JP4873100B2 - 表面検査装置 - Google Patents

表面検査装置 Download PDF

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Publication number
JP4873100B2
JP4873100B2 JP2011032135A JP2011032135A JP4873100B2 JP 4873100 B2 JP4873100 B2 JP 4873100B2 JP 2011032135 A JP2011032135 A JP 2011032135A JP 2011032135 A JP2011032135 A JP 2011032135A JP 4873100 B2 JP4873100 B2 JP 4873100B2
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JP
Japan
Prior art keywords
unit
defect
imaging
steel plate
inspection apparatus
Prior art date
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Active
Application number
JP2011032135A
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English (en)
Japanese (ja)
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JP2011209274A (ja
Inventor
眞 奥野
宰一 村田
英紀 ▲高▼田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
JFE Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JFE Steel Corp filed Critical JFE Steel Corp
Priority to JP2011032135A priority Critical patent/JP4873100B2/ja
Priority to PCT/JP2011/054013 priority patent/WO2011111528A1/ja
Priority to KR1020127023429A priority patent/KR101343277B1/ko
Priority to CN201180013105.5A priority patent/CN102792155B/zh
Publication of JP2011209274A publication Critical patent/JP2011209274A/ja
Application granted granted Critical
Publication of JP4873100B2 publication Critical patent/JP4873100B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2011032135A 2010-03-11 2011-02-17 表面検査装置 Active JP4873100B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2011032135A JP4873100B2 (ja) 2010-03-11 2011-02-17 表面検査装置
PCT/JP2011/054013 WO2011111528A1 (ja) 2010-03-11 2011-02-23 表面検査装置
KR1020127023429A KR101343277B1 (ko) 2010-03-11 2011-02-23 표면 검사 장치
CN201180013105.5A CN102792155B (zh) 2010-03-11 2011-02-23 表面检查装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010055115 2010-03-11
JP2010055115 2010-03-11
JP2011032135A JP4873100B2 (ja) 2010-03-11 2011-02-17 表面検査装置

Publications (2)

Publication Number Publication Date
JP2011209274A JP2011209274A (ja) 2011-10-20
JP4873100B2 true JP4873100B2 (ja) 2012-02-08

Family

ID=44563339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011032135A Active JP4873100B2 (ja) 2010-03-11 2011-02-17 表面検査装置

Country Status (4)

Country Link
JP (1) JP4873100B2 (ko)
KR (1) KR101343277B1 (ko)
CN (1) CN102792155B (ko)
WO (1) WO2011111528A1 (ko)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105136810A (zh) * 2015-08-27 2015-12-09 张小磊 基于高强度照明的钢板缺陷检测平台
DE102016009237A1 (de) * 2016-07-28 2018-02-01 Franz Kessler Gmbh Spindelanordnung für eine Werkzeugmaschine mit einem optischen Element sowie optisches Element, insbesondere für eine derartige Spindelanordnung
JP6627689B2 (ja) * 2016-08-17 2020-01-08 Ｊｆｅスチール株式会社 金属帯の表面検査方法
JP2018059772A (ja) * 2016-10-04 2018-04-12 オムロン株式会社 シート検査装置
CN109781743A (zh) * 2017-11-14 2019-05-21 鹤立精工股份有限公司 光学检测方法
TWI689723B (zh) * 2019-02-01 2020-04-01 中國鋼鐵股份有限公司 提取物件表面凹印的方法
CN110346381B (zh) * 2019-08-12 2022-03-08 衡阳师范学院 一种光学元件损伤测试方法及装置
CN112730419B (zh) * 2019-10-14 2024-01-09 富泰华工业（深圳）有限公司 外观瑕疵检测装置
CN112730420B (zh) * 2019-10-14 2024-02-20 富泰华工业（深圳）有限公司 外观瑕疵检测工站
CN112718881A (zh) * 2019-10-28 2021-04-30 南京智欧智能技术研究院有限公司 一种用于检测热轧钢材料表面缺陷的方法和装置
CN111307825B (zh) * 2020-04-08 2023-05-02 山东交通学院 木质板材表面凹坑缺陷检测方法
JP7471533B2 (ja) 2022-03-03 2024-04-19 三菱電機株式会社 外観検査装置及び外観検査方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3590162B2 (ja) * 1995-10-16 2004-11-17 アピックヤマダ株式会社 リードフレームの検査装置
CN100520376C (zh) * 2003-10-21 2009-07-29 大发工业株式会社 表面缺陷检查方法及装置
US20080024794A1 (en) * 2004-06-04 2008-01-31 Yoko Miyazaki Semiconductor Surface Inspection Apparatus and Method of Illumination
JP4673733B2 (ja) * 2005-12-02 2011-04-20 新日本製鐵株式会社 表面検査装置および表面検査方法
US7458318B2 (en) * 2006-02-01 2008-12-02 Speedline Technologies, Inc. Off-axis illumination assembly and method
CN101614679B (zh) * 2008-06-27 2011-06-22 上海纺印印刷包装有限公司 一种凹凸印刷品的质量检测装置

Also Published As

Publication number Publication date
WO2011111528A1 (ja) 2011-09-15
CN102792155B (zh) 2014-10-29
KR20120115580A (ko) 2012-10-18
KR101343277B1 (ko) 2013-12-18
CN102792155A (zh) 2012-11-21
JP2011209274A (ja) 2011-10-20

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