JP4985973B2 - 密封構造 - Google Patents

密封構造 Download PDF

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Publication number
JP4985973B2
JP4985973B2 JP2007319476A JP2007319476A JP4985973B2 JP 4985973 B2 JP4985973 B2 JP 4985973B2 JP 2007319476 A JP2007319476 A JP 2007319476A JP 2007319476 A JP2007319476 A JP 2007319476A JP 4985973 B2 JP4985973 B2 JP 4985973B2
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JP
Japan
Prior art keywords
groove
mounting groove
seal
spacer
shoulder
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Expired - Fee Related
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JP2007319476A
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English (en)
Japanese (ja)
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JP2009144735A5 (enExample
JP2009144735A (ja
Inventor
善行 石垣
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Nok Corp
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Nok Corp
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Priority to JP2007319476A priority Critical patent/JP4985973B2/ja
Publication of JP2009144735A publication Critical patent/JP2009144735A/ja
Publication of JP2009144735A5 publication Critical patent/JP2009144735A5/ja
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JP2007319476A 2007-12-11 2007-12-11 密封構造 Expired - Fee Related JP4985973B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007319476A JP4985973B2 (ja) 2007-12-11 2007-12-11 密封構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007319476A JP4985973B2 (ja) 2007-12-11 2007-12-11 密封構造

Publications (3)

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JP2009144735A JP2009144735A (ja) 2009-07-02
JP2009144735A5 JP2009144735A5 (enExample) 2010-12-09
JP4985973B2 true JP4985973B2 (ja) 2012-07-25

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Family Applications (1)

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JP2007319476A Expired - Fee Related JP4985973B2 (ja) 2007-12-11 2007-12-11 密封構造

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JP (1) JP4985973B2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110234914A (zh) * 2017-01-31 2019-09-13 株式会社华尔卡 复合密封件
KR102002341B1 (ko) * 2019-02-25 2019-10-01 주식회사 테시스 에어공급장치

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9869392B2 (en) 2011-10-20 2018-01-16 Lam Research Corporation Edge seal for lower electrode assembly
US9859142B2 (en) 2011-10-20 2018-01-02 Lam Research Corporation Edge seal for lower electrode assembly
US10090211B2 (en) * 2013-12-26 2018-10-02 Lam Research Corporation Edge seal for lower electrode assembly
JP2016153115A (ja) * 2015-02-20 2016-08-25 三菱化学株式会社 分離膜モジュール及び管状分離膜接続構造体
JP6254981B2 (ja) * 2015-08-12 2017-12-27 ファナック株式会社 レーザ発振器の真空容器
JP6734918B2 (ja) * 2016-04-28 2020-08-05 ギガフォトン株式会社 タンク、ターゲット生成装置、及び、極端紫外光生成装置
WO2018105094A1 (ja) 2016-12-08 2018-06-14 株式会社ハーモニック・ドライブ・システムズ Ｏリングを用いたシール構造
KR102178594B1 (ko) * 2019-02-26 2020-11-18 무진전자 주식회사 기판 건조 챔버
JP7205722B2 (ja) * 2019-03-20 2023-01-17 株式会社オンダ製作所 管継手
CN113645794B (zh) * 2021-07-15 2023-01-06 北京遥测技术研究所 一种基于高度差的双层回旋式密封结构及方法
CN114396476B (zh) * 2022-01-19 2025-09-26 深圳市矩阵多元科技有限公司 O型圈真空密封结构及真空设备
JP7780387B2 (ja) * 2022-05-25 2025-12-04 東京エレクトロン株式会社 シール構造、チャンバ、基板処理装置及びシール材の取り付け方法
CN116206938A (zh) * 2022-08-03 2023-06-02 拓荆科技股份有限公司 一种密封环及其制备方法
CN120845392A (zh) * 2025-09-25 2025-10-28 江苏芬奇工业设备制造有限公司 一种卧式耐腐泵泵壳

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01193463A (ja) * 1988-01-29 1989-08-03 Matsushita Electric Ind Co Ltd 真空加工装置の真空シール部構造
JPH0438781A (ja) * 1990-06-01 1992-02-07 Canon Inc 画像ファイリング方式
JP3323928B2 (ja) * 1997-09-08 2002-09-09 東京エレクトロン株式会社 プラズマ処理装置
JP4689221B2 (ja) * 2003-11-10 2011-05-25 日本バルカー工業株式会社 複合シール材
JP4711046B2 (ja) * 2004-11-30 2011-06-29 Ｎｏｋ株式会社 密封構造
JP4625746B2 (ja) * 2005-10-06 2011-02-02 三菱電線工業株式会社 シール材
JP2007173420A (ja) * 2005-12-21 2007-07-05 Kayaba Ind Co Ltd 平面密封機構、プラズマ遮断シール
JP4936730B2 (ja) * 2006-01-16 2012-05-23 東京エレクトロン株式会社 減圧容器および減圧処理装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110234914A (zh) * 2017-01-31 2019-09-13 株式会社华尔卡 复合密封件
US11231108B2 (en) 2017-01-31 2022-01-25 Valqua, Ltd. Composite seal member
TWI770111B (zh) * 2017-01-31 2022-07-11 日商華爾卡股份有限公司 複合密封材
KR102002341B1 (ko) * 2019-02-25 2019-10-01 주식회사 테시스 에어공급장치

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Publication number Publication date
JP2009144735A (ja) 2009-07-02

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