CN1954193B - 用于惯性传感器的耦合设备 - Google Patents
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Abstract
一种耦合设备,其允许惯性传感元件框架反相位运动,但基本上防止框架同相位运动。该耦合设备包括耦合在第一和第二传感元件框架之间的至少一个杆和支撑所述杆的至少一个支撑结构。所述至少一个结构耦合到框架下方的基板上。当框架沿基本上平行的轴线彼此反相位移动时,所述结构允许所述杆绕一枢转点旋转,但基本上防止框架同相位运动。
Description
技术领域
本发明总的涉及传感器,更具体地说,本发明涉及惯性传感器。
背景技术
惯性传感器,诸如MEMS陀螺仪,通常会受到驱动频率中的旋转振动(通常称为“摆动”(wobble))的不利影响。特别是,如果MEMS陀螺仪不能区分旋转振动与旨在检测的实际运动,MEMS陀螺仪就可能产生错误的读数。
而且,具有振动质量体、例如陀螺仪的MEMS装置的形状畸变会对横向于纵向驱动指状物(drive finger)的力产生不平衡。这种不平衡会引起不能与科里奥利(Coriolis)力相区别的净力。因而陀螺仪产生假输出。这些形状畸变存在至少两个来源。一个由基板的表面剪切力(例如,切割时的释放/晶片弯曲)引发。另一个是由组件的不均匀膨胀和施加的加速度(例如,对角G×G)引发。G×G误差的一些原因论述在IEEE设计2004年会刊1-6页Geen,J.A.的“集成陀螺仪的进展”中,其全部内容在此引入作为参考。
发明内容
本发明的实施例提供了一种用于耦合惯性传感元件框架的设备,以便允许惯性传感元件框架反相位运动,但基本上防止框架同相位运动。
依照本发明的一个方面,提供了一种用于耦合惯性传感器的传感元件的设备。该设备包括耦合在第一和第二传感元件框架之间的至少一个杆和支撑所述杆的至少一个支撑结构。所述至少一个结构耦合到框架下方的基板上。当框架沿基本上平行的轴线彼此反相位移动时,所述结构允许所述杆绕-枢转点旋转,但基本上防止框架的同相位运动。
在一个示例性实施例中,该设备还包括从其中一个框架延伸并通过第一长挠曲件(flexure)互连在一起的第一对短挠曲件和从另一个框架延伸并通过第二长挠曲件互连在一起的第二对短挠曲件。所述杆大体上在第一和第二长挠曲件的中点处将第一长挠曲件互连到第二长挠曲件上。所述至少一个支撑结构包括支撑所述杆的至少一个锚固挠曲件。所述锚固挠曲件与所述杆大体上在所述杆和所述锚固挠曲件的中点相交。锚固挠曲件的各个端部锚固到基板上。每个长挠曲件通常耦合成随着所述杆的旋转而弯曲。
在本发明的另一个示例性实施例中,该设备还包括从其中一个框架延伸的第一挠曲件和从另一个框架延伸的第二挠曲件。所述杆将第一和第二挠曲件互连。所述至少一个支撑结构包括支撑所述杆的至少一个锚固挠曲件。每个锚固挠曲件包括在一端锚固到所述至少一个基板上并向后折叠180度以与所述杆相抵接的结构。所述至少一个锚固挠曲件可包括绕枢转点设置的四个锚固挠曲件。每个锚固挠曲件通常锚固到邻接于所述杆的基板上。每个第一和第二挠曲件可包括耦合在两端的两个基本上平行的元件,其中一个元件与框架相耦合,另一个元件与所述杆相耦合,使得两个元件随着所述杆的旋转弯曲。
依照本发明的另一个方面,提供了一种用于耦合惯性传感器的传感元件的设备,所述设备包括用于耦合装置第一与第二传感元件框架的耦合装置和用于支撑所述耦合装置的支撑装置。所述支撑装置耦合到框架下方的基板上。当框架沿分开的基本上平行的轴线彼此反相位移动时,所述支撑装置允许所述耦合装置绕-枢转点旋转,但基本上防止框架同相位运动。
在第一示例性实施例中,所述耦合装置包括:从其中一个框架延伸并通过第一长挠曲件互连在一起的第一对短挠曲件;从另一个框架延伸并通过第二长挠曲件互连在一起的第二对短挠曲件;和杆,所述杆大体上在第一和第二长挠曲件的中点处将第一长挠曲件互连到第二长挠曲件上。所述支撑装置可包括支撑所述杆的锚固挠曲件,锚固挠曲件与所述杆大体上在所述杆和所述锚固挠曲件的中点相交,锚固挠曲件的各个端部锚固到基板上。每个长挠曲件可耦合成随着所述杆的旋转而弯曲。
在本发明的另一个示例性实施例中,所述耦合装置包括:从其中一个框架延伸的第一挠曲件;从另一个框架延伸的第二挠曲件;和将第一和第二挠曲件互连的杆。所述支撑装置可包括支撑所述杆的至少一个锚固挠曲件,每个锚固挠曲件包括在一端锚固到所述至少一个基板上并向后折叠180度以与所述杆相抵接的结构。所述至少一个锚固挠曲件可包括绕枢转点设置的四个锚固挠曲件。每个锚固挠曲件可锚固到邻接于所述杆的基板上。每个第一和第二挠曲件可包括耦合在两端的两个基本上平行的元件,其中一个元件与框架相耦合,另一个元件与所述杆相耦合,两个元件耦合成随着所述杆的旋转而弯曲。
在本发明的典型实施例中,所述至少一个基板绕垂直于平面的轴线的旋转引起框架运动。
附图说明
参考附图,从下面进一步的说明中将更全面地领会本发明的前述内容和优点,其中:
图1示意显示了依照本发明的示例性实施例配置的陀螺仪线性阵列;
图2示意显示了依照本发明的示例性实施例、用于耦合图1所示的两个框架的耦合设备;
图3示意显示了第一对陀螺仪的另一实施例的补充细节;
图4显示了图3所示的陀螺仪所使用的具体耦合设备的更多细节;和
图5显示了依照本发明的示例性实施例的具体平衡器的更多细节。
附图用于示例性目的,可以不按比例描绘。
具体实施方式
在示例性实施例中,惯性传感器具有多个独立传感元件。下面详细论述示例性实施例。
图1示意显示了依照本发明示例性实施例配置的微机电系统(即,“MEMS”)的阵列10。具体地说,MEMS装置的阵列10结合在一起,有效地执行单个陀螺仪的功能。为此,阵列10包括四个MEMS陀螺仪12A-D,全部MEMS陀螺仪12A-D都固定到一公共的下伏基板(未显示)上。做为选择,MEMS陀螺仪12A-12D也可以固定到不同的基板上。
每个陀螺仪12A-12D包括至少一个振动质量体(在此分别被称为“谐振器14A、14B、14C或14D”,或统称为“谐振器14”),1)所述至少一个振动质量体以恒定的频率沿X轴振动,2)所述至少一个振动质量体与单个加速度计框架(在此分别被称为“框架16A、16B、16C或16D”,或统称为“框架16”)。举例来说,谐振器14只在X轴方向是顺从(compliant)的,而框架16只在Y轴方向是顺从的。因此,任何一个陀螺仪12A-12D绕Z轴的旋转都使得谐振器14产生施加给加速度计框架16的科里奥利力。一旦接收到该科里奥利力,框架16就沿Y轴移动。电容耦合指状物18检测到该Y轴运动,并将其转换成表示角加速度大小的信号。
在示例性实施例中,陀螺仪12A-12D类似于美国专利号6,505,511和6,122,961中披露的陀螺仪,这些文件披露的全部内容在此引入作为参考。陀螺仪12A-12D也可类似于发明人John Green在2003年2月6日提交的共同待定的美国专利申请号10/360,987中披露的陀螺仪,该文件披露的全部内容在此引入作为参考。
如上所述,在示例性实施例中,不同的陀螺仪12A和12D具有公共的质心,陀螺仪产生反相位信号12B和12C。所以阵列10配置成使得陀螺仪12A-12D的位置以及各自的谐振器14的相位实现该结果。因而具体的放置、陀螺仪12A-12D的数量以及其谐振器14的相位相互协调,以保证它们共享一个公共的质心。
图1显示了产生所要求的结果的示例性配置。特别是,阵列10包括具有第一和第二陀螺仪12A和12B的第一对陀螺仪12A/B和具有第三和第四陀螺仪12C和12D的第二对陀螺仪12C/D。如图所示,各对陀螺仪的谐振器14相位错开180度操作,它们的框架16的耦合方式将在下面论述。但是,第一对陀螺仪12A/B不与第二对陀螺仪12C/D耦合。
当以图1所示的方式定位时,第一陀螺仪12A和第四陀螺仪12D同相位谐振,而第二和第三陀螺仪12B和12C同相位谐振。因此,下列等式成立:
V1+V4=V2+V3,
其中:
V1是第一陀螺仪12A到旋转点的矢量距离,
V2是第二陀螺仪12B到旋转点的矢量距离,
V3是第三陀螺仪12C到旋转点的矢量距离,和
V4是第四陀螺仪12D到旋转点的矢量距离。
注意,考虑该等式时,应当考虑矢量距离的符号。当保持该关系时,陀螺仪总体上变得基本上不再受绕旋转点的角加速度的干扰,这样以致于框架的响应相互匹配。耦合件克服了由制造公差导致的不匹配,从而改善了对角加速度的抑制。
该配置仍然不会不利地影响阵列10检测下方的角速度的设计目的。
因此,本发明的实施例基本上不会受到表面剪切力的干扰,而且如上所述,消除了角加速度噪音。
如上所述,每对传感元件内部的各个框架16以促进操作的方式耦合在一起。具体地说,框架16A和16B通过耦合件99AB耦合在一起,而框架16C和16D通过耦合件99CD耦合在一起(在此统称为“耦合设备99”)。在示例性实施例中,各对框架16耦合在一起,保证它们只能反相位(即,相位错开180度)移动,不过两对框架没有互连在一起。图2示意显示了用于固定两个框架的机械耦合设备99的更多细节。虽然耦合设备99的实施例适用于所示的任何框架16,但是为简单起见,在图2中的框架16标记为第一和第二框架16A和16B。
具体地说,第一框架16A具有与第一长挠曲件22A耦合的第一对短挠曲件20A。相应的,第二框架16B具有与第二长挠曲件22B耦合的第二对短挠曲件20B。杆24将第一长挠曲件22A固定到第二长挠曲件22B上。为了提供一定的稳定性,一对锚固器26A和26B在杆24两侧延伸,并借助于锚固挠曲件28与杆24相耦合。
当两个框架被促使成同相位移动时,该配置基本上是不顺从的。相反,当两个框架被促使成反相位移动时,该配置基本上是顺从的。换句话说,当第一框架16A被促使成沿Y轴向上运动时,第二框架16B被促使成沿Y轴向下运动。但是,如果两者都被促使成沿Y轴向上运动,该配置将基本上是不顺从的。在有些实施例中,当框架16A和16B在Y轴方向移动时,该配置允许框架16A和16B旋转一定程度。
图3示意显示了第一对框架16A和16B的另一实施例的补充细节。如图所示,该实施例也具有谐振器14、框架16、耦合设备以及其他类似于如上所述的部件。图4显示了图3所示的具体耦合设备的更多细节。注意,耦合设备可以与其他陀螺仪构造一起使用,包括图1所示的那些陀螺仪构造。
如图4所示,锚固挠曲件28大体上向外延伸,然后向后折叠180度,与杆24相抵接。另外,耦合设备还具有刻蚀补偿器。看图4的文字,注意,折叠的锚固挠曲件28允许杆24绕一枢转点旋转,但不允许垂直于杆24的轴线平移。而且,该实施例不具有各框架上的一对短挠曲件20,而是使用了各框架上的单个短挠曲件20。
除保证框架16A和16B反相位移动之外,该挠曲件配置还能减少材料收缩和G×G(G cross G)误差的潜在不利影响。该G×G误差在框架同相位运动的时候产生,该误差由耦合件抑制或降低。
该耦合设备99有效地增加了质量和对框架16的运动的刚性。由于各框架仅仅沿其一侧耦合到邻接框架上,该耦合设备99实际上打破了各框架运动的平衡。所以,阵列10最好包括若干平衡器(在此分别被称为“平衡器97A、97B、97C和97D”,或统称为“平衡器97”),以帮助补偿该耦合设备99的效应。具体地说,平衡器97最好耦合到与耦合设备99相对的各框架一侧。因此,平衡器97A沿与耦合件99AB相对的一侧耦合到框架16A上,平衡器97B沿与耦合件99AB相对的一侧耦合到框架16B上,平衡器97C沿与耦合件99CD相对的一侧耦合到框架16C上,平衡器97D沿与耦合件99CD相对的一侧耦合到框架16D上。各平衡器97的构造通常为耦合设备99的一半的等同物,因此在各自的框架16上基本上赋予了相等但相反的机械作用。
图5显示了依照本发明的示例性实施例的具体平衡器97(在该例子中,为坐落于两对传感元件之间的平衡器97B和97C)的更多细节。如图所示,各平衡器97的构造基本上为如图4所示的耦合设备的一半的等同物。应当指出,与耦合设备99不同,在两个相邻的平衡器97B和97C之间没有耦合件。
在示例性实施例中,加速度计在大约17伏运转。
在不脱离本发明的真实的范围的情况下,本发明可以包含其他的特定形式。所述的这些实施例在各个方面都被仅仅认为是示例性的,而非限制性的。
Claims (16)
1.一种用于耦合惯性传感器的传感元件的设备,该设备包括:
耦合在第一和第二传感元件框架之间的杆;和
位于所述框架下方的基板之上的支撑所述杆的复数个锚固挠曲件,每个锚固挠曲件包括在一端锚固到所述基板上并向后折叠180度以与所述杆相抵接的结构,且每个锚固挠曲件垂直于所述杆的轴线,当框架沿分开的基本上平行的轴线彼此反相位移动时,所述锚固挠曲件允许所述杆绕一枢转点旋转,但基本上防止框架的同相位运动以及所述杆的垂直于该杆轴线的平移。
2.如权利要求1所述的设备,还包括:
从其中一个框架延伸并通过第一长挠曲件互连在一起的第一对短挠曲件;
从另一个框架延伸并通过第二长挠曲件互连在一起的第二对短挠曲件,其中所述杆大体上在第一和第二长挠曲件的中点处将第一长挠曲件互连到第二长挠曲件上。
3.如权利要求2所述的设备,其中,每个长挠曲件耦合成随着所述杆的旋转而弯曲。
4.如权利要求1所述的设备,还包括:
从其中一个框架延伸的第一挠曲件;和
从另一个框架延伸的第二挠曲件,其中所述杆将第一和第二挠曲件互连。
5.如权利要求4所述的设备,其中,所述复数个锚固挠曲件包括绕枢转点设置的四个锚固挠曲件。
6.如权利要求4所述的设备,其中,每个第一和第二挠曲件包括耦合在两端的两个基本上平行的元件,其中一个元件与框架相耦合,另一个元件与所述杆相耦合,两个元件耦合成随着所述杆的旋转而弯曲。
7.如权利要求1所述的设备,其中,所述基板绕垂直于平面的轴线的旋转引起框架运动。
8.一种用于耦合惯性传感器的传感元件的设备,该设备包括:
用于耦合第一和第二传感元件框架的耦合装置;和
位于所述框架下方的基板之上的用于支撑所述耦合装置的支撑装置,所述支撑装置包括复数个锚固挠曲件,每个锚固挠曲件包括在一端锚固到所述基板上并向后折叠180度以与所述耦合装置相抵接的结构,且每个锚固挠曲件垂直于所述耦合装置的轴线,当框架沿分开的基本上平行的轴线彼此反相位移动时,所述支撑装置允许所述耦合装置绕一枢转点旋转,但基本上防止框架的同相位运动以及所述耦合装置的垂直于该耦合装置轴线的平移。
9.如权利要求8所述的设备,其中,所述耦合装置包括:
从其中一个框架延伸并通过第一长挠曲件互连在一起的第一对短挠曲件;
从另一个框架延伸并通过第二长挠曲件互连在一起的第二对短挠曲件;和
杆,所述杆大体上在第一和第二长挠曲件的中点处将第一长挠曲件互连到第二长挠曲件上。
10.如权利要求9所述的设备,其中,每个长挠曲件耦合成随着所述杆的旋转而弯曲。
11.如权利要求8所述的设备,其中,所述耦合装置包括:
从其中一个框架延伸的第一挠曲件;
从另一个框架延伸的第二挠曲件;和
将第一和第二挠曲件互连的杆。
12.如权利要求8所述的设备,其中,所述支撑装置包括绕枢转点设置的四个锚固挠曲件。
13.如权利要求11所述的设备,其中,每个第一和第二挠曲件包括耦合在两端的两个基本上平行的元件,其中一个元件与框架相耦合,另一个元件与所述杆相耦合,两个元件耦合成随着所述杆的旋转而弯曲。
14.如权利要求8所述的设备,其中,所述基板绕垂直于平面的轴线的旋转引起框架运动。
15.如权利要求1所述的设备,还包括:
耦合到所述框架的复数个平衡器,每个框架包括一平衡器,该平衡器耦合到与所述耦合的杆相对的框架一侧上。
16.如权利要求8所述的设备,还包括:
耦合到所述框架的平衡装置,每个框架包括一平衡装置,该平衡装置耦合到与所述耦合装置相对的框架一侧上。
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PCT/US2005/013109 WO2005103621A1 (en) | 2004-04-14 | 2005-04-14 | Coupling apparatus for inertial sensors |
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Families Citing this family (72)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005103620A1 (en) * | 2004-04-14 | 2005-11-03 | Analog Devices, Inc. | Inertial sensor with a linear array of sensor elements |
US7478557B2 (en) * | 2004-10-01 | 2009-01-20 | Analog Devices, Inc. | Common centroid micromachine driver |
EP1645847B1 (en) * | 2004-10-08 | 2014-07-02 | STMicroelectronics Srl | Temperature compensated micro-electromechanical device and method of temperature compensation in a micro-electromechanical device |
US7421897B2 (en) * | 2005-04-14 | 2008-09-09 | Analog Devices, Inc. | Cross-quad and vertically coupled inertial sensors |
FR2895501B1 (fr) * | 2005-12-23 | 2008-02-29 | Commissariat Energie Atomique | Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement |
US7653214B2 (en) * | 2006-01-17 | 2010-01-26 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Accelerometer utilizing image-based movement tracking |
KR20090052832A (ko) * | 2006-03-10 | 2009-05-26 | 콘티넨탈 테베스 아게 운트 코. 오하게 | 커플링 바를 구비한 회전 속도 센서 |
JPWO2008032415A1 (ja) * | 2006-09-15 | 2010-01-21 | 株式会社日立製作所 | 角速度センサ |
US8042394B2 (en) | 2007-09-11 | 2011-10-25 | Stmicroelectronics S.R.L. | High sensitivity microelectromechanical sensor with rotary driving motion |
US8733952B2 (en) | 2008-06-17 | 2014-05-27 | The Invention Science Fund I, Llc | Methods and systems for coordinated use of two or more user responsive projectors |
US20090309826A1 (en) | 2008-06-17 | 2009-12-17 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Systems and devices |
US8267526B2 (en) | 2008-06-17 | 2012-09-18 | The Invention Science Fund I, Llc | Methods associated with receiving and transmitting information related to projection |
US8403501B2 (en) | 2008-06-17 | 2013-03-26 | The Invention Science Fund, I, LLC | Motion responsive devices and systems |
US20090310038A1 (en) | 2008-06-17 | 2009-12-17 | Searete Llc, A Limited Liability Corporation Of The State Of Delaware | Projection in response to position |
US8262236B2 (en) | 2008-06-17 | 2012-09-11 | The Invention Science Fund I, Llc | Systems and methods for transmitting information associated with change of a projection surface |
US8641203B2 (en) | 2008-06-17 | 2014-02-04 | The Invention Science Fund I, Llc | Methods and systems for receiving and transmitting signals between server and projector apparatuses |
US8723787B2 (en) | 2008-06-17 | 2014-05-13 | The Invention Science Fund I, Llc | Methods and systems related to an image capture projection surface |
US8820939B2 (en) | 2008-06-17 | 2014-09-02 | The Invention Science Fund I, Llc | Projection associated methods and systems |
US8308304B2 (en) | 2008-06-17 | 2012-11-13 | The Invention Science Fund I, Llc | Systems associated with receiving and transmitting information related to projection |
US8936367B2 (en) | 2008-06-17 | 2015-01-20 | The Invention Science Fund I, Llc | Systems and methods associated with projecting in response to conformation |
US8384005B2 (en) | 2008-06-17 | 2013-02-26 | The Invention Science Fund I, Llc | Systems and methods for selectively projecting information in response to at least one specified motion associated with pressure applied to at least one projection surface |
US8608321B2 (en) | 2008-06-17 | 2013-12-17 | The Invention Science Fund I, Llc | Systems and methods for projecting in response to conformation |
US8944608B2 (en) | 2008-06-17 | 2015-02-03 | The Invention Science Fund I, Llc | Systems and methods associated with projecting in response to conformation |
US8187902B2 (en) | 2008-07-09 | 2012-05-29 | The Charles Stark Draper Laboratory, Inc. | High performance sensors and methods for forming the same |
US7980133B2 (en) * | 2008-08-19 | 2011-07-19 | Analog Devices, Inc. | Method and apparatus for a micromachined multisensor |
ITTO20090489A1 (it) * | 2008-11-26 | 2010-12-27 | St Microelectronics Srl | Circuito di lettura per un giroscopio mems multi-asse avente direzioni di rilevamento inclinate rispetto agli assi di riferimento, e corrispondente giroscopio mems multi-asse |
IT1391973B1 (it) | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico mono o biassiale con aumentata sensibilita' al rilevamento di velocita' angolari |
IT1391972B1 (it) * | 2008-11-26 | 2012-02-02 | St Microelectronics Rousset | Giroscopio microelettromeccanico con movimento di azionamento rotatorio e migliorate caratteristiche elettriche |
IT1392741B1 (it) * | 2008-12-23 | 2012-03-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con migliorata reiezione di disturbi di accelerazione |
FI20095201A0 (fi) * | 2009-03-02 | 2009-03-02 | Vti Technologies Oy | Värähtelevä mikromekaaninen kulmanopeusanturi |
US8256290B2 (en) * | 2009-03-17 | 2012-09-04 | Minyao Mao | Tri-axis angular rate sensor |
IT1394007B1 (it) * | 2009-05-11 | 2012-05-17 | St Microelectronics Rousset | Struttura microelettromeccanica con reiezione migliorata di disturbi di accelerazione |
US9097524B2 (en) | 2009-09-11 | 2015-08-04 | Invensense, Inc. | MEMS device with improved spring system |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
DE102009046506B4 (de) | 2009-11-06 | 2024-01-18 | Robert Bosch Gmbh | Drehratensensor |
ITTO20091042A1 (it) | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
DE102010042438B4 (de) * | 2010-01-27 | 2013-09-26 | Robert Bosch Gmbh | Sensoranordnung |
ITTO20110806A1 (it) | 2011-09-12 | 2013-03-13 | St Microelectronics Srl | Dispositivo microelettromeccanico integrante un giroscopio e un accelerometro |
US9291638B2 (en) * | 2012-01-20 | 2016-03-22 | Mcube, Inc. | Substrate curvature compensation methods and apparatus |
RU2486469C1 (ru) * | 2012-01-31 | 2013-06-27 | Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" | Способ подавления ложного сигнала в измерителе угловой скорости с микромеханическими гироскопами |
JP5822321B2 (ja) | 2012-06-22 | 2015-11-24 | 国立研究開発法人産業技術総合研究所 | 回転角加速度測定装置 |
CN102928622B (zh) * | 2012-10-17 | 2014-03-05 | 中北大学 | 梁岛塔形压阻式三轴mems高量程加速度传感器阵列 |
FI125695B (en) * | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Improved gyroscope construction and gyroscope |
FI125696B (en) * | 2013-09-11 | 2016-01-15 | Murata Manufacturing Co | Gyroscope structure and gyroscope with improved quadrature compensation |
US9404747B2 (en) | 2013-10-30 | 2016-08-02 | Stmicroelectroncs S.R.L. | Microelectromechanical gyroscope with compensation of quadrature error drift |
JP6248576B2 (ja) * | 2013-11-25 | 2017-12-20 | セイコーエプソン株式会社 | 機能素子、電子機器、および移動体 |
JP6189792B2 (ja) * | 2014-05-19 | 2017-08-30 | 日立オートモティブシステムズ株式会社 | 角速度センサ |
US10038443B2 (en) * | 2014-10-20 | 2018-07-31 | Ford Global Technologies, Llc | Directional proximity switch assembly |
EP3234503B1 (en) * | 2014-12-18 | 2020-12-02 | RISE Research Institutes of Sweden AB | A quadrature compensation method for mems gyroscopes and a gyroscope sensor |
US20160370180A1 (en) * | 2015-06-17 | 2016-12-22 | Freescale Semiconductor, Inc. | Inertial sensor with couple spring for common mode rejection |
WO2017048839A1 (en) * | 2015-09-14 | 2017-03-23 | The Regents Of The University Of Michigan | High-performance inertial measurements using a redundant array of inexpensive inertial sensors |
ITUB20159197A1 (it) * | 2015-12-29 | 2017-06-29 | St Microelectronics Srl | Giroscopio microelettromeccanico con reiezione di disturbi e metodo di rilevamento di una velocita' angolare |
US10696541B2 (en) * | 2016-05-26 | 2020-06-30 | Honeywell International Inc. | Systems and methods for bias suppression in a non-degenerate MEMS sensor |
US10514259B2 (en) | 2016-08-31 | 2019-12-24 | Analog Devices, Inc. | Quad proof mass MEMS gyroscope with outer couplers and related methods |
US10697774B2 (en) | 2016-12-19 | 2020-06-30 | Analog Devices, Inc. | Balanced runners synchronizing motion of masses in micromachined devices |
US10627235B2 (en) | 2016-12-19 | 2020-04-21 | Analog Devices, Inc. | Flexural couplers for microelectromechanical systems (MEMS) devices |
US10415968B2 (en) | 2016-12-19 | 2019-09-17 | Analog Devices, Inc. | Synchronized mass gyroscope |
US10330476B2 (en) | 2017-07-12 | 2019-06-25 | Nxp Usa, Inc. | Angular rate sensor with in-phase motion suppression structure |
JP7013774B2 (ja) * | 2017-09-29 | 2022-02-01 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
JP7215607B2 (ja) * | 2017-09-29 | 2023-01-31 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
JP7135291B2 (ja) * | 2017-10-24 | 2022-09-13 | セイコーエプソン株式会社 | 物理量センサー、慣性計測装置、移動体測位装置、電子機器および移動体 |
JP7159548B2 (ja) * | 2017-11-28 | 2022-10-25 | セイコーエプソン株式会社 | 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体 |
US10948294B2 (en) | 2018-04-05 | 2021-03-16 | Analog Devices, Inc. | MEMS gyroscopes with in-line springs and related systems and methods |
TWI689708B (zh) | 2018-12-24 | 2020-04-01 | 財團法人工業技術研究院 | 具監測功能的振動感測器及其振動訊號監測方法 |
EP3916353B1 (en) | 2020-05-25 | 2023-05-17 | Murata Manufacturing Co., Ltd. | Gyroscope with mass pairs |
US11193771B1 (en) | 2020-06-05 | 2021-12-07 | Analog Devices, Inc. | 3-axis gyroscope with rotational vibration rejection |
WO2021252364A1 (en) | 2020-06-08 | 2021-12-16 | Analog Devices, Inc. | Stress-relief mems gyroscope |
US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
US11519726B2 (en) | 2020-06-19 | 2022-12-06 | Analog Devices, Inc. | Mechanism for selective coupling in microelectromechanical systems inertial sensors |
JP7215606B2 (ja) * | 2020-07-22 | 2023-01-31 | セイコーエプソン株式会社 | 物理量センサーおよび電子機器 |
US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
US11525680B2 (en) | 2021-02-17 | 2022-12-13 | Nxp Usa, Inc. | Angular rate sensor with centrally positioned coupling structures |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1286751A (zh) * | 1996-11-22 | 2001-03-07 | 西门子公司 | 转速传感器 |
US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
Family Cites Families (100)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2309853A (en) | 1941-04-10 | 1943-02-02 | Sperry Gyroscope Co Inc | Rate and attitude indicating instrument |
US4381672A (en) | 1981-03-04 | 1983-05-03 | The Bendix Corporation | Vibrating beam rotation sensor |
US4654663A (en) | 1981-11-16 | 1987-03-31 | Piezoelectric Technology Investors, Ltd. | Angular rate sensor system |
US4510802A (en) | 1983-09-02 | 1985-04-16 | Sundstrand Data Control, Inc. | Angular rate sensor utilizing two vibrating accelerometers secured to a parallelogram linkage |
US4524619A (en) | 1984-01-23 | 1985-06-25 | Piezoelectric Technology Investors, Limited | Vibratory angular rate sensor system |
US4598585A (en) | 1984-03-19 | 1986-07-08 | The Charles Stark Draper Laboratory, Inc. | Planar inertial sensor |
US4744248A (en) | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
US4744249A (en) | 1985-07-25 | 1988-05-17 | Litton Systems, Inc. | Vibrating accelerometer-multisensor |
US4884446A (en) | 1987-03-12 | 1989-12-05 | Ljung Per B | Solid state vibrating gyro |
US5016072A (en) | 1988-01-13 | 1991-05-14 | The Charles Stark Draper Laboratory, Inc. | Semiconductor chip gyroscopic transducer |
US5111693A (en) | 1988-01-13 | 1992-05-12 | The Charles Stark Draper Laboratory, Inc. | Motion restraints for micromechanical devices |
US5195371A (en) | 1988-01-13 | 1993-03-23 | The Charles Stark Draper Laboratory, Inc. | Semiconductor chip transducer |
US5216490A (en) | 1988-01-13 | 1993-06-01 | Charles Stark Draper Laboratory, Inc. | Bridge electrodes for microelectromechanical devices |
US5025346A (en) | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
US5056366A (en) | 1989-12-26 | 1991-10-15 | Litton Systems, Inc. | Piezoelectric vibratory rate sensor |
US5144184A (en) | 1990-01-26 | 1992-09-01 | The Charles Stark Draper Laboratory, Inc. | Micromechanical device with a trimmable resonant frequency structure and method of trimming same |
US5016076A (en) | 1990-02-28 | 1991-05-14 | At&T Bell Laboratories | Lateral MOS controlled thyristor |
US5537144A (en) | 1990-06-11 | 1996-07-16 | Revfo, Inc. | Electro-optical display system for visually displaying polarized spatially multiplexed images of 3-D objects for use in stereoscopically viewing the same with high image quality and resolution |
US6155115A (en) | 1991-01-02 | 2000-12-05 | Ljung; Per | Vibratory angular rate sensor |
US5205171A (en) | 1991-01-11 | 1993-04-27 | Northrop Corporation | Miniature silicon accelerometer and method |
US6295870B1 (en) * | 1991-02-08 | 2001-10-02 | Alliedsignal Inc. | Triaxial angular rate and acceleration sensor |
US5241861A (en) | 1991-02-08 | 1993-09-07 | Sundstrand Corporation | Micromachined rate and acceleration sensor |
DE4106288C2 (de) | 1991-02-28 | 2001-05-31 | Bosch Gmbh Robert | Sensor zur Messung von Drücken oder Beschleunigungen |
DE4107658A1 (de) | 1991-03-09 | 1992-09-17 | Bosch Gmbh Robert | Montageverfahren fuer mikromechanische sensoren |
ATE143489T1 (de) | 1991-03-12 | 1996-10-15 | New Sd Inc | Stimmgabelinertialsensor mit einem ende und verfahren |
US5203208A (en) | 1991-04-29 | 1993-04-20 | The Charles Stark Draper Laboratory | Symmetrical micromechanical gyroscope |
US5331852A (en) | 1991-09-11 | 1994-07-26 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic rebalanced micromechanical transducer |
US5635639A (en) | 1991-09-11 | 1997-06-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical tuning fork angular rate sensor |
US5377544A (en) | 1991-12-19 | 1995-01-03 | Motorola, Inc. | Rotational vibration gyroscope |
US5329815A (en) | 1991-12-19 | 1994-07-19 | Motorola, Inc. | Vibration monolithic gyroscope |
US5313835A (en) | 1991-12-19 | 1994-05-24 | Motorola, Inc. | Integrated monolithic gyroscopes/accelerometers with logic circuits |
US5359893A (en) | 1991-12-19 | 1994-11-01 | Motorola, Inc. | Multi-axes gyroscope |
US5408877A (en) | 1992-03-16 | 1995-04-25 | The Charles Stark Draper Laboratory, Inc. | Micromechanical gyroscopic transducer with improved drive and sense capabilities |
US5767405A (en) | 1992-04-07 | 1998-06-16 | The Charles Stark Draper Laboratory, Inc. | Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout |
US5349855A (en) | 1992-04-07 | 1994-09-27 | The Charles Stark Draper Laboratory, Inc. | Comb drive micromechanical tuning fork gyro |
GB9212099D0 (en) | 1992-06-06 | 1992-07-22 | Lucas Ind Plc | Angular rate sensor and method of production thereof |
US5734105A (en) | 1992-10-13 | 1998-03-31 | Nippondenso Co., Ltd. | Dynamic quantity sensor |
US5367217A (en) | 1992-11-18 | 1994-11-22 | Alliedsignal Inc. | Four bar resonating force transducer |
US5555765A (en) | 1993-02-10 | 1996-09-17 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope |
US5650568A (en) | 1993-02-10 | 1997-07-22 | The Charles Stark Draper Laboratory, Inc. | Gimballed vibrating wheel gyroscope having strain relief features |
US5492596A (en) | 1994-02-04 | 1996-02-20 | The Charles Stark Draper Laboratory, Inc. | Method of making a micromechanical silicon-on-glass tuning fork gyroscope |
US5481914A (en) | 1994-03-28 | 1996-01-09 | The Charles Stark Draper Laboratory, Inc. | Electronics for coriolis force and other sensors |
DE4414237A1 (de) * | 1994-04-23 | 1995-10-26 | Bosch Gmbh Robert | Mikromechanischer Schwinger eines Schwingungsgyrometers |
US5987986A (en) | 1994-07-29 | 1999-11-23 | Litton Systems, Inc. | Navigation grade micromachined rotation sensor system |
US5646348A (en) | 1994-08-29 | 1997-07-08 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode and fabrication technique therefor |
US5581035A (en) | 1994-08-29 | 1996-12-03 | The Charles Stark Draper Laboratory, Inc. | Micromechanical sensor with a guard band electrode |
DE4431338C2 (de) | 1994-09-02 | 2003-07-31 | Bosch Gmbh Robert | Beschleunigungssensor |
US5530342A (en) | 1994-09-30 | 1996-06-25 | Rockwell International Corporation | Micromachined rate sensor comb drive device and method |
JP3412293B2 (ja) | 1994-11-17 | 2003-06-03 | 株式会社デンソー | 半導体ヨーレートセンサおよびその製造方法 |
DE4442033C2 (de) * | 1994-11-25 | 1997-12-18 | Bosch Gmbh Robert | Drehratensensor |
US5763781A (en) | 1995-02-23 | 1998-06-09 | Netzer; Yishay | Coupled resonator vibratory rate sensor |
GB2301671B (en) | 1995-05-30 | 1999-10-13 | Allied Signal Inc | Angular rate sensor electronic balance |
US5635638A (en) | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Coupling for multiple masses in a micromachined device |
US5635640A (en) | 1995-06-06 | 1997-06-03 | Analog Devices, Inc. | Micromachined device with rotationally vibrated masses |
US6064169A (en) | 1995-10-11 | 2000-05-16 | The Charles Stark Draper Laboratory, Inc. | Motor amplitude control circuit in conductor-on-insulator tuning fork gyroscope |
US5747961A (en) | 1995-10-11 | 1998-05-05 | The Charles Stark Draper Laboratory, Inc. | Beat frequency motor position detection scheme for tuning fork gyroscope and other sensors |
US5600065A (en) | 1995-10-25 | 1997-02-04 | Motorola, Inc. | Angular velocity sensor |
JPH09196682A (ja) | 1996-01-19 | 1997-07-31 | Matsushita Electric Ind Co Ltd | 角速度センサと加速度センサ |
JP3039364B2 (ja) | 1996-03-11 | 2000-05-08 | 株式会社村田製作所 | 角速度センサ |
US5880369A (en) | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
US5992233A (en) | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
US6250156B1 (en) | 1996-05-31 | 2001-06-26 | The Regents Of The University Of California | Dual-mass micromachined vibratory rate gyroscope |
US5696323A (en) | 1996-06-25 | 1997-12-09 | Alliedsignal, Inc. | Two bar resonant beam Coriolis rate sensor |
US5795988A (en) | 1996-07-01 | 1998-08-18 | Alliedsignal Inc. | Gyroscope noise reduction and drift compensation |
JP3702412B2 (ja) | 1996-07-29 | 2005-10-05 | アイシン精機株式会社 | 角速度検出装置 |
JPH1047966A (ja) | 1996-07-31 | 1998-02-20 | Aisin Seiki Co Ltd | 角速度センサ |
DE19641284C1 (de) * | 1996-10-07 | 1998-05-20 | Inst Mikro Und Informationstec | Drehratensensor mit entkoppelten orthogonalen Primär- und Sekundärschwingungen |
US5892153A (en) | 1996-11-21 | 1999-04-06 | The Charles Stark Draper Laboratory, Inc. | Guard bands which control out-of-plane sensitivities in tuning fork gyroscopes and other sensors |
GB2320571B (en) | 1996-12-20 | 2000-09-27 | Aisin Seiki | Semiconductor micromachine and manufacturing method thereof |
US5955668A (en) | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
US5911156A (en) | 1997-02-24 | 1999-06-08 | The Charles Stark Draper Laboratory, Inc. | Split electrode to minimize charge transients, motor amplitude mismatch errors, and sensitivity to vertical translation in tuning fork gyros and other devices |
US5783973A (en) | 1997-02-24 | 1998-07-21 | The Charles Stark Draper Laboratory, Inc. | Temperature insensitive silicon oscillator and precision voltage reference formed therefrom |
US6044707A (en) | 1997-06-20 | 2000-04-04 | Aisin Seiki Kabushiki Kaisha | Angular rate sensor |
US6032531A (en) | 1997-08-04 | 2000-03-07 | Kearfott Guidance & Navigation Corporation | Micromachined acceleration and coriolis sensor |
US6122961A (en) | 1997-09-02 | 2000-09-26 | Analog Devices, Inc. | Micromachined gyros |
US6070464A (en) | 1997-09-05 | 2000-06-06 | Motorola, Inc. | Sensing structure comprising a movable mass and a self-test structure |
JP2001520385A (ja) | 1997-10-14 | 2001-10-30 | アービン・センサーズ・コーポレイション | 複数要素のマイクロジャイロ |
JP3262082B2 (ja) * | 1997-10-16 | 2002-03-04 | 株式会社豊田中央研究所 | 振動式角速度検出器 |
US5920012A (en) | 1998-06-16 | 1999-07-06 | Boeing North American | Micromechanical inertial sensor |
JP3882973B2 (ja) | 1998-06-22 | 2007-02-21 | アイシン精機株式会社 | 角速度センサ |
US6009751A (en) | 1998-10-27 | 2000-01-04 | Ljung; Bo Hans Gunnar | Coriolis gyro sensor |
US6164134A (en) | 1999-01-29 | 2000-12-26 | Hughes Electronics Corporation | Balanced vibratory gyroscope and amplitude control for same |
JP4126833B2 (ja) | 1999-03-12 | 2008-07-30 | 株式会社デンソー | 角速度センサ装置 |
US6189381B1 (en) | 1999-04-26 | 2001-02-20 | Sitek, Inc. | Angular rate sensor made from a structural wafer of single crystal silicon |
US6289733B1 (en) | 1999-05-12 | 2001-09-18 | Hughes Electronics Corporation | Planar vibratory gyroscopes |
US6257059B1 (en) | 1999-09-24 | 2001-07-10 | The Charles Stark Draper Laboratory, Inc. | Microfabricated tuning fork gyroscope and associated three-axis inertial measurement system to sense out-of-plane rotation |
US6311555B1 (en) | 1999-11-17 | 2001-11-06 | American Gnc Corporation | Angular rate producer with microelectromechanical system technology |
FR2808264B1 (fr) * | 2000-04-28 | 2002-06-07 | Commissariat Energie Atomique | Structure mecanique micro-usinee et dispositif incorporant la structure |
US6516666B1 (en) * | 2000-09-19 | 2003-02-11 | Motorola, Inc. | Yaw rate motion sensor |
JP4568997B2 (ja) * | 2000-12-05 | 2010-10-27 | 株式会社豊田中央研究所 | 加加速度センサ |
US6742389B2 (en) * | 2001-01-24 | 2004-06-01 | The Regents Of The University Of Michigan | Filter-based method and system for measuring angular speed of an object |
JP2003185482A (ja) * | 2001-12-17 | 2003-07-03 | Yokogawa Electric Corp | コリオリ質量流量計 |
JP3870895B2 (ja) * | 2002-01-10 | 2007-01-24 | 株式会社村田製作所 | 角速度センサ |
US6860151B2 (en) * | 2003-02-07 | 2005-03-01 | Honeywell International Inc. | Methods and systems for controlling movement within MEMS structures |
US6837107B2 (en) * | 2003-04-28 | 2005-01-04 | Analog Devices, Inc. | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
US6767758B1 (en) * | 2003-04-28 | 2004-07-27 | Analog Devices, Inc. | Micro-machined device structures having on and off-axis orientations |
US7036372B2 (en) * | 2003-09-25 | 2006-05-02 | Kionix, Inc. | Z-axis angular rate sensor |
JP4433747B2 (ja) * | 2003-09-29 | 2010-03-17 | 株式会社村田製作所 | 角速度検出装置 |
WO2005103620A1 (en) * | 2004-04-14 | 2005-11-03 | Analog Devices, Inc. | Inertial sensor with a linear array of sensor elements |
US9479575B2 (en) * | 2012-03-27 | 2016-10-25 | International Business Machines Corporation | Managing capacity on demand in a server cloud |
-
2005
- 2005-04-14 WO PCT/US2005/012932 patent/WO2005103620A1/en active Application Filing
- 2005-04-14 US US11/106,039 patent/US7287428B2/en active Active
- 2005-04-14 EP EP05736589.2A patent/EP1735590B1/en not_active Not-in-force
- 2005-04-14 US US11/106,354 patent/US7347094B2/en active Active
- 2005-04-14 CN CNB2005800155143A patent/CN100559122C/zh not_active Expired - Fee Related
- 2005-04-14 EP EP05738720.1A patent/EP1735591B1/en not_active Not-in-force
- 2005-04-14 WO PCT/US2005/013109 patent/WO2005103621A1/en active Application Filing
- 2005-04-14 CN CN2005800155590A patent/CN1954193B/zh not_active Expired - Fee Related
- 2005-04-14 JP JP2007508588A patent/JP4512636B2/ja not_active Expired - Fee Related
- 2005-04-14 JP JP2007508620A patent/JP4516113B2/ja not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1286751A (zh) * | 1996-11-22 | 2001-03-07 | 西门子公司 | 转速传感器 |
US6230563B1 (en) * | 1998-06-09 | 2001-05-15 | Integrated Micro Instruments, Inc. | Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability |
Also Published As
Publication number | Publication date |
---|---|
JP4512636B2 (ja) | 2010-07-28 |
EP1735591B1 (en) | 2014-01-22 |
CN1954192A (zh) | 2007-04-25 |
US7347094B2 (en) | 2008-03-25 |
JP2007532924A (ja) | 2007-11-15 |
EP1735591A1 (en) | 2006-12-27 |
US7287428B2 (en) | 2007-10-30 |
WO2005103621A1 (en) | 2005-11-03 |
EP1735590B1 (en) | 2013-11-27 |
JP2007532917A (ja) | 2007-11-15 |
JP4516113B2 (ja) | 2010-08-04 |
US20050229705A1 (en) | 2005-10-20 |
WO2005103620A1 (en) | 2005-11-03 |
CN1954193A (zh) | 2007-04-25 |
CN100559122C (zh) | 2009-11-11 |
EP1735590A1 (en) | 2006-12-27 |
US20050229703A1 (en) | 2005-10-20 |
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