JP4973959B2 - プラズマ発生体及び反応装置 - Google Patents
プラズマ発生体及び反応装置 Download PDFInfo
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- C01B3/34—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents
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Description
図1および図2に示されるように、プラズマ発生体1は、第1〜第3放電空間5A〜5C(以下、単に「放電空間5」といい、これらを区別しないことがある。)が形成された基体3と、プラズマ発生のために放電空間5において放電を行う第1〜第4電極7A〜7D(図2)とを備えている。
図6は、第2の実施形態を説明する図である。図6(a)は、第1電極層215Aの平面図である。図6(b)は、第2電極層215Bの平面図である。図6(c)は、第1電極層215A及び第2電極層215B全体の、電極対の対向方向(図4の電極対9参照)への投影面積SA215Tを説明する図である。図6(d)は、第1電極層215Aの、電極対の対向方向への投影面積SA215Aを説明する図である。図6(e)は、第2電極層215Bの、電極対の対向方向への投影面積SA215Bを説明する図である。
図7は、第3の実施形態を説明する図である。図7(a)は、第1電極層315Aの平面図である。図7(b)は、第2電極層315Bの平面図である。図7(c)は、第1電極層315A及び第2電極層315Bからなる電極307の断面図である。図7(d)は、第1電極層315A及び第2電極層315B全体の、電極対の対向方向(図4の電極対9参照)への投影面積SA315Tを説明する図である。図7(e)は、第1電極層315Aの、電極対の対向方向への投影面積SA315Aを説明する図である。図7(f)は、第2電極層315Bの、電極対の対向方向への投影面積SA315Bを説明する図である。
図8は、本発明の第4の実施形態に係る反応装置31の構造的な構成を示す概念図である。
Claims (10)
- 放電空間が設けられた絶縁基体と、
前記絶縁基体に前記放電空間を挟んで設けられた電極対と、
を有し、
前記電極対の一方の電極は、前記電極対の対向方向において互いに異なる位置に設けられた複数の電極層を有し、
前記各電極層は、前記対向方向に見て、前記各電極層に隙間が生じるように互いに異なる位置に配置された複数の部分電極を有し、
前記対向方向に見て、前記複数の電極層全体としては前記複数の部分電極間に隙間が生じないように、前記各電極層の前記複数の部分電極は、他の電極層の前記複数の部分電極間に位置し、
前記各電極層において、前記複数の部分電極は、前記対向方向に見て、所定の方向において互いに離間しており、前記所定の方向に直交する方向に長い長尺状である
プラズマ発生体。 - 前記絶縁基体は、前記対向方向に見て、前記直交する方向に長い長尺状である
請求項1に記載のプラズマ発生体。 - 前記対向方向に延び、前記複数の電極層を接続する接続導体を有し、
前記複数の電極層は、前記対向方向に見て、前記接続導体の位置においてのみ互いに重なる
請求項1又は2に記載のプラズマ発生体。 - 放電空間が設けられた絶縁基体と、
前記絶縁基体に前記放電空間を挟んで設けられた電極対と、
を有し、
前記電極対の一方の電極は、
前記電極対の対向方向において互いに異なる位置に設けられた複数の電極層と、
前記対向方向に延び、前記複数の電極層を接続する複数の接続導体と、
を有し、
前記各電極層は、前記対向方向に見て、前記各電極層に隙間が生じるように互いに異なる位置に配置された複数の部分電極を有し、
前記対向方向に見て、前記複数の電極層全体としては前記複数の部分電極間に隙間が生じないように、前記各電極層の前記複数の部分電極は、他の電極層の前記複数の部分電極間に位置し、
前記各電極層の前記複数の部分電極は、各々に対応して設けられた前記複数の接続導体により他の電極層に接続され、当該他の電極層を介して互いに電気的に接続されている
プラズマ発生体。 - 前記各電極層において、前記複数の部分電極は、前記対向方向に見て、複数列に配列され、各列において互いに離間しているとともに、隣接する列の複数の部分電極間に位置している
請求項4に記載のプラズマ発生体。 - 前記複数の部分電極それぞれは、前記対向方向に見て、前記複数の部分電極の列に平行な辺及び直交する辺を有する矩形状である
請求項5に記載のプラズマ発生体。 - 前記複数の電極層は、前記対向方向に見て、前記接続導体の位置においてのみ互いに重なる
請求項4〜6のいずれか1項に記載のプラズマ発生体。 - 前記絶縁基体は、複数の絶縁層の積層体であり、
前記複数の電極層は、前記複数の絶縁層間に設けられている
請求項1〜7のいずれか1項に記載のプラズマ発生体。 - 放電空間が設けられた絶縁基体と、前記絶縁基体に前記放電空間を挟んで設けられた電極対とを有するプラズマ発生体と、
前記放電空間に被処理流体を供給可能な供給部と、
前記放電空間でプラズマを発生させて前記被処理流体を化学変化させるように前記電極に電圧を印加可能な電極制御部と
を有し、
前記電極対の一方の電極は、前記電極対の対向方向において互いに異なる位置に設けられた複数の電極層を有し、
前記各電極層は、前記対向方向に見て、前記各電極層に隙間が生じるように互いに異なる位置に配置された複数の部分電極を有し、
前記対向方向に見て、前記複数の電極層全体としては前記複数の部分電極間に隙間が生じないように、前記各電極層の前記複数の部分電極は、他の電極層の前記複数の部分電極間に位置し、
前記各電極層において、前記複数の部分電極は、前記対向方向に見て、所定の方向において互いに離間しており、前記所定の方向に直交する方向に長い長尺状である
反応装置。 - 放電空間が設けられた絶縁基体と、前記絶縁基体に前記放電空間を挟んで設けられた電極対とを有するプラズマ発生体と、
前記放電空間に被処理流体を供給可能な供給部と、
前記放電空間でプラズマを発生させて前記被処理流体を化学変化させるように前記電極に電圧を印加可能な電極制御部と
を有し、
前記電極対の一方の電極は、
前記電極対の対向方向において互いに異なる位置に設けられた複数の電極層と、
前記対向方向に延び、前記複数の電極層を接続する接続導体と、
を有し、
前記各電極層は、前記対向方向に見て、前記各電極層に隙間が生じるように互いに異なる位置に配置された複数の部分電極を有し、
前記対向方向に見て、前記複数の電極層全体としては前記複数の部分電極間に隙間が生じないように、前記各電極層の前記複数の部分電極は、他の電極層の前記複数の部分電極間に位置し、
前記各電極層の前記複数の部分電極は、各々に対応して設けられた前記複数の接続導体により他の電極層に接続され、当該他の電極層を介して互いに電気的に接続されている
反応装置。
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