JP4918473B2 - 高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ - Google Patents
高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ Download PDFInfo
- Publication number
- JP4918473B2 JP4918473B2 JP2007323420A JP2007323420A JP4918473B2 JP 4918473 B2 JP4918473 B2 JP 4918473B2 JP 2007323420 A JP2007323420 A JP 2007323420A JP 2007323420 A JP2007323420 A JP 2007323420A JP 4918473 B2 JP4918473 B2 JP 4918473B2
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- purity
- quartz glass
- pulling
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 115
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 38
- 239000010703 silicon Substances 0.000 title claims abstract description 38
- 239000013078 crystal Substances 0.000 title claims description 71
- 238000002425 crystallisation Methods 0.000 claims abstract description 46
- 230000008025 crystallization Effects 0.000 claims abstract description 46
- 239000011521 glass Substances 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 9
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 claims description 6
- 238000000465 moulding Methods 0.000 claims description 6
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 claims description 4
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 claims description 4
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 claims description 4
- 239000000292 calcium oxide Substances 0.000 claims description 4
- 229910000019 calcium carbonate Inorganic materials 0.000 claims description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000002994 raw material Substances 0.000 abstract description 14
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 2
- 239000010453 quartz Substances 0.000 description 74
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 25
- 229910002804 graphite Inorganic materials 0.000 description 24
- 239000010439 graphite Substances 0.000 description 24
- 239000000843 powder Substances 0.000 description 13
- 230000007547 defect Effects 0.000 description 10
- 235000012431 wafers Nutrition 0.000 description 6
- 230000001965 increasing effect Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 238000010891 electric arc Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 230000004913 activation Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
- C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
Description
また、上記の単結晶インゴットの製造において、同じく図4に示されるように、シリコン融液は石英ルツボ内を単結晶インゴット底部からルツボ底部に下がり、ルツボ底部から内面に沿って下から上に向って流れ、単結晶インゴット底部に向う対流によって移動し、この間前記シリコン融液とルツボ内面(SiO2)とが反応してSiOガスが発生するが、この発生SiOガスは前記シリコン融液の流れに乗ってシリコン融液面に移動し、ここで減圧Arガス雰囲気中に放出されて、除去され、引上げ中の単結晶インゴット内に取込まれてピンホール欠陥とならないように引上げ条件を調整しながら製造されている。
(a)石英ルツボの単結晶インゴット引上げ中の強度は、ルツボ開口上端部の強度によって決まり、したがって、前記ルツボ開口上端部に高強度が確保できれば、すなわちルツボ開口上端部だけが結晶組織で、その他の部分(実質的にシリコン融液面のインゴット引上げ開始ライン以下)が非晶質組織であっても石英ルツボは単結晶インゴット引上げ中も高強度を保持するので、石英ルツボの変形やゆがみを防止することができること。
以上(a)〜(d)に示される研究結果を得たのである。
上記石英ルツボ本体のルツボ開口上端から上方に伸長して、Al2O3、CaO、BaO、CaCO3、およびBaCO3のうちの1種または2種以上からなる結晶化促進剤を高純度石英ガラスとの合量に占める割合で、0.01〜1質量%配合した高純度石英ガラスのリング状切り捨て部を設けた溶融成形の石英ルツボ素材から前記リング状切り捨て部を切断除去してなる石英ルツボにして、前記石英ルツボにおけるルツボ開口上端とシリコン融液面のインゴット引上げ開始ラインとの間、またはこの間のルツボ開口上端から40容量%以上の部分を、前記石英ルツボ素材の溶融成形時における前記リング状切り捨て部に配合した結晶化促進剤の作用で、前記結晶化促進剤を含有しない結晶組織としてなる、高強度を有する大径単結晶インゴット引上げ用石英ルツボ。
また、単結晶インゴット引上げ後の本発明石英ルツボ1〜18および従来石英ルツボ1〜18について、同じくルツボ開口上端からの結晶化率を光学顕微鏡を用いて観察し、ルツボ開口上端からシリコン融液面のインゴット引き上げ開始ラインまでの結晶化率を100容量%とし、これに対する割合で、ルツボ5個の平均値として表1,2(インゴット引上げ後の欄)に示した。
なお、単結晶インゴット引上げ後の本発明石英ルツボ1〜18および従来石英ルツボ1〜18について、ルツボ開口上端の内径を内周に沿って10箇所測定したところ、いずれのルツボも最大値と最小値の差が1mm以下の範囲内にあり、変形のきわめて少ないものであった。
Claims (1)
- 気泡含有率:1〜10%にして、純度:99.99%以上の高純度非晶質石英ガラスの外側層と、気泡含有率:0.6%以下にして、純度:99.99%以上の高純度非晶質石英ガラスの内側層の2重積層構造を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボにおいて、
上記高純度石英ガラスルツボ本体のルツボ開口上端から上方に伸長して、酸化アルミニウム、酸化カルシウム、酸化バリウム、炭酸カルシウム、および炭酸バリウムのうちの1種または2種以上からなる結晶化促進剤を高純度石英ガラスとの合量に占める割合で、0.01〜1質量%配合した高純度石英ガラスのリング状切り捨て部を設けた溶融成形の高純度石英ガラスルツボ素材から前記リング状切り捨て部を切断除去してなる高純度石英ガラスルツボにして、前記高純度石英ガラスルツボにおけるルツボ開口上端とシリコン融液面のインゴット引上げ開始ラインとの間、またはこの間のルツボ開口上端から40容量%以上の部分を、前記高純度石英ガラスルツボ素材の溶融成形時における前記リング状切り捨て部に配合した結晶化促進剤の作用で、前記結晶化促進剤を含有しない結晶組織としたこと、
を特徴とする高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007323420A JP4918473B2 (ja) | 2007-12-14 | 2007-12-14 | 高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ |
US12/325,019 US8888915B2 (en) | 2007-12-14 | 2008-11-28 | High-purity vitreous silica crucible used for pulling large-diameter single-crystal silicon ingot |
AT08020769T ATE499328T1 (de) | 2007-12-14 | 2008-11-28 | HOCHREINER QUARZGLASTIEGEL ZUM ZIEHEN EINES EINKRISTALL-SILICIUMBLOCKS MIT GROßEM DURCHMESSER SOWIE HERSTELLUNGSVERFAHREN |
DE602008005099T DE602008005099D1 (de) | 2007-12-14 | 2008-11-28 | Hochreiner Quarzglastiegel zum Ziehen eines Einkristall-Siliciumblocks mit großem Durchmesser sowie Herstellungsverfahren |
EP08020769A EP2070882B1 (en) | 2007-12-14 | 2008-11-28 | High-purity vitreous silica crucible used for pulling large-diameter single-crystal silicon ingot and manufacturing method |
KR1020080119680A KR101104673B1 (ko) | 2007-12-14 | 2008-11-28 | 대경 실리콘 단결정 잉곳 인상용 고순도 석영 유리 도가니 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007323420A JP4918473B2 (ja) | 2007-12-14 | 2007-12-14 | 高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009143770A JP2009143770A (ja) | 2009-07-02 |
JP4918473B2 true JP4918473B2 (ja) | 2012-04-18 |
Family
ID=40445424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007323420A Active JP4918473B2 (ja) | 2007-12-14 | 2007-12-14 | 高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ |
Country Status (6)
Country | Link |
---|---|
US (1) | US8888915B2 (ja) |
EP (1) | EP2070882B1 (ja) |
JP (1) | JP4918473B2 (ja) |
KR (1) | KR101104673B1 (ja) |
AT (1) | ATE499328T1 (ja) |
DE (1) | DE602008005099D1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5234526B2 (ja) * | 2008-02-29 | 2013-07-10 | 株式会社Sumco | シリコン単結晶引上げ用石英ルツボ及びその製造方法 |
JP5102744B2 (ja) * | 2008-10-31 | 2012-12-19 | ジャパンスーパークォーツ株式会社 | 石英ルツボ製造用モールド |
JP4922355B2 (ja) * | 2009-07-15 | 2012-04-25 | 信越石英株式会社 | シリカ容器及びその製造方法 |
JP5397857B2 (ja) * | 2009-10-20 | 2014-01-22 | 株式会社Sumco | 石英ガラスルツボの製造方法および製造装置 |
US20110129784A1 (en) * | 2009-11-30 | 2011-06-02 | James Crawford Bange | Low thermal expansion doped fused silica crucibles |
JP4951057B2 (ja) * | 2009-12-10 | 2012-06-13 | 信越石英株式会社 | シリカ容器及びその製造方法 |
JP5610570B2 (ja) * | 2010-07-20 | 2014-10-22 | 株式会社Sumco | シリカガラスルツボ、シリコンインゴットの製造方法 |
JP5467418B2 (ja) * | 2010-12-01 | 2014-04-09 | 株式会社Sumco | 造粒シリカ粉の製造方法、シリカガラスルツボの製造方法 |
JP5781303B2 (ja) | 2010-12-31 | 2015-09-16 | 株式会社Sumco | シリカガラスルツボ製造方法およびシリカガラスルツボ製造装置 |
US9216923B2 (en) * | 2011-07-25 | 2015-12-22 | Shin-Etsu Quartz Products Co., Ltd. | Metal and graphite mold and method of making a crucible |
CN109477239A (zh) * | 2016-09-23 | 2019-03-15 | 胜高股份有限公司 | 石英玻璃坩埚及其制造方法以及使用了石英玻璃坩埚的单晶硅的制造方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0788269B2 (ja) * | 1987-03-10 | 1995-09-27 | 東芝セラミツクス株式会社 | シリコン単結晶引上げ用ルツボ |
JPH0729871B2 (ja) * | 1987-12-03 | 1995-04-05 | 信越半導体 株式会社 | 単結晶引き上げ用石英るつぼ |
JP2824883B2 (ja) * | 1992-07-31 | 1998-11-18 | 信越石英株式会社 | 石英ガラスルツボの製造方法 |
JP3123696B2 (ja) * | 1993-12-17 | 2001-01-15 | 東芝セラミックス株式会社 | 石英ガラス坩堝の製造方法 |
JP4285788B2 (ja) * | 1996-03-14 | 2009-06-24 | 信越石英株式会社 | 単結晶引き上げ用大口径石英るつぼの製造方法 |
JPH11171687A (ja) | 1997-12-12 | 1999-06-29 | Sumitomo Sitix Corp | 単結晶の酸素濃度制御方法 |
