JP5037850B2 - 電子ビーム露光装置 - Google Patents
電子ビーム露光装置 Download PDFInfo
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- JP5037850B2 JP5037850B2 JP2006125312A JP2006125312A JP5037850B2 JP 5037850 B2 JP5037850 B2 JP 5037850B2 JP 2006125312 A JP2006125312 A JP 2006125312A JP 2006125312 A JP2006125312 A JP 2006125312A JP 5037850 B2 JP5037850 B2 JP 5037850B2
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- wafer stage
- electron beam
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- wafer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
- H01J37/3045—Object or beam position registration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/2025—Sensing velocity of translation or rotation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31761—Patterning strategy
Description
図3に、本実施形態に係る電子ビーム露光装置の構成図を示す。
図4(a)に、ステージフィードバック部300の構成図を示す。
以下に、本実施形態で行う予測補間演算について、図5を参照しながら説明する。
以下に、図6のフローチャートを参照して、予測補間演算を採用したステージフィードバック処理について説明する。
(メモリを利用した予測補間演算)
次に、メモリを利用した予測補間演算について説明する。
Claims (4)
- 電子ビームを発生させる電子銃と、
前記電子ビームを偏向させる偏向手段と、
ウエハが載置されるウエハステージと、
ウエハステージの位置を検出するステージ位置検出手段と、
前記ステージ位置検出手段によって検出した前記ウエハステージの移動距離及び該移動に要した時間から前記ウエハステージの移動速度を算出し、該移動速度を基に前記ステージ位置検出手段の測長周期より短い補間時間に対する前記ウエハステージの位置変化量を算出し、前記ステージ位置検出手段によって測長されるステージ位置に前記位置変化量を前記補間時間に同期して順次加算したステージ位置移動量を算出し、該ステージ位置移動量に対応する電子ビーム偏向量を算出するステージ位置演算手段と、
前記電子ビーム偏向量に基づいて前記偏向手段に前記電子ビームを偏向させる偏向制御手段と、
前記ウエハステージの移動速度に応じた前記位置変化量が格納されたメモリとを有し、
前記ウエハステージの測長周期及びステージフィードバックの値を所定の値に固定したときに前記ステージ位置演算手段は、前記ウエハステージの移動速度に対応する値をアドレスとして前記メモリにアクセスし、前記ウエハステージの移動速度に応じた前記位置変化量を前記メモリから抽出する
ことを特徴とする電子ビーム露光装置。 - 前記ステージ位置演算手段は、前記位置変化量が所定の値以下になるように前記補間時間を決定することを特徴とする請求項1に記載の電子ビーム露光装置。
- 前記所定の値は1nmであることを特徴とする請求項1に記載の電子ビーム露光装置。
- 前記ステージ位置演算手段は、前記移動速度が20mm/s以上であると判定したとき、前記位置変化量、ステージ位置移動量、及び電子ビーム偏向量を算出することを特徴とする請求項1に記載の電子ビーム露光装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006125312A JP5037850B2 (ja) | 2006-04-28 | 2006-04-28 | 電子ビーム露光装置 |
DE102007014301.1A DE102007014301B4 (de) | 2006-04-28 | 2007-03-26 | Elektronenstrahlbestrahlungsgerät |
US11/729,673 US7777202B2 (en) | 2006-04-28 | 2007-03-28 | Electron beam exposure apparatus involving the position and velocity calculation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006125312A JP5037850B2 (ja) | 2006-04-28 | 2006-04-28 | 電子ビーム露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007299853A JP2007299853A (ja) | 2007-11-15 |
JP5037850B2 true JP5037850B2 (ja) | 2012-10-03 |
Family
ID=38542507
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006125312A Active JP5037850B2 (ja) | 2006-04-28 | 2006-04-28 | 電子ビーム露光装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7777202B2 (ja) |
JP (1) | JP5037850B2 (ja) |
DE (1) | DE102007014301B4 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4174528B2 (ja) * | 2006-06-16 | 2008-11-05 | 株式会社東芝 | 電子ビーム描画装置及び電子ビーム描画方法 |
US8384048B2 (en) * | 2007-06-25 | 2013-02-26 | Multibeam Corporation | Charged particle beam deflection method with separate stage tracking and stage positional error signals |
JP5463149B2 (ja) * | 2010-01-20 | 2014-04-09 | 株式会社ニューフレアテクノロジー | 荷電粒子ビーム描画装置及び荷電粒子ビーム描画方法 |
US9466462B2 (en) | 2014-01-13 | 2016-10-11 | Applied Materials Israel Ltd. | Inspection of regions of interest using an electron beam system |
US9558915B2 (en) | 2014-01-13 | 2017-01-31 | Frederick A. Flitsch | Method and apparatus for a high resolution imaging system |
US9847209B2 (en) | 2014-01-13 | 2017-12-19 | Applied Materials Israel Ltd. | Inspection of regions of interest using an electron beam system |
US10049853B2 (en) | 2014-01-13 | 2018-08-14 | Frederick A. Flitsch | Method and apparatus for an imaging system of biological material |
US11302516B2 (en) | 2014-01-13 | 2022-04-12 | Frederick A. Flitsch | Method and apparatus for an imaging system |
US11915909B2 (en) | 2014-01-13 | 2024-02-27 | Frederick A. Flitsch | Method and apparatus for an imaging system |
US9171697B2 (en) | 2014-01-13 | 2015-10-27 | Futrfab, Inc | Method and apparatus for an imaging system |
JP2016207926A (ja) * | 2015-04-27 | 2016-12-08 | 株式会社アドバンテスト | 露光装置および露光方法 |
US10541104B2 (en) | 2015-07-09 | 2020-01-21 | Applied Materials Israel Ltd. | System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection |
US10054551B2 (en) | 2016-04-20 | 2018-08-21 | Applied Materials Israel Ltd. | Inspection system and method for inspecting a sample by using a plurality of spaced apart beams |
KR102566136B1 (ko) | 2016-10-14 | 2023-08-10 | 삼성전자주식회사 | 계측 시스템 및 이를 사용하는 스테이지 제어 장치 |
CN112882353B (zh) * | 2021-01-28 | 2021-11-30 | 清华大学 | 一种基于柔性纳米伺服运动系统的扫描电镜直写光刻系统 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4698509A (en) * | 1985-02-14 | 1987-10-06 | Varian Associates, Inc. | High speed pattern generator for electron beam lithography |
US5124560A (en) * | 1990-03-14 | 1992-06-23 | Fujitsu Limited | Electron beam exposure system having an improved data transfer efficiency |
JPH0513037A (ja) * | 1991-07-02 | 1993-01-22 | Fujitsu Ltd | 荷電粒子ビーム装置及びその制御方法 |
JPH10177941A (ja) | 1996-12-17 | 1998-06-30 | Fujitsu Ltd | 電子ビーム露光方法及び電子ビーム露光装置 |
JP2000182938A (ja) * | 1998-12-17 | 2000-06-30 | Toshiba Corp | 荷電ビ−ム描画装置 |
JP4410871B2 (ja) * | 1999-03-25 | 2010-02-03 | キヤノン株式会社 | 荷電粒子線露光装置及び該装置を用いたデバイス製造方法 |
JP3907497B2 (ja) * | 2002-03-01 | 2007-04-18 | キヤノン株式会社 | 位置決め装置及びその制御方法、並びに露光装置、並びにその制御方法により制御される露光装置により半導体デバイスを製造する製造方法 |
JP2004146402A (ja) * | 2002-10-21 | 2004-05-20 | Advantest Corp | 電子ビーム露光装置及び偏向量補正方法 |
US6911792B2 (en) * | 2003-05-20 | 2005-06-28 | Hewlett-Packard Development Company, L.P. | System and method for controlling movement |
-
2006
- 2006-04-28 JP JP2006125312A patent/JP5037850B2/ja active Active
-
2007
- 2007-03-26 DE DE102007014301.1A patent/DE102007014301B4/de active Active
- 2007-03-28 US US11/729,673 patent/US7777202B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
DE102007014301A1 (de) | 2007-10-31 |
US7777202B2 (en) | 2010-08-17 |
JP2007299853A (ja) | 2007-11-15 |
US20080277598A1 (en) | 2008-11-13 |
DE102007014301B4 (de) | 2016-11-17 |
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