DE602008006439D1 - Mems-mikrospiegel-scanner mit verminderter dynamischer deformation - Google Patents

Mems-mikrospiegel-scanner mit verminderter dynamischer deformation

Info

Publication number
DE602008006439D1
DE602008006439D1 DE602008006439T DE602008006439T DE602008006439D1 DE 602008006439 D1 DE602008006439 D1 DE 602008006439D1 DE 602008006439 T DE602008006439 T DE 602008006439T DE 602008006439 T DE602008006439 T DE 602008006439T DE 602008006439 D1 DE602008006439 D1 DE 602008006439D1
Authority
DE
Germany
Prior art keywords
pair
beams
mems
midpoint
dynamic deformation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602008006439T
Other languages
English (en)
Inventor
Krassimir T Krastev
Lierop Hendrikus W Van
Hermanus M Soemers
Renatus H Sanders
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Innoluce BV
Original Assignee
Innoluce BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Innoluce BV filed Critical Innoluce BV
Publication of DE602008006439D1 publication Critical patent/DE602008006439D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE602008006439T 2007-10-05 2008-10-02 Mems-mikrospiegel-scanner mit verminderter dynamischer deformation Active DE602008006439D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97771307P 2007-10-05 2007-10-05
PCT/IB2008/054028 WO2009044360A1 (en) 2007-10-05 2008-10-02 Mems scanning micromirror with reduced dynamic deformation

Publications (1)

Publication Number Publication Date
DE602008006439D1 true DE602008006439D1 (de) 2011-06-01

Family

ID=40276115

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602008006439T Active DE602008006439D1 (de) 2007-10-05 2008-10-02 Mems-mikrospiegel-scanner mit verminderter dynamischer deformation

Country Status (7)

Country Link
US (1) US8345336B2 (de)
EP (1) EP2201421B1 (de)
AT (1) ATE506628T1 (de)
DE (1) DE602008006439D1 (de)
ES (1) ES2364743T3 (de)
TW (1) TWI432777B (de)
WO (1) WO2009044360A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8345336B2 (en) 2007-10-05 2013-01-01 Innoluce B.V. MEMS scanning micromirror with reduced dynamic deformation
DE102009033191A1 (de) * 2009-07-07 2011-01-13 Technische Universität Dresden Reduzierung der dynamischen Deformation von Translationsspiegeln mit Hilfe von trägen Massen
US8547619B2 (en) * 2009-12-23 2013-10-01 Jds Uniphase Corporation Tiltable MEMS mirror
JP5936154B2 (ja) 2011-03-31 2016-06-15 ベスパー テクノロジーズ インコーポレイテッドＶｅｓｐｅｒ Ｔｅｃｈｎｏｌｏｇｉｅｓ Ｉｎｃ． ギャップ制御構造を有する音響トランスデューサおよび音響トランスデューサの製造方法
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
NL2007886C2 (en) * 2011-11-29 2013-05-30 Innoluce B V Mems scanning micromirror.
TWI476444B (zh) * 2011-12-22 2015-03-11 Nat Inst Chung Shan Science & Technology 雙投影之鏡面結構
DE102013212102A1 (de) * 2013-06-25 2015-01-08 Robert Bosch Gmbh Mikromechanisches Bauteil, Mikrospiegelvorrichtung und Herstellungsverfahren für ein mikromechanisches Bauteil
DE102013223937B4 (de) 2013-11-22 2022-01-05 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikrospiegelanordnung
DE102017206252A1 (de) 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
DE102017118776B4 (de) 2017-08-17 2020-11-12 Blickfeld GmbH Scaneinheit mit mindestens zwei Stützelementen und einem freistehenden Umlenkelement und Verfahren zum Scannen von Licht
DE102017120678A1 (de) 2017-09-07 2019-03-21 Blickfeld GmbH Scaneinheit mit Robustheit gegenüber Schock
DE102017219442B8 (de) * 2017-10-30 2023-03-02 Infineon Technologies Ag Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist
DE102017219929B4 (de) * 2017-11-09 2019-05-23 Robert Bosch Gmbh Mikromechanischer z-Inertialsensor
DE102018113739A1 (de) 2018-06-08 2019-12-12 Blickfeld GmbH Koaxiales optisches System eines reibungsfreien Scansystems für Lichtdetektion und Abstandsmessung, LIDAR, Messungen
DE102018118584A1 (de) 2018-07-31 2020-02-06 Blickfeld GmbH Fahrzeugscheinwerfer mit LIDAR-Modul
DE102018126522A1 (de) 2018-10-24 2020-04-30 Blickfeld GmbH Laufzeitbasierte Entfernungsmessung unter Verwendung von modulierten Pulsfolgen von Laserpulsen
US11360299B2 (en) 2019-04-02 2022-06-14 Microsoft Technology Licensing, Llc Display device with compact scanning mirror
US11740458B2 (en) * 2019-07-26 2023-08-29 Microsoft Technology Licensing, Llc Projection device and projection method for head mounted display based on rotary MEMS fast scanner
US11726240B2 (en) * 2020-02-14 2023-08-15 Google Llc Variable mesh low mass MEMS mirrors
US11668925B2 (en) * 2020-03-25 2023-06-06 Compertum Microsystems Inc. MEMS micro-mirror device with stopper and method of making same
US20220269070A1 (en) * 2020-04-03 2022-08-25 Google Llc Capacitive angle sensing of electrostatic mems mirrors
US11662570B2 (en) * 2020-06-17 2023-05-30 Infineon Technologies Ag Mems scanner suspension system enabling high frequency and high mechanical tilt angle for large mirrors

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7188964B2 (en) * 2003-02-25 2007-03-13 Xinetics, Inc. Integrated actuator meniscus mirror
US7557972B2 (en) * 2006-06-07 2009-07-07 Canon Kabushiki Kaisha Oscillator device, optical deflector and optical instrument using the same
US7916373B2 (en) * 2007-08-09 2011-03-29 Alcatel-Lucent Usa Inc. Tapered reinforcing struts for micromachined structures
WO2009044324A2 (en) 2007-10-05 2009-04-09 Koninklijke Philips Electronics N.V. Mems scanning micromirror manufacturing method
US8345336B2 (en) 2007-10-05 2013-01-01 Innoluce B.V. MEMS scanning micromirror with reduced dynamic deformation

Also Published As

Publication number Publication date
TW200922861A (en) 2009-06-01
WO2009044360A1 (en) 2009-04-09
EP2201421B1 (de) 2011-04-20
TWI432777B (zh) 2014-04-01
US8345336B2 (en) 2013-01-01
ES2364743T3 (es) 2011-09-13
US20100290142A1 (en) 2010-11-18
ATE506628T1 (de) 2011-05-15
EP2201421A1 (de) 2010-06-30

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