JP5028584B2 - 液晶配向膜用真空蒸着装置およびその成膜方法 - Google Patents

液晶配向膜用真空蒸着装置およびその成膜方法 Download PDF

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Publication number
JP5028584B2
JP5028584B2 JP2005154892A JP2005154892A JP5028584B2 JP 5028584 B2 JP5028584 B2 JP 5028584B2 JP 2005154892 A JP2005154892 A JP 2005154892A JP 2005154892 A JP2005154892 A JP 2005154892A JP 5028584 B2 JP5028584 B2 JP 5028584B2
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substrate
slit
alignment film
liquid crystal
vacuum deposition
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Japanese (ja)
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JP2006330411A5 (cg-RX-API-DMAC7.html
JP2006330411A (ja
Inventor
隆一朗 臼井
達士 石上
和芳 永井
忠司 金子
寛人 新
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Showa Shinku Co Ltd
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Showa Shinku Co Ltd
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Publication of JP2006330411A5 publication Critical patent/JP2006330411A5/ja
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  • Liquid Crystal (AREA)
JP2005154892A 2005-05-27 2005-05-27 液晶配向膜用真空蒸着装置およびその成膜方法 Expired - Lifetime JP5028584B2 (ja)

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JP2005154892A JP5028584B2 (ja) 2005-05-27 2005-05-27 液晶配向膜用真空蒸着装置およびその成膜方法

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JP2005154892A JP5028584B2 (ja) 2005-05-27 2005-05-27 液晶配向膜用真空蒸着装置およびその成膜方法

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JP2006330411A JP2006330411A (ja) 2006-12-07
JP2006330411A5 JP2006330411A5 (cg-RX-API-DMAC7.html) 2008-06-19
JP5028584B2 true JP5028584B2 (ja) 2012-09-19

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Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5098375B2 (ja) * 2007-03-12 2012-12-12 セイコーエプソン株式会社 液晶装置の製造方法
JPWO2013042247A1 (ja) * 2011-09-22 2015-03-26 株式会社シンクロン 薄膜形成装置
WO2013042247A1 (ja) * 2011-09-22 2013-03-28 株式会社シンクロン 薄膜形成装置
KR102048051B1 (ko) * 2012-09-04 2019-11-25 삼성디스플레이 주식회사 증착 환경 검사용 마스크 조립체 및 이를 포함하는 증착 설비
JP6056025B2 (ja) * 2015-11-26 2017-01-11 株式会社昭和真空 成膜装置
JP2017190513A (ja) * 2016-04-15 2017-10-19 株式会社昭和真空 蒸着装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63313123A (ja) * 1987-06-17 1988-12-21 Konica Corp 液晶表示素子の製造方法
JP2548373B2 (ja) * 1989-05-24 1996-10-30 松下電器産業株式会社 液晶配向膜の製造法とその製造装置
JPH04131370A (ja) * 1990-09-25 1992-05-06 Canon Inc 薄膜堆積装置
JP2002365639A (ja) * 2001-04-06 2002-12-18 Victor Co Of Japan Ltd 液晶表示素子の配向膜製造装置及び液晶表示素子の配向膜製造方法

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