TWI221486B (en) * | 1998-07-31 | 2004-10-01 | Shinetsu Handotai Kk | Quartz glass crucible for pulling silicon single crystal and production process for such |
WO2002014587A1 (fr) * | 2000-08-15 | 2002-02-21 | Shin-Etsu Handotai Co., Ltd. | Creuset en quartz et procede de fabrication d'un monocristal |
JP4444559B2 (ja) * | 2002-10-09 | 2010-03-31 | ジャパンスーパークォーツ株式会社 | 石英ガラスルツボの強化方法とシリコン単結晶の引き上げ方法 |
JP2005145732A (ja) | 2003-11-12 | 2005-06-09 | Kuramoto Seisakusho Co Ltd | 結晶化石英ルツボ |
JP2005255488A (ja) | 2004-03-12 | 2005-09-22 | Komatsu Electronic Metals Co Ltd | 石英るつぼおよび石英るつぼを用いた半導体単結晶製造方法 |
JP2006124235A (ja) | 2004-10-29 | 2006-05-18 | Japan Siper Quarts Corp | 石英ガラスルツボとその製造方法および用途 |
JP4753640B2 (ja) * | 2005-06-28 | 2011-08-24 | 南条装備工業株式会社 | 表皮材の切断装置 |
JP4994647B2 (ja) * | 2005-11-30 | 2012-08-08 | ジャパンスーパークォーツ株式会社 | 結晶化し易い石英ガラス部材とその用途 |
JP2007323420A (ja) | 2006-06-01 | 2007-12-13 | Canon Inc | 会議履歴検索装置 |
US7716948B2 (en) * | 2006-12-18 | 2010-05-18 | Heraeus Shin-Etsu America, Inc. | Crucible having a doped upper wall portion and method for making the same |
-
2007
- 2007-12-14 JP JP2007323420A patent/JP4918473B2/ja active Active
-
2008
- 2008-11-28 DE DE602008005099T patent/DE602008005099D1/de active Active
- 2008-11-28 EP EP08020769A patent/EP2070882B1/en active Active
- 2008-11-28 US US12/325,019 patent/US8888915B2/en active Active
- 2008-11-28 KR KR1020080119680A patent/KR101104673B1/ko active IP Right Grant
- 2008-11-28 AT AT08020769T patent/ATE499328T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP2070882A1 (en) | 2009-06-17 |
JP2009143770A (ja) | 2009-07-02 |
ATE499328T1 (de) | 2011-03-15 |
US8888915B2 (en) | 2014-11-18 |
EP2070882B1 (en) | 2011-02-23 |
KR101104673B1 (ko) | 2012-01-13 |
KR20090064302A (ko) | 2009-06-18 |
DE602008005099D1 (de) | 2011-04-07 |
US20090173276A1 (en) | 2009-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4918473B2 (ja) | 高強度を有する大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ | |
EP2251460B1 (en) | Silica crucible for pulling silicon single crystal | |
JP4799536B2 (ja) | 大径のシリコン単結晶インゴット中のピンホール欠陥の低減を可能とする大径シリコン単結晶インゴット引上げ用高純度石英ガラスルツボ | |
JP5069663B2 (ja) | 多層構造を有する石英ガラスルツボ | |
TWI238204B (en) | Silica crucibles and methods for making the same | |
JP5462423B1 (ja) | 単結晶シリコン引き上げ用シリカ容器及びその製造方法 | |
JP4781020B2 (ja) | シリコン単結晶引き上げ用石英ガラスルツボおよびシリコン単結晶引き上げ用石英ガラスルツボの製造方法 | |
JP4975012B2 (ja) | シリコン単結晶引き上げ用石英ガラスルツボ及びその製造方法 | |
US8951346B2 (en) | Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof | |
US8105514B2 (en) | Mold for producing silica crucible | |
TWI435960B (zh) | 氧化矽玻璃坩堝以及矽錠的製造方法 | |
JP2010280567A (ja) | シリカガラスルツボの製造方法 | |
JP4428529B2 (ja) | 石英ルツボ | |
JP6324837B2 (ja) | 単結晶シリコン引き上げ用石英ガラスるつぼの製造方法 | |
JPWO2013171955A1 (ja) | 単結晶シリコン引き上げ用シリカ容器及びその製造方法 | |
JP2007091532A (ja) | シリカガラスルツボ | |
KR102243264B1 (ko) | 실리카 유리 도가니 및 그의 제조 방법 | |
JP2005060152A (ja) | 石英ルツボの製造方法及び石英ルツボ並びにこれを用いたシリコン単結晶の製造方法 | |
JP7280160B2 (ja) | シリカガラスルツボ | |
KR20200077546A (ko) | 실리카 유리 도가니 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100615 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110720 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110728 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110909 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120123 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120130 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150203 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4918473 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150203 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150203 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150203 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |