JP5021919B2 - 半導体用熱交換器 - Google Patents

半導体用熱交換器 Download PDF

Info

Publication number
JP5021919B2
JP5021919B2 JP2005263863A JP2005263863A JP5021919B2 JP 5021919 B2 JP5021919 B2 JP 5021919B2 JP 2005263863 A JP2005263863 A JP 2005263863A JP 2005263863 A JP2005263863 A JP 2005263863A JP 5021919 B2 JP5021919 B2 JP 5021919B2
Authority
JP
Japan
Prior art keywords
heat exchanger
mesh plug
coolant
passage
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005263863A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006203159A (ja
JP2006203159A5 (https=
Inventor
イヴ・マーティン
セオドア・ジー・ファン・ケッセル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JP2006203159A publication Critical patent/JP2006203159A/ja
Publication of JP2006203159A5 publication Critical patent/JP2006203159A5/ja
Application granted granted Critical
Publication of JP5021919B2 publication Critical patent/JP5021919B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W40/00Arrangements for thermal protection or thermal control
    • H10W40/40Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids
    • H10W40/47Arrangements for thermal protection or thermal control involving heat exchange by flowing fluids by flowing liquids, e.g. forced water cooling

Landscapes

  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2005263863A 2005-01-18 2005-09-12 半導体用熱交換器 Expired - Fee Related JP5021919B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/037,918 US20060157225A1 (en) 2005-01-18 2005-01-18 High turbulence heat exchanger
US11/037,918 2005-01-18

Publications (3)

Publication Number Publication Date
JP2006203159A JP2006203159A (ja) 2006-08-03
JP2006203159A5 JP2006203159A5 (https=) 2008-10-16
JP5021919B2 true JP5021919B2 (ja) 2012-09-12

Family

ID=36682681

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005263863A Expired - Fee Related JP5021919B2 (ja) 2005-01-18 2005-09-12 半導体用熱交換器

Country Status (2)

Country Link
US (2) US20060157225A1 (https=)
JP (1) JP5021919B2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12394690B2 (en) 2022-01-04 2025-08-19 Corning Research & Development Corporation Systems and methods of nano-particle bonding for electronics cooling

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7265977B2 (en) * 2005-01-18 2007-09-04 International Business Machines Corporation Active liquid metal thermal spreader
US9412926B2 (en) * 2005-06-10 2016-08-09 Cree, Inc. High power solid-state lamp
US7365981B2 (en) * 2005-06-28 2008-04-29 Delphi Technologies, Inc. Fluid-cooled electronic system
US7905275B2 (en) * 2006-04-20 2011-03-15 The Boeing Company Ceramic foam cold plate
US8505616B2 (en) * 2006-04-20 2013-08-13 The Boeing Company Hybrid ceramic core cold plate
JP4231081B2 (ja) * 2007-01-31 2009-02-25 株式会社東芝 冷却装置
US7942000B2 (en) * 2007-09-25 2011-05-17 Engine-Uity Limited Rotary vane engine system
US8171986B2 (en) * 2008-04-02 2012-05-08 Northrop Grumman Systems Corporation Foam metal heat exchanger system
CN101610664B (zh) * 2008-06-20 2014-05-14 萨帕铝型材(上海)有限公司 液体冷却器及其制造方法
US10775054B2 (en) 2009-03-13 2020-09-15 Treau, Inc. Modular air conditioning system
US20100296249A1 (en) * 2009-05-19 2010-11-25 Beijing AVC Technology Research Center Co., Ltd. Micro passage cold plate device for a liquid cooling radiator
US8081461B2 (en) * 2009-06-25 2011-12-20 International Business Machines Corporation Cooling apparatus with thermally conductive porous material and jet impingement nozzle(s) extending therein
US8720828B2 (en) * 2009-12-03 2014-05-13 The Boeing Company Extended plug cold plate
DE102009058673A1 (de) * 2009-12-16 2011-06-22 Behr GmbH & Co. KG, 70469 Thermoelektrischer Wärmetauscher
CN102655129B (zh) * 2012-02-07 2014-07-16 山东大学 具有莫尔条纹效应的电力电子集成模块微小通道液冷基板
RU2640574C2 (ru) * 2012-04-23 2018-01-10 Конинклейке Филипс Н.В. Интегральный электронный модуль с охлаждающей структурой
US9803938B2 (en) * 2013-07-05 2017-10-31 Toyota Motor Engineering & Manufacturing North America, Inc. Cooling assemblies having porous three dimensional surfaces
WO2016187598A1 (en) 2015-05-20 2016-11-24 Other Lab, Llc Membrane heat exchanger system and method
WO2019075121A1 (en) 2017-10-10 2019-04-18 Other Lab, Llc METHOD AND SYSTEM FOR CONFORMABLE HEAT EXCHANGER
KR102146491B1 (ko) * 2018-08-27 2020-08-21 엘지전자 주식회사 방열판 모듈
US10988375B1 (en) * 2018-10-04 2021-04-27 EngeniusMicro, LLC Systems, methods, and devices for mechanical isolation or mechanical damping of microfabricated inertial sensors
US11253958B2 (en) 2019-01-29 2022-02-22 Treau, Inc. Polymer film heat exchanger sealing system and method
KR102202443B1 (ko) * 2019-03-08 2021-01-13 엘지전자 주식회사 방열판 모듈
KR102202435B1 (ko) * 2019-03-08 2021-01-13 엘지전자 주식회사 방열판 모듈
DE102019204847A1 (de) * 2019-04-04 2020-10-08 Siemens Aktiengesellschaft Vorrichtung zum Entwärmen elektrischer und/oder elektronischer Bauteile
SG10201904782SA (en) 2019-05-27 2020-12-30 Aem Singapore Pte Ltd Cold plate and a method of manufacture thereof
CN114746701A (zh) 2019-09-13 2022-07-12 特劳公司 分体式架构空调单元的窗户安装系统和方法
EP3792967A1 (en) * 2019-09-16 2021-03-17 Nokia Technologies Oy Heat sink
KR102604789B1 (ko) * 2020-11-30 2023-11-21 세메스 주식회사 히터 조립체 및 이를 포함하는 본딩 헤드
US12356585B2 (en) * 2020-12-23 2025-07-08 Abaco Systems, Inc. Cooling module for providing enhanced localized cooling of a heatsink
FR3122547A1 (fr) * 2021-04-29 2022-11-04 Valeo Siemens Eautomotive France Sas Module de refroidissement comprenant une structure de refroidissement pour la dissipation thermique
EP4550409A4 (en) * 2022-06-28 2025-10-29 Jatco Ltd UNIT
CN119487631A (zh) * 2022-06-28 2025-02-18 加特可株式会社 组件
JPWO2024004459A1 (https=) * 2022-07-01 2024-01-04
CN119790720A (zh) 2022-08-29 2025-04-08 三星电子株式会社 包括包围多个集成电路的热管的电子装置
US20230025921A1 (en) * 2022-09-30 2023-01-26 Intel Corporation Cold plates and liquid cooling systems for electronic devices
DE102024205695A1 (de) * 2024-06-20 2025-11-20 Zf Friedrichshafen Ag Kühlelement, Herstellungsverfahren für ein Kühlelement, Halbleitervorrichtung und Verfahren zum Betreiben einer Halbleitervorrichtung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4222434A (en) * 1978-04-27 1980-09-16 Clyde Robert A Ceramic sponge heat-exchanger member
JPS5936827B2 (ja) * 1979-01-12 1984-09-06 日本電信電話株式会社 集積回路素子の冷却装置
JPS60160149A (ja) * 1984-01-26 1985-08-21 Fujitsu Ltd 集積回路装置の冷却方式
JPH06101523B2 (ja) * 1985-03-04 1994-12-12 株式会社日立製作所 集積回路チツプ冷却装置
US4689104A (en) * 1985-06-24 1987-08-25 Lockheed Missiles & Space Company, Inc. Method of bonding two substrate faces utilizing boron-silicon-hydrogen alloy films
JPH02162795A (ja) * 1988-12-16 1990-06-22 Mitsubishi Electric Corp 電子部品冷却装置
JP2724033B2 (ja) * 1990-07-11 1998-03-09 株式会社日立製作所 半導体モジユール
EP0471552B1 (en) * 1990-08-14 1997-07-02 Texas Instruments Incorporated Heat transfer module for ultra high density and silicon on silicon packaging applications
US5381944A (en) * 1993-11-04 1995-01-17 The Regents Of The University Of California Low temperature reactive bonding
US5761037A (en) * 1996-02-12 1998-06-02 International Business Machines Corporation Orientation independent evaporator
US6301100B1 (en) * 1998-06-23 2001-10-09 Citizen Watch Co., Ltd. Portable electronic device having a connector and a cable for connecting with an external device
FR2805036B1 (fr) * 2000-02-10 2002-06-14 Valeo Thermique Moteur Sa Echangeur de chaleur avec joint d'etancheite ameliore, en particulier pour vehicule automobile
DE10253625A1 (de) * 2002-11-15 2004-05-27 Nordson Corp., Westlake Verfahren und Vorrichtung zum Abgeben von Fluid sowie Patrone
US20050083655A1 (en) * 2003-10-15 2005-04-21 Visteon Global Technologies, Inc. Dielectric thermal stack for the cooling of high power electronics
US7044199B2 (en) * 2003-10-20 2006-05-16 Thermal Corp. Porous media cold plate
US20050111188A1 (en) * 2003-11-26 2005-05-26 Anandaroop Bhattacharya Thermal management device for an integrated circuit
US20050224212A1 (en) * 2004-04-02 2005-10-13 Par Technologies, Llc Diffusion bonded wire mesh heat sink
US20060096738A1 (en) * 2004-11-05 2006-05-11 Aavid Thermalloy, Llc Liquid cold plate heat exchanger

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12394690B2 (en) 2022-01-04 2025-08-19 Corning Research & Development Corporation Systems and methods of nano-particle bonding for electronics cooling

Also Published As

Publication number Publication date
JP2006203159A (ja) 2006-08-03
US20060157225A1 (en) 2006-07-20
US20070295014A1 (en) 2007-12-27

Similar Documents

Publication Publication Date Title
JP5021919B2 (ja) 半導体用熱交換器
US7265977B2 (en) Active liquid metal thermal spreader
JP4305406B2 (ja) 冷却構造体
US8210243B2 (en) Structure and apparatus for cooling integrated circuits using cooper microchannels
US7215545B1 (en) Liquid cooled diamond bearing heat sink
US7348665B2 (en) Liquid metal thermal interface for an integrated circuit device
CN102869236B (zh) 用于功率模块的冷却装置及其相关方法
JP2006203159A5 (https=)
US11156409B2 (en) Coolant-cooled heat sinks with internal thermally-conductive fins joined to the cover
CN105576113A (zh) 半导体制冷组件
CN112969349A (zh) 一种多热源散热冷却装置及冷却方法
CN107084550A (zh) 半导体制冷组件及冰淇淋机
CN116454046A (zh) 一种基于多孔层的相变流体射流冲击冷却装置
US20130271918A1 (en) Cold plate with reduced bubble effects
JP5093161B2 (ja) ヒートシンク
JP5764156B2 (ja) 給水機とそれに使用される熱電ヒートポンプ装置
JP2006310363A (ja) パワー半導体装置
US20200375069A1 (en) High pressure heat dissipation apparatus for power semiconductor devices
CN102163789A (zh) 一种微通道式水冷热沉装置及其组装方法
CN109459728B (zh) 一种t/r模块结构及具有该结构的液冷板插件
US20050104200A1 (en) Micropin heat exchanger
CN205542899U (zh) 半导体制冷组件
JP2008235572A (ja) 電子部品冷却装置
JP4453230B2 (ja) 半導体素子用冷却構造体
CN115360154B (zh) 一种模块化散热装置及车载域控制器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080901

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080901

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090206

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110714

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110719

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110831

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120522

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120615

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150622

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees