DE60033565D1 - Rasterkraftmikroskophebelarm mit reflektiver struktur - Google Patents

Rasterkraftmikroskophebelarm mit reflektiver struktur

Info

Publication number
DE60033565D1
DE60033565D1 DE60033565T DE60033565T DE60033565D1 DE 60033565 D1 DE60033565 D1 DE 60033565D1 DE 60033565 T DE60033565 T DE 60033565T DE 60033565 T DE60033565 T DE 60033565T DE 60033565 D1 DE60033565 D1 DE 60033565D1
Authority
DE
Germany
Prior art keywords
reflective structure
cantilever
microscope arm
grid microscope
grid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60033565T
Other languages
English (en)
Other versions
DE60033565T2 (de
Inventor
J Thomson
J Lada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cascade Microtech Dresden GmbH
Original Assignee
SUSS MicroTec Test Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23871748&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE60033565(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by SUSS MicroTec Test Systems GmbH filed Critical SUSS MicroTec Test Systems GmbH
Publication of DE60033565D1 publication Critical patent/DE60033565D1/de
Application granted granted Critical
Publication of DE60033565T2 publication Critical patent/DE60033565T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE60033565T 1999-12-22 2000-12-21 Rasterkraftmikroskophebelarm mit reflektiver struktur Expired - Fee Related DE60033565T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US471467 1995-06-06
US09/471,467 US6298715B1 (en) 1999-12-22 1999-12-22 Scanning force microscope probe cantilever with reflective structure
PCT/US2000/035021 WO2001046643A1 (en) 1999-12-22 2000-12-21 Scanning force microscope probe cantilever with reflective structure

Publications (2)

Publication Number Publication Date
DE60033565D1 true DE60033565D1 (de) 2007-04-05
DE60033565T2 DE60033565T2 (de) 2007-11-08

Family

ID=23871748

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60033565T Expired - Fee Related DE60033565T2 (de) 1999-12-22 2000-12-21 Rasterkraftmikroskophebelarm mit reflektiver struktur

Country Status (7)

Country Link
US (1) US6298715B1 (de)
EP (1) EP1247063B1 (de)
JP (1) JP2003518253A (de)
AT (1) ATE354779T1 (de)
AU (1) AU2451201A (de)
DE (1) DE60033565T2 (de)
WO (1) WO2001046643A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6642517B1 (en) * 2000-01-25 2003-11-04 Veeco Instruments, Inc. Method and apparatus for atomic force microscopy
US20030160170A1 (en) * 2000-03-30 2003-08-28 Mcmaster Terence J. Methods and apparatus for atomic force microscopy
US20030233870A1 (en) * 2001-07-18 2003-12-25 Xidex Corporation Multidimensional sensing system for atomic force microscopy
US8524488B2 (en) * 2002-09-10 2013-09-03 The Regents Of The University Of California Methods and devices for determining a cell characteristic, and applications employing the same
JP2005037205A (ja) * 2003-07-18 2005-02-10 Hitachi Kenki Fine Tech Co Ltd 走査型プローブ顕微鏡およびその計測方法
US6935167B1 (en) 2004-03-15 2005-08-30 The Board Of Trustees Of The Leland Stanford Junior University Harmonic cantilevers and imaging methods for atomic force microscopy
US7089787B2 (en) * 2004-07-08 2006-08-15 Board Of Trustees Of The Leland Stanford Junior University Torsional harmonic cantilevers for detection of high frequency force components in atomic force microscopy
US7603891B2 (en) * 2006-04-25 2009-10-20 Asylum Research Corporation Multiple frequency atomic force microscopy
US8024963B2 (en) 2006-10-05 2011-09-27 Asylum Research Corporation Material property measurements using multiple frequency atomic force microscopy
US7594443B2 (en) * 2006-10-09 2009-09-29 The Board Of Regents, University Of Texas System Mechanically tunable optical-encoded force sensor
US8677809B2 (en) * 2008-06-16 2014-03-25 Oxford Instruments Plc Thermal measurements using multiple frequency atomic force microscopy
AU2012101789A4 (en) * 2012-08-24 2013-01-10 Kuo LI A method to utilize string-strain-change induced by a transverse force and its application in fiber Bragg grating accelerometers
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
DE102017205528B4 (de) * 2017-03-31 2021-06-10 Carl Zeiss Smt Gmbh Vorrichtung und Verfahren für ein Rastersondenmikroskop
EP3591410A1 (de) * 2018-07-06 2020-01-08 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Sondenchip, abtastkopf, rastersondenmikroskopievorrichtung und verwendung eines sondenchips

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5394741A (en) * 1990-07-11 1995-03-07 Olympus Optical Co., Ltd. Atomic probe microscope
JPH0526662A (ja) * 1991-07-25 1993-02-02 Hitachi Ltd 走査型原子間力，磁気力顕微鏡及びその類似装置
JPH09222431A (ja) * 1996-02-19 1997-08-26 Hitachi Constr Mach Co Ltd 力顕微鏡装置
JPH1073607A (ja) * 1996-08-29 1998-03-17 Shimadzu Corp 走査型プローブ顕微鏡
US5908981A (en) * 1996-09-05 1999-06-01 Board Of Trustees Of The Leland Stanford, Jr. University Interdigital deflection sensor for microcantilevers

Also Published As

Publication number Publication date
US6298715B1 (en) 2001-10-09
DE60033565T2 (de) 2007-11-08
EP1247063B1 (de) 2007-02-21
JP2003518253A (ja) 2003-06-03
WO2001046643A1 (en) 2001-06-28
ATE354779T1 (de) 2007-03-15
EP1247063A1 (de) 2002-10-09
EP1247063A4 (de) 2005-03-23
AU2451201A (en) 2001-07-03

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: THOMSON, DOUGLAS J., WINNIPEG, MANITOBA R2M 3Z, CA

Inventor name: LADA, CHRISTOPHER O., PALO ALTO, CA 94301, US

8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee