DE69003047D1 - Nah-Feld Lorentz-Kraft-Mikroskopie. - Google Patents

Nah-Feld Lorentz-Kraft-Mikroskopie.

Info

Publication number
DE69003047D1
DE69003047D1 DE90111524T DE69003047T DE69003047D1 DE 69003047 D1 DE69003047 D1 DE 69003047D1 DE 90111524 T DE90111524 T DE 90111524T DE 69003047 T DE69003047 T DE 69003047T DE 69003047 D1 DE69003047 D1 DE 69003047D1
Authority
DE
Germany
Prior art keywords
lorentz force
force microscopy
field lorentz
field
microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE90111524T
Other languages
English (en)
Other versions
DE69003047T2 (de
Inventor
David W Abraham
Hemantha K Wickramasinghe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE69003047D1 publication Critical patent/DE69003047D1/de
Publication of DE69003047T2 publication Critical patent/DE69003047T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/82—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables for investigating the presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/852—Manufacture, treatment, or detection of nanostructure with scanning probe for detection of specific nanostructure sample or nanostructure-related property
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/865—Magnetic force probe
DE90111524T 1989-07-27 1990-06-19 Nah-Feld Lorentz-Kraft-Mikroskopie. Expired - Fee Related DE69003047T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/386,330 US4992659A (en) 1989-07-27 1989-07-27 Near-field lorentz force microscopy

Publications (2)

Publication Number Publication Date
DE69003047D1 true DE69003047D1 (de) 1993-10-07
DE69003047T2 DE69003047T2 (de) 1994-04-21

Family

ID=23525154

Family Applications (1)

Application Number Title Priority Date Filing Date
DE90111524T Expired - Fee Related DE69003047T2 (de) 1989-07-27 1990-06-19 Nah-Feld Lorentz-Kraft-Mikroskopie.

Country Status (4)

Country Link
US (1) US4992659A (de)
EP (1) EP0410131B1 (de)
JP (1) JPH0734032B2 (de)
DE (1) DE69003047T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110793683A (zh) * 2019-10-30 2020-02-14 季华实验室 一种基于近场直写技术的微纳电阻应变片制作方法及应变片

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US5304924A (en) * 1989-03-29 1994-04-19 Canon Kabushiki Kaisha Edge detector
JP2686645B2 (ja) * 1989-05-08 1997-12-08 キヤノン株式会社 走査型トンネル電流検出装置
JP2999282B2 (ja) * 1990-03-09 2000-01-17 キヤノン株式会社 記録再生方法及び装置
US5065103A (en) * 1990-03-27 1991-11-12 International Business Machines Corporation Scanning capacitance - voltage microscopy
JPH041949A (ja) * 1990-04-18 1992-01-07 Canon Inc 情報入力及び／または取出し装置
US5394741A (en) * 1990-07-11 1995-03-07 Olympus Optical Co., Ltd. Atomic probe microscope
US5164595A (en) * 1990-09-10 1992-11-17 North Carolina State University Scanning tunneling microscope tips
US5122739A (en) * 1990-11-06 1992-06-16 Texas Instruments Incorporated STM-like device and method for measuring node voltages on integrated circuits
US5375087A (en) * 1991-02-04 1994-12-20 The United States Of America As Represented By The Secretary Of Commerce Tunneling-stabilized magnetic reading and recording
CA2060674C (en) * 1991-02-08 1996-10-01 Masahiro Tagawa Driving apparatus and a recording and/or reproducing apparatus using the same
US5155361A (en) * 1991-07-26 1992-10-13 The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
US5384507A (en) * 1991-11-29 1995-01-24 Hitachi Construction Machinery Co., Ltd. Method of and device for driving piezo-electric elements and system for controlling micromotion mechanism
US5267471A (en) * 1992-04-30 1993-12-07 Ibm Corporation Double cantilever sensor for atomic force microscope
US5381101A (en) * 1992-12-02 1995-01-10 The Board Of Trustees Of The Leland Stanford Junior University System and method of measuring high-speed electrical waveforms using force microscopy and offset sampling frequencies
EP0611945B1 (de) * 1993-02-15 1997-11-19 International Business Machines Corporation Kraftmikroskop und Verfahren zur Messung von atomaren Kräften in mehreren Richtungen
DE69433974T2 (de) * 1993-04-13 2005-09-01 Agilent Technologies, Inc., Palo Alto Elektro-optisches instrument
WO1995006138A1 (en) * 1993-08-25 1995-03-02 The Regents Of The University Of California Microscopic method for detecting micromotions
US5445011A (en) * 1993-09-21 1995-08-29 Ghislain; Lucien P. Scanning force microscope using an optical trap
EP0727085B1 (de) * 1993-11-03 1998-07-22 International Business Machines Corporation Methode und gerät zur wiedergewinnung digitaler daten von einem magnetischen speichermedium
US5440920A (en) * 1994-02-03 1995-08-15 Molecular Imaging Systems Scanning force microscope with beam tracking lens
US5646339A (en) * 1994-02-14 1997-07-08 International Business Machines Corporation Force microscope and method for measuring atomic forces in multiple directions
US5509300A (en) * 1994-05-12 1996-04-23 Arizona Board Of Regents Acting For Arizona State University Non-contact force microscope having a coaxial cantilever-tip configuration
US5513518A (en) * 1994-05-19 1996-05-07 Molecular Imaging Corporation Magnetic modulation of force sensor for AC detection in an atomic force microscope
US5866805A (en) * 1994-05-19 1999-02-02 Molecular Imaging Corporation Arizona Board Of Regents Cantilevers for a magnetically driven atomic force microscope
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5515719A (en) * 1994-05-19 1996-05-14 Molecular Imaging Corporation Controlled force microscope for operation in liquids
JPH0862230A (ja) * 1994-08-24 1996-03-08 Olympus Optical Co Ltd 集積型ｓｐｍセンサー
EP0732584A3 (de) * 1995-03-16 1999-06-30 International Business Machines Corporation Verfahren und Aufbau zur Identifizierung einer Codesequenz eines Biomoleküls
GB9617380D0 (en) * 1996-08-19 1996-10-02 Isis Innovation Atomic force microscopy apparatus and a method thereof
US6426621B1 (en) * 1998-06-22 2002-07-30 Honeywell Inc. Method and apparatus for generating an output voltage by detecting magnetic field
US6285811B1 (en) * 1999-02-25 2001-09-04 The United States Of America As Represented By The Secretary Of The Navy Near-field optical microscope with infrared fiber probe
US6836559B2 (en) * 2000-03-09 2004-12-28 The Regents Of The University Of California Automated video-microscopic imaging and data acquisition system for colloid deposition measurements
US6975109B2 (en) * 2000-09-01 2005-12-13 Honeywell International Inc. Method for forming a magnetic sensor that uses a Lorentz force and a piezoelectric effect
US7498564B2 (en) 2001-02-06 2009-03-03 University Of Bristol Of Senate House Resonant scanning near-field optical microscope
KR100474844B1 (ko) * 2001-12-08 2005-03-08 삼성전자주식회사 로렌츠력 현미경 및 로렌츠력을 이용한 자구 측정방법
US7473887B2 (en) 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
DE102004030881B4 (de) * 2003-07-01 2015-05-13 Cascade Microtech, Inc. Verfahren und Prober zur Kontaktierung einer Kontakfläche mit einer Kontaktspitze
CN100363752C (zh) * 2004-09-03 2008-01-23 清华大学 水平式隧穿磁强计
US7034563B1 (en) * 2005-01-26 2006-04-25 Ahbee 2, L.P., A California Limited Partnership Apparatus for measuring of thin dielectric layer properties on semiconductor wafers with contact self aligning electrodes
US9110131B2 (en) 2010-04-13 2015-08-18 Cascade Microtech, Inc. Method and device for contacting a row of contact areas with probe tips

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535515A (en) * 1967-06-14 1970-10-20 Us Navy Ultrasonic apparatus for electron microscope
CH643397A5 (de) * 1979-09-20 1984-05-30 Ibm Raster-tunnelmikroskop.
JPS6115341A (ja) * 1984-07-02 1986-01-23 Canon Inc ウエハプロ−バ
EP0194323B1 (de) * 1985-03-07 1989-08-02 International Business Machines Corporation Tunneleffektabtastungsmikroskop
JPS6289483A (ja) * 1985-10-11 1987-04-23 Agency Of Ind Science & Technol 微動装置
US4864227A (en) * 1987-02-27 1989-09-05 Canon Kabushiki Kaisha Wafer prober
JPS643502A (en) * 1987-06-25 1989-01-09 Seiko Instr & Electronics Scanning type tunnel microscope
JPH01110204A (ja) * 1987-10-23 1989-04-26 Jeol Ltd 電子顕微鏡用走査トンネル顕微鏡
US4861990A (en) * 1988-02-09 1989-08-29 California Institute Of Technology Tunneling susceptometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110793683A (zh) * 2019-10-30 2020-02-14 季华实验室 一种基于近场直写技术的微纳电阻应变片制作方法及应变片

Also Published As

Publication number Publication date
US4992659A (en) 1991-02-12
EP0410131B1 (de) 1993-09-01
DE69003047T2 (de) 1994-04-21
JPH0734032B2 (ja) 1995-04-12
EP0410131A1 (de) 1991-01-30
JPH0368880A (ja) 1991-03-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee