JP4939787B2 - ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 - Google Patents

ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 Download PDF

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JP4939787B2
JP4939787B2 JP2005289970A JP2005289970A JP4939787B2 JP 4939787 B2 JP4939787 B2 JP 4939787B2 JP 2005289970 A JP2005289970 A JP 2005289970A JP 2005289970 A JP2005289970 A JP 2005289970A JP 4939787 B2 JP4939787 B2 JP 4939787B2
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laser beam
laser
optical waveguide
deflector
deflecting body
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JP2006135308A (ja
JP2006135308A5 (enExample
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幸一郎 田中
洋正 大石
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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JP2005289970A 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 Expired - Fee Related JP4939787B2 (ja)

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JP2005289970A JP4939787B2 (ja) 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法

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JP2004290968 2004-10-04
JP2004290968 2004-10-04
JP2005289970A JP4939787B2 (ja) 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法

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JP2006135308A JP2006135308A (ja) 2006-05-25
JP2006135308A5 JP2006135308A5 (enExample) 2008-11-06
JP4939787B2 true JP4939787B2 (ja) 2012-05-30

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8237085B2 (en) * 2006-11-17 2012-08-07 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, and laser irradiation method
CN113640817A (zh) * 2012-03-26 2021-11-12 螳螂慧视科技有限公司 三维照相机及其投影仪

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* Cited by examiner, † Cited by third party
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JPS63163405A (ja) * 1986-12-26 1988-07-06 Matsushita Electric Ind Co Ltd 光フアイバーケーブル
JPH02166782A (ja) * 1988-12-21 1990-06-27 Hitachi Cable Ltd 中空導波路の入力結合部構造
JP2002141302A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp レーザアニーリング用レーザ光学系とこれを用いたレーザアニーリング装置
JP2002139697A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp 複数レーザビームを用いたレーザ光学系とレーザアニーリング装置
JP4090374B2 (ja) * 2003-03-20 2008-05-28 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法

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