DE69030835T2 - Photoelektronenmikroskop - Google Patents

Photoelektronenmikroskop

Info

Publication number
DE69030835T2
DE69030835T2 DE69030835T DE69030835T DE69030835T2 DE 69030835 T2 DE69030835 T2 DE 69030835T2 DE 69030835 T DE69030835 T DE 69030835T DE 69030835 T DE69030835 T DE 69030835T DE 69030835 T2 DE69030835 T2 DE 69030835T2
Authority
DE
Germany
Prior art keywords
photoelectron microscope
photoelectron
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69030835T
Other languages
English (en)
Other versions
DE69030835D1 (de
Inventor
Hideo Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1082462A external-priority patent/JP2757441B2/ja
Priority claimed from JP1219473A external-priority patent/JPH0718960B2/ja
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of DE69030835D1 publication Critical patent/DE69030835D1/de
Application granted granted Critical
Publication of DE69030835T2 publication Critical patent/DE69030835T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/50—Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/50005—Imaging and conversion tubes characterised by form of illumination
    • H01J2231/5001—Photons
    • H01J2231/50031—High energy photons
    • H01J2231/50036—X-rays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/50057—Imaging and conversion tubes characterised by form of output stage
    • H01J2231/50089—Having optical stage before electrical conversion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/501—Imaging and conversion tubes including multiplication stage
    • H01J2231/5013—Imaging and conversion tubes including multiplication stage with secondary emission electrodes
    • H01J2231/5016—Michrochannel plates [MCP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2231/00—Cathode ray tubes or electron beam tubes
    • H01J2231/50—Imaging and conversion tubes
    • H01J2231/505—Imaging and conversion tubes with non-scanning optics
    • H01J2231/5056—Imaging and conversion tubes with non-scanning optics magnetic

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
DE69030835T 1989-03-31 1990-03-21 Photoelektronenmikroskop Expired - Fee Related DE69030835T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1082462A JP2757441B2 (ja) 1989-03-31 1989-03-31 Ｘ線顕微鏡
JP1219473A JPH0718960B2 (ja) 1989-08-25 1989-08-25 Ｘ線顕微鏡

Publications (2)

Publication Number Publication Date
DE69030835D1 DE69030835D1 (de) 1997-07-10
DE69030835T2 true DE69030835T2 (de) 1998-01-22

Family

ID=26423473

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69030835T Expired - Fee Related DE69030835T2 (de) 1989-03-31 1990-03-21 Photoelektronenmikroskop

Country Status (3)

Country Link
US (1) US5045696A (de)
EP (1) EP0389952B1 (de)
DE (1) DE69030835T2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5285061A (en) * 1992-08-28 1994-02-08 Csl Opto-Electronics Corp. X-ray photocathode for a real time x-ray image intensifier
US5446282A (en) * 1993-04-05 1995-08-29 Nikon Corporation Scanning photoelectron microscope
US5491331A (en) * 1994-04-25 1996-02-13 Pilot Industries, Inc. Soft x-ray imaging device
US6002740A (en) * 1996-10-04 1999-12-14 Wisconsin Alumni Research Foundation Method and apparatus for X-ray and extreme ultraviolet inspection of lithography masks and other objects
US5912939A (en) * 1997-02-07 1999-06-15 Hirsch; Gregory Soft x-ray microfluoroscope
ATE349757T1 (de) * 1997-04-08 2007-01-15 Xrt Ltd Hochauflösende röntgenbilderdarstellung von sehr kleinen objekten
US6324255B1 (en) * 1998-08-13 2001-11-27 Nikon Technologies, Inc. X-ray irradiation apparatus and x-ray exposure apparatus
US6455838B2 (en) 1998-10-06 2002-09-24 The Regents Of The University Of California High sensitivity deflection sensing device
JP3573725B2 (ja) * 2001-08-03 2004-10-06 川崎重工業株式会社 Ｘ線顕微鏡装置
CN1280835C (zh) * 2002-03-05 2006-10-18 姆拉丁·阿布比奇罗维奇·库马科夫 X射线显微镜
EP1495312A4 (de) * 2002-04-17 2008-12-17 Ebara Corp Probenoberflächenuntersuchungsvorrichtung und -verfahren
US7006741B1 (en) * 2005-03-22 2006-02-28 Bi Yu Contact-field optical microscope
US7608838B1 (en) 2007-01-15 2009-10-27 Raymond Browning Electron optical component
US7569816B1 (en) 2007-01-15 2009-08-04 Raymond Browning Electron spectrometer
US7718961B1 (en) 2007-01-15 2010-05-18 Raymond Browning Photoelectron microscope
US9291578B2 (en) 2012-08-03 2016-03-22 David L. Adler X-ray photoemission microscope for integrated devices
US9129715B2 (en) 2012-09-05 2015-09-08 SVXR, Inc. High speed x-ray inspection microscope
PL233846B1 (pl) 2015-02-26 2019-12-31 Krzysztof Grzelakowski Fotonowo transmisyjny mikroskop emisyjny elektronów wtórnych

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4172008A (en) * 1977-08-23 1979-10-23 Dubble Whammy, Inc. Nuclear fusion reactor
DE2842527C3 (de) * 1978-09-29 1981-12-17 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen Elektrostatische Emissionslinse
JPS58500186A (ja) * 1981-01-16 1983-02-03 ケベック・コ−ポレ−ション 放出型電子顕微鏡
GB2115979A (en) * 1982-02-27 1983-09-14 Kratos Ltd Improvements in charged particle microscopes
JPH0630235B2 (ja) * 1985-06-11 1994-04-20 浜松ホトニクス株式会社 高時間分解電子顕微鏡装置
US4829177A (en) * 1986-09-11 1989-05-09 Gregory Hirsch Point projection photoelectron microscope with hollow needle
US4912737A (en) * 1987-10-30 1990-03-27 Hamamatsu Photonics K.K. X-ray image observing device

Also Published As

Publication number Publication date
EP0389952A2 (de) 1990-10-03
EP0389952B1 (de) 1997-06-04
DE69030835D1 (de) 1997-07-10
US5045696A (en) 1991-09-03
EP0389952A3 (de) 1991-03-27

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Legal Events

Date Code Title Description
8320 Willingness to grant licences declared (paragraph 23)
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee