JP5021312B2 - 角速度センサ及びその製造方法 - Google Patents

角速度センサ及びその製造方法 Download PDF

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Publication number
JP5021312B2
JP5021312B2 JP2006536699A JP2006536699A JP5021312B2 JP 5021312 B2 JP5021312 B2 JP 5021312B2 JP 2006536699 A JP2006536699 A JP 2006536699A JP 2006536699 A JP2006536699 A JP 2006536699A JP 5021312 B2 JP5021312 B2 JP 5021312B2
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frame
sensor
mass
wafer
etching
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Japanese (ja)
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JP2007509346A (ja
JP2007509346A5 (enExample
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エス． ナシリ、スティーブン
シーガー、ジョセフ
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InvenSense Inc
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InvenSense Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H2009/02346—Anchors for ring resonators
    • H03H2009/02354—Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
JP2006536699A 2003-10-20 2004-10-12 角速度センサ及びその製造方法 Expired - Fee Related JP5021312B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/690,224 2003-10-20
US10/690,224 US6892575B2 (en) 2003-10-20 2003-10-20 X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
PCT/US2004/034431 WO2005043079A2 (en) 2003-10-20 2004-10-12 X-y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

Publications (3)

Publication Number Publication Date
JP2007509346A JP2007509346A (ja) 2007-04-12
JP2007509346A5 JP2007509346A5 (enExample) 2007-05-31
JP5021312B2 true JP5021312B2 (ja) 2012-09-05

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JP2006536699A Expired - Fee Related JP5021312B2 (ja) 2003-10-20 2004-10-12 角速度センサ及びその製造方法

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US (1) US6892575B2 (enExample)
EP (1) EP1676096B1 (enExample)
JP (1) JP5021312B2 (enExample)
TW (1) TWI247896B (enExample)
WO (1) WO2005043079A2 (enExample)

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US6892575B2 (en) 2005-05-17
JP2007509346A (ja) 2007-04-12
EP1676096A4 (en) 2009-11-18
EP1676096A2 (en) 2006-07-05
TWI247896B (en) 2006-01-21
WO2005043079A2 (en) 2005-05-12
TW200526961A (en) 2005-08-16
US20050081633A1 (en) 2005-04-21
WO2005043079A3 (en) 2005-08-11
EP1676096B1 (en) 2017-06-07

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