ATE518115T1 - Cross-quad- und vertikal gekoppelte trägheitssensoren - Google Patents

Cross-quad- und vertikal gekoppelte trägheitssensoren

Info

Publication number
ATE518115T1
ATE518115T1 AT06749476T AT06749476T ATE518115T1 AT E518115 T1 ATE518115 T1 AT E518115T1 AT 06749476 T AT06749476 T AT 06749476T AT 06749476 T AT06749476 T AT 06749476T AT E518115 T1 ATE518115 T1 AT E518115T1
Authority
AT
Austria
Prior art keywords
sensor elements
cross
vertically coupled
quad
inertial sensors
Prior art date
Application number
AT06749476T
Other languages
English (en)
Inventor
John Geen
Jinbo Kuang
Original Assignee
Analog Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Analog Devices Inc filed Critical Analog Devices Inc
Application granted granted Critical
Publication of ATE518115T1 publication Critical patent/ATE518115T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Micromachines (AREA)
AT06749476T 2005-04-14 2006-04-06 Cross-quad- und vertikal gekoppelte trägheitssensoren ATE518115T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/106,053 US7421897B2 (en) 2005-04-14 2005-04-14 Cross-quad and vertically coupled inertial sensors
PCT/US2006/012963 WO2006113162A1 (en) 2005-04-14 2006-04-06 Cross-quad and vertically coupled inertial sensors

Publications (1)

Publication Number Publication Date
ATE518115T1 true ATE518115T1 (de) 2011-08-15

Family

ID=36720678

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06749476T ATE518115T1 (de) 2005-04-14 2006-04-06 Cross-quad- und vertikal gekoppelte trägheitssensoren

Country Status (8)

Country Link
US (1) US7421897B2 (de)
EP (1) EP1889005B1 (de)
JP (2) JP5554921B2 (de)
KR (1) KR100988440B1 (de)
CN (1) CN101160506B (de)
AT (1) ATE518115T1 (de)
TW (1) TWI292818B (de)
WO (1) WO2006113162A1 (de)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
DE102007030119A1 (de) * 2007-06-29 2009-01-02 Litef Gmbh Corioliskreisel
US8215151B2 (en) * 2008-06-26 2012-07-10 Analog Devices, Inc. MEMS stiction testing apparatus and method
DE102008040525B4 (de) * 2008-07-18 2017-05-24 Robert Bosch Gmbh Mikromechanisches Sensorelement
US7980133B2 (en) * 2008-08-19 2011-07-19 Analog Devices, Inc. Method and apparatus for a micromachined multisensor
US8151641B2 (en) 2009-05-21 2012-04-10 Analog Devices, Inc. Mode-matching apparatus and method for micromachined inertial sensors
EP2435789B1 (de) * 2009-05-27 2015-04-08 King Abdullah University Of Science And Technology Mems-masse-feder-dämpfersysteme mit federungsschema ausserhalb der ebene
US8266961B2 (en) 2009-08-04 2012-09-18 Analog Devices, Inc. Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies
US8783103B2 (en) * 2009-08-21 2014-07-22 Analog Devices, Inc. Offset detection and compensation for micromachined inertial sensors
DE102010040514A1 (de) 2009-09-09 2011-04-21 Continental Teves Ag & Co. Ohg Doppelaxialer, schockrobuster Drehratensensor mit linearen und rotatorischen seismischen Elementen
US8701459B2 (en) * 2009-10-20 2014-04-22 Analog Devices, Inc. Apparatus and method for calibrating MEMS inertial sensors
US8421481B2 (en) * 2009-10-20 2013-04-16 Analog Devices, Inc. Detection and mitigation of particle contaminants in MEMS devices
DE102010002657A1 (de) * 2010-03-08 2011-09-08 Robert Bosch Gmbh Elektrodenanordnung für einen Drehratensensor, Drehratensensor und Verfahren zur Ermittlung einer Drehrate
DE102010029634B4 (de) * 2010-06-02 2024-04-11 Robert Bosch Gmbh Drehratensensor
WO2011158348A1 (ja) * 2010-06-16 2011-12-22 トヨタ自動車株式会社 複合センサ
DE102010061755A1 (de) * 2010-11-23 2012-05-24 Robert Bosch Gmbh Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
FI124020B (fi) 2011-03-04 2014-02-14 Murata Electronics Oy Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
DE102011007805B4 (de) * 2011-04-20 2024-08-22 Hanking Electronics Hongkong Co., Ltd. Mikro-elektro-mechanischer Sensor
JP5822177B2 (ja) 2011-05-20 2015-11-24 セイコーエプソン株式会社 ジャイロセンサー、電子機器
US9212908B2 (en) 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
JP6191151B2 (ja) * 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
ITTO20120855A1 (it) * 2012-09-28 2014-03-29 Milano Politecnico Struttura integrata di rilevamento risonante di accelerazione e velocita' angolare e relativo dispositivo sensore mems
US20140144232A1 (en) * 2012-11-28 2014-05-29 Yizhen Lin Spring for microelectromechanical systems (mems) device
TWI508913B (zh) * 2013-10-03 2015-11-21 Pixart Imaging Inc 微機電元件與微機電應力補償結構
FR3013445B1 (fr) * 2013-11-20 2015-11-20 Sagem Defense Securite Capteur a element sensible mobile ayant un fonctionnement mixte vibrant et pendulaire, et procedes de commande d'un tel capteur
FI20155095A (fi) 2015-02-11 2016-08-12 Murata Manufacturing Co Mikromekaaninen kulmanopeusanturi
FI20155094A (fi) 2015-02-11 2016-08-12 Murata Manufacturing Co Mikromekaaninen kulmanopeusanturi
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
FI127202B (en) * 2015-04-16 2018-01-31 Murata Manufacturing Co Three axis gyroscope
US10359284B2 (en) 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
ITUB20159197A1 (it) 2015-12-29 2017-06-29 St Microelectronics Srl Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare
US10514259B2 (en) 2016-08-31 2019-12-24 Analog Devices, Inc. Quad proof mass MEMS gyroscope with outer couplers and related methods
US10627235B2 (en) * 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
US10415968B2 (en) 2016-12-19 2019-09-17 Analog Devices, Inc. Synchronized mass gyroscope
DE102017130384B4 (de) * 2016-12-19 2022-03-31 Analog Devices, Inc. Gyroskop mit synchronisierter Masse
US10697774B2 (en) 2016-12-19 2020-06-30 Analog Devices, Inc. Balanced runners synchronizing motion of masses in micromachined devices
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
US10760909B2 (en) 2018-06-18 2020-09-01 Nxp Usa, Inc. Angular rate sensor with in-phase drive and sense motion suppression
EP3696503B1 (de) * 2019-02-15 2022-10-26 Murata Manufacturing Co., Ltd. Vibrationsrobuster mehrachsiger kreisel
US11060866B2 (en) * 2019-02-15 2021-07-13 Murata Manufacturing Co., Ltd. Balanced multiaxis gyroscope
US11193771B1 (en) 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
US11686581B2 (en) 2020-06-08 2023-06-27 Analog Devices, Inc. Stress-relief MEMS gyroscope
US11692825B2 (en) 2020-06-08 2023-07-04 Analog Devices, Inc. Drive and sense stress relief apparatus
US11519726B2 (en) 2020-06-19 2022-12-06 Analog Devices, Inc. Mechanism for selective coupling in microelectromechanical systems inertial sensors
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope
US11624613B2 (en) * 2020-12-03 2023-04-11 Murata Manufacturing Co., Ltd. Synchronized four mass gyroscope
US11525680B2 (en) 2021-02-17 2022-12-13 Nxp Usa, Inc. Angular rate sensor with centrally positioned coupling structures

Family Cites Families (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2309853A (en) 1941-04-10 1943-02-02 Sperry Gyroscope Co Inc Rate and attitude indicating instrument
US4381672A (en) 1981-03-04 1983-05-03 The Bendix Corporation Vibrating beam rotation sensor
US4654663A (en) 1981-11-16 1987-03-31 Piezoelectric Technology Investors, Ltd. Angular rate sensor system
US4510802A (en) 1983-09-02 1985-04-16 Sundstrand Data Control, Inc. Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage
US4524619A (en) 1984-01-23 1985-06-25 Piezoelectric Technology Investors, Limited Vibratory angular rate sensor system
US4598585A (en) 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4744249A (en) 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4744248A (en) 1985-07-25 1988-05-17 Litton Systems, Inc. Vibrating accelerometer-multisensor
US4884446A (en) 1987-03-12 1989-12-05 Ljung Per B Solid state vibrating gyro
US5111693A (en) 1988-01-13 1992-05-12 The Charles Stark Draper Laboratory, Inc. Motion restraints for micromechanical devices
US5195371A (en) 1988-01-13 1993-03-23 The Charles Stark Draper Laboratory, Inc. Semiconductor chip transducer
US5216490A (en) 1988-01-13 1993-06-01 Charles Stark Draper Laboratory, Inc. Bridge electrodes for microelectromechanical devices
US5016072A (en) 1988-01-13 1991-05-14 The Charles Stark Draper Laboratory, Inc. Semiconductor chip gyroscopic transducer
US5025346A (en) 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5056366A (en) 1989-12-26 1991-10-15 Litton Systems, Inc. Piezoelectric vibratory rate sensor
US5144184A (en) 1990-01-26 1992-09-01 The Charles Stark Draper Laboratory, Inc. Micromechanical device with a trimmable resonant frequency structure and method of trimming same
US5016076A (en) 1990-02-28 1991-05-14 At&T Bell Laboratories Lateral MOS controlled thyristor
US5537144A (en) 1990-06-11 1996-07-16 Revfo, Inc. Electro-optical display system for visually displaying polarized spatially multiplexed images of 3-D objects for use in stereoscopically viewing the same with high image quality and resolution
US6155115A (en) 1991-01-02 2000-12-05 Ljung; Per Vibratory angular rate sensor
US5205171A (en) 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
US5241861A (en) 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
DE4106288C2 (de) 1991-02-28 2001-05-31 Bosch Gmbh Robert Sensor zur Messung von Drücken oder Beschleunigungen
DE4107658A1 (de) 1991-03-09 1992-09-17 Bosch Gmbh Robert Montageverfahren fuer mikromechanische sensoren
EP0503807B1 (de) 1991-03-12 1996-09-25 New Sd, Inc. Stimmgabelinertialsensor mit einem Ende und Verfahren
US5203208A (en) 1991-04-29 1993-04-20 The Charles Stark Draper Laboratory Symmetrical micromechanical gyroscope
US5635639A (en) 1991-09-11 1997-06-03 The Charles Stark Draper Laboratory, Inc. Micromechanical tuning fork angular rate sensor
US5331852A (en) 1991-09-11 1994-07-26 The Charles Stark Draper Laboratory, Inc. Electromagnetic rebalanced micromechanical transducer
US5313835A (en) 1991-12-19 1994-05-24 Motorola, Inc. Integrated monolithic gyroscopes/accelerometers with logic circuits
US5377544A (en) 1991-12-19 1995-01-03 Motorola, Inc. Rotational vibration gyroscope
US5329815A (en) 1991-12-19 1994-07-19 Motorola, Inc. Vibration monolithic gyroscope
US5359893A (en) 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5408877A (en) 1992-03-16 1995-04-25 The Charles Stark Draper Laboratory, Inc. Micromechanical gyroscopic transducer with improved drive and sense capabilities
US5349855A (en) 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
US5767405A (en) 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
GB9212099D0 (en) 1992-06-06 1992-07-22 Lucas Ind Plc Angular rate sensor and method of production thereof
US5734105A (en) 1992-10-13 1998-03-31 Nippondenso Co., Ltd. Dynamic quantity sensor
US5367217A (en) 1992-11-18 1994-11-22 Alliedsignal Inc. Four bar resonating force transducer
US5555765A (en) 1993-02-10 1996-09-17 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope
US5650568A (en) 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5492596A (en) 1994-02-04 1996-02-20 The Charles Stark Draper Laboratory, Inc. Method of making a micromechanical silicon-on-glass tuning fork gyroscope
US5481914A (en) 1994-03-28 1996-01-09 The Charles Stark Draper Laboratory, Inc. Electronics for coriolis force and other sensors
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
US5987986A (en) 1994-07-29 1999-11-23 Litton Systems, Inc. Navigation grade micromachined rotation sensor system
US5581035A (en) 1994-08-29 1996-12-03 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode
US5646348A (en) 1994-08-29 1997-07-08 The Charles Stark Draper Laboratory, Inc. Micromechanical sensor with a guard band electrode and fabrication technique therefor
DE4431338C2 (de) 1994-09-02 2003-07-31 Bosch Gmbh Robert Beschleunigungssensor
US5530342A (en) 1994-09-30 1996-06-25 Rockwell International Corporation Micromachined rate sensor comb drive device and method
JP3412293B2 (ja) 1994-11-17 2003-06-03 株式会社デンソー 半導体ヨーレートセンサおよびその製造方法
DE4442033C2 (de) 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
US5763781A (en) 1995-02-23 1998-06-09 Netzer; Yishay Coupled resonator vibratory rate sensor
GB2301671B (en) 1995-05-30 1999-10-13 Allied Signal Inc Angular rate sensor electronic balance
US5635638A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5747961A (en) 1995-10-11 1998-05-05 The Charles Stark Draper Laboratory, Inc. Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors
US6064169A (en) 1995-10-11 2000-05-16 The Charles Stark Draper Laboratory, Inc. Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope
US5600065A (en) 1995-10-25 1997-02-04 Motorola, Inc. Angular velocity sensor
JPH09196682A (ja) 1996-01-19 1997-07-31 Matsushita Electric Ind Co Ltd 角速度センサと加速度センサ
JP3039364B2 (ja) 1996-03-11 2000-05-08 株式会社村田製作所 角速度センサ
US5880369A (en) 1996-03-15 1999-03-09 Analog Devices, Inc. Micromachined device with enhanced dimensional control
US5992233A (en) 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6250156B1 (en) 1996-05-31 2001-06-26 The Regents Of The University Of California Dual-mass micromachined vibratory rate gyroscope
US5696323A (en) 1996-06-25 1997-12-09 Alliedsignal, Inc. Two bar resonant beam Coriolis rate sensor
US5795988A (en) 1996-07-01 1998-08-18 Alliedsignal Inc. Gyroscope noise reduction and drift compensation
JP3702412B2 (ja) 1996-07-29 2005-10-05 アイシン精機株式会社 角速度検出装置
JPH1047966A (ja) 1996-07-31 1998-02-20 Aisin Seiki Co Ltd 角速度センサ
US5892153A (en) 1996-11-21 1999-04-06 The Charles Stark Draper Laboratory, Inc. Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
GB2320571B (en) 1996-12-20 2000-09-27 Aisin Seiki Semiconductor micromachine and manufacturing method thereof
US5955668A (en) 1997-01-28 1999-09-21 Irvine Sensors Corporation Multi-element micro gyro
US5911156A (en) 1997-02-24 1999-06-08 The Charles Stark Draper Laboratory, Inc. Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices
US5783973A (en) 1997-02-24 1998-07-21 The Charles Stark Draper Laboratory, Inc. Temperature insensitive silicon oscillator and precision voltage reference formed therefrom
DE19827688A1 (de) 1997-06-20 1999-01-28 Aisin Seiki Winkelgeschwindigkeitssensor
US6032531A (en) 1997-08-04 2000-03-07 Kearfott Guidance & Navigation Corporation Micromachined acceleration and coriolis sensor
US6122961A (en) 1997-09-02 2000-09-26 Analog Devices, Inc. Micromachined gyros
US6070464A (en) 1997-09-05 2000-06-06 Motorola, Inc. Sensing structure comprising a movable mass and a self-test structure
EP1023607A2 (de) 1997-10-14 2000-08-02 Irvine Sensors Corporation Gyroskop aus mehreren elementen
US6230563B1 (en) 1998-06-09 2001-05-15 Integrated Micro Instruments, Inc. Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability
US5920012A (en) 1998-06-16 1999-07-06 Boeing North American Micromechanical inertial sensor
JP3882973B2 (ja) 1998-06-22 2007-02-21 アイシン精機株式会社 角速度センサ
US6009751A (en) 1998-10-27 2000-01-04 Ljung; Bo Hans Gunnar Coriolis gyro sensor
US6164134A (en) 1999-01-29 2000-12-26 Hughes Electronics Corporation Balanced vibratory gyroscope and amplitude control for same
JP4126833B2 (ja) 1999-03-12 2008-07-30 株式会社デンソー 角速度センサ装置
US6189381B1 (en) 1999-04-26 2001-02-20 Sitek, Inc. Angular rate sensor made from a structural wafer of single crystal silicon
US6289733B1 (en) 1999-05-12 2001-09-18 Hughes Electronics Corporation Planar vibratory gyroscopes
US6257059B1 (en) 1999-09-24 2001-07-10 The Charles Stark Draper Laboratory, Inc. Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation
US6311555B1 (en) 1999-11-17 2001-11-06 American Gnc Corporation Angular rate producer with microelectromechanical system technology
US6516666B1 (en) 2000-09-19 2003-02-11 Motorola, Inc. Yaw rate motion sensor
US6742389B2 (en) * 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
JP3870895B2 (ja) * 2002-01-10 2007-01-24 株式会社村田製作所 角速度センサ
US7316161B2 (en) * 2002-01-12 2008-01-08 Robert Bosch Gmbh Rotation rate sensor
US7089792B2 (en) * 2002-02-06 2006-08-15 Analod Devices, Inc. Micromachined apparatus utilizing box suspensions
EP2327959B1 (de) * 2002-02-06 2012-09-12 Analog Devices, Inc. Mikromechanisches Gyroskop
US6848304B2 (en) * 2003-04-28 2005-02-01 Analog Devices, Inc. Six degree-of-freedom micro-machined multi-sensor
US20050066728A1 (en) * 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
CN1954193B (zh) 2004-04-14 2010-09-01 模拟设备公司 用于惯性传感器的耦合设备

Also Published As

Publication number Publication date
US20060230830A1 (en) 2006-10-19
CN101160506A (zh) 2008-04-09
JP2013083662A (ja) 2013-05-09
US7421897B2 (en) 2008-09-09
WO2006113162A1 (en) 2006-10-26
EP1889005A1 (de) 2008-02-20
CN101160506B (zh) 2013-02-06
KR100988440B1 (ko) 2010-10-18
JP5554921B2 (ja) 2014-07-23
JP2008537114A (ja) 2008-09-11
KR20070120197A (ko) 2007-12-21
EP1889005B1 (de) 2011-07-27
TWI292818B (en) 2008-01-21
TW200704916A (en) 2007-02-01

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