JP4864370B2 - 温度センサ - Google Patents

温度センサ Download PDF

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Publication number
JP4864370B2
JP4864370B2 JP2005213141A JP2005213141A JP4864370B2 JP 4864370 B2 