JP4072743B2 - Optical deflector and display device using the same - Google Patents

Optical deflector and display device using the same Download PDF

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Publication number
JP4072743B2
JP4072743B2 JP32409298A JP32409298A JP4072743B2 JP 4072743 B2 JP4072743 B2 JP 4072743B2 JP 32409298 A JP32409298 A JP 32409298A JP 32409298 A JP32409298 A JP 32409298A JP 4072743 B2 JP4072743 B2 JP 4072743B2
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Prior art keywords
reflection mirror
portion
side
pair
mirror portion
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JP2000147419A (en
Inventor
隆之 井関
実紀雄 奥村
慎悟 柳生
泰弘 菅野
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日本ビクター株式会社
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Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an optical deflector that deflects light by reflecting light such as a laser beam, and a display device using the optical deflector.
[0002]
[Prior art]
Optical polarization for scanning devices for optical equipment such as electrophotographic copying machines, laser beam printers, barcode readers, optical deflection devices for optical disk tracking control devices, and display devices that scan laser light and project images. A vessel is being used.
[0003]
In general, optical deflectors that mechanically deflect light include rotary polygon mirrors and turbulent reflectors (galvano mirrors), but galvano mirror type is more than polygon mirror type. The mechanism can be reduced in size, and in recent semiconductor process technology, a prototype of a micromirror using a silicon substrate has been reported, and further reduction in size, weight, and cost can be expected.
[0004]
Conventional examples of such galvanomirror type optical deflectors are shown in FIGS. 14 to 17 and FIG. 18, respectively.
[0005]
FIG. 14 is an exploded perspective view of the first conventional optical deflector, and FIG. 15 is a schematic side view of the optical deflector. 14 and 15, the base 50 is provided with a pair of left and right standing portions 51 and 52, and a vibrating body 53 is disposed on the pair of standing portions 51 and 52. The vibrating body 53 includes an outer frame portion 54, a reflection mirror portion 55 disposed in the opening 54 a of the outer frame portion 54, and a position on the axis passing through the approximate center of gravity of the reflection mirror portion 55. A pair of support portions 56, 56 connecting the frame portion 54 are integrally formed. The left and right end portions of the outer frame portion 54 are fixed on the pair of standing portions 51 and 52, and the pair of support portions 56 and 56 support the reflection mirror portion 55 with respect to the outer frame portion 54, and this reflection. A torsion spring function for vibrating the mirror unit 55 is provided.
[0006]
A pair of left and right fixed electrodes 57, 58 are disposed on the base 50, and the pair of fixed electrodes 57, 58 are disposed at positions facing the left and right ends of the reflection mirror portion 55. A reflection mirror portion 55 is configured as an electrode on the other side of the pair of fixed electrodes 57, 58, and selectively interposed between the fixed electrodes 57, 58 and the reflection mirror portion 55 via the changeover switches SW1, SW2. It is comprised so that a voltage can be applied. Since the reflection mirror unit 55 is connected to the outer frame unit 54 via a pair of support units 56, 56, voltage application to the reflection mirror unit 55 may be applied to the outer frame unit 54.
[0007]
In the above configuration, when a voltage is applied between one fixed electrode 57 and the reflection mirror portion 55, the left side of the reflection mirror portion 55 is attracted by an electrostatic force, and the reflection mirror portion 55 causes the pair of support portions 56, 56 to move. It rotates counterclockwise as a swing center axis CL (shown in FIG. 15), and when a voltage is applied between the other fixed electrode 58 and the reflection mirror portion 55, the reflection mirror portion 55 is attracted by electrostatic force. Then, the right side of the reflection mirror portion 55 rotates in the clockwise direction with the pair of support portions 56 and 56 as the swing center axis CL (shown in FIG. 15). Accordingly, the reflection mirror unit 55 swings to the left and right by alternately turning on and off the changeover switches SW1 and SW2 and alternately applying a voltage to the pair of fixed electrodes 57 and 58. The reflection angle of the light applied to the reflection mirror unit 55 is changed by the swinging of the reflection mirror unit 55, and thereby the light is deflected.
[0008]
FIG. 18 is an exploded perspective view of a second conventional optical deflector. In FIG. 18, the auxiliary base member 60 is fixed on the base 50, and the reflection mirror portion 55 is disposed in the opening 60 a of the auxiliary base member 60. A pair of support portions 56, 56 connect the both sides on the axis passing through the approximate center of gravity of the reflection mirror portion 55 and the outer auxiliary base member 60. The reflection mirror portion 55 is configured to be swingable about the pair of support portions 56 and 56. Further, comb teeth 61 are formed at both outer ends of the reflection mirror 55, and a fixed electrode is provided at a position of the auxiliary base 60 facing the comb teeth 61 and at a position lower than that. 57 and 58 are fixed, respectively. A comb tooth portion 62 that meshes with the comb tooth portion 61 is formed on the reflecting mirror portion 55 side of the pair of fixed electrodes 57 and 58.
[0009]
In the above configuration, when a voltage is applied between one fixed electrode 57 and the reflection mirror portion 55, the left side of the reflection mirror portion 55 is attracted by an electrostatic force, and the reflection mirror portion 55 causes the pair of support portions 56, 56 to move. When the voltage is applied between the other fixed electrode 58 and the reflection mirror unit 55, the right side of the reflection mirror unit 55 is attracted by the electrostatic force, and the reflection mirror unit rotates. 55 rotates in the clockwise direction with the pair of support portions 56, 56 as the swing center axis. Accordingly, as in the first conventional example, the reflection mirror portion 55 swings left and right by alternately applying a voltage to the pair of fixed electrodes 57 and 58.
[0010]
[Problems to be solved by the invention]
However, the first and second conventional examples have the following problems.
[0011]
That is, in the first conventional example, it is desirable that the weight of the reflection mirror 55 is lighter in order to swing the reflection mirror 55 at a high speed. Here, as shown in FIG. 16, when the thickness t of the reflection mirror portion 55 is reduced in order to reduce the weight, inconvenience such as bending of the light reflecting surface occurs, and there is a problem in rigidity.
[0012]
Further, in order to increase the deflection angle (deflection angle) of the reflection mirror unit 55, it is necessary to set a large gap interval between the reflection mirror unit 55 and the fixed electrodes 57 and 58 as shown in FIG. However, since the electrostatic force is inversely proportional to the square of the gap, a very large voltage is required to obtain the necessary driving force.
[0013]
On the other hand, in the second conventional example, unlike the first conventional example, the deflection angle can be increased if the heights of the comb teeth portions 61 and 62 are set large, and the voltage decreases if the number of comb teeth is increased. A large driving force can be obtained. However, since the comb-tooth portions 61 are provided at both outer end portions of the reflection mirror portion 55, it is inevitable that the reflection mirror portion 55 is enlarged. When the size of the reflection mirror unit 55 is increased, the resonance frequency of the reflection mirror unit 55 is lowered, and thus the reflection mirror unit 55 cannot be swung at a high speed. In particular, in order to obtain a large deflection angle or to obtain a large driving force at a low voltage, the height of the comb teeth portions 61 and 62 is increased, or the number of comb teeth is increased. As a result, the resonance frequency is further lowered.
[0014]
Therefore, the present invention has been made to solve the above-mentioned problems, and can swing at a high speed and a wide deflection angle even under a low driving power, and also has a problem with the rigidity of the reflecting mirror section. It is an object of the present invention to provide an optical deflector that does not generate light and a display device using the same.
[0015]
[Means for Solving the Problems]
In order to achieve the above object, the present invention is characterized in that a reflecting mirror portion having a light reflecting surface on the surface, a pair of supporting portions that swingably support the reflecting mirror portion with respect to the base, A pair of fixed electrodes arranged on the reflection mirror part side, and a voltage is applied between each fixed electrode and the reflection mirror part, and the reflection mirror part swings the pair of support parts by electrostatic force. In the optical deflector that oscillates as a moving central axis, the reflection mirror portion includes a mirror side comb tooth portion having a groove and a protrusion extending in a direction orthogonal to the oscillating central axis on the back surface thereof, Each fixed electrode includes, on the reflection mirror part side, an electrode side comb tooth part having a protrusion and a groove that can mesh with the mirror side comb tooth part, and the mirror side comb tooth part and the electrode side comb tooth part are , The height of the protrusion relative to the groove is determined by the oscillation center axis It is that configured to become lower as the distance al.
[0016]
Another feature of the present invention is that the reflection mirror portion having a light reflection surface on the surface, a pair of support portions that swingably support the reflection mirror portion with respect to the base, and the reflection mirror portion side of the base are disposed. A pair of fixed electrodes, and a voltage is applied between each of the fixed electrodes and the reflection mirror portion to cause the reflection mirror portion to swing with the pair of support portions as a swing center axis by an electrostatic force. In the optical deflector, the reflection mirror portion has a mirror-side comb tooth portion having a groove and a protrusion extending in a direction orthogonal to the oscillation central axis on the back surface, and the oscillation center axis. And a rib portion that connects the support portions to each other via the projection portion, and each of the fixed electrodes has a projection portion and a groove that can mesh with the mirror-side comb tooth portion on the reflection mirror portion side. The electrode side comb-tooth part which has this is provided.
[0018]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0019]
1 to 4 show a first embodiment of the present invention. FIG. 1A is an exploded perspective view of an optical deflector 1A, FIG. 1B is a schematic side view of the optical deflector 1A, and FIG. 3 is a perspective view of the deflector 1A, FIG. 3 is a schematic side view of the optical deflector 1A, and FIG.
[0020]
1 to 4, the base 2 of the optical deflector 1 </ b> A has a flat rectangular shape, and an upright portion 3 is integrally formed on the entire outer peripheral end of the base 2. A vibrating body 5 is disposed on the top.
[0021]
The vibrating body 5 includes a rectangular outer frame portion 6, a reflection mirror portion 7 disposed in the opening 6 a of the outer frame portion 6, and an axial position passing through the approximate center of gravity of the reflection mirror portion 7. The reflecting mirror portion 7 and the outer frame portion 6 are integrally formed from a pair of support portions 8 and 8. The outer frame portion 6 is fixed on the standing portion 3, and the reflection mirror portion 7 is swingable with a pair of support portions 8 and 8 as a swing center axis CL (shown in FIGS. 1 and 3). It is configured. A light reflecting film is formed on the surface of the reflecting mirror unit 7 to form a light reflecting surface 7a.
[0022]
Further, as shown in detail in FIG. 4, a mirror side comb tooth portion 9 including a groove 9a extending in a direction perpendicular to the oscillation center axis CL and a projection portion 9b is integrally formed on the back surface of the reflection mirror portion 7. Has been. A pair of left and right fixed electrodes 10 and 11 are disposed at a position on the base 2 facing the mirror side comb tooth portion 9 of the reflection mirror portion 7, and a groove 12 a and An electrode-side comb tooth portion 12 including the protrusion portion 12b is integrally formed. The mirror-side comb-tooth portion 9 and the electrode-side comb-tooth portion 12 are arranged such that one groove 9a, 12a and the other protrusion 9b, 12b face each other, that is, mesh with each other. . A voltage can be selectively applied between the fixed electrodes 10 and 11 and the reflection mirror unit 7 via the changeover switches SW1 and SW2, and the changeover switches SW1 and SW2 are alternately turned on and off. It is configured to control and alternately apply a voltage to the pair of fixed electrodes 11 and 12.
[0023]
Further, the reflection mirror portion 7 is formed to be thin, and the height of the mirror side comb teeth portion 9 and the electrode side comb teeth 12, specifically the engagement between the grooves 9 a and 12 a and the projection portions 9 b and 12 b. The stroke is formed high so as to obtain a wide deflection angle. That is, the reflection mirror unit 7 is light in weight as a whole and is configured to have a high resonance frequency.
[0024]
In the above configuration, as shown in FIG. 1B, when a voltage is applied between one fixed electrode 10 and the reflection mirror unit 7, the left side of the reflection mirror unit 7 is attracted by an electrostatic force, and the reflection mirror unit 7 rotates counterclockwise about the pair of support portions 8 as the oscillation center axis CL, and when a voltage is applied between the other fixed electrode 11 and the reflection mirror portion 7 as shown in FIG. Then, the suction force of one fixed electrode 10 is released, and the pair of twisted support portions 8 attempt to return the reflection mirror portion 7 to the original position by the elastic restoring force, and the right side of the reflection mirror portion 7 is static. By being attracted by the electric power, the reflection mirror unit 7 rotates in the clockwise direction with the pair of support units 8 as the swing center axis CL. Therefore, when the changeover switches SW1 and SW2 are alternately turned on / off, the reflection mirror 7 swings left and right by alternately applying a voltage to the pair of fixed electrodes 10 and 11. The reflection angle of the light applied to the reflection mirror unit 7 is changed by the swinging of the reflection mirror unit 7, and thereby the light is deflected. Note that voltage application to the reflection mirror unit 7 is applied to the outer frame unit 6 to which the reflection mirror unit 7 is connected.
[0025]
Here, the driving force of the reflecting mirror unit 7 is obtained by an electrostatic force generated between the mirror side comb-teeth portion 9 and the electrode side comb-teeth portion 12, and the gap distance between the two is independent of the swing position. Since it is narrow and constant, a large driving force can be obtained with a low voltage. The magnitude of the driving force will be described in detail below.
[0026]
The heights of the mirror side comb teeth portion 9 and the electrode side comb teeth portion 12 are set to a height necessary for obtaining a desired deflection angle, and the reflection mirror portion 7 is lightweight and has a high resonance frequency. Since it is configured, it can be swung at a high speed and with a large deflection angle even under a low voltage. In particular, when the reflecting mirror unit 7 is vibrated at the resonance frequency, the reflecting mirror unit 7 vibrates at the maximum displacement, and thus a large rotational force can be obtained with low power.
[0027]
In addition, since the reflection mirror portion 7 functions as a rib for increasing the strength of the projection 9b of the mirror side comb tooth portion 9, there is no problem in rigidity such that the light reflection surface 7a is bent even if the thickness is reduced. . The reflection mirror portion 7 is provided with the mirror-side comb-tooth portion 9 on the back side thereof, and the entire surface of the reflection mirror portion 7 can be configured as the light reflection surface 7a. Therefore, the light reflection surface 7a is set to the minimum necessary size. In this respect, the weight can be reduced.
[0028]
Next, the magnitude of the electrostatic force in the case of the comb electrode of the present invention and the case of the planar electrode of the first conventional example will be compared. In general, the electrostatic force F generated when a voltage V is applied between the fixed electrode and the reflecting mirror part 7 which is a movable part has a gap interval g, a dielectric constant between gaps ε, and an electrode depth. When W and the electrode width are L, in the case of a comb-tooth electrode as shown in FIG. 5A, the electrostatic force acting on one comb-tooth surface is F = εV 2 W / 2g. In the case of a parallel plane electrode as shown in FIG. 5B, F = εV 2 WL / 2g 2 .
[0029]
In the case of parallel plane electrodes, the electrostatic force increases with the square of the gap interval. However, in order to increase the deflection angle of the reflecting mirror unit 7, it is necessary to increase the gap interval. Therefore, it becomes difficult to obtain a large electrostatic force. On the other hand, in the case of the comb-teeth electrode, the reflection mirror portion 7 moves in parallel with the gap, so that the gap interval is constant. Therefore, since the gap interval can be made as small as possible, a large electrostatic force can be obtained. Furthermore, since the number n of comb teeth can be made plural, the electrostatic force is further 2n times the above formula.
[0030]
Next, both cases are compared by substituting specific numerical values. As shown in FIG. 6, when the size of the reflecting mirror unit 7 is 2 mm square, W = 1 mm and L = 2 mm in the above formula. Also, assuming that the deflection angle is ± 10 degrees, in the case of comb-tooth electrodes, if the number of comb teeth is 50 (40 μm pitch) for each electrode and the gap interval g is 2 μm, the static force acting on a set of comb teeth The electric power f becomes f = εV 2 × 1/2 × (2 × 10 −4 ) = 2.5 × 10 2 × εV 2 . A set of comb teeth has two surfaces on which electrostatic force works, and since there are 50 comb teeth, the electrostatic force F as a whole is F = 2 × 50f = 2.5 × 10 5 × εV 2. It becomes.
[0031]
In the case of a parallel plane electrode, when the deflection angle is ± 10 degrees, the outermost end portion of the reflection mirror portion 7 is displaced by 176 μm, which is the gap interval g. Therefore, the electrostatic force F is F = εV 2 × 1 × 2/2 × (176 × 10 −4 ) 2 = 3.2 × 10 3 × εV 2 .
[0032]
From the above, when the comb electrode is used, an electrostatic force of about 80 times can be obtained at the same voltage. Furthermore, in the case of a comb electrode, the number of comb teeth can be increased or the gap interval can be narrowed by the manufacturing method, and a larger electrostatic force can be obtained.
[0033]
FIG. 7 is a perspective view of the back side of the optical deflector 1B showing the second embodiment of the present invention. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals in the drawing, and the description thereof is omitted. Only different configurations will be described.
[0034]
That is, as shown in FIG. 7, adjacent to the back surface side of the reflecting mirror portion 7 and on the swinging central axis CL passing through the pair of support portions 8 and 8, without providing the groove 9a. Ribs 20 are formed to connect the protrusions 9b. Since this part is irrelevant to the action of the electrostatic force, an electrostatic force having the same magnitude as that of the first embodiment can be obtained, and the rib 20 further increases the strength of the reflecting mirror unit 7. Thus, the rigidity is further improved.
[0035]
8 and 9 show a third embodiment of the present invention, and FIGS. 8 and 9 are schematic side views of the optical deflector 1C, respectively. 8 and 9, the third embodiment is different from the first embodiment only in the configuration of the mirror side comb teeth portion 9 and the electrode side comb teeth portion 12, and the other configurations are the same. Therefore, only the configuration of the mirror-side comb-tooth portion 9 and the electrode-side comb-tooth portion 12 will be described, and other configurations will be denoted by the same reference numerals in the drawings, and description thereof will be omitted.
[0036]
That is, in this third embodiment, the length of the swing direction of the mirror side comb tooth portion 9 and the electrode side comb tooth portion 12 (the direction orthogonal to the swing center axis CL) is the swing direction of the reflection mirror portion 7. It is formed shorter than the length of. By doing in this way, since the angle until the free end (outer end part) of the reflective mirror part 7 collides with the fixed electrodes 10, 11 or the base 2 can be increased, the deflection angle can be increased. FIG. 9 shows a state in which a voltage is applied between one fixed electrode 10 and the reflection mirror unit 7, and it can be seen that the swing angle is larger than that in the case of FIG. 3 of the first embodiment.
[0037]
10 and 11 show a fourth embodiment of the present invention, and FIGS. 10 and 11 are schematic side views of the optical deflector 1D. 10 and 11, in this fourth embodiment, only the configuration of the mirror side comb tooth portion 9 and the electrode side comb tooth portion 12 is different from that of the first embodiment, and the other configurations are the same. Therefore, only the configuration of the mirror-side comb-tooth portion 9 and the electrode-side comb-tooth portion 12 will be described, and other configurations will be denoted by the same reference numerals in the drawings, and description thereof will be omitted.
[0038]
That is, in the fourth embodiment, the heights of the mirror-side comb-tooth portion 9 and the electrode-side comb-tooth portion 12 are formed so as to decrease as the distance from the oscillation center axis CL increases. By doing so, the angle until the free end (outer end) of the reflection mirror 7 collides with the fixed electrodes 10 and 11 even if the interval between the reflection mirror 7 and the fixed electrodes 10 and 11 is set narrow. Therefore, the deflection angle can be increased. FIG. 11 shows a state in which a voltage is applied between one fixed electrode 10 and the reflection mirror unit 7, and it can be seen that the swing angle is larger than that in the case of FIG. 3 of the first embodiment.
[0039]
As described above, according to the first to fourth embodiments, it is possible to swing at a wide deflection angle at a high speed even under a low voltage. However, the inside of each of the optical deflectors 1A to 1D is anodic bonded or the like. If this method is used for vacuum sealing, the influence of the air resistance can be eliminated with respect to the swinging of the reflecting mirror unit 7, and the swinging at a higher speed is preferable.
[0040]
FIG. 12 is a schematic configuration diagram of a display device using the optical deflectors 1A to 1D. In FIG. 12, the laser light emitted from the laser light source 30 is applied to the horizontal scanning optical deflector 31. In the horizontal scanning light deflector 31, the reflection mirror section is swung in synchronization with the horizontal frequency, and the reflected light is scanned in the horizontal direction by the swing. The laser beam reflected here is applied to the vertical scanning optical deflector 32. In the vertical scanning light deflector 32, the reflection mirror portion is swung in synchronization with the vertical frequency, and the reflected light is scanned in the vertical direction by the swing. The screen 33 is irradiated with the laser beam reflected here.
[0041]
Each of the optical deflectors 1A to 1D is used as the horizontal scanning optical deflector 31 and can be swung at a high speed and with a wide deflection angle as described above, so that it is synchronized with a scanning frequency of several tens of kHz. It can be swung. Of course, the optical deflectors 1A to 1D may be used for the vertical scanning optical deflector 32 as well.
[0042]
FIG. 13 is a schematic configuration diagram of another display device using the optical deflectors 1A to 1D. In FIG. 13, the laser light emitted from the laser light source 30 is applied to the horizontal scanning optical deflector 31. In the horizontal scanning light deflector 31, the reflection mirror section is swung in synchronization with the horizontal frequency, and the reflected light is scanned in the horizontal direction by the swing. The laser beam reflected here is applied to the vertical scanning optical deflector 32. In the vertical scanning light deflector 32, the reflection mirror portion is swung in synchronization with the vertical frequency, and the reflected light is scanned in the vertical direction by the swing. The laser beam reflected here passes through the focusing lens 34 and is applied to the optical address type spatial modulation element 35. The optical address type spatial modulation element 35 writes this optical information and amplifies the brightness, luminance, etc. on the surface side and displays it on the liquid crystal.
[0043]
On the other hand, the light from the lamp 36 is incident on the polarization beam splitter 40 through the infrared cut filter 37, the lens 38 and the wavelength filter 39, and the reflected light is irradiated on the optical address type spatial modulation element 35. The light reflected by the optical address type spatial modulation element 35 is again incident on the polarization beam splitter 40, and the light transmitted therethrough is irradiated on the screen 33 through the lens 41.
[0044]
Each of the optical deflectors 1A to 1D is used as the horizontal scanning optical deflector 31 and can be swung at a high speed and with a wide deflection angle as described above, so that it is synchronized with a scanning frequency of several tens of kHz. It can be swung. Of course, the optical deflectors 1A to 1D may be used for the vertical scanning optical deflector 32 as well.
[0045]
According to the embodiment, the display device is shown as an application example of the optical deflector. However, the scanning device for the optical device such as an electrophotographic copying machine, a laser beam printer, a barcode reader, and the optical disk tracking control device. Of course, the present invention can also be applied to other optical deflection devices.
[0046]
【The invention's effect】
As described above, according to the present invention, in the optical deflector in which the reflection mirror part is oscillated by an electrostatic force with the pair of support parts as the oscillating center axis, the back surface of the reflecting mirror part is arranged on the oscillating center axis. A mirror-side comb-tooth portion composed of a groove extending in an orthogonal direction and a projection portion is formed, and a groove and a projection portion engageable with the mirror-side comb-tooth portion are formed on the reflection mirror portion side of the pair of fixed electrodes. Since the electrode-side comb-tooth portion is formed, the mirror-side comb-tooth portion even if the height of the mirror-side comb-tooth portion and the electrode-side comb-tooth portion is set to a height necessary to obtain a desired deflection angle. The gap distance between the electrode side comb teeth portion does not change, and since the mirror side comb teeth portion is formed on the back surface side of the reflection mirror portion, the size of the reflection mirror portion is the minimum required for the light reflecting slope. What is necessary is just to form in a magnitude | size, and the projection part of a mirror side comb-tooth part functions as an intensity | strength rib. Because the rigidity can be maintained even if the thickness of the reflecting mirror part is reduced, the reflecting mirror part can be configured to be light and have a high resonance frequency, so that it swings at a high speed and with a large deflection angle even under a low voltage. In addition, there is no problem with the rigidity of the reflecting mirror portion.
[0047]
Further , according to the present invention, the reflection mirror part is configured to be swingable with respect to the base around the pair of support parts, and the pair of fixed electrodes are disposed on the reflection mirror part side of the base, A mirror-side comb-tooth portion is formed on the back surface, and an electrode-side comb-tooth portion that meshes with the mirror-side comb-tooth portion is formed on the reflection mirror portion side of each fixed electrode, and each fixed electrode and the reflection mirror An optical deflector is provided in which the reflection mirror unit swings about the pair of support portions as a swing center axis by applying a voltage between the pair of support portions and a laser beam on the reflection mirror unit of the optical deflector. Since the projected image is obtained by changing the direction of the reflected light of the irradiated laser light by swinging the reflecting mirror, an image with a high scanning frequency can be displayed.
[0048]
Further, according to the present invention, in the display device, reflected light from the reflecting mirror unit writes by irradiating the optically addressable spatial light modulator, the optical information written in the optically addressable spatial light modulator Therefore, an image with a high scanning frequency can be displayed using the optical address type spatial modulation element.
[Brief description of the drawings]
FIG. 1A is an exploded perspective view of an optical deflector according to a first embodiment of the present invention, and FIG. 1B is a schematic side view of the optical deflector.
FIG. 2 is a perspective view of an optical deflector according to the first embodiment of the present invention.
FIG. 3 is a schematic side view of the optical deflector according to the first embodiment of the present invention.
FIG. 4 is a perspective view of the back side of the reflecting mirror portion showing the first embodiment of the present invention.
5A is a side view for explaining the electrostatic force in the case of the comb electrode of the present invention, and FIG. 5B is a side view for explaining the electrostatic force in the case of the parallel plane electrode of the first conventional example. FIG.
FIG. 6 is a perspective view of a reflecting mirror portion for explaining a specific magnitude of electrostatic force.
FIG. 7 is a perspective view of the back side of a reflection mirror portion showing a second embodiment of the present invention.
FIG. 8 is a side view of an optical polarizer showing a third embodiment of the present invention.
FIG. 9 is a side view of an optical polarizer showing a third embodiment of the present invention.
FIG. 10 is a side view of an optical polarizer showing a fourth embodiment of the present invention.
FIG. 11 is a side view of an optical polarizer showing a fourth embodiment of the present invention.
FIG. 12 is a schematic configuration diagram of a display device using an optical deflector.
FIG. 13 is a schematic configuration diagram of another display device using an optical deflector.
FIG. 14 is an exploded perspective view of an optical deflector of a first conventional example.
FIG. 15 is a side view of a first conventional optical polarizer.
FIG. 16 is a side view of the optical polarizer of the first conventional example when the thickness of the reflection mirror portion is reduced.
FIG. 17 is a side view of the optical polarizer of the first conventional example when the gap interval between the reflection mirror portion and the base is widened.
FIG. 18 is an exploded perspective view of a second conventional optical deflector.
[Explanation of symbols]
1A to 1D Optical polarizer 2 Base 7 Reflective mirror portion 7a Opposite slope 8 Support portion 9 Mirror side comb tooth portion 9a Groove 9b Protrusion portion 10, 11 Fixed electrode 12 Electrode side comb tooth portion 12a Groove 12b Protrusion portion CL Oscillation center axis

Claims (4)

  1. A reflection mirror portion having a light reflection surface on the surface, a pair of support portions that swingably support the reflection mirror portion with respect to the base, and a pair of fixed electrodes disposed on the reflection mirror portion side of the base An optical deflector in which a voltage is applied between each of the fixed electrodes and the reflection mirror portion, and the reflection mirror portion swings with the pair of support portions as swing center axes by electrostatic force;
    The reflection mirror portion includes a mirror side comb tooth portion having a groove and a protrusion extending on the back surface thereof in a direction orthogonal to the oscillation central axis,
    Each of the fixed electrodes includes, on the reflection mirror part side, an electrode side comb tooth part having a protrusion and a groove that can mesh with the mirror side comb tooth part,
    The mirror-side comb-teeth portion and the electrode-side comb-teeth portion are configured such that the height of the protrusion with respect to the groove decreases as the distance from the oscillation central axis increases. .
  2. A reflection mirror portion having a light reflection surface on the surface, a pair of support portions that swingably support the reflection mirror portion with respect to the base, and a pair of fixed electrodes disposed on the reflection mirror portion side of the base An optical deflector in which a voltage is applied between each of the fixed electrodes and the reflection mirror portion, and the reflection mirror portion swings with the pair of support portions as swing center axes by electrostatic force;
    The reflection mirror portion is formed on the rear surface thereof along a mirror side comb tooth portion having a groove and a protrusion extending in a direction orthogonal to the swing center axis, and along the swing center axis. A rib portion connecting the projecting portions with each other,
    Each of the fixed electrodes is provided with an electrode-side comb-tooth portion having a protrusion and a groove that can mesh with the mirror-side comb-tooth portion on the reflection mirror portion side.
  3. A reflection mirror portion having a light reflection surface on the surface, a pair of support portions that swingably support the reflection mirror portion with respect to the base, and a pair of fixed electrodes disposed on the reflection mirror portion side of the base An optical deflector in which a voltage is applied between each of the fixed electrodes and the reflection mirror portion, and the reflection mirror portion swings with the pair of support portions as swing center axes by electrostatic force;
    The reflection mirror portion includes a mirror side comb tooth portion having a groove and a protrusion extending in a direction orthogonal to the oscillation central axis on the back surface, and the fixed electrodes are disposed on the reflection mirror portion side. The mirror-side comb-tooth portion and the electrode-side comb-tooth portion each have a projection-side and a groove-side electrode-side comb-tooth portion that can mesh with the mirror-side comb-tooth portion. A display device comprising an optical deflector configured to become lower as the distance from the swing central axis increases.
  4.   A reflection mirror portion having a light reflection surface on the surface, a pair of support portions that swingably support the reflection mirror portion with respect to the base, and a pair of fixed electrodes disposed on the reflection mirror portion side of the base In the optical deflector in which the reflection mirror unit swings about the pair of support portions as the swing center axis by an electrostatic force by applying a voltage between each fixed electrode and the reflection mirror unit. The mirror portion is formed on the back surface thereof along a mirror side comb tooth portion having a groove and a protrusion extending in a direction orthogonal to the swing center axis, and the support center portion. Ribs connected via the protrusions, and each fixed electrode has an electrode side comb tooth portion having a protrusion and a groove that can mesh with the mirror side comb tooth portion on the reflection mirror portion side. A display device comprising an optical deflector provided
JP32409298A 1998-11-13 1998-11-13 Optical deflector and display device using the same Expired - Lifetime JP4072743B2 (en)

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JP2002148554A (en) * 2000-11-03 2002-05-22 Samsung Electronics Co Ltd Optical scanner and laser video projector applying the same and driving method for the same
KR100400218B1 (en) * 2000-08-18 2003-10-30 삼성전자주식회사 micro-actuator and manufacturing method therof
US7005775B2 (en) * 2001-05-09 2006-02-28 Chang Feng Wan Microfabricated torsional drive utilizing lateral electrostatic force
KR100434541B1 (en) 2001-08-24 2004-06-05 삼성전자주식회사 Optical scanner and manufacturing method thereof
JP3862623B2 (en) 2002-07-05 2006-12-27 キヤノン株式会社 Optical deflector and manufacturing method thereof
KR100486716B1 (en) * 2002-10-18 2005-05-03 삼성전자주식회사 2-dimensional actuator and manufacturing method thereof
US7071594B1 (en) * 2002-11-04 2006-07-04 Microvision, Inc. MEMS scanner with dual magnetic and capacitive drive
JP2004325578A (en) * 2003-04-22 2004-11-18 Fujitsu Ltd Deflecting mirror
JP4761810B2 (en) * 2004-04-26 2011-08-31 パナソニック株式会社 Micro actuator
EP1591824B1 (en) 2004-04-26 2012-05-09 Panasonic Corporation Microactuator
US7356880B2 (en) 2004-07-26 2008-04-15 Pentax Corporation Hinge structure of micromirror device
JP2006053396A (en) 2004-08-12 2006-02-23 Pentax Corp Driving mechanism and micromirror device equipped with this mechanism
KR100636348B1 (en) 2004-08-18 2006-10-19 엘지전자 주식회사 Scanning Micro-mirror
JP4734122B2 (en) * 2006-01-16 2011-07-27 富士フイルム株式会社 Light modulation element, actuator, and driving method of actuator
JP5557113B2 (en) * 2011-01-12 2014-07-23 コニカミノルタ株式会社 Image display device
JP5751206B2 (en) 2011-10-21 2015-07-22 株式会社豊田中央研究所 Optical deflection device
JP2013195940A (en) * 2012-03-22 2013-09-30 Hitachi Media Electoronics Co Ltd Optical scanning mirror device, control method thereof, and image drawing device using optical scanning mirror device
JP2016139015A (en) 2015-01-28 2016-08-04 セイコーエプソン株式会社 Mirror device, manufacturing method of mirror device, and image display apparatus
US10268037B2 (en) * 2017-04-27 2019-04-23 Google Llc Interdigitating vertical dampers for MEMS-based actuators

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