JP4991277B2 - 液晶表示装置の製造方法 - Google Patents
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Description
前記非晶質シリコン薄膜トランジスタ技術は1979年英国のLeComberなどによって概念が確立されて1986年に3以上(液晶携帯用テレビとして実用化されて最近は50)の大面積薄膜トランジスタ液晶表示装置が開発された。特に、前記非晶質シリコン薄膜トランジスタは低温工程が可能で低価の絶縁基板を使用し得るため、活発に利用されている。
図2Iに示すように、第3絶縁膜115cが形成された基板110の全面に第3導電膜を形成した後、該第3導電膜を選択的にエッチングして第3コンタクトホール140cを介して画素部ドレイン電極123と電気的に接続する画素電極118を形成する(第9マスク工程)。
図4Eに示すように、これら回路部第1ソース領域及び回路部ドレイン領域205P3S、205P3Dを有する基板上に第4感光膜パターン237を形成する。ここで、第4感光膜パターン237は前記画素部でそれぞれの画素部ゲート電極及び共通ラインが形成される部位、前記回路部のnチャネルTFT領域で回路部第2ゲート電極が形成される部位、そして前記pチャネルTFT領域の全体を覆うように形成される。
Claims (3)
- 画素部TFT領域及び回路部がそれぞれ定義され、前記回路部はnチャネルTFT領域とpチャネルTFT領域とに区分されている基板を準備し、
前記基板上に同一レベルで形成され、前記画素部TFT領域、前記nチャネルTFT領域及びpチャネルTFT領域を覆うそれぞれの第1、第2、及び第3活性層を形成し、
前記第1、第2、及び第3活性層が形成された基板にゲート絶縁膜を形成し、
前記第3活性層上部のゲート絶縁膜上に回路部第1ゲート電極を形成し、
該回路部第1ゲート電極両側の第3活性層に回路部第1ソース領域及び回路部第1ドレイン領域を同時に形成し、
前記第1、第2活性層上にそれぞれ画素部ゲート電極及び回路部第2ゲート電極を形成し、
前記画素部TFT領域の画素部ゲート電極の両側の第1活性層に画素部ソース領域及び画素部ドレイン領域を形成し、これと同時に前記回路部の第2ゲート電極両側の第2活性層に回路部第2ソース領域及び回路部第2ドレイン領域を形成し、
該基板上に前記画素部ソース領域及び画素部ドレイン領域、前記回路部第2ソース領域及び回路部第2ドレイン領域、及び前記回路部第1ソース領域及び回路部第1ドレイン領域をそれぞれ露出させる第1、第2、第3、第4、第5、及び第6コンタクトホールを有する保護膜を形成し、
前記保護膜上と前記第1、第2、第3、第4、第5、及び第6コンタクトホールの内部壁面及び下面にバリア金属膜を形成し、
前記保護膜上と前記第1、第2、第3、第4、第5、及び第6コンタクトホールの内部に感光膜を形成し、
前記感光膜をアッシングして前記保護膜上部のバリア金属膜を露出させ、
前記露出したバリア金属膜をパターニングして前記第1、第2、第3、第4、第5、及び第6コンタクトホールの内部壁面及び下面にバリア金属パターンを形成し、
前記保護膜上と前記第1、第2、第3、第4、第5、及び第6コンタクトホールのバリア金属パターンの上部に透明導電膜を形成した後、前記保護膜上の透明導電膜の上及び当該透明導電膜が形成された前記第1、第2、第3、第4、第5、及び第6コンタクトホールの内部に金属膜を形成し、
前記金属膜の上部に絶縁膜を形成し、前記絶値膜が形成された基板上に感光膜を積層してスリットマスクにより感光膜パターンを形成し、前記感光膜パターンにより前記透明導電膜、金属膜及び絶縁膜をエッチングした後、前記感光膜パターンをアッシングして露出した前記絶縁膜及び金属膜を前記アッシングされた感光膜パターンによりエッチングし、前記第1、第3、及び第5コンタクトホールのバリア金属パターンの上部及び前記保護膜上の一部領域に透明な画素部ソース電極パターン、透明な回路部第2ソース電極パターン、及び透明な回路部第1ソース電極パターンを形成し、前記保護膜上の画素部ソース電極パターン、回路部第2ソース電極パターン、及び回路部第1ソース電極パターンの上部と前記第1、第3、及び第5コンタクトホールの内部にそれぞれ画素部ソース電極、回路部第2ソース電極、及び回路部第1ソース電極を形成し、これと同時に前記第2、第4、及び第6コンタクトホールのバリア金属パターンの上部及び前記保護膜上の一部領域に透明な画素部ドレイン電極パターン、透明な回路部第2ドレイン電極パターン、及び透明な回路部第1ドレイン電極パターンを形成し、前記保護膜上の画素部ドレイン電極パターン、回路部第2ドレイン電極パターン、及び回路部第1ドレイン電極パターンの上部と前記第2、第4、及び第6コンタクトホールの内部にそれぞれ画素部ドレイン電極、回路部第2ドレイン電極、及び回路部第1ドレイン電極を形成し、画素部ソース電極、画素部ドレイン電極、回路部第2ソース電極、回路部第2ドレイン電極、回路部第1ソース電極、回路部第1ドレイン電極上にそれぞれ画素部第1絶縁パターン、画素部第2絶縁パターン、回路部第1絶縁パターン、回路部第2絶縁パターン、回路部第3絶縁パターン、回路部第4絶縁パターンを形成し、
前記バリア金属パターンは、前記画素部ソース領域、画素部ドレイン領域、回路部第1ソース領域、回路部第1ドレイン領域、回路部第2ソース領域、及び回路部第2ドレイン領域と接触して、前記画素部ソース領域、画素部ドレイン領域、回路部第1ソース領域、回路部第1ドレイン領域、回路部第2ソース領域、及び回路部第2ドレイン領域の活性層と前記画素部ソース電極パターン、画素部ドレイン電極パターン、回路部第1ソース電極パターン、回路部第1ドレイン電極パターン、回路部第2ソース電極パターン、及び回路部第2ドレイン電極パターン間のコンタクト抵抗を改善させる
ことを特徴とする液晶表示装置の製造方法。 - 前記バリア金属パターンの形成は、前記保護膜上に前記第1ないし第6コンタクトホールを覆うようにバリア金属膜を形成し、該バリア金属膜を有する基板上に感光膜を塗布し、該感光膜をアッシングして前記バリア金属膜を露出するが、前記第1ないし第6コンタクトホールの内部に残留する感光膜パターンを形成し、該感光膜パターンにより露出したバリア金属膜をエッチングし、前記感光膜パターンを除去することを特徴とする請求項1に記載の液晶表示装置の製造方法。
- 前記バリア金属膜はモリブデン膜を300〜700Åの厚さに形成することを特徴とする請求項2に記載の液晶表示装置の製造方法。
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US20090311494A1 (en) | 2008-06-17 | 2009-12-17 | Fujifilm Corporation | Relief printing plate precursor for laser engraving, relief printing plate, and process for producing relief printing plate |
JP5566713B2 (ja) | 2009-02-05 | 2014-08-06 | 富士フイルム株式会社 | レーザー彫刻用レリーフ印刷版原版、レリーフ印刷版及びレリーフ印刷版の製造方法 |
JP2011063012A (ja) | 2009-08-19 | 2011-03-31 | Fujifilm Corp | レリーフ印刷版の製版方法及びレリーフ印刷版製版用リンス液 |
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JP2624687B2 (ja) * | 1987-06-19 | 1997-06-25 | 株式会社日立製作所 | 薄膜能動素子アレイの製造方法 |
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JPH11109406A (ja) * | 1997-09-30 | 1999-04-23 | Sanyo Electric Co Ltd | 表示装置とその製造方法 |
JP2000058852A (ja) * | 1998-08-17 | 2000-02-25 | Sanyo Electric Co Ltd | 薄膜トランジスタ及びそれを用いた表示装置 |
JP2002094064A (ja) * | 2000-09-11 | 2002-03-29 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタ、薄膜トランジスタの製造方法、液晶表示装置およびエレクトロルミネッセンス表示装置 |
JP2003186041A (ja) * | 2001-12-17 | 2003-07-03 | Casio Comput Co Ltd | 液晶表示素子 |
JP2004022900A (ja) * | 2002-06-18 | 2004-01-22 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
JP2005215278A (ja) * | 2004-01-29 | 2005-08-11 | Quanta Display Japan Inc | 液晶表示装置とその製造方法 |
JP2005266475A (ja) * | 2004-03-19 | 2005-09-29 | Mitsubishi Electric Corp | 半透過型液晶表示装置 |
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2006
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