JP4946133B2 - ヒューズ素子切断手順の決定方法 - Google Patents
ヒューズ素子切断手順の決定方法 Download PDFInfo
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- JP4946133B2 JP4946133B2 JP2006094490A JP2006094490A JP4946133B2 JP 4946133 B2 JP4946133 B2 JP 4946133B2 JP 2006094490 A JP2006094490 A JP 2006094490A JP 2006094490 A JP2006094490 A JP 2006094490A JP 4946133 B2 JP4946133 B2 JP 4946133B2
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- fuse element
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- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 23
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 21
- 229920005591 polysilicon Polymers 0.000 description 21
- 239000003870 refractory metal Substances 0.000 description 18
- 238000002955 isolation Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 12
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
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- 229910052796 boron Inorganic materials 0.000 description 5
- -1 phosphorus ions Chemical class 0.000 description 5
- 238000004151 rapid thermal annealing Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000005468 ion implantation Methods 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 239000011574 phosphorus Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008646 thermal stress Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
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- 238000005259 measurement Methods 0.000 description 3
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- 239000002356 single layer Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 229910010282 TiON Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 238000012790 confirmation Methods 0.000 description 2
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- 238000005530 etching Methods 0.000 description 2
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- 239000000463 material Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910000789 Aluminium-silicon alloy Inorganic materials 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910016006 MoSi Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910008484 TiSi Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
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- 230000015556 catabolic process Effects 0.000 description 1
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- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
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- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
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- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Description
シランと窒素との流量比:20:80
ガス流量:200sccm
圧力:30Pa
基板温度:600℃
成長時の基板温度を上記温度よりも低くすると、アモルファスシリコンが堆積する。アモルファスシリコンが堆積した後に基板を加熱して、多結晶化させてもよい。また、アモルファスシリコン層をそのまま用いてもよい。ポリシリコン層16の厚さの好適な範囲は20〜1000nmであり、より好適な範囲は80〜200nmである。ポリシリコン層16に、不純物濃度が1×1020cm−3になるように、リン(P)を一様に拡散させる。拡散温度は、例えば800〜900℃とする。なお、拡散工程前に、ポリシリコン層16の表面に形成されている自然酸化膜をバッファードフッ酸等で除去することが好ましい。
Claims (1)
- (a)半導体基板上に形成された評価用ヒューズ素子に、該評価用ヒューズ素子が切断されるまで電気パルスを複数回印加する工程と、
(b)前記工程aで前記評価用ヒューズ素子に与えられた電気エネルギの総量を求める工程と、
(c)前記工程bで求められた電気エネルギの総量に基づいて、前記評価用ヒューズ素子と同一の切断特性を持ったヒューズ素子を切断するための電気エネルギの総量に相当する切断閾値を決定する工程と、
(d)切断すべきヒューズ素子に印加する電気パルスの電圧及び電流の少なくとも一方、パルス幅、及びパルス数を、切断すべきヒューズ素子に投入される電気エネルギの総量が前記切断閾値以上になるように決定する工程と
を有し、前記複数回印加される電気パルスの間隔は先に印加されたパルスによって上昇した温度が元に戻る時間に設定されるヒューズ素子切断手順の決定方法。
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JP2006094490A JP4946133B2 (ja) | 2005-03-30 | 2006-03-30 | ヒューズ素子切断手順の決定方法 |
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JP2006094490A JP4946133B2 (ja) | 2005-03-30 | 2006-03-30 | ヒューズ素子切断手順の決定方法 |
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JP2006310829A JP2006310829A (ja) | 2006-11-09 |
JP2006310829A5 JP2006310829A5 (ja) | 2009-05-07 |
JP4946133B2 true JP4946133B2 (ja) | 2012-06-06 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4871767B2 (ja) * | 2007-03-20 | 2012-02-08 | 日本電信電話株式会社 | ナノギャップ電極の製造方法 |
US7405590B1 (en) * | 2007-07-18 | 2008-07-29 | Kabushiki Kaisha Toshiba | Systems and methods for controlling a fuse programming current in an IC |
JP5435713B2 (ja) | 2009-07-23 | 2014-03-05 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法、製造プログラム、及び半導体装置 |
JP2011091447A (ja) * | 2011-02-07 | 2011-05-06 | Renesas Electronics Corp | ヒューズの溶断方法 |
JP2013037749A (ja) | 2011-08-09 | 2013-02-21 | Fujitsu Ltd | 書込回路、半導体集積回路、及び書込方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6246496A (ja) * | 1985-08-23 | 1987-02-28 | Sony Corp | 固定記憶装置の書き込み方法 |
JP3354033B2 (ja) * | 1994-06-17 | 2002-12-09 | 株式会社豊田中央研究所 | 半導体装置及びその製造方法 |
JP3104843B2 (ja) * | 1994-08-19 | 2000-10-30 | 川崎製鉄株式会社 | アンチヒューズ型半導体集積回路装置 |
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