JP2006135308A5 - - Google Patents

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Publication number
JP2006135308A5
JP2006135308A5 JP2005289970A JP2005289970A JP2006135308A5 JP 2006135308 A5 JP2006135308 A5 JP 2006135308A5 JP 2005289970 A JP2005289970 A JP 2005289970A JP 2005289970 A JP2005289970 A JP 2005289970A JP 2006135308 A5 JP2006135308 A5 JP 2006135308A5
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JP
Japan
Prior art keywords
laser beam
deflector
laser
optical axis
light pipe
Prior art date
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Granted
Application number
JP2005289970A
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English (en)
Japanese (ja)
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JP2006135308A (ja
JP4939787B2 (ja
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Priority to JP2005289970A priority Critical patent/JP4939787B2/ja
Priority claimed from JP2005289970A external-priority patent/JP4939787B2/ja
Publication of JP2006135308A publication Critical patent/JP2006135308A/ja
Publication of JP2006135308A5 publication Critical patent/JP2006135308A5/ja
Application granted granted Critical
Publication of JP4939787B2 publication Critical patent/JP4939787B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005289970A 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法 Expired - Fee Related JP4939787B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005289970A JP4939787B2 (ja) 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004290968 2004-10-04
JP2004290968 2004-10-04
JP2005289970A JP4939787B2 (ja) 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法

Publications (3)

Publication Number Publication Date
JP2006135308A JP2006135308A (ja) 2006-05-25
JP2006135308A5 true JP2006135308A5 (enExample) 2008-11-06
JP4939787B2 JP4939787B2 (ja) 2012-05-30

Family

ID=36728532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005289970A Expired - Fee Related JP4939787B2 (ja) 2004-10-04 2005-10-03 ビームホモジナイザ、レーザ照射装置、及び半導体装置の作製方法

Country Status (1)

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JP (1) JP4939787B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8237085B2 (en) * 2006-11-17 2012-08-07 Semiconductor Energy Laboratory Co., Ltd. Beam homogenizer, laser irradiation apparatus, and laser irradiation method
CN104471348A (zh) * 2012-03-26 2015-03-25 曼蒂斯影像有限公司 三维照相机及其投影仪

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63163405A (ja) * 1986-12-26 1988-07-06 Matsushita Electric Ind Co Ltd 光フアイバーケーブル
JPH02166782A (ja) * 1988-12-21 1990-06-27 Hitachi Cable Ltd 中空導波路の入力結合部構造
JP2002139697A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp 複数レーザビームを用いたレーザ光学系とレーザアニーリング装置
JP2002141302A (ja) * 2000-11-02 2002-05-17 Mitsubishi Electric Corp レーザアニーリング用レーザ光学系とこれを用いたレーザアニーリング装置
JP4090374B2 (ja) * 2003-03-20 2008-05-28 株式会社日立製作所 ナノプリント装置、及び微細構造転写方法

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