JP4888564B2 - キャビティ付きセラミック多層基板の製造方法 - Google Patents
キャビティ付きセラミック多層基板の製造方法 Download PDFInfo
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- JP4888564B2 JP4888564B2 JP2009538012A JP2009538012A JP4888564B2 JP 4888564 B2 JP4888564 B2 JP 4888564B2 JP 2009538012 A JP2009538012 A JP 2009538012A JP 2009538012 A JP2009538012 A JP 2009538012A JP 4888564 B2 JP4888564 B2 JP 4888564B2
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- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 215
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- 239000000843 powder Substances 0.000 description 23
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- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 6
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 230000006399 behavior Effects 0.000 description 3
- 238000004898 kneading Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 3
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- UODXCYZDMHPIJE-UHFFFAOYSA-N menthanol Chemical compound CC1CCC(C(C)(C)O)CC1 UODXCYZDMHPIJE-UHFFFAOYSA-N 0.000 description 2
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- HBNHCGDYYBMKJN-UHFFFAOYSA-N 2-(4-methylcyclohexyl)propan-2-yl acetate Chemical compound CC1CCC(C(C)(C)OC(C)=O)CC1 HBNHCGDYYBMKJN-UHFFFAOYSA-N 0.000 description 1
- CBECDWUDYQOTSW-UHFFFAOYSA-N 2-ethylbut-3-enal Chemical compound CCC(C=C)C=O CBECDWUDYQOTSW-UHFFFAOYSA-N 0.000 description 1
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- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
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- 150000001298 alcohols Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
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- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
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- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
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- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- JTHNLKXLWOXOQK-UHFFFAOYSA-N n-propyl vinyl ketone Natural products CCCC(=O)C=C JTHNLKXLWOXOQK-UHFFFAOYSA-N 0.000 description 1
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/4807—Ceramic parts
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
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- H01L2924/19101—Disposition of discrete passive components
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K3/46—Manufacturing multilayer circuits
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- Physics & Mathematics (AREA)
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- Production Of Multi-Layered Print Wiring Board (AREA)
Description
11,11s 複合積層体
12 セラミックグリーンシート(セラミック基材層)
13 セラミック積層体
15 キャビティ
15s 側面
15t 底面
16,16a,16b、16x、16y 空隙形成層
18,18x,18y 剥離層
19 空間
30 セラミック基材層
31 複合積層体
32 収縮抑制層
36 空隙形成層
38 剥離層
Claims (7)
- 複数の未焼成のセラミック基材層が積層され、収縮抑制層が少なくとも1層の未焼成の前記セラミック基材層の主面に接している複合積層体を形成する第1の工程と、
前記複合積層体を、前記収縮抑制層により面方向の収縮を抑制しながら焼成して、未焼成の前記セラミック基材層を焼結させる第2の工程と、
焼成後の前記複合積層体から、キャビティが形成された1個又は2個以上のセラミック多層基板を取り出す第3の工程と、
を備えた、キャビティ付きセラミック多層基板の製造方法において、
前記セラミック多層基板の前記キャビティは、
前記第1の工程において、未焼成の前記セラミック基材層に、前記キャビティの底面になるべき部分の少なくとも一部に剥離層を形成し、かつ、前記セラミック基材層を介して厚み方向に隣接して、少なくとも前記キャビティの側面になるべき部分の近傍部分に空隙形成層を形成し、
前記第2の工程において、前記空隙形成層により、前記セラミック基材層に隣接して複数の空隙が形成され、前記セラミック基材層に前記空隙間を繋ぐ空間が形成され、
前記第3の工程において、焼成後の前記複合積層体から、前記空間及び前記剥離層を境界として、前記キャビティの内部に残っている部分を取り除く、
ことにより形成されることを特徴とする、キャビティ付きセラミック多層基板の製造方法。 - 前記第1の工程において、未焼成の前記セラミック基材層の主面に、前記剥離層及び前記空隙形成層の少なくとも一方が形成されることを特徴とする、請求項1に記載のキャビティ付きセラミック多層基板の製造方法。
- 前記第1の工程において、前記剥離層及び前記空隙形成層の少なくとも一方は、ペースト状の材料を未焼成の前記セラミック基材層の前記主面に印刷することにより形成されることを特徴とする、請求項2に記載のキャビティ付きセラミック多層基板の製造方法。
- 前記剥離層は、未焼成の前記セラミック基材層が焼結する温度では実質的に焼結しない未焼結セラミック材料を主成分とし、
前記第2の工程における焼成温度は、前記剥離層が焼結する温度よりも低いことを特徴とする、請求項1、2又は3に記載のキャビティ付きセラミック多層基板の製造方法。 - 前記空隙形成層は、前記第2の工程において、未焼成の前記セラミック基材層が焼成収縮を開始するときに前記空隙を形成することを特徴とする、請求項1〜4のいずれか一つに記載のキャビティ付きセラミック多層基板の製造方法。
- 前記空隙形成層は、カーボンを含む材料を用いて形成されることを特徴とする、請求項1〜5のいずれか一つに記載のキャビティ付きセラミック多層基板の製造方法。
- 複数のセラミック基材層が積層され、キャビティが形成された、キャビティ付きセラミック多層基板であって、
前記キャビティの側面は、前記セラミック基材層の焼成時の収縮で分断された破断面を含むことを特徴とする、キャビティ付きセラミック多層基板。
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