DE102017219442B8 - Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist - Google Patents

Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist Download PDF

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Publication number
DE102017219442B8
DE102017219442B8 DE102017219442.1A DE102017219442A DE102017219442B8 DE 102017219442 B8 DE102017219442 B8 DE 102017219442B8 DE 102017219442 A DE102017219442 A DE 102017219442A DE 102017219442 B8 DE102017219442 B8 DE 102017219442B8
Authority
DE
Germany
Prior art keywords
apertures
leaf spring
mirror device
mirror
leaf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE102017219442.1A
Other languages
English (en)
Other versions
DE102017219442B4 (de
DE102017219442A1 (de
Inventor
Hendrikus VAN LIEROP
Kaveh SAMADI KHAH
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to DE102017219442.1A priority Critical patent/DE102017219442B8/de
Priority to US16/174,519 priority patent/US10877263B2/en
Priority to CN201811280732.5A priority patent/CN109725414B/zh
Publication of DE102017219442A1 publication Critical patent/DE102017219442A1/de
Publication of DE102017219442B4 publication Critical patent/DE102017219442B4/de
Application granted granted Critical
Publication of DE102017219442B8 publication Critical patent/DE102017219442B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/18—Leaf springs
    • F16F1/185—Leaf springs characterised by shape or design of individual leaves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs
    • F16F1/02—Springs made of steel or other material having low internal friction; Wound, torsion, leaf, cup, ring or the like springs, the material of the spring not being relevant
    • F16F1/04—Wound springs
    • F16F1/12—Attachments or mountings
    • F16F1/126—Attachments or mountings comprising an element between the end coil of the spring and the support proper, e.g. an elastomeric annulus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00—Purpose; Design features
    • F16F2230/36—Holes, slots or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
DE102017219442.1A 2017-10-30 2017-10-30 Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist Active DE102017219442B8 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE102017219442.1A DE102017219442B8 (de) 2017-10-30 2017-10-30 Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist
US16/174,519 US10877263B2 (en) 2017-10-30 2018-10-30 Mirror device having leaf spring with openings
CN201811280732.5A CN109725414B (zh) 2017-10-30 2018-10-30 具备具有开口的板簧的镜子器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102017219442.1A DE102017219442B8 (de) 2017-10-30 2017-10-30 Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist

Publications (3)

Publication Number Publication Date
DE102017219442A1 DE102017219442A1 (de) 2019-05-02
DE102017219442B4 DE102017219442B4 (de) 2023-02-02
DE102017219442B8 true DE102017219442B8 (de) 2023-03-02

Family

ID=66137791

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102017219442.1A Active DE102017219442B8 (de) 2017-10-30 2017-10-30 Spiegelvorrichtung, die eine Blattfeder mit Öffnungen aufweist

Country Status (3)

Country Link
US (1) US10877263B2 (de)
CN (1) CN109725414B (de)
DE (1) DE102017219442B8 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017206252A1 (de) * 2017-04-11 2018-10-11 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanische Spiegelvorrichtung
DE102018010451B4 (de) * 2018-05-22 2023-11-02 Infineon Technologies Ag MEMS-Bauelement mit Aufhängungsstruktur und Verfahren zum Herstellen eines MEMS-Bauelementes
CN108843522B (zh) * 2018-06-07 2019-07-26 北京金风科创风电设备有限公司 阻尼器限位装置、塔筒及风力发电机组
US10788659B2 (en) * 2018-10-24 2020-09-29 Infinean Technologies Ag Monitoring of MEMS mirror properties
DE102019206151A1 (de) * 2019-04-30 2020-11-05 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung und Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung
JP7247778B2 (ja) * 2019-06-20 2023-03-29 株式会社リコー 光偏向装置、レーザレーダ装置、及び画像形成装置
CN110501812A (zh) * 2019-09-05 2019-11-26 上海汽车集团股份有限公司 一种mems扫描镜
US11662570B2 (en) * 2020-06-17 2023-05-30 Infineon Technologies Ag Mems scanner suspension system enabling high frequency and high mechanical tilt angle for large mirrors
CN113933948B (zh) * 2020-06-29 2023-04-07 上海微电子装备（集团）股份有限公司 镜组调节机构、可调式光学系统及光刻设备
WO2022180736A1 (ja) * 2021-02-25 2022-09-01 パイオニア株式会社 アクチュエーター
CN113370731A (zh) * 2021-06-23 2021-09-10 东风柳州汽车有限公司 一种钢板弹簧悬架

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030174035A1 (en) 2002-03-18 2003-09-18 Olympus Opitical Co., Ltd. Optical deflector and electromagnetic actuator
US7187100B2 (en) 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
WO2013111266A1 (ja) 2012-01-24 2013-08-01 パイオニア株式会社 アクチュエータ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5268784A (en) * 1991-02-05 1993-12-07 Canon Kabushiki Kaisha Pivotable mirror device for tracking
JP3003429B2 (ja) * 1992-10-08 2000-01-31 富士電機株式会社 ねじり振動子および光偏向子
JPH112774A (ja) * 1997-06-11 1999-01-06 Toshiba Corp 光偏向装置およびそれを用いたマルチビーム走査装置
US20060250675A1 (en) 2003-07-14 2006-11-09 Koninklijke Philips Electronics N.V. Laser beam scanner
JP4262574B2 (ja) 2003-10-30 2009-05-13 オリンパス株式会社 光偏向器
ATE506628T1 (de) * 2007-10-05 2011-05-15 Innoluce B V Mems-mikrospiegel-scanner mit verminderter dynamischer deformation
JP4980990B2 (ja) * 2008-06-25 2012-07-18 パナソニック株式会社 可動構造体及びそれを用いたマイクロミラー素子
NL2007554C2 (en) * 2011-10-10 2013-04-11 Innoluce B V Mems scanning micromirror.
NL2007886C2 (en) * 2011-11-29 2013-05-30 Innoluce B V Mems scanning micromirror.
US10788659B2 (en) * 2018-10-24 2020-09-29 Infinean Technologies Ag Monitoring of MEMS mirror properties

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030174035A1 (en) 2002-03-18 2003-09-18 Olympus Opitical Co., Ltd. Optical deflector and electromagnetic actuator
US7187100B2 (en) 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
WO2013111266A1 (ja) 2012-01-24 2013-08-01 パイオニア株式会社 アクチュエータ

Also Published As

Publication number Publication date
DE102017219442B4 (de) 2023-02-02
US20190129163A1 (en) 2019-05-02
CN109725414A (zh) 2019-05-07
CN109725414B (zh) 2022-04-01
DE102017219442A1 (de) 2019-05-02
US10877263B2 (en) 2020-12-29

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