JP4883291B2 - 液体噴射ヘッド及び液体噴射装置 - Google Patents
液体噴射ヘッド及び液体噴射装置 Download PDFInfo
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- JP4883291B2 JP4883291B2 JP2006283023A JP2006283023A JP4883291B2 JP 4883291 B2 JP4883291 B2 JP 4883291B2 JP 2006283023 A JP2006283023 A JP 2006283023A JP 2006283023 A JP2006283023 A JP 2006283023A JP 4883291 B2 JP4883291 B2 JP 4883291B2
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- pressure generating
- flow path
- path forming
- forming substrate
- generating chamber
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- 239000007788 liquid Substances 0.000 title claims description 27
- 239000000758 substrate Substances 0.000 claims description 126
- 239000000853 adhesive Substances 0.000 claims description 66
- 230000001070 adhesive effect Effects 0.000 claims description 59
- 238000004891 communication Methods 0.000 claims description 22
- 230000001154 acute effect Effects 0.000 claims description 6
- 230000000149 penetrating effect Effects 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims description 2
- 238000009751 slip forming Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 description 13
- 239000012298 atmosphere Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000012212 insulator Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000005304 joining Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 229910052726 zirconium Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920000069 polyphenylene sulfide Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000000018 DNA microarray Methods 0.000 description 1
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006283023A JP4883291B2 (ja) | 2006-10-17 | 2006-10-17 | 液体噴射ヘッド及び液体噴射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006283023A JP4883291B2 (ja) | 2006-10-17 | 2006-10-17 | 液体噴射ヘッド及び液体噴射装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008100382A JP2008100382A (ja) | 2008-05-01 |
| JP2008100382A5 JP2008100382A5 (enExample) | 2009-10-08 |
| JP4883291B2 true JP4883291B2 (ja) | 2012-02-22 |
Family
ID=39435076
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006283023A Active JP4883291B2 (ja) | 2006-10-17 | 2006-10-17 | 液体噴射ヘッド及び液体噴射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4883291B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010143098A (ja) * | 2008-12-19 | 2010-07-01 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
| JP6616156B2 (ja) * | 2015-10-29 | 2019-12-04 | 京セラ株式会社 | 流路部材、液体吐出ヘッド、記録装置、および流路部材の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278560A (ja) * | 1988-06-30 | 1990-03-19 | Canon Inc | インクジェット記録ヘッドおよびインクジェット記録装置 |
| JP3324621B2 (ja) * | 1992-11-25 | 2002-09-17 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
| JP3424721B2 (ja) * | 1996-10-18 | 2003-07-07 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、及びその製造方法 |
| JP3414227B2 (ja) * | 1997-01-24 | 2003-06-09 | セイコーエプソン株式会社 | インクジェット式記録ヘッド |
| JP2002307687A (ja) * | 2001-04-09 | 2002-10-23 | Sharp Corp | インク吐出装置及びその製造方法 |
| JP4390038B2 (ja) * | 2002-05-28 | 2009-12-24 | ブラザー工業株式会社 | 薄板状部品の積層接着構造 |
| JP2006082518A (ja) * | 2004-09-17 | 2006-03-30 | Canon Finetech Inc | インクジェットヘッドの製造方法およびインクジェットヘッドならびにインクジェット記録装置 |
| JP2006175668A (ja) * | 2004-12-21 | 2006-07-06 | Seiko Epson Corp | ブレイクパターン形成方法、及び、液体噴射ヘッド |
| JP4333584B2 (ja) * | 2005-01-07 | 2009-09-16 | ブラザー工業株式会社 | インクジェットヘッド |
| JP2006231790A (ja) * | 2005-02-25 | 2006-09-07 | Seiko Epson Corp | 液体噴射ヘッド及び液体噴射装置 |
-
2006
- 2006-10-17 JP JP2006283023A patent/JP4883291B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008100382A (ja) | 2008-05-01 |
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