JP4993730B2 - 蒸着用アルミニウム箔材の製造方法 - Google Patents
蒸着用アルミニウム箔材の製造方法 Download PDFInfo
- Publication number
- JP4993730B2 JP4993730B2 JP2007250689A JP2007250689A JP4993730B2 JP 4993730 B2 JP4993730 B2 JP 4993730B2 JP 2007250689 A JP2007250689 A JP 2007250689A JP 2007250689 A JP2007250689 A JP 2007250689A JP 4993730 B2 JP4993730 B2 JP 4993730B2
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- aluminum foil
- foil material
- aluminum
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims description 39
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 39
- 239000000463 material Substances 0.000 title claims description 38
- 239000011888 foil Substances 0.000 title claims description 33
- 238000007740 vapor deposition Methods 0.000 title claims description 27
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 238000012360 testing method Methods 0.000 description 11
- 239000003921 oil Substances 0.000 description 8
- 239000010731 rolling oil Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
- Physical Vapour Deposition (AREA)
Description
アルミニウム純度99.85%のアルミニウム地金を用いて、常法に従い、溶解、鋳造、面削、熱間圧延、冷間圧延を行い、厚さ30μmのアルミニウム箔を製造した。得られたアルミニウム箔を試験材とし、これら試験材について、表1に示す条件で加熱(焼鈍)処理を実施し、以下の密着性評価試験に供した。
なお、上記蒸着手法は、前記特許文献1の段落0025の実施例に記載される手法、すなわち、0.002トル〜0.005トルの圧力の窒素と2×10−4トル〜5×10−4トルの圧力の酸素との無水雰囲気内で300℃の温度に保持されたアルミニウム箔上に、熱抵抗性蒸着によって蒸着した、に基づくものである。
Claims (1)
- アルミニウム蒸着層を形成するための厚さ10〜50μmのアルミニウム(アルミニウム合金を含む、以下同じ)箔材を製造する方法であって、100〜350℃の温度で1〜60秒間加熱することにより、箔材表面のハンターホール法で測定した酸化皮膜厚さを0.6V以下、箔材表面に残留している油分を600mg/m2以下とすることを特徴とする蒸着用アルミニウム箔材の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007250689A JP4993730B2 (ja) | 2007-09-27 | 2007-09-27 | 蒸着用アルミニウム箔材の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007250689A JP4993730B2 (ja) | 2007-09-27 | 2007-09-27 | 蒸着用アルミニウム箔材の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009079275A JP2009079275A (ja) | 2009-04-16 |
JP4993730B2 true JP4993730B2 (ja) | 2012-08-08 |
Family
ID=40654252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007250689A Expired - Fee Related JP4993730B2 (ja) | 2007-09-27 | 2007-09-27 | 蒸着用アルミニウム箔材の製造方法 |
Country Status (1)
Country | Link |
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JP (1) | JP4993730B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8654509B2 (en) | 2010-02-15 | 2014-02-18 | Panasonic Corporation | Electrode foil, process for producing same, and capacitor using electrode foil |
JP5921951B2 (ja) * | 2012-05-15 | 2016-05-24 | 三菱アルミニウム株式会社 | 電解コンデンサ用アルミニウム箔の製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0442913A (ja) * | 1990-06-06 | 1992-02-13 | Elna Co Ltd | 電解コンデンサ用電極箔の製造方法 |
JP2003119585A (ja) * | 2001-10-15 | 2003-04-23 | Nippon Foil Mfg Co Ltd | 電解コンデンサ電極用アルミニウム箔の製造方法 |
JP2003297694A (ja) * | 2002-03-29 | 2003-10-17 | Nippon Chemicon Corp | 電解コンデンサ |
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2007
- 2007-09-27 JP JP2007250689A patent/JP4993730B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2009079275A (ja) | 2009-04-16 |
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