JP4889199B2 - 低誘電率層間絶縁膜のドライエッチング方法 - Google Patents
低誘電率層間絶縁膜のドライエッチング方法 Download PDFInfo
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- JP4889199B2 JP4889199B2 JP2003375225A JP2003375225A JP4889199B2 JP 4889199 B2 JP4889199 B2 JP 4889199B2 JP 2003375225 A JP2003375225 A JP 2003375225A JP 2003375225 A JP2003375225 A JP 2003375225A JP 4889199 B2 JP4889199 B2 JP 4889199B2
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- gas
- dielectric constant
- interlayer insulating
- low dielectric
- insulating film
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- 239000011229 interlayer Substances 0.000 title claims description 39
- 238000000034 method Methods 0.000 title claims description 37
- 238000001312 dry etching Methods 0.000 title claims description 20
- 239000007789 gas Substances 0.000 claims description 132
- 238000005530 etching Methods 0.000 claims description 90
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 27
- 229910052757 nitrogen Inorganic materials 0.000 claims description 23
- 229920006254 polymer film Polymers 0.000 claims description 23
- 238000001228 spectrum Methods 0.000 claims description 20
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 14
- 229920002239 polyacrylonitrile Polymers 0.000 claims description 13
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 10
- 229920000642 polymer Polymers 0.000 claims description 9
- 229930195733 hydrocarbon Natural products 0.000 claims description 6
- 150000002430 hydrocarbons Chemical class 0.000 claims description 6
- 239000004215 Carbon black (E152) Substances 0.000 claims description 5
- 239000012528 membrane Substances 0.000 claims description 5
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000002798 spectrophotometry method Methods 0.000 claims description 2
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 17
- 239000001301 oxygen Substances 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 15
- 229910052799 carbon Inorganic materials 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 239000000758 substrate Substances 0.000 description 11
- 239000010410 layer Substances 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 125000002560 nitrile group Chemical group 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 229910052731 fluorine Inorganic materials 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000007654 immersion Methods 0.000 description 6
- 239000000047 product Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000002305 electric material Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 4
- 238000000026 X-ray photoelectron spectrum Methods 0.000 description 4
- 239000000654 additive Substances 0.000 description 4
- 230000000996 additive effect Effects 0.000 description 4
- 125000001153 fluoro group Chemical group F* 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010790 dilution Methods 0.000 description 2
- 239000012895 dilution Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000007348 radical reaction Methods 0.000 description 2
- 244000132059 Carica parviflora Species 0.000 description 1
- 235000014653 Carica parviflora Nutrition 0.000 description 1
- 101100107923 Vitis labrusca AMAT gene Proteins 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000005513 bias potential Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000003085 diluting agent Substances 0.000 description 1
- 238000003113 dilution method Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
上記のようにして形成されるフッ素化ポリアクリロニトリルは、例えば、−CF=N−C=N−結合を有する上記構造式で示され得る。
以下、実施例および比較例により、本発明をさらに詳細に説明する。
なお、上記エッチングガスの流量は、C3F8:25sccm、アルゴン:205sccm、N2:25sccm(約9.8%)のような比率で用いた。
3 プラズマ発生部 4 基板電極部
S 基板
Claims (9)
- SiOCH又はSiOC系材料からなる低誘電率層間絶縁膜をエッチングし、孔、溝を微細加工するドライエッチング方法において、
エッチングガスとしてフッ化炭素ガスとこのフッ化炭素ガスと同量の窒素原子含有ガスと希ガスとを含む混合ガスを用い、この混合ガスを0.1〜1.5Paの圧力下で導入して、エッチング加工表面に−CF=N−C=N−結合を有するポリマー膜を形成しながら微細加工することを特徴とする低誘電率層間絶縁膜のドライエッチング方法。 - 前記フッ化炭素ガスがC3F8ガス、窒素原子含有ガスがN2ガス、及び、前記希ガスがアルゴンであることを特徴とする請求項1記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記ポリマー膜がフッ素化ポリアクリロニトリルからなる膜であることを特徴とする請求項1または2に記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記フッ素化ポリアクリロニトリルが、フーリエ変換赤外分光光度計で測定したスペクトルにおいて、1250cm−1付近にC−Fのピーク、1350cm−1付近にC−Nのピーク、1750cm−1付近にC=C/C=Nのピークを有するポリマーであることを特徴とする請求項3記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記低誘電率層間絶縁膜が、多孔質膜であることを特徴とする請求項1〜4のいずれか1項に記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記低誘電率層間絶縁膜が、塗布によってまたはCVDによって成膜されたものであることを特徴とする請求項1〜5のいずれか1項に記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記混合ガスとして、低級直鎖炭化水素ガスを更に含むことを特徴とする請求項1〜6のいずれか1項に記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記低級直鎖炭化水素ガスの流量が、混合ガス総流量基準で2〜10%であることを特徴とする請求項7記載の低誘電率層間絶縁膜のドライエッチング方法。
- 前記低級直鎖炭化水素ガスがCH4、C2H6、C3H8、C4H10、またはC2H2であることを特徴とする請求項7または8記載の低誘電率層間絶縁膜のドライエッチング方法。
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Families Citing this family (5)
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JP2007251034A (ja) * | 2006-03-17 | 2007-09-27 | Hitachi High-Technologies Corp | プラズマ処理方法 |
JP2012015411A (ja) * | 2010-07-02 | 2012-01-19 | Tokyo Electron Ltd | 半導体装置の製造方法及び半導体装置 |
US9659788B2 (en) * | 2015-08-31 | 2017-05-23 | American Air Liquide, Inc. | Nitrogen-containing compounds for etching semiconductor structures |
US20170110336A1 (en) * | 2016-12-31 | 2017-04-20 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges CLuadeq | Methods for minimizing sidewall damage during low k etch processes |
US10347498B2 (en) | 2016-12-31 | 2019-07-09 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Methods of minimizing plasma-induced sidewall damage during low K etch processes |
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JP3330554B2 (ja) * | 1999-01-27 | 2002-09-30 | 松下電器産業株式会社 | エッチング方法 |
JP2002289577A (ja) * | 2001-03-27 | 2002-10-04 | Ulvac Japan Ltd | 基板上に堆積した有機珪素化合物を含有する材料の薄膜のエッチング法 |
JP4326746B2 (ja) * | 2002-01-07 | 2009-09-09 | 東京エレクトロン株式会社 | プラズマ処理方法 |
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