JP5008448B2 - インクジェット記録ヘッド用の基板の製造方法 - Google Patents

インクジェット記録ヘッド用の基板の製造方法 Download PDF

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Publication number
JP5008448B2
JP5008448B2 JP2007111992A JP2007111992A JP5008448B2 JP 5008448 B2 JP5008448 B2 JP 5008448B2 JP 2007111992 A JP2007111992 A JP 2007111992A JP 2007111992 A JP2007111992 A JP 2007111992A JP 5008448 B2 JP5008448 B2 JP 5008448B2
Authority
JP
Japan
Prior art keywords
layer
substrate
metal
plating
recording head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007111992A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008265164A (ja
JP2008265164A5 (enExample
Inventor
智 伊部
博和 小室
琢也 初井
圭介 岸本
裕登 小宮山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007111992A priority Critical patent/JP5008448B2/ja
Priority to US12/105,931 priority patent/US8182072B2/en
Publication of JP2008265164A publication Critical patent/JP2008265164A/ja
Publication of JP2008265164A5 publication Critical patent/JP2008265164A5/ja
Application granted granted Critical
Publication of JP5008448B2 publication Critical patent/JP5008448B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1643—Manufacturing processes thin film formation thin film formation by plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/18—Electrical connection established using vias

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2007111992A 2007-04-20 2007-04-20 インクジェット記録ヘッド用の基板の製造方法 Expired - Fee Related JP5008448B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007111992A JP5008448B2 (ja) 2007-04-20 2007-04-20 インクジェット記録ヘッド用の基板の製造方法
US12/105,931 US8182072B2 (en) 2007-04-20 2008-04-18 Substrate for inkjet printing head and method for manufacturing the substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007111992A JP5008448B2 (ja) 2007-04-20 2007-04-20 インクジェット記録ヘッド用の基板の製造方法

Publications (3)

Publication Number Publication Date
JP2008265164A JP2008265164A (ja) 2008-11-06
JP2008265164A5 JP2008265164A5 (enExample) 2010-06-03
JP5008448B2 true JP5008448B2 (ja) 2012-08-22

Family

ID=39871764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007111992A Expired - Fee Related JP5008448B2 (ja) 2007-04-20 2007-04-20 インクジェット記録ヘッド用の基板の製造方法

Country Status (2)

Country Link
US (1) US8182072B2 (enExample)
JP (1) JP5008448B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5596962B2 (ja) * 2009-11-18 2014-09-24 キヤノン株式会社 液体吐出ヘッド用基板の製造方法及び液体吐出ヘッドの製造方法
JP2013033843A (ja) * 2011-08-02 2013-02-14 Sony Corp 回路基板、回路基板の製造方法、表示装置および電子機器
EP3099497B1 (en) * 2014-01-29 2020-01-22 Hewlett-Packard Development Company, L.P. Thermal ink jet printhead
JP7094693B2 (ja) * 2017-11-27 2022-07-04 キヤノン株式会社 液体吐出ヘッドの製造方法及び液体吐出ヘッド

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3705652B2 (ja) * 1996-06-28 2005-10-12 富士写真フイルム株式会社 インクジェット記録装置およびその製造方法
JP4146933B2 (ja) 1998-06-03 2008-09-10 キヤノン株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法
JP4654494B2 (ja) * 2000-08-07 2011-03-23 ソニー株式会社 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
JP4604337B2 (ja) * 2000-11-07 2011-01-05 ソニー株式会社 プリンタ、プリンタヘッド及びプリンタヘッドの製造方法
JP2003127367A (ja) * 2001-10-26 2003-05-08 Fuji Xerox Co Ltd インクジェット式プリンタヘッドの圧電アクチュエータおよびその製造方法
JP4617145B2 (ja) * 2003-12-16 2011-01-19 キヤノン株式会社 液体吐出ヘッド用基板の製造方法
US7697020B2 (en) * 2004-11-04 2010-04-13 Rohm Co., Ltd. Thermal print head and method for manufacturing same
JP4630680B2 (ja) * 2005-01-31 2011-02-09 キヤノン株式会社 半導体素子の製造方法およびインクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
US8182072B2 (en) 2012-05-22
JP2008265164A (ja) 2008-11-06
US20080259130A1 (en) 2008-10-23

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