JP4875740B2 - インクジェットヘッドの製造方法 - Google Patents
インクジェットヘッドの製造方法 Download PDFInfo
- Publication number
- JP4875740B2 JP4875740B2 JP2009232599A JP2009232599A JP4875740B2 JP 4875740 B2 JP4875740 B2 JP 4875740B2 JP 2009232599 A JP2009232599 A JP 2009232599A JP 2009232599 A JP2009232599 A JP 2009232599A JP 4875740 B2 JP4875740 B2 JP 4875740B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric body
- membrane
- inkjet head
- manufacturing
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 238000000034 method Methods 0.000 claims description 24
- 239000012528 membrane Substances 0.000 claims description 23
- 238000005498 polishing Methods 0.000 claims description 7
- 230000008569 process Effects 0.000 description 15
- 239000000758 substrate Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Description
なお、上記の発明の概要は、本発明の必要な特徴の全てを列挙したものではない。また、これらの特徴群のサブコンビネーションもまた、発明となりうる。
10 リザーバ
20 流入口
30 リストリクタ
40 チャンバ
50 ダンパ
60 ノズル
70 メンブレイン
80 圧電体
82 溝
Claims (3)
- 複数のチャンバと、
前記複数のチャンバをカバーするメンブレインと、
前記複数のチャンバにそれぞれ圧力を提供するように、仮想の分割線を境界として前記メンブレイン上に互いに離隔して配置される複数の駆動部と、
を含むインクジェットヘッドを製造する方法であって、
前記分割線の位置に対応する圧電体の一面に溝を形成する工程と、
前記溝が形成された前記圧電体の一面をメンブレインに接合する工程と、
前記溝が露出するまで前記圧電体の他面を研磨する工程と、
を含むことを特徴とするインクジェットヘッドの製造方法。 - 前記圧電体を接合する工程が、
前記メンブレインに装着溝を形成する工程と、
前記装着溝に前記圧電体を接合する工程と、
を含むことを特徴とする請求項1に記載のインクジェットヘッドの製造方法。 - 前記圧電体の他面を研磨する工程が、
前記装着溝の深さと、前記装着溝の底面から前記圧電体の他面までの高さとが同一になるように行われることを特徴とする請求項1に記載のインクジェットヘッドの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080121663A KR101024013B1 (ko) | 2008-12-03 | 2008-12-03 | 잉크젯 헤드 제조방법 |
KR10-2008-0121663 | 2008-12-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010131978A JP2010131978A (ja) | 2010-06-17 |
JP4875740B2 true JP4875740B2 (ja) | 2012-02-15 |
Family
ID=42221500
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009232599A Expired - Fee Related JP4875740B2 (ja) | 2008-12-03 | 2009-10-06 | インクジェットヘッドの製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20100132196A1 (ja) |
JP (1) | JP4875740B2 (ja) |
KR (1) | KR101024013B1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9139004B2 (en) * | 2012-03-05 | 2015-09-22 | Xerox Corporation | Print head transducer dicing directly on diaphragm |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3650004T2 (de) * | 1985-05-20 | 1995-02-23 | Matsushita Electric Ind Co Ltd | Ultraschallsonde. |
JPH11334088A (ja) * | 1998-05-27 | 1999-12-07 | Fuji Electric Co Ltd | インクジェット記録ヘッドの製造方法 |
US7266868B2 (en) * | 2003-06-30 | 2007-09-11 | Brother Kogyo Kabushiki Kaisha | Method of manufacturing liquid delivery apparatus |
JP4703382B2 (ja) * | 2005-02-14 | 2011-06-15 | 富士フイルム株式会社 | 振動子アレイの構造、およびその作製方法、並びに超音波プローブ |
KR101179335B1 (ko) * | 2006-02-17 | 2012-09-03 | 삼성전기주식회사 | 스크린 프린팅에 의한 후막 형성 방법 및 잉크젯 헤드의압전 액츄에이터 형성 방법 |
US20070257580A1 (en) * | 2006-05-05 | 2007-11-08 | Fujifilm Dimatix, Inc. | Polishing Piezoelectric Material |
JP2008198960A (ja) * | 2007-02-16 | 2008-08-28 | Brother Ind Ltd | 圧電アクチュエータの製造方法、及び、液体移送装置の製造方法 |
-
2008
- 2008-12-03 KR KR1020080121663A patent/KR101024013B1/ko not_active IP Right Cessation
-
2009
- 2009-08-14 US US12/541,570 patent/US20100132196A1/en not_active Abandoned
- 2009-10-06 JP JP2009232599A patent/JP4875740B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20100132196A1 (en) | 2010-06-03 |
KR20100063233A (ko) | 2010-06-11 |
JP2010131978A (ja) | 2010-06-17 |
KR101024013B1 (ko) | 2011-03-29 |
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