JP4639231B2 - 集積回路装置のための液体金属熱インターフェース - Google Patents
集積回路装置のための液体金属熱インターフェース Download PDFInfo
- Publication number
- JP4639231B2 JP4639231B2 JP2007525629A JP2007525629A JP4639231B2 JP 4639231 B2 JP4639231 B2 JP 4639231B2 JP 2007525629 A JP2007525629 A JP 2007525629A JP 2007525629 A JP2007525629 A JP 2007525629A JP 4639231 B2 JP4639231 B2 JP 4639231B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- liquid metal
- die
- heat
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01068—Erbium [Er]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Description
Claims (8)
- 表面を有する集積回路ダイと、
複数のフィンを有するヒートシンクを含む熱伝達要素と、
入口および出口を有する流体チャンバと、
前記入口に接続された流体アクチュエータと、
前記出口と前記流体アクチュエータとの間に延在する流体コンジットと、
前記流体チャンバ、前記流体アクチュエータ、および前記流体コンジットによって与えられる流体回路内に配置された所定量の液体金属と、
を含み、
前記流体チャンバの一壁は、前記集積回路ダイの表面によって画定され、
前記流体チャンバの対向壁は、前記熱伝達要素の底面によって画定され、
前記流体アクチュエータは、前記流体回路を経由して前記液体金属を循環させ、
前記流体チャンバを経由して流れる前記液体金属は、前記集積回路ダイの表面全体にわたって移動して前記集積回路ダイから前記熱伝達要素へ熱を伝達する、装置。 - 前記熱伝達要素は前記ヒートシンクより面積の小さい放熱体を含み、前記放熱体は前記流体チャンバと前記ヒートシンクとの間に配置され、前記放熱体の底面は前記流体チャンバの前記対向壁を画定する、請求項1に記載の装置。
- 入口および出口を有する流体チャンバと、
前記入口に接続された流体アクチュエータと、
前記出口と前記流体アクチュエータとの間に延在する流体コンジットと、
前記流体チャンバ、前記流体アクチュエータ、および前記流体コンジットによって与えられる流体回路内に配置された所定量の液体金属と、
を含み、
前記流体チャンバの一壁は、集積回路ダイの表面によって画定され、
前記流体チャンバの対向壁は、複数のフィンを有するヒートシンクを含む熱伝達要素に熱的に接続され、
前記流体アクチュエータは、前記流体回路を経由して前記液体金属を循環させ、
前記流体チャンバを経由して流れる前記液体金属は、前記集積回路ダイの表面全体にわたって移動して前記集積回路ダイから前記熱伝達要素へ熱を伝達する、装置。 - 前記流体回路は、実質的にシールされた閉ループ流体回路を含む、請求項3に記載の装置。
- 前記流体アクチュエータは電磁ポンプを含む、請求項3または4に記載の装置。
- 前記液体金属は、ガリウム、インジウム、水銀、すず、鉛、銅、亜鉛およびビスマスからなる群から選択される1つ以上の金属を含む、請求項3から5のいずれか一項に記載の装置。
- メモリと、
前記メモリに接続された処理装置と、
を含み、
前記処理装置は、
表面を有する集積回路ダイと、
複数のフィンを有するヒートシンクを含む熱伝達要素と、
入口および出口を有する流体チャンバと、
前記入口に接続された流体アクチュエータと、
前記出口と前記流体アクチュエータとの間に延在する流体コンジットと、
前記流体チャンバ、前記流体アクチュエータ、および前記流体コンジットによって与えられる流体回路内に配置された所定量の液体金属と、
を含み、
前記流体チャンバの一壁は、前記集積回路ダイの表面によって画定され、
前記流体チャンバの対向壁は、前記熱伝達要素の底面によって画定され、
前記流体アクチュエータは、前記流体回路を経由して前記液体金属を循環させ、
前記流体チャンバを経由して流れる前記液体金属は、前記集積回路ダイの表面全体にわたって移動して前記集積回路ダイから前記熱伝達要素へ熱を伝達する、
システム。 - 前記熱伝達要素は前記ヒートシンクより面積の小さい放熱体を含み、前記放熱体は前記流体チャンバと前記ヒートシンクとの間に配置され、前記放熱体の底面は前記流体チャンバの前記対向壁を画定する、請求項7に記載のシステム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/917,702 US7348665B2 (en) | 2004-08-13 | 2004-08-13 | Liquid metal thermal interface for an integrated circuit device |
PCT/US2005/025815 WO2006020332A1 (en) | 2004-08-13 | 2005-07-20 | Liquid metal thermal interface for an integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008510301A JP2008510301A (ja) | 2008-04-03 |
JP4639231B2 true JP4639231B2 (ja) | 2011-02-23 |
Family
ID=35276650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007525629A Expired - Fee Related JP4639231B2 (ja) | 2004-08-13 | 2005-07-20 | 集積回路装置のための液体金属熱インターフェース |
Country Status (7)
Country | Link |
---|---|
US (1) | US7348665B2 (ja) |
JP (1) | JP4639231B2 (ja) |
KR (1) | KR100895005B1 (ja) |
CN (1) | CN101006581A (ja) |
DE (1) | DE112005001952B4 (ja) |
TW (1) | TWI303472B (ja) |
WO (1) | WO2006020332A1 (ja) |
Families Citing this family (47)
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US8166645B2 (en) | 2006-08-23 | 2012-05-01 | Rockwell Collins, Inc. | Method for providing near-hermetically coated, thermally protected integrated circuit assemblies |
US8084855B2 (en) * | 2006-08-23 | 2011-12-27 | Rockwell Collins, Inc. | Integrated circuit tampering protection and reverse engineering prevention coatings and methods |
US8581108B1 (en) | 2006-08-23 | 2013-11-12 | Rockwell Collins, Inc. | Method for providing near-hermetically coated integrated circuit assemblies |
US8076185B1 (en) | 2006-08-23 | 2011-12-13 | Rockwell Collins, Inc. | Integrated circuit protection and ruggedization coatings and methods |
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US10607857B2 (en) * | 2017-12-06 | 2020-03-31 | Indium Corporation | Semiconductor device assembly including a thermal interface bond between a semiconductor die and a passive heat exchanger |
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CN113257759A (zh) * | 2020-02-10 | 2021-08-13 | 华为技术有限公司 | 散热器、单板、电子设备及制造方法 |
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2004
- 2004-08-13 US US10/917,702 patent/US7348665B2/en not_active Expired - Fee Related
-
2005
- 2005-07-20 TW TW094124566A patent/TWI303472B/zh not_active IP Right Cessation
- 2005-07-20 WO PCT/US2005/025815 patent/WO2006020332A1/en active Application Filing
- 2005-07-20 KR KR1020077003326A patent/KR100895005B1/ko active IP Right Grant
- 2005-07-20 JP JP2007525629A patent/JP4639231B2/ja not_active Expired - Fee Related
- 2005-07-20 CN CNA2005800275361A patent/CN101006581A/zh active Pending
- 2005-07-20 DE DE112005001952T patent/DE112005001952B4/de not_active Expired - Fee Related
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JPS5599752A (en) * | 1979-01-25 | 1980-07-30 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Structure for fitting ic chip |
JPH0397993U (ja) * | 1990-01-29 | 1991-10-09 | ||
JPH0476944A (ja) * | 1990-07-19 | 1992-03-11 | Oki Electric Ind Co Ltd | 半導体装置の放熱構造とその実装方法 |
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JP2003294885A (ja) * | 2002-03-29 | 2003-10-15 | Mitsui Eng & Shipbuild Co Ltd | 液体金属循環装置 |
Also Published As
Publication number | Publication date |
---|---|
TW200614465A (en) | 2006-05-01 |
DE112005001952B4 (de) | 2012-03-29 |
DE112005001952T5 (de) | 2007-05-31 |
US7348665B2 (en) | 2008-03-25 |
TWI303472B (en) | 2008-11-21 |
US20060033205A1 (en) | 2006-02-16 |
KR20070032814A (ko) | 2007-03-22 |
KR100895005B1 (ko) | 2009-04-27 |
CN101006581A (zh) | 2007-07-25 |
WO2006020332A1 (en) | 2006-02-23 |
JP2008510301A (ja) | 2008-04-03 |
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