JP5027163B2 - 光学系の焦点位置を検出する装置および方法、ならびに眼科的処置装置 - Google Patents

光学系の焦点位置を検出する装置および方法、ならびに眼科的処置装置 Download PDF

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JP5027163B2
JP5027163B2 JP2008554701A JP2008554701A JP5027163B2 JP 5027163 B2 JP5027163 B2 JP 5027163B2 JP 2008554701 A JP2008554701 A JP 2008554701A JP 2008554701 A JP2008554701 A JP 2008554701A JP 5027163 B2 JP5027163 B2 JP 5027163B2
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optical
optical element
radiation
focal position
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JP2009527265A (ja
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オラフ キッテルマン
ペーター トゥリーベル
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ウェイブライト ゲーエムベーハー
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    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0665Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F9/00825Methods or devices for eye surgery using laser for photodisruption
    • A61F9/00827Refractive correction, e.g. lenticle
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F2009/00855Calibration of the laser system
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F2009/00861Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872Cornea
JP2008554701A 2006-02-20 2007-02-20 光学系の焦点位置を検出する装置および方法、ならびに眼科的処置装置 Active JP5027163B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102006007750A DE102006007750A1 (de) 2006-02-20 2006-02-20 Verfahren und optische Anordnung zur Kontrolle der Fokustiefe eines abbildenden optischen Systems
DE102006007750.4 2006-02-20
PCT/EP2007/001456 WO2007096136A1 (de) 2006-02-20 2007-02-20 Vorrichtung und verfahren zum detektieren der fokuslage eines optischen systems und ophthalmologische behandlungsvorrichtung

Publications (2)

Publication Number Publication Date
JP2009527265A JP2009527265A (ja) 2009-07-30
JP5027163B2 true JP5027163B2 (ja) 2012-09-19

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Country Status (12)

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US (1) US7982169B2 (ko)
EP (1) EP1986582B1 (ko)
JP (1) JP5027163B2 (ko)
KR (1) KR101310045B1 (ko)
CN (1) CN101389296B (ko)
BR (1) BRPI0708057B8 (ko)
CA (1) CA2642892C (ko)
DE (1) DE102006007750A1 (ko)
ES (1) ES2393518T3 (ko)
MX (1) MX2008010678A (ko)
RU (1) RU2440084C2 (ko)
WO (1) WO2007096136A1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158331A (ja) * 2009-01-07 2010-07-22 Nidek Co Ltd 眼科用レーザ治療装置

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007053632B4 (de) * 2007-11-08 2017-12-14 Primes Gmbh Verfahren zur koaxialen Strahlanalyse an optischen Systemen
BRPI0822849B8 (pt) * 2008-06-30 2021-06-22 Alcon Inc aparelho para cirurgia oftalmológica
CN102338693A (zh) * 2010-07-20 2012-02-01 上海雄博精密仪器股份有限公司 一种渐进多焦点镜片的检测方法和装置
US8687178B2 (en) * 2010-09-30 2014-04-01 Wavelight Gmbh Process for testing a laser device
US8439902B2 (en) 2010-09-30 2013-05-14 Wavelight Gmbh Apparatus and method for processing material with focused electromagnetic radiation
PL2621662T3 (pl) * 2010-09-30 2019-09-30 Wavelight Gmbh Urządzenie i sposób obróbki materiału za pomocą zogniskowanego promieniowania elektromagnetycznego
DE102011007176B4 (de) * 2011-04-12 2015-06-25 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Vorrichtung zur Fokussierung eines Laserstrahls und Verfahren zum Überwachen einer Laserbearbeitung
US9095414B2 (en) * 2011-06-24 2015-08-04 The Regents Of The University Of California Nonlinear optical photodynamic therapy (NLO-PDT) of the cornea
PL2797562T3 (pl) * 2011-12-29 2019-01-31 Wavelight Gmbh Sposób przetwarzania obrazu do określania głębokości ogniskowania lasera refrakcyjnego
CN104748674B (zh) * 2013-12-27 2019-01-18 上海微电子装备(集团)股份有限公司 焦点监测装置和方法
KR101661159B1 (ko) * 2014-04-08 2016-09-29 서울대학교산학협력단 레이저 시술 평가 시스템 및 평가 방법
US9483617B2 (en) 2014-04-08 2016-11-01 Seoul National University R&Db Foundation System and method for evaluating laser treatment
EP2944413A1 (de) 2014-05-12 2015-11-18 Boegli-Gravures S.A. Vorrichtung zur Maskenprojektion von Femtosekunden- und Pikosekunden- Laserstrahlen mit einer Blende, einer Maske und Linsensystemen
CN106681015B (zh) * 2017-01-09 2019-03-08 成都曙光光纤网络有限责任公司 一种适用于反射式太赫兹波系统的自动对焦装置和方法
US10802117B2 (en) 2018-01-24 2020-10-13 Facebook Technologies, Llc Systems and methods for optical demodulation in a depth-sensing device
US10805594B2 (en) * 2018-02-08 2020-10-13 Facebook Technologies, Llc Systems and methods for enhanced depth sensor devices
US10735640B2 (en) 2018-02-08 2020-08-04 Facebook Technologies, Llc Systems and methods for enhanced optical sensor devices
DE102018105319A1 (de) * 2018-03-08 2019-09-12 Precitec Gmbh & Co. Kg Vorrichtung zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem, Laserbearbeitungssystem mit derselben und Verfahren zur Bestimmung einer Fokuslage in einem Laserbearbeitungssystem
CN108844716B (zh) * 2018-05-10 2020-10-30 泉州市淦兴科技发展有限公司 一种医疗器械用可校对光线的辅助检测设备
AU2019288652B2 (en) * 2018-06-22 2023-06-08 Avava, Inc. Feedback detection for a treatment device
WO2020148580A1 (en) 2019-01-18 2020-07-23 Alcon Inc. Controlling the position of the focal point of a laser beam
CN110425979A (zh) * 2019-08-07 2019-11-08 江苏汇博机器人技术股份有限公司 一种基于实训机器人的点激光测量方法和装置
DE102020103884A1 (de) * 2019-10-11 2021-04-15 Trumpf Laser- Und Systemtechnik Gmbh Justage-vorrichtung für eine bessel-strahl-bearbeitungsoptik und verfahren
CN112222609A (zh) * 2020-09-22 2021-01-15 中国科学院上海光学精密机械研究所 高峰值功率激光焦点的定位方法
CN114543695A (zh) * 2022-02-08 2022-05-27 南京中安半导体设备有限责任公司 哈特曼测量装置及其测量方法和晶圆几何参数测量装置
WO2023208863A1 (de) * 2022-04-25 2023-11-02 Primes Gmbh Messtechnik Für Die Produktion Mit Laserstrahlung Vorrichtung und verfahren zur fokuslagen-bestimmung mit berücksichtigung von prozessgas

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139488A (en) * 1981-02-24 1982-08-28 Amada Eng & Service Method and device for adjusting focus of laser beam in laser working device
JPS618024A (ja) * 1984-06-21 1986-01-14 キヤノン株式会社 位置合わせ用光学装置
US5162641A (en) * 1991-02-19 1992-11-10 Phoenix Laser Systems, Inc. System and method for detecting, correcting and measuring depth movement of target tissue in a laser surgical system
JPH07503382A (ja) 1991-11-06 1995-04-13 ライ,シュイ,ティー. 角膜手術装置及び方法
JP3512823B2 (ja) * 1992-11-20 2004-03-31 興和株式会社 眼科医療機器
EP0627675B1 (de) 1993-04-16 2001-06-13 Infineon Technologies AG Diffraktive optische Einrichtung zur optischen Abbildung eines Raumpunktes auf andere Raumpunkte
DE19513354A1 (de) * 1994-04-14 1995-12-14 Zeiss Carl Materialbearbeitungseinrichtung
US6163010A (en) * 1996-10-25 2000-12-19 E. I. Du Pont De Nemours And Company Method and apparatus for laser cutting materials
US5818592A (en) * 1997-02-07 1998-10-06 Phase Metrics, Inc. Non-contact optical glide tester
AU777228B2 (en) * 1999-10-21 2004-10-07 Technolas Gmbh Ophthalmologische Systeme Method and apparatus for opthalmic refractive correction
HU0004712D0 (ko) * 2000-11-24 2001-02-28 Duha Tibor
US6899707B2 (en) 2001-01-29 2005-05-31 Intralase Corp. Applanation lens and method for ophthalmic surgical applications
US6794625B2 (en) * 2001-05-15 2004-09-21 Applied Materials Dynamic automatic focusing method and apparatus using interference patterns
JP3978024B2 (ja) * 2001-12-03 2007-09-19 株式会社ニデック 眼科装置及び角膜手術装置
US6666857B2 (en) * 2002-01-29 2003-12-23 Robert F. Smith Integrated wavefront-directed topography-controlled photoablation
JP2004069314A (ja) * 2002-08-01 2004-03-04 Olympus Corp 焦点距離測定装置
DE10323422B4 (de) * 2002-08-23 2022-05-05 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Messung eines optischen Durchbruchs in einem Gewebe
US20040051976A1 (en) * 2002-08-29 2004-03-18 Accretech (Israel) Ltd Confocal microscope with diffractively formed virtual pinhole array
JP3807374B2 (ja) * 2003-01-31 2006-08-09 住友電気工業株式会社 一括多点ホモジナイズ光学系
KR20060006805A (ko) * 2003-04-11 2006-01-19 보오슈 앤드 롬 인코포레이팃드 시력 교정을 위한 치료 계획에 관한 방법, 시스템 및알고리즘
CN2664628Y (zh) * 2003-04-28 2004-12-22 林瑞腾 紫外激光多功能视力治疗仪
US20040237971A1 (en) * 2003-06-02 2004-12-02 Hema Radhakrishnan Methods and apparatuses for controlling optical aberrations to alter modulation transfer functions
CN2640445Y (zh) * 2003-08-11 2004-09-15 苏州六六视觉科技股份有限公司 准分子激光治疗机的眼跟踪反光片环
US9427822B2 (en) * 2003-10-23 2016-08-30 Carl Zeiss Meditec Ag Laser treatment device
DE10356415A1 (de) * 2003-11-24 2005-06-23 Universität Stuttgart Verfahren und Anordnung zur Keyhole-Tiefendetektion
DE102004009212B4 (de) 2004-02-25 2015-08-20 Carl Zeiss Meditec Ag Kontaktelement für Laserbearbeitung und Laserbearbeitungsvorrichtung
CN100430031C (zh) * 2004-04-26 2008-11-05 中国科学院光电技术研究所 双眼体视高阶像差矫正视觉仿真系统
US7207983B2 (en) * 2005-04-29 2007-04-24 University Of Florida Research Foundation, Inc. System and method for real-time feedback of ablation rate during laser refractive surgery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158331A (ja) * 2009-01-07 2010-07-22 Nidek Co Ltd 眼科用レーザ治療装置

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Publication number Publication date
MX2008010678A (es) 2009-01-29
CN101389296A (zh) 2009-03-18
EP1986582B1 (de) 2012-09-26
KR20080108474A (ko) 2008-12-15
RU2440084C2 (ru) 2012-01-20
CA2642892A1 (en) 2007-08-30
DE102006007750A1 (de) 2007-08-23
EP1986582A1 (de) 2008-11-05
BRPI0708057A2 (pt) 2011-05-17
KR101310045B1 (ko) 2013-09-17
JP2009527265A (ja) 2009-07-30
RU2008133868A (ru) 2010-03-27
US7982169B2 (en) 2011-07-19
ES2393518T3 (es) 2012-12-26
BRPI0708057B1 (pt) 2019-01-15
WO2007096136A1 (de) 2007-08-30
CN101389296B (zh) 2012-03-28
US20090127429A1 (en) 2009-05-21
CA2642892C (en) 2013-12-10
BRPI0708057B8 (pt) 2021-06-22

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