JP4866200B2 - 発光デバイスの製造方法 - Google Patents

発光デバイスの製造方法 Download PDF

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Publication number
JP4866200B2
JP4866200B2 JP2006274252A JP2006274252A JP4866200B2 JP 4866200 B2 JP4866200 B2 JP 4866200B2 JP 2006274252 A JP2006274252 A JP 2006274252A JP 2006274252 A JP2006274252 A JP 2006274252A JP 4866200 B2 JP4866200 B2 JP 4866200B2
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Japan
Prior art keywords
glass substrate
substrate
emitting device
thickness
main surface
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JP2006274252A
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Japanese (ja)
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JP2008097829A (ja
JP2008097829A5 (enrdf_load_stackoverflow
Inventor
孝之 竹内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Priority to JP2006274252A priority Critical patent/JP4866200B2/ja
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Publication of JP2008097829A5 publication Critical patent/JP2008097829A5/ja
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JP2006274252A 2006-10-05 2006-10-05 発光デバイスの製造方法 Active JP4866200B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006274252A JP4866200B2 (ja) 2006-10-05 2006-10-05 発光デバイスの製造方法

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Application Number Priority Date Filing Date Title
JP2006274252A JP4866200B2 (ja) 2006-10-05 2006-10-05 発光デバイスの製造方法

Publications (3)

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JP2008097829A JP2008097829A (ja) 2008-04-24
JP2008097829A5 JP2008097829A5 (enrdf_load_stackoverflow) 2009-06-04
JP4866200B2 true JP4866200B2 (ja) 2012-02-01

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JP2006274252A Active JP4866200B2 (ja) 2006-10-05 2006-10-05 発光デバイスの製造方法

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JP (1) JP4866200B2 (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009136305A1 (en) * 2008-05-06 2009-11-12 Koninklijke Philips Electronics N.V. Reelable oled curtain
JP5099060B2 (ja) * 2009-03-26 2012-12-12 セイコーエプソン株式会社 有機el装置、有機el装置の製造方法、電子機器
KR101114916B1 (ko) * 2010-12-27 2012-02-14 주식회사 엘지화학 유기발광소자용 기판 및 그 제조방법
TWI669835B (zh) * 2012-07-05 2019-08-21 日商半導體能源研究所股份有限公司 發光裝置
WO2014136259A1 (ja) 2013-03-08 2014-09-12 パイオニア株式会社 発光素子
WO2015029806A1 (en) 2013-08-30 2015-03-05 Semiconductor Energy Laboratory Co., Ltd. Processing apparatus and processing method of stack
JP6416307B2 (ja) * 2017-04-07 2018-10-31 パイオニア株式会社 発光素子

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004040649A1 (ja) * 2002-11-01 2004-05-13 Semiconductor Energy Laboratory Co., Ltd. 半導体装置および半導体装置の作製方法
KR100484109B1 (ko) * 2002-12-14 2005-04-18 삼성에스디아이 주식회사 기판 제조방법, 이 기판제조방법을 이용한 유기 전계발광표시장치의 제조방법 및 유기 전계 발광 표시장치
JP4218338B2 (ja) * 2002-12-24 2009-02-04 セイコーエプソン株式会社 液晶表示装置の製造方法
JP2005100895A (ja) * 2003-09-26 2005-04-14 Seiko Epson Corp 電気光学装置の製造方法、電気光学装置の製造方法で製造された電気光学装置、電気光学装置を搭載した電子機器、および液滴吐出装置
JP2005209756A (ja) * 2004-01-21 2005-08-04 Sony Corp 薄膜デバイスの製造方法、薄膜デバイス、液晶表示装置およびエレクトロルミネッセンス表示装置
JP4512436B2 (ja) * 2004-07-09 2010-07-28 シャープ株式会社 表示装置およびその製造方法
JP5109228B2 (ja) * 2005-02-08 2012-12-26 旭硝子株式会社 薄板ガラス積層体及び薄板ガラス積層体を用いた表示装置の製造方法
FR2893750B1 (fr) * 2005-11-22 2008-03-14 Commissariat Energie Atomique Procede de fabrication d'un dispositif electronique flexible du type ecran comportant une pluralite de composants en couches minces.

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