DE69009846D1 - Aperturlose, optische Nahfeld-Mikroskopie. - Google Patents

Aperturlose, optische Nahfeld-Mikroskopie.

Info

Publication number
DE69009846D1
DE69009846D1 DE69009846T DE69009846T DE69009846D1 DE 69009846 D1 DE69009846 D1 DE 69009846D1 DE 69009846 T DE69009846 T DE 69009846T DE 69009846 T DE69009846 T DE 69009846T DE 69009846 D1 DE69009846 D1 DE 69009846D1
Authority
DE
Germany
Prior art keywords
apertureless
field microscopy
optical near
optical
microscopy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69009846T
Other languages
English (en)
Other versions
DE69009846T2 (de
Inventor
Hemantha K Wickramasinghe
Clayton C Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69009846D1 publication Critical patent/DE69009846D1/de
Application granted granted Critical
Publication of DE69009846T2 publication Critical patent/DE69009846T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/862—Near-field probe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69009846T 1989-04-28 1990-03-21 Aperturlose, optische Nahfeld-Mikroskopie. Expired - Lifetime DE69009846T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/344,621 US4947034A (en) 1989-04-28 1989-04-28 Apertureless near field optical microscope

Publications (2)

Publication Number Publication Date
DE69009846D1 true DE69009846D1 (de) 1994-07-21
DE69009846T2 DE69009846T2 (de) 1995-01-05

Family

ID=23351269

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69009846T Expired - Lifetime DE69009846T2 (de) 1989-04-28 1990-03-21 Aperturlose, optische Nahfeld-Mikroskopie.

Country Status (4)

Country Link
US (1) US4947034A (de)
EP (1) EP0394668B1 (de)
JP (1) JPH0727118B2 (de)
DE (1) DE69009846T2 (de)

Families Citing this family (52)

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US5264698A (en) * 1988-07-17 1993-11-23 Raoul Kopelman Nanometer dimension optical device with microimaging and nanoillumination capabilities
IL87139A0 (en) * 1988-07-17 1989-02-28 Aaron Lewis Nanometer dimension optical device
IL97362A0 (en) * 1991-02-26 1992-08-18 Aaron Lewis Method for external excitation of subwavelength light sources that is integrated into feedback methodologies
US5254854A (en) * 1991-11-04 1993-10-19 At&T Bell Laboratories Scanning microscope comprising force-sensing means and position-sensitive photodetector
JP2535759B2 (ja) * 1993-05-13 1996-09-18 工業技術院長 原子間力顕微鏡および原子間力顕微鏡における試料観察方法
US5677978A (en) * 1993-08-08 1997-10-14 Lewis; Aaron Bent probe microscopy
WO1995006138A1 (en) * 1993-08-25 1995-03-02 The Regents Of The University Of California Microscopic method for detecting micromotions
US5548113A (en) * 1994-03-24 1996-08-20 Trustees Of Boston University Co-axial detection and illumination with shear force dithering in a near-field scanning optical microscope
US5734498A (en) * 1994-05-09 1998-03-31 The Regents Of The University Of California Illuminator elements for conventional light microscopes
US5479024A (en) * 1994-08-11 1995-12-26 The Regents Of The University Of California Method and apparatus for performing near-field optical microscopy
US5538898A (en) * 1995-03-16 1996-07-23 International Business Machines Corporation Method suitable for identifying a code sequence of a biomolecule
EP0732584A3 (de) * 1995-03-16 1999-06-30 International Business Machines Corporation Verfahren und Aufbau zur Identifizierung einer Codesequenz eines Biomoleküls
US5609744A (en) * 1995-03-16 1997-03-11 International Business Machines Corporation Assembly suitable for identifying a code sequence of a biomolecule in a gel embodiment
US5607568A (en) * 1995-03-16 1997-03-04 International Business Machines Corporation Assembly suitable for identifying a code sequence of a biomolecule in a free-solution embodiment
US5624845A (en) * 1995-03-16 1997-04-29 International Business Machines Corporation Assembly and a method suitable for identifying a code
US5581082A (en) * 1995-03-28 1996-12-03 The Regents Of The University Of California Combined scanning probe and scanning energy microscope
DE69625292T2 (de) 1995-08-04 2003-09-04 International Business Machines Corp., Armonk Interferometrischer Nahfeldapparat und Verfahren
US5602820A (en) * 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5874726A (en) * 1995-10-10 1999-02-23 Iowa State University Research Foundation Probe-type near-field confocal having feedback for adjusting probe distance
JP3290586B2 (ja) * 1996-03-13 2002-06-10 セイコーインスツルメンツ株式会社 走査型近視野光学顕微鏡
DE19630650C2 (de) * 1996-07-30 1999-12-02 Univ Dresden Tech Optische Nahfeldsonde
US5754514A (en) * 1996-10-08 1998-05-19 Polaroid Corporation Phase controlled evanescent field systems and methods for optical recording and retrieval
US7550963B1 (en) * 1996-09-20 2009-06-23 The Regents Of The University Of California Analytical scanning evanescent microwave microscope and control stage
EP0880078A3 (de) * 1997-05-23 2001-02-14 Canon Kabushiki Kaisha Vorrichtung zur Detektion einer Position, Apparat unter Verwendung derselben, Belichtungsapparat, und Verfahren zur Herstellung einer Vorrichtung unter Verwendung desselben
US6806477B1 (en) 1997-05-23 2004-10-19 Canon Kabushiki Kaisha Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
US5939709A (en) * 1997-06-19 1999-08-17 Ghislain; Lucien P. Scanning probe optical microscope using a solid immersion lens
IL124838A0 (en) 1998-06-10 1999-01-26 Yeda Res & Dev Near-field optical inspection apparatus
DE19852833A1 (de) * 1998-11-17 2000-05-18 Thomas Stifter Verfahren zur Bestimmung des Abstandes einer Nahfeldsonde von einer zu untersuchenden Probenoberfläche und Nahfeldmikroskop
US6633660B1 (en) * 1999-02-05 2003-10-14 John Carl Schotland Near-field tomography
DE19947287C2 (de) * 1999-09-30 2003-01-30 Surface Imaging Systems Gmbh Nahfeldmikroskop
DE10035134B4 (de) * 2000-07-19 2006-06-01 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtung zur optischen Nahfeldmikroskopie
AU2002245395A1 (en) * 2001-02-07 2002-08-19 University Of Rochester A system and method for high resolution optical imaging, data storage, lithography, and inspection
DE10228123B4 (de) * 2002-06-24 2011-09-15 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtungen zur Erfassung von optischen Nahfeldwechselwirkungssignalen
US7412143B2 (en) * 2002-06-28 2008-08-12 Seagate Technology Llc Heat assisted magnetic recording with heat profile shaping
US6795630B2 (en) * 2002-06-28 2004-09-21 Seagate Technology Llc Apparatus and method for producing a small spot of optical energy
US7330404B2 (en) * 2003-10-10 2008-02-12 Seagate Technology Llc Near-field optical transducers for thermal assisted magnetic and optical data storage
US7234343B2 (en) * 2004-03-08 2007-06-26 Virginia Tech Intellectual Properties, Inc. Method and apparatus for evanescent filed measuring of particle-solid separation
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
US7272079B2 (en) * 2004-06-23 2007-09-18 Seagate Technology Llc Transducer for heat assisted magnetic recording
JP4323412B2 (ja) 2004-11-02 2009-09-02 株式会社ミツトヨ 表面性状測定用探針およびこれを用いた顕微鏡
DE102005029823B4 (de) * 2005-06-27 2014-10-09 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Vorrichtung zur tiefenaufgelösten Nahfeldmikroskopie
US8248599B2 (en) * 2006-06-21 2012-08-21 University Of Dayton Methods of polarization engineering and their applications
US7894308B2 (en) * 2006-06-27 2011-02-22 Seagate Technology Llc Near-field optical transducers having a tilted metallic pin
TWI312064B (en) 2006-07-10 2009-07-11 Ind Tech Res Inst Interferometer and a microscope utilizing the same
US8173965B2 (en) * 2006-09-12 2012-05-08 International Business Machines Corporation Thermally excited near-field source
FR2920538B1 (fr) * 2007-09-04 2009-11-20 Centre Nat Rech Scient Dispositif de detection heterodyne pour l'imagerie d'un objet par retroinjection
JP2009156601A (ja) * 2007-12-25 2009-07-16 Institute Of Physical & Chemical Research 散乱型近接場顕微鏡用プローブの製造方法
US8059354B2 (en) * 2009-01-29 2011-11-15 Seagate Technology Llc Transducer for data storage device
DE202010013458U1 (de) 2010-09-23 2010-12-30 Eberhard-Karls-Universität Tübingen Sonde für aperturlose Nahfeldmikroskopie und/oder für Ramanspektroskopie
EP2613159A1 (de) 2012-01-05 2013-07-10 Neaspec GmbH Messverfahren eines Nahfeldsignals
JP6566749B2 (ja) * 2015-07-01 2019-08-28 株式会社ソニー・インタラクティブエンタテインメント 撮像素子、イメージセンサ、および情報処理装置
FR3061289B1 (fr) 2016-12-23 2020-10-09 Centre Nat Rech Scient Dispositif de detection infrarouge.

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3745353A (en) * 1971-10-26 1973-07-10 Us Navy Bragg angle collinear heterodyning filter
AT353497B (de) * 1972-05-23 1979-11-12 Leitz Ernst Gmbh Vorrichtung an mikroskopen, zum automatischen fokussieren des geraetes auf unterschiedliche objekt-ebenen
US3914055A (en) * 1974-05-23 1975-10-21 Lansing Research Corp Instrument for high resolution spectral analysis with large optical throughput
US4042822A (en) * 1975-07-24 1977-08-16 Rockwell International Corporation Laser radar device utilizing heterodyne detection
NL7600479A (nl) * 1976-01-19 1977-07-21 Philips Nv Automatisch optisch focusseersysteem.
SE399151B (sv) * 1976-05-21 1978-01-30 Philips Svenska Ab Avstembar magnetron
US4092070A (en) * 1976-10-26 1978-05-30 Lansing Research Corporation Tuning of etalons in spectroscopic apparatus
GB1595422A (en) * 1977-04-28 1981-08-12 Nat Res Dev Scaning microscopes
US4445209A (en) * 1979-08-27 1984-04-24 Discovision Associates Dithered focusing systems
GB2130433B (en) * 1982-03-05 1986-02-05 Jeol Ltd Scanning electron microscope with as optical microscope
DE3223157C2 (de) * 1982-06-22 1985-11-28 C. Reichert Optische Werke Ag, Wien Einspiegelungsvorrichtung
EP0112401B1 (de) * 1982-12-27 1987-04-22 International Business Machines Corporation Optisches Nahfeldabtastmikroskop
US4634854A (en) * 1985-01-10 1987-01-06 The United States Of America As Represented By The Secretary Of The Air Force Moving aperture device for reducing scattered light in an optical system

Also Published As

Publication number Publication date
JPH02300709A (ja) 1990-12-12
US4947034A (en) 1990-08-07
DE69009846T2 (de) 1995-01-05
EP0394668A1 (de) 1990-10-31
JPH0727118B2 (ja) 1995-03-29
EP0394668B1 (de) 1994-06-15

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Legal Events

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