JP4951699B2 - 太陽電池モジュール及びその製造方法 - Google Patents
太陽電池モジュール及びその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 239000000758 substrate Substances 0.000 claims description 66
- 238000006243 chemical reaction Methods 0.000 claims description 56
- 239000010410 layer Substances 0.000 claims description 30
- 238000010248 power generation Methods 0.000 claims description 20
- 238000005422 blasting Methods 0.000 claims description 15
- 239000011241 protective layer Substances 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 10
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 10
- 239000002245 particle Substances 0.000 description 9
- 230000001678 irradiating effect Effects 0.000 description 7
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 239000010408 film Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022466—Electrodes made of transparent conductive layers, e.g. TCO, ITO layers
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic System
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0465—PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising particular structures for the electrical interconnection of adjacent PV cells in the module
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Description
図1(a)〜図1(f)に、第1の実施の形態における太陽電池モジュール200の製造工程を示す。図1(a)〜図1(f)では、太陽電池モジュール200の製造工程の各ステップにおける平面図及び断面図を模式的に示している。断面図は、平面図におけるラインC−Cに沿った断面図とラインD−Dに沿った断面図を示している。
図4(a)〜図4(f)に、第2の実施の形態における太陽電池モジュール300の製造工程を示す。図4(a)〜図4(f)では、太陽電池モジュール300の製造工程の各ステップにおける平面図及び断面図を模式的に示している。断面図は、平面図におけるラインE−Eに沿った断面図とラインF−Fに沿った断面図を示している。なお、第1の実施の形態と同様の構成及びステップについては説明を省略する。
Claims (5)
- 基板上に第1の電極、発電層、第2の電極を順に積層し、光電変換素子を複数直列に接続した太陽電池モジュールの製造方法であって、
前記基板上に前記第1の電極を形成する第1の工程と、
前記第1の電極の一部を第1の幅で除去した後、当該除去された領域にブラスト加工を施して前記基板の表面に凹凸を形成する第2の工程と、
前記基板上に前記発電層及び前記第2の電極を順に積層する工程を含む第3の工程と、
前記第1の電極が除去された領域に重なる領域において、前記第1の幅より狭い第2の幅で前記発電層及び前記第2の電極を除去する第4の工程と、
を含むことを特徴とする太陽電池モジュールの製造方法。 - 請求項1に記載の太陽電池モジュールの製造方法であって、
前記第2の工程では、前記ブラスト加工により前記第1の電極の一部の除去を行うことを特徴とする太陽電池モジュールの製造方法。 - 基板上に第1の電極、発電層、第2の電極を順に積層した光電変換素子を複数直列に接続した太陽電池モジュールであって、
前記光電変換素子の直列接続方向に沿って前記第1の電極を除去した複数の溝に挟まれ前記第1の電極が残された島を含み、前記島の少なくとも一部に前記発電層及び前記第2の電極が積層されている第1のスリットと、
前記第1のスリットが形成された領域内において前記第1の電極、前記発電層及び前記第2の電極が除去され、前記基板に達する第2のスリットと、
が形成されていることを特徴とする太陽電池モジュール。 - 請求項3に記載の太陽電池モジュールであって、
前記第2の電極を含む前記基板上に積層された保護層をさらに備え、
前記第2のスリットの幅は、前記溝の幅よりも広く形成されていることを特徴とする太陽電池モジュール。 - 基板上に第1の電極、発電層、第2の電極を順に積層し、光電変換素子を複数直列に接続した太陽電池モジュールの製造方法であって、
前記基板上に前記第1の電極を形成する第1の工程と、
前記光電変換素子が直列接続される方向に沿って前記第1の電極を除去して複数の溝を形成することによって、前記溝に挟まれ前記第1の電極の島が残された第1のスリットを形成する第2の工程と、
前記島の少なくとも一部を含む前記第1の電極上に前記発電層及び前記第2の電極を積層する第3の工程と、
前記第1のスリットが形成された領域内において前記第1の電極、前記発電層及び前記第2の電極を除去して前記基板に達する第2のスリットを形成する第4の工程と、
を含むことを特徴とする太陽電池モジュールの製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010170554A JP4951699B2 (ja) | 2009-08-19 | 2010-07-29 | 太陽電池モジュール及びその製造方法 |
PCT/JP2010/063843 WO2011021615A1 (ja) | 2009-08-19 | 2010-08-17 | 太陽電池モジュール及びその製造方法 |
US13/389,573 US20120145224A1 (en) | 2009-08-19 | 2010-08-17 | Solar cell module and method for manufacturing same |
Applications Claiming Priority (5)
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JP2009190249 | 2009-08-19 | ||
JP2009190249 | 2009-08-19 | ||
JP2009190688 | 2009-08-20 | ||
JP2009190688 | 2009-08-20 | ||
JP2010170554A JP4951699B2 (ja) | 2009-08-19 | 2010-07-29 | 太陽電池モジュール及びその製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011259974A Division JP2012044226A (ja) | 2009-08-19 | 2011-11-29 | 太陽電池モジュール |
Publications (3)
Publication Number | Publication Date |
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JP2011066395A JP2011066395A (ja) | 2011-03-31 |
JP2011066395A5 JP2011066395A5 (ja) | 2012-01-19 |
JP4951699B2 true JP4951699B2 (ja) | 2012-06-13 |
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JP2010170554A Expired - Fee Related JP4951699B2 (ja) | 2009-08-19 | 2010-07-29 | 太陽電池モジュール及びその製造方法 |
Country Status (3)
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US (1) | US20120145224A1 (ja) |
JP (1) | JP4951699B2 (ja) |
WO (1) | WO2011021615A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2013051257A (ja) * | 2011-08-30 | 2013-03-14 | Kyocera Corp | 光電変換装置 |
Family Cites Families (1)
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JP4340246B2 (ja) * | 2005-03-07 | 2009-10-07 | シャープ株式会社 | 薄膜太陽電池およびその製造方法 |
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2010
- 2010-07-29 JP JP2010170554A patent/JP4951699B2/ja not_active Expired - Fee Related
- 2010-08-17 US US13/389,573 patent/US20120145224A1/en not_active Abandoned
- 2010-08-17 WO PCT/JP2010/063843 patent/WO2011021615A1/ja active Application Filing
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Publication number | Publication date |
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JP2011066395A (ja) | 2011-03-31 |
WO2011021615A1 (ja) | 2011-02-24 |
US20120145224A1 (en) | 2012-06-14 |
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