JP2003262803A5 - - Google Patents

Claims (10)

 A movable body, at least a pair of elastic members extending from the movable body to both sides, and a support body supporting the movable body via the elastic members, each elastic member having a mesh structure A movable structure in which the support and the movable body are connected via an elastic member.  The movable structure according to claim 1, wherein the support body, the movable body, and the elastic member are manufactured by a semiconductor manufacturing process.  The movable structure according to claim 2, wherein the support and the movable body are made of a silicon substrate.  The movable structure according to claim 2, wherein the elastic member is made of an organic insulating material.  The movable structure according to claim 2, wherein the movable body is made of a deformable elastic film.  The movable structure according to claim 5, wherein the movable body is partially connected directly to the support.  A deflection mirror element, wherein the movable structure according to any one of claims 1 to 4, a reflecting surface for reflecting a light beam formed on the movable body, and a direction of the movable plate are changed. A deflecting mirror element, wherein the direction of the light beam reflected by the reflecting surface is changed in accordance with a change in the direction of the movable plate.  It is an optical switch element, Comprising: The movable structure as described in any one of Claims 1-6, the mirror for reflecting the light beam fixed to the movable body, The drive means to move a movable body, An optical switch element, wherein the direction of the light beam is switched when the mirror is inserted into or retracted from the optical path by moving the movable body.  A variable shape mirror, comprising: the movable structure according to claim 5 or 6; a reflecting surface formed on the movable body; and drive means for deforming the movable body, and reflecting by deformation of the movable body. A deformable mirror that changes the shape of the surface. A movable structure including an elastic film having a reflective surface, a support frame surrounding the periphery of the elastic film, a support spring having a mesh structure that connects the periphery of the elastic film and the support frame over the entire circumference, and elasticity A driving means for deforming the membrane and the supporting spring, comprising: an electrostatic driving means comprising a metal film formed on the elastic film and an electrode disposed opposite thereto; A deformable mirror that can change the shape of the reflective surface.