JP5030060B2 - 電気信号接続装置 - Google Patents

電気信号接続装置 Download PDF

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Publication number
JP5030060B2
JP5030060B2 JP2007223243A JP2007223243A JP5030060B2 JP 5030060 B2 JP5030060 B2 JP 5030060B2 JP 2007223243 A JP2007223243 A JP 2007223243A JP 2007223243 A JP2007223243 A JP 2007223243A JP 5030060 B2 JP5030060 B2 JP 5030060B2
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JP
Japan
Prior art keywords
probe
circuit board
resin film
support
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007223243A
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English (en)
Japanese (ja)
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JP2009036745A (ja
JP2009036745A5 (enExample
Inventor
軍生 木本
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Individual
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Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2007223243A priority Critical patent/JP5030060B2/ja
Priority to TW097127693A priority patent/TW200907359A/zh
Priority to US12/180,695 priority patent/US7622937B2/en
Priority to CN2008101350416A priority patent/CN101359000B/zh
Priority to KR1020080075283A priority patent/KR20090013717A/ko
Publication of JP2009036745A publication Critical patent/JP2009036745A/ja
Publication of JP2009036745A5 publication Critical patent/JP2009036745A5/ja
Application granted granted Critical
Publication of JP5030060B2 publication Critical patent/JP5030060B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2007223243A 2007-08-01 2007-08-01 電気信号接続装置 Expired - Fee Related JP5030060B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2007223243A JP5030060B2 (ja) 2007-08-01 2007-08-01 電気信号接続装置
TW097127693A TW200907359A (en) 2007-08-01 2008-07-21 Electrical signal connector
US12/180,695 US7622937B2 (en) 2007-08-01 2008-07-28 Electrical signal connector
CN2008101350416A CN101359000B (zh) 2007-08-01 2008-07-29 电气讯号接续装置
KR1020080075283A KR20090013717A (ko) 2007-08-01 2008-07-31 전기 신호 접속 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007223243A JP5030060B2 (ja) 2007-08-01 2007-08-01 電気信号接続装置

Publications (3)

Publication Number Publication Date
JP2009036745A JP2009036745A (ja) 2009-02-19
JP2009036745A5 JP2009036745A5 (enExample) 2010-10-07
JP5030060B2 true JP5030060B2 (ja) 2012-09-19

Family

ID=40331500

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007223243A Expired - Fee Related JP5030060B2 (ja) 2007-08-01 2007-08-01 電気信号接続装置

Country Status (5)

Country Link
US (1) US7622937B2 (enExample)
JP (1) JP5030060B2 (enExample)
KR (1) KR20090013717A (enExample)
CN (1) CN101359000B (enExample)
TW (1) TW200907359A (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5077794B2 (ja) * 2007-08-02 2012-11-21 軍生 木本 プローブ組立体
JP5099487B2 (ja) * 2007-08-03 2012-12-19 軍生 木本 複数梁合成型接触子
JP5288248B2 (ja) 2008-06-04 2013-09-11 軍生 木本 電気信号接続装置
JP5364877B2 (ja) * 2009-04-28 2013-12-11 有限会社清田製作所 積層型プローブ
WO2011036718A1 (ja) * 2009-09-25 2011-03-31 株式会社アドバンテスト プローブ装置および試験装置
JP2011141126A (ja) * 2010-01-05 2011-07-21 Toshiba Corp プローブカード
CN102156205B (zh) * 2010-02-11 2013-06-19 旺矽科技股份有限公司 探针卡及用于该探针卡的印刷电路板
CN103048576A (zh) * 2013-01-24 2013-04-17 昆山尼赛拉电子器材有限公司 端子检测治具
CN112309486B (zh) * 2019-07-26 2024-04-12 第一检测有限公司 芯片测试装置
CN112349712B (zh) * 2019-08-08 2024-12-03 桑迪士克科技股份有限公司 集成电子元件模块、包含其的半导体封装体及其制造方法
TWI749690B (zh) * 2020-08-10 2021-12-11 京元電子股份有限公司 半導體元件預燒測試模組及其預燒測試裝置
CN114078718B (zh) * 2020-08-13 2025-02-28 京元电子股份有限公司 半导体元件预烧测试模块及其预烧测试装置
CN115616259B (zh) * 2022-09-26 2023-12-08 上海泽丰半导体科技有限公司 薄膜探针卡水平调节装置及薄膜探针卡

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5829128A (en) 1993-11-16 1998-11-03 Formfactor, Inc. Method of mounting resilient contact structures to semiconductor devices
US5084672A (en) * 1989-02-21 1992-01-28 Giga Probe, Inc. Multi-point probe assembly for testing electronic device
US5059898A (en) * 1990-08-09 1991-10-22 Tektronix, Inc. Wafer probe with transparent loading member
US6034534A (en) * 1995-05-25 2000-03-07 Kiyota; Shigeo Laminated contact probe for inspection of ultra-microscopic pitch
US5736850A (en) 1995-09-11 1998-04-07 Teradyne, Inc. Configurable probe card for automatic test equipment
JP3022312B2 (ja) 1996-04-15 2000-03-21 日本電気株式会社 プローブカードの製造方法
KR100471341B1 (ko) 1996-05-23 2005-07-21 제네시스 테크놀로지 가부시키가이샤 콘택트프로브및그것을구비한프로브장치
JP3172760B2 (ja) * 1997-03-07 2001-06-04 東京エレクトロン株式会社 バキュームコンタクタ
US6586954B2 (en) * 1998-02-10 2003-07-01 Celadon Systems, Inc. Probe tile for probing semiconductor wafer
EP0915344B1 (de) 1997-11-05 2004-02-25 Feinmetall GmbH Prüfkopf für Mikrostrukturen mit Schnittstelle
JP3323449B2 (ja) 1998-11-18 2002-09-09 日本碍子株式会社 半導体用ソケット
JP4185218B2 (ja) * 1999-04-02 2008-11-26 株式会社ヨコオ コンタクトプローブとその製造方法、および前記コンタクトプローブを用いたプローブ装置とその製造方法
US6330744B1 (en) 1999-07-12 2001-12-18 Pjc Technologies, Inc. Customized electrical test probe head using uniform probe assemblies
US6496612B1 (en) 1999-09-23 2002-12-17 Arizona State University Electronically latching micro-magnetic switches and method of operating same
JP4355074B2 (ja) 1999-12-27 2009-10-28 株式会社日本マイクロニクス プローブカード
US6496026B1 (en) * 2000-02-25 2002-12-17 Microconnect, Inc. Method of manufacturing and testing an electronic device using a contact device having fingers and a mechanical ground
JP2002296297A (ja) 2001-03-29 2002-10-09 Isao Kimoto 接触子組立体
JP4496456B2 (ja) 2001-09-03 2010-07-07 軍生 木本 プローバ装置
JP3829099B2 (ja) * 2001-11-21 2006-10-04 株式会社日本マイクロニクス 電気的接続装置
JP4008408B2 (ja) 2003-11-07 2007-11-14 日本電子材料株式会社 プローブカード
JP4721099B2 (ja) * 2004-03-16 2011-07-13 軍生 木本 電気信号接続装置及びこれを用いたプローブ組立体並びにプローバ装置
TWI286606B (en) * 2004-03-16 2007-09-11 Gunsei Kimoto Electric signal connecting device, and probe assembly and prober device using it
JP4107275B2 (ja) * 2004-09-09 2008-06-25 セイコーエプソン株式会社 検査用プローブ及び検査装置、検査用プローブの製造方法
JP4815192B2 (ja) * 2005-10-31 2011-11-16 株式会社日本マイクロニクス 電気的接続装置
JP5077794B2 (ja) * 2007-08-02 2012-11-21 軍生 木本 プローブ組立体

Also Published As

Publication number Publication date
US20090033348A1 (en) 2009-02-05
TWI375039B (enExample) 2012-10-21
CN101359000A (zh) 2009-02-04
CN101359000B (zh) 2012-07-04
KR20090013717A (ko) 2009-02-05
JP2009036745A (ja) 2009-02-19
US7622937B2 (en) 2009-11-24
TW200907359A (en) 2009-02-16

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