JP4902272B2 - 蛍光ｘ線分析装置 - Google Patents

蛍光ｘ線分析装置 Download PDF

Info

Publication number
JP4902272B2
JP4902272B2 JP2006156821A JP2006156821A JP4902272B2 JP 4902272 B2 JP4902272 B2 JP 4902272B2 JP 2006156821 A JP2006156821 A JP 2006156821A JP 2006156821 A JP2006156821 A JP 2006156821A JP 4902272 B2 JP4902272 B2 JP 4902272B2
Authority
JP
Japan
Prior art keywords
ray
sample
detector
rays
polarizing filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006156821A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007327756A5 (enExample
JP2007327756A (ja
Inventor
則生 笹山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Science Corp
Original Assignee
SII NanoTechnology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SII NanoTechnology Inc filed Critical SII NanoTechnology Inc
Priority to JP2006156821A priority Critical patent/JP4902272B2/ja
Priority to US11/805,664 priority patent/US7471763B2/en
Priority to EP07252275A priority patent/EP1865309B1/en
Priority to CN200710109917.5A priority patent/CN101093201B/zh
Priority to DE602007006249T priority patent/DE602007006249D1/de
Publication of JP2007327756A publication Critical patent/JP2007327756A/ja
Publication of JP2007327756A5 publication Critical patent/JP2007327756A5/ja
Application granted granted Critical
Publication of JP4902272B2 publication Critical patent/JP4902272B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2006156821A 2006-06-06 2006-06-06 蛍光ｘ線分析装置 Expired - Fee Related JP4902272B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006156821A JP4902272B2 (ja) 2006-06-06 2006-06-06 蛍光ｘ線分析装置
US11/805,664 US7471763B2 (en) 2006-06-06 2007-05-24 Fluorescent X-ray analysis apparatus
EP07252275A EP1865309B1 (en) 2006-06-06 2007-06-06 Fluorescent X-ray analysis apparatus
CN200710109917.5A CN101093201B (zh) 2006-06-06 2007-06-06 荧光x射线分析设备
DE602007006249T DE602007006249D1 (de) 2006-06-06 2007-06-06 Vorrichtung zur Analyse fluoreszenter Röntgenstrahlen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006156821A JP4902272B2 (ja) 2006-06-06 2006-06-06 蛍光ｘ線分析装置

Publications (3)

Publication Number Publication Date
JP2007327756A JP2007327756A (ja) 2007-12-20
JP2007327756A5 JP2007327756A5 (enExample) 2009-04-23
JP4902272B2 true JP4902272B2 (ja) 2012-03-21

Family

ID=38283646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006156821A Expired - Fee Related JP4902272B2 (ja) 2006-06-06 2006-06-06 蛍光ｘ線分析装置

Country Status (5)

Country Link
US (1) US7471763B2 (enExample)
EP (1) EP1865309B1 (enExample)
JP (1) JP4902272B2 (enExample)
CN (1) CN101093201B (enExample)
DE (1) DE602007006249D1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102460135A (zh) * 2009-06-03 2012-05-16 特莫尼托恩分析仪器股份有限公司 检测器位于聚焦元件内部的x射线系统和方法
US8439520B2 (en) * 2010-10-21 2013-05-14 Rambus Delaware Llc Color-configurable lighting assembly
CN102841108B (zh) * 2012-03-09 2014-12-17 深圳市华唯计量技术开发有限公司 一种偏振二次靶能量色散型x射线荧光光谱仪
WO2017100475A1 (en) * 2015-12-09 2017-06-15 Integrated-X, Inc. Systems and methods for inspection using electromagnetic radiation

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3944822A (en) * 1974-09-30 1976-03-16 The United States Of America As Represented By The Administrator Of The U. S. Environmental Protection Agency Polarization excitation device for X-ray fluorescence analysis
SU1045094A1 (ru) 1982-05-04 1983-09-30 Научно-исследовательский институт ядерной физики при Томском политехническом институте им.С.М.Кирова Устройство дл рентгенофлуоресцентного анализа вещества
JPH088314A (ja) * 1994-06-24 1996-01-12 Toshiba Corp 半導体分析装置
FI102697B (fi) 1997-06-26 1999-01-29 Metorex Internat Oy Polarisoitua herätesäteilyä hyödyntävä röntgenfluoresenssimittausjärje stely ja röntgenputki
JP3013827B2 (ja) * 1997-12-12 2000-02-28 日本電気株式会社 Ｘ線偏光分析器及びそれを用いたｘ線偏光分析方法
DE19826294C1 (de) * 1998-06-12 2000-02-10 Glukomeditech Ag Polarimetrisches Verfahren zur Bestimmung der (Haupt-)Schwingungsebene polarisierten Lichts auf etwa 0,1m DEG und miniaturisierbare Vorrichtung zu seiner Durchführung
JP3498689B2 (ja) * 2000-07-31 2004-02-16 株式会社島津製作所 モノクロ線源励起用モノクロメータ及び蛍光ｘ線分析装置
JP2004004125A (ja) * 2003-08-22 2004-01-08 Shimadzu Corp 蛍光ｘ線分析装置
JP4754957B2 (ja) * 2005-12-08 2011-08-24 株式会社リガク 多元素同時型蛍光ｘ線分析装置

Also Published As

Publication number Publication date
CN101093201A (zh) 2007-12-26
DE602007006249D1 (de) 2010-06-17
US7471763B2 (en) 2008-12-30
JP2007327756A (ja) 2007-12-20
EP1865309B1 (en) 2010-05-05
US20070280414A1 (en) 2007-12-06
EP1865309A1 (en) 2007-12-12
CN101093201B (zh) 2011-08-03

Similar Documents

Publication Publication Date Title
CN206531787U (zh) 一种测量样品中微量元素荧光吸收谱的系统
US20100310041A1 (en) X-Ray System and Methods with Detector Interior to Focusing Element
US20080056442A1 (en) X-ray analysis apparatus
US8471203B2 (en) Particle-beam microscope
US9958404B2 (en) X-ray analyzing system for x-ray scattering analysis
JP3284198B2 (ja) 蛍光ｘ線分析装置
WO2020199689A1 (zh) 一种毛细管聚焦的微束x射线衍射仪
WO2021112080A1 (ja) 蛍光ｘ線分析装置
JP2004333131A (ja) 全反射蛍光ｘａｆｓ測定装置
JP4902272B2 (ja) 蛍光ｘ線分析装置
JP2009507328A (ja) リフレクトロン
JP2001235437A (ja) 全反射蛍光ｘ線分析装置
JP2002189004A (ja) Ｘ線分析装置
CN106908465B (zh) 一种测量含硅或锆元素的物质中磷元素荧光吸收谱的方法及系统
JP4715345B2 (ja) Ｘ線分析装置
JP6352616B2 (ja) Ｘ線計測装置
JP2018132491A (ja) 検査装置、検査システム、および検査方法
CN103245445A (zh) 一种应力仪
US11035806B2 (en) Devices and systems for improved collection efficiency and resolution of wavelength dispersive spectrometry
US20110182404A1 (en) Collimator with an adjustable focal length
CN104897705B (zh) 一种识别液体种类的x射线衍射谱仪与方法
JP4639971B2 (ja) Ｘ線分析装置
CN204556541U (zh) 一种用于X荧光光谱分析仪的Cu元素弯晶分光器
CN103748483A (zh) 包含百叶窗的背景减少系统
JP4478792B2 (ja) 背面設置型ｘ線検出方法

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090225

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090225

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20091105

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20091113

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20110412

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110609

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111227

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111228

R150 Certificate of patent or registration of utility model

Ref document number: 4902272

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150113

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees