning system 10 will be described with reference to FIG. FIG. 20 is a flowchart of an example of processing related to the optical scanning system.

In step S11, the control unit 30 acquires optical scanning information from an external device or the like.

In step S12, the control unit 30 generates a control signal from the acquired optical scanning information and outputs the control signal to the drive signal output unit 31.

In step S13, the drive signal output unit 31 outputs a drive signal to the light source device 12 and the movable device 13 based on the input control signal.

In step 14, the light source device 12 irradiates light based on the input drive signal. Further, the movable device 13 moves the reflecting surface 14 based on the input drive signal. By driving the light source device 12 and the movable device 13, light is deflected in an arbitrary direction and light is scanned.

In the optical scanning system 10, one control device 11 has a device and a function of controlling the light source device 12 and the movable device 13, but the control device for the light source device and the control device for the movable device It may be provided separately.

Further, in the optical scanning system 10, one control device 11 is provided with the functions of the control unit 30 of the light source device 12 and the movable device 13 and the functions of the drive signal output unit 31, but these functions exist as separate bodies. For example, a drive signal output device having a drive signal output unit 31 may be provided separately from the control device 11 having the control unit 30. In the optical scanning system 10, a movable device 13 having a reflecting surface 14 and a control device 11 may be used to configure an optical deflection system that performs optical deflection.

As described above, by applying the movable device of the embodiment to the optical scanning system, it is possible to provide an optical scanning system having excellent reliability.

[Image projection device]
Next, the image projection device to which the movable device of the embodiment is applied will be described in detail with reference to FIGS. 21 and 22.

FIG. 21 is an example of an image projection device, and is a schematic view of an embodiment of an automobile 400 equipped with a head-up display device 500, which is an example of a deflection device. Further, FIG. 22 is a schematic view of an example of the head-up display device 500. An image projection device is a device that projects an image by optical scanning.

As shown in FIG. 21, the head-up display device 500 is installed near a windshield (windshield 401, etc.) of an automobile 400, which is an example of a “vehicle”. The projected light L emitted from the head-up display device 500 is reflected by the windshield 401 and heads toward the observer (driver 402) who is the user. As a result, the driver 402 can visually recognize the image or the like projected by the head-up display device 500 as a virtual image. A combiner may be installed on the inner wall surface of the windshield so that the user can visually recognize the virtual image by the projected light reflected by the combiner.

As shown in FIG. 22, the head-up display device 500 emits laser light from red, green, and blue laser light sources 501R, 501G, and 501B. The emitted laser light passes through an incident optical system composed of collimating lenses 502, 503, 504 provided for each laser light source, two dichroic mirrors 505, 506, and a light amount adjusting unit 507, and then reflected. It is deflected by a movable device 13 having a surface 14. Then, the deflected laser beam is projected onto the screen via a projection optical system including a free curved mirror 509, an intermediate screen 510, and a projection mirror 511. In the head-up display device 500, the laser light source 501R, 501G, 501B, the collimating lenses 502, 503, 504, and the dichroic mirrors 505, 506 are unitized by an optical housing as a light source unit 530.

The head-up display device 500 projects the intermediate image displayed on the intermediate screen 510 onto the windshield 401 of the automobile 400, so that the intermediate image is visually recognized by the driver 402 as a virtual image.

The laser light of each color emitted from the laser light sources 501R, 501G, and 501B is regarded as substantially parallel light by the collimated lenses 502, 503, and 504, respectively, and is combined by two dichroic mirrors 505 and 506. The combined laser light is two-dimensionally scanned by the movable device 13 having the reflecting surface 14 after the light amount is adjusted by the light amount adjusting unit 507. The projected light L two-dimensionally scanned by the movable device 13 is reflected by the free-form surface mirror 509, corrected for distortion, and then condensed on the intermediate screen 510 to display an intermediate image. The intermediate screen 510 is composed of a microlens array in which microlenses are two-dimensionally arranged, and magnifies the projected light L incident on the intermediate screen 510 in microlens units.

The movable device 13 reciprocates the reflecting surface 14 in the biaxial direction, and two-dimensionally scans the projected light L incident on the reflecting surface 14. The drive control of the movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B.

The head-up display device 500 as an example of the image projection device has been described above, but the image projection device may be a device that projects an image by performing optical scanning by a movable device 13 having a reflecting surface 14. .. For example, it is mounted on a projector that is placed on a desk or the like and projects an image on a display screen, or is mounted on a mounting member mounted on an observer's head or the like, and is projected onto a reflection / transmission screen of the mounting member, or an eyeball is used as a screen. The same can be applied to a head-mounted display device or the like that projects an image.

Further, the image projection device is not only a vehicle or a mounting member, but also a moving object such as an aircraft, a ship, or a mobile robot, or a work robot that operates a drive target such as a manipulator without moving from the place. It may be mounted on a non-moving body.

As described above, by applying the movable device of the embodiment to the image projection device, it is possible to provide an image projection device having excellent reliability.

[Optical writing device]
Next, the optical writing device to which the movable device 13 of the embodiment is applied will be described in detail with reference to FIGS. 23 and 24.

FIG. 23 is an example of an image forming apparatus incorporating the optical writing apparatus 600. Further, FIG. 24 is a schematic diagram of an example of an optical writing device.

As shown in FIG. 23, the optical writing device 600 is used as a constituent member of an image forming device represented by a laser printer 650 or the like having a printer function using a laser beam. In the image forming apparatus, the optical writing device 600 performs optical writing on the photoconductor drum by lightly scanning the photoconductor drum, which is the surface to be scanned 15, with one or a plurality of laser beams.

As shown in FIG. 24, in the optical writing device 600, the laser light from the light source device 12 such as a laser element passes through an imaging optical system 601 such as a collimating lens and then is transferred by a movable device 13 having a reflecting surface 14. It is deflected axially or biaxially. Then, the laser beam deflected by the movable device 13 passes through the scanning optical system 602 including the first lens 602a, the second lens 602b, and the reflection mirror portion 602c, and then passes through the scanned surface 15 (photoreceptor drum, photosensitive paper, etc.). ) Is irradiated and optical writing is performed. The scanning optical system 602 forms a spot-shaped light beam on the scanned surface 15. Further, the movable device 13 having the light source device 12 and the reflecting surface 14 is driven under the control of the control device 11.

As described above, the optical writing device 600 can be used as a component of an image forming device having a printer function by laser light. Further, by making the scanning optical system different so that optical scanning can be performed not only in the uniaxial direction but also in the biaxial direction, the laser beam is deflected to the thermal media to scan the light, and the laser label device for printing by heating and the like. It can be used as a constituent member of the image forming apparatus of.

Since the movable device 13 consumes less power for driving than the rotary multifaceted mirror using a polygon mirror or the like, it is advantageous for power saving of the optical writing device 600. Further, since the wind noise at the time of vibration of the movable device 13 is smaller than that of the rotating polymorphic mirror, it is advantageous for improving the quietness of the optical writing device 600. The optical writing device 600 requires an overwhelmingly small installation space as compared with a rotating multi-sided mirror, and the amount of heat generated by the movable device 13 is small, so that it is easy to miniaturize, which is advantageous for miniaturizing the image forming device. Is.

As described above, by applying the movable device of the embodiment to the optical writing device, it is possible to provide a highly reliable optical writing device.

[Distance measuring device]
Next, the distance measuring device to which the movable device 13 of the embodiment is applied will be described in detail with reference to FIGS. 25 and 26.

FIG. 25 is a schematic view of an automobile equipped with a lidar (Laser Imaging Detection and Ranging) device, which is an example of a distance measuring device and also an example of a deflection device. Further, FIG. 26 is a schematic view of an example of the rider device.

A distance measuring device is a device that measures a distance in a target direction.

As shown in FIG. 25, the rider device 700 is mounted on an automobile 701 which is an example of a “vehicle”, scans light in a target direction, and receives reflected light from an object 702 existing in the target direction. Then, the distance of the object 702 is measured.

As shown in FIG. 26, the laser light emitted from the light source device 12 is reflected through an incident optical system composed of a collimating lens 703, which is an optical system whose divergent light is substantially parallel light, and a plane mirror 704. The movable device 13 having the surface 14 scans in one or two axial directions. Then, the object is irradiated to the object 702 in front of the apparatus via the projection lens 705 or the like which is a projection optical system. The drive of the light source device 12 and the movable device 13 is controlled by the control device 11. The reflected light reflected by the object 702 is photodetected by the photodetector 709. That is, the reflected light is received by the image pickup element 707 via the condenser lens 706, which is an incident light detection light receiving optical system, and the image pickup element 707 outputs the detection signal to the signal processing circuit 708. The signal processing circuit 708 performs predetermined processing such as binarization and noise processing on the input detection signal, and outputs the result to the distance measuring circuit 710.

In the distance measuring circuit 710, the object is determined by the time difference between the timing at which the light source device 12 emits the laser beam and the timing at which the laser beam is received by the photodetector 709, or the phase difference for each pixel of the image pickup element 707 that receives the light. The presence or absence of the 702 is recognized, and the distance information to the object 702 is calculated.

Since the movable device 13 is less likely to be damaged and is smaller than the polymorphic mirror, it is possible to provide a small radar device with high durability. Such a rider device can be attached to a vehicle, an aircraft, a ship, a robot, or the like, and can lightly scan a predetermined range to measure the presence or absence of an obstacle and the distance to the obstacle. The mounting position of the rider device 700 is not limited to the upper front of the automobile 701, and may be mounted on the side surface or the rear.

In the above-mentioned example, the rider device 700 has been described, but the present invention is not limited thereto. The distance measuring device may be any device that measures the distance of the object 702 by performing light scanning by controlling the movable device 13 with the control device 11 and receiving the reflected light by the photodetector.

For example, biometric authentication that recognizes an object by calculating object information such as shape from distance information obtained by light scanning the hand or face and referring to it as a record, or recognition of an intruder by optical scanning to the target range. It can also be applied to a security sensor, a component of a three-dimensional scanner that calculates and recognizes object information such as a shape from distance information obtained by optical scanning, and outputs it as three-dimensional data.

As described above, by applying the movable device of the embodiment to the distance measuring device, it is possible to provide a highly reliable distance measuring device.

[Laser headlamp]
Next, the laser headlamp 50 in which the movable device 13 of the embodiment is applied to the headlight of an automobile will be described with reference to FIG. 27. FIG. 27 is a schematic diagram illustrating an example of the configuration of the laser headlamp 50.

The laser headlamp 50 includes a control device 11, a light source device 12b, a movable device 13 having a reflecting surface 14, a mirror 51, and a transparent plate 52.

The light source device 12b is a light source that emits a blue laser beam. The light emitted from the light source device 12b is incident on the movable device 13 and reflected by the reflecting surface 14. The movable device 13 drives the reflecting surface in the XY direction based on the signal from the control device 11, and scans the blue laser light from the light source device 12b in the XY direction in two dimensions.

The scanning light from the movable device 13 is reflected by the mirror 51 and incident on the transparent plate 52. The front surface or the back surface of the transparent plate 52 is covered with a yellow fluorescent substance. The blue laser beam from the mirror 51 changes to white within the legal range of the color of the headlights as it passes through the yellow phosphor coating on the transparent plate 52. As a result, the front of the automobile is illuminated with white light from the transparent plate 52.

The scanning light from the movable device 13 scatters predeterminedly as it passes through the phosphor of the transparent plate 52. This alleviates the glare in the illuminated object in front of the vehicle.

When the movable device 13 is applied to the headlight of an automobile, the colors of the light source device 12b and the phosphor are not limited to blue and yellow, respectively. For example, the light source device 12b may be near-ultraviolet rays, and the transparent plate 52 may be coated with a uniform mixture of blue, green, and red phosphors of the three primary colors of light. Even in this case, the light passing through the transparent plate 52 can be converted into white, and the front of the automobile can be illuminated with white light.

As described above, by applying the movable device of the embodiment to the laser headlamp, it is possible to provide a highly reliable laser headlamp.

[Head-mounted display]
Next, the head-mounted display 60 to which the movable device 13 of the embodiment is applied will be described with reference to FIGS. 28 to 13. Here, the head-mounted display 60 is a head-mounted display that can be worn on a human head and can be shaped like eyeglasses. The head-mounted display is hereinafter abbreviated as HMD.

FIG. 28 is a perspective view illustrating the appearance of the HMD 60. In FIG. 28, the HMD 60 is composed of a front 60a and a temple 60b provided in pairs on the left and right in a substantially symmetrical manner. The front 60a can be configured by a light guide plate 61 or the like, and the optical system and the control device can be built in the temple 60b.

FIG. 29 is a diagram partially illustrating the configuration of the HMD 60. Although the configuration for the left eye is illustrated in FIG. 29, the HMD 60 has the same configuration for the right eye.

The HMD 60 includes a control device 11, a light source unit 530, a light amount adjusting unit 507, a movable device 13 having a reflecting surface 14, a light guide plate 61, and a half mirror 62.

The light source unit 530 is a unitization of a laser light source 501R, 501G, 501B, a collimating lens 502, 503, 504, and a dichroic mirror 505, 506 by an optical housing. In the light source unit 530, the three-color laser light from the laser light sources 501R, 501G, and 501B is combined by the dichroic mirrors 505 and 506. The combined parallel light is emitted from the light source unit 530.

The light from the light source unit 530 is incident on the movable device 13 after the light amount is adjusted by the light amount adjusting unit 507. The movable device 13 drives the reflecting surface 14 in the XY directions based on the signal from the control device 11, and two-dimensionally scans the light from the light source unit 530. The drive control of the movable device 13 is performed in synchronization with the light emission timing of the laser light sources 501R, 501G, and 501B, and a color image is formed by the scanning light.

The scanning light from the movable device 13 is incident on the light guide plate 61. The light guide plate 61 guides the scanning light to the half mirror 62 while reflecting the scanning light on the inner wall surface. The light guide plate 61 is made of a resin or the like having transparency with respect to the wavelength of the scanning light.

The half mirror 62 reflects the light from the light guide plate 61 toward the back surface of the HMD 60 and emits the light toward the eyes of the wearer 63 of the HMD 60. The half mirror 62 has a free curved surface shape. The image by the scanning light is imaged on the retina of the wearer 63 by the reflection by the half mirror 62. Alternatively, an image is formed on the retina of the wearer 63 due to the reflection by the half mirror 62 and the lens effect of the crystalline lens on the eyeball. Further, the spatial distortion of the image is corrected by the reflection by the half mirror 62. The wearer 63 can observe the image formed by the light scanned in the XY directions.

Since the 62 is a half mirror, the image of the light from the outside world and the image of the scanning light are superimposed and observed on the wearer 63. By providing a mirror instead of the half mirror 62, the light from the outside world may be eliminated and only the image by the scanning light can be observed.

As described above, by applying the movable device of the embodiment to the head-mounted display, it is possible to provide a highly reliable head-mounted display.

[Packaging]
Next, the packaging of the movable device 13 of the embodiment will be described with reference to FIG.

FIG. 30 is a schematic diagram of an example of the packaged movable device 13.

As shown in FIG. 30, the movable device 13 is attached to a mounting member 802 arranged inside the package member 801 and is packaged by covering a part of the package member 801 with the transmission member 803 and sealing the package member 801. Will be done. Further, the package is sealed with an inert gas such as nitrogen. As a result, deterioration of the movable device 13 due to oxidation is suppressed, and durability against changes in the environment such as temperature is further improved.

Although examples of embodiments of the present invention have been described above, the present invention is not limited to such specific embodiments, and various aspects are described within the scope of the gist of the present invention described in the claims. It can be transformed and changed.

In the above-described embodiment, the configuration in which the movable portion has a reflecting surface is exemplified, but the present invention is not limited to this. The movable portion may be configured to have a diffraction grating, a photodiode, a heater (for example, a heater using SiN), a light source (for example, a surface emitting laser), or the like instead of the reflecting surface.

Further, in the above-described embodiment, a configuration in which the movable portion is supported from two directions is exemplified, but the present invention is not limited to this. The movable device may support the movable portion from two or more directions. In other words, the movable device can also include two or more drive beams that swing the movable portion.

100 Movable device 101 Movable part 102A Spring part (an example of the first beam part)
102B Spring part (an example of the second beam part)
103A Drive unit 103B Drive unit 106A Support unit (example of first support unit)
106B support part (an example of the second support part)
107A hole (first hole)
107B hole (second hole)
108A hole (third hole)
108B hole (fourth hole)
110A, 110B Positioning member 120 Main body 130 Fixed part 131 Facing part (an example of the part facing the movable part)
132 Adhesive area 200 Movable device 201 Movable part 202A Spring part (example of first beam part)
202B Spring part (an example of the second beam part)
203A Drive unit 203B Drive unit 206A Support unit (example of first support unit)
206B support (an example of the second support)
207A hole (first hole)
207B hole (second hole)
208A hole (third hole)
208B hole (fourth hole)
210A, 210B Positioning member 220 Main body 230 Fixed part 231 Opposing part (an example of the part facing the movable part)
232 Adhesive area 500 Head-up display device (an example of image projection device)
700 Rider device (an example of a distance measuring device)
400,701 Automobile (an example of a vehicle)
w ₁ Thickness of facing part 131 w ₂ Thickness of other parts E-axis Swing axis

Japanese Patent No. 355261

Claims (13)

Moving parts and
A first beam portion that is connected to the movable portion at a predetermined position and swings the movable portion,
A second beam portion that is connected to the movable portion at a location different from the predetermined location and swings the movable portion, and a second beam portion.
The first support portion that supports the first beam portion and the first support portion
A second support portion that supports the second beam portion and
A fixing portion for fixing the first support portion and the second support portion is provided.
The first support portion comprises a first hole portion.
The second support portion comprises a second hole portion.
The fixed part is
A third hole provided so as to correspond to the first hole,
A fourth hole provided so as to correspond to the second hole is provided.
A movable device provided with a positioning member between the first hole and the third hole, and between the second hole and the fourth hole. The movable device according to claim 1, wherein the positioning member is any one of a spherical member, a spheroidal member, and a columnar member provided with conical portions at both ends. The movable device according to claim 1 or 2, wherein the first hole portion, the second hole portion, the third hole portion, and the fourth hole portion each include a plurality of holes. The movable device according to any one of claims 1 to 3, wherein the first hole portion and the second hole portion are provided at positions symmetrical with respect to the movable portion. The first hole and the second hole are provided at positions symmetrical with respect to a swing axis that swings the movable portion, according to any one of claims 1 to 4. Movable device. The portion of the fixing portion for fixing the first support portion is formed in a shape corresponding to the first support portion.
The movable device according to any one of claims 1 to 5, wherein the portion of the fixing portion that fixes the second support portion is formed in a shape corresponding to the second support portion. The movable device according to any one of claims 1 to 6, wherein the fixed portion has a portion facing the movable portion formed thinner than the other portion of the fixed portion. Claims 1 to 7 are formed so that the adhesive region for adhering each of the first support portion and the second support portion in the fixed portion is higher than the region other than the adhesive region in the fixed portion. The movable device according to any one of the above items. The movable device according to any one of claims 1 to 7, wherein the facing region of the fixed portion facing the movable portion is formed to be lower than the region other than the facing region of the fixed portion. The movable device according to any one of claims 1 to 9,
A deflector having a light source and. A distance measuring device having the movable device according to any one of claims 1 to 9. An image projection device having the movable device according to any one of claims 1 to 9. A vehicle having at least one of the distance measuring device according to claim 11 or the image projection device according to claim 12.

Images