JP4920975B2 - ターボ型真空ポンプ - Google Patents

ターボ型真空ポンプ Download PDF

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Publication number
JP4920975B2
JP4920975B2 JP2006009650A JP2006009650A JP4920975B2 JP 4920975 B2 JP4920975 B2 JP 4920975B2 JP 2006009650 A JP2006009650 A JP 2006009650A JP 2006009650 A JP2006009650 A JP 2006009650A JP 4920975 B2 JP4920975 B2 JP 4920975B2
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JP
Japan
Prior art keywords
blade
centrifugal
turbine blade
stage
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2006009650A
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English (en)
Japanese (ja)
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JP2007192076A5 (enExample
JP2007192076A (ja
Inventor
裕之 川崎
信一 関口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2006009650A priority Critical patent/JP4920975B2/ja
Priority to US11/411,896 priority patent/US7645116B2/en
Publication of JP2007192076A publication Critical patent/JP2007192076A/ja
Publication of JP2007192076A5 publication Critical patent/JP2007192076A5/ja
Priority to US12/320,356 priority patent/US7938619B2/en
Application granted granted Critical
Publication of JP4920975B2 publication Critical patent/JP4920975B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Non-Positive Displacement Air Blowers (AREA)
JP2006009650A 2005-04-28 2006-01-18 ターボ型真空ポンプ Expired - Lifetime JP4920975B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006009650A JP4920975B2 (ja) 2006-01-18 2006-01-18 ターボ型真空ポンプ
US11/411,896 US7645116B2 (en) 2005-04-28 2006-04-27 Turbo vacuum pump
US12/320,356 US7938619B2 (en) 2005-04-28 2009-01-23 Turbo vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006009650A JP4920975B2 (ja) 2006-01-18 2006-01-18 ターボ型真空ポンプ

Publications (3)

Publication Number Publication Date
JP2007192076A JP2007192076A (ja) 2007-08-02
JP2007192076A5 JP2007192076A5 (enExample) 2008-12-25
JP4920975B2 true JP4920975B2 (ja) 2012-04-18

Family

ID=38447981

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006009650A Expired - Lifetime JP4920975B2 (ja) 2005-04-28 2006-01-18 ターボ型真空ポンプ

Country Status (1)

Country Link
JP (1) JP4920975B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5087418B2 (ja) 2008-02-05 2012-12-05 株式会社荏原製作所 ターボ真空ポンプ
JP4934089B2 (ja) * 2008-04-09 2012-05-16 株式会社荏原製作所 ターボ分子ポンプ
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (enExample) * 1973-03-30 1974-10-25 Cit Alcatel
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JP2741863B2 (ja) * 1988-04-15 1998-04-22 株式会社日立製作所 ターボ真空ポンプ
JPH0866803A (ja) * 1994-08-25 1996-03-12 Toshiba Mach Co Ltd 工作機械の主軸
JPH08232956A (ja) * 1995-03-01 1996-09-10 Daikin Ind Ltd 回転軸の支持構造

Also Published As

Publication number Publication date
JP2007192076A (ja) 2007-08-02

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