JP4870204B2 - パワー半導体モジュール - Google Patents
パワー半導体モジュール Download PDFInfo
- Publication number
- JP4870204B2 JP4870204B2 JP2009286738A JP2009286738A JP4870204B2 JP 4870204 B2 JP4870204 B2 JP 4870204B2 JP 2009286738 A JP2009286738 A JP 2009286738A JP 2009286738 A JP2009286738 A JP 2009286738A JP 4870204 B2 JP4870204 B2 JP 4870204B2
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- Japan
- Prior art keywords
- power semiconductor
- semiconductor module
- solder layer
- internal electrode
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Description
特に、パワー半導体モジュールでは、内部電極等の接合には半田が用いられ、半田接合部の割れが、製品寿命を決める一つの要素となっていた。
図1は、全体が100で表される、本発明の実施の形態1にかかるパワー半導体モジュールの断面図である。また、図2は、図1に符合Aで示す部分を拡大した断面図である。
図5は、本発明の実施の形態2にかかるパワー半導体モジュールに用いる内部電極9の、絶縁基板2に半田層10で接続される部分の斜視図である。
本実施の形態2にかかる内部電極9は、板状部19と縒り線部23とからなる。絶縁基板2と半田層10により接合される縒り線部23は、例えば複数の銅の細線を縒り合わせた構造からなる。銅の細線には、ニッケルメッキ等が施されている。縒り線部23は、例えば銅からなる板状部19にろう付けされている。
かかる内部電極9は、板状部29と編み線部24とからなる。絶縁基板2と半田層10により接合される編み線部24は、例えば複数の銅の細線をメッシュ状に編んだ構造からなる。銅の細線には、ニッケルメッキ等が施されている。編み線部24は、例えば銅からなる板状部29にろう付けされている。
図7は、本発明の実施の形態3にかかるパワー半導体モジュールの、図1のAに相当する部分の断面図である。A以外の部分の構造は、図1と同じである(以下の実施の形態においても同じ)。
図8は、本発明の実施の形態4にかかるパワー半導体モジュールの、図1のAに相当する部分の断面図である。
Claims (4)
- 絶縁板と該絶縁板の主表面に設けられた配線層とを含む絶縁基板と、
該配線層上に固定された半導体素子と、
該絶縁板の主表面に略平行な接合面を有し、該接合面が該配線層上に半田層で接続された内部電極とを含み、
該内部電極が、該半田層で覆われた該接合面に、略平行に配置された複数のストライプ状の上部突起部を有し、かつ該配線層が、該半田層で覆われた領域に、略平行に配置された複数のストライプ状の下部突起部を有することを特徴とするパワー半導体モジュール。 - 隣接する2つの上記上部突起部の間に、上記下部突起部が配置されたことを特徴とする請求項1に記載のパワー半導体モジュール。
- 上記上部突起部および上記下部突起部の断面形状が、ともに略矩形であることを特徴とする請求項1に記載のパワー半導体モジュール。
- 上記上部突起部および上記下部突起部の断面形状が、ともに略三角形であることを特徴とする請求項1に記載のパワー半導体モジュール。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009286738A JP4870204B2 (ja) | 2009-12-17 | 2009-12-17 | パワー半導体モジュール |
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---|---|---|---|
JP2009286738A JP4870204B2 (ja) | 2009-12-17 | 2009-12-17 | パワー半導体モジュール |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005170251A Division JP4485995B2 (ja) | 2005-06-10 | 2005-06-10 | パワー半導体モジュール |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011231269A Division JP5602703B2 (ja) | 2011-10-21 | 2011-10-21 | パワー半導体モジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010093287A JP2010093287A (ja) | 2010-04-22 |
JP4870204B2 true JP4870204B2 (ja) | 2012-02-08 |
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JP2009286738A Active JP4870204B2 (ja) | 2009-12-17 | 2009-12-17 | パワー半導体モジュール |
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JP (1) | JP4870204B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6569558B2 (ja) * | 2016-02-19 | 2019-09-04 | 株式会社村田製作所 | モジュール |
CN112164689A (zh) * | 2020-08-25 | 2021-01-01 | 江苏长电科技股份有限公司 | 一种防止金属罩偏移的气密性封装结构 |
JP7438071B2 (ja) * | 2020-09-15 | 2024-02-26 | 株式会社東芝 | 半導体装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001036001A (ja) * | 1999-07-21 | 2001-02-09 | Toyota Central Res & Dev Lab Inc | 電力半導体モジュール |
JP2004200539A (ja) * | 2002-12-20 | 2004-07-15 | Toshiba Corp | 部品の接続端子及び電子機器 |
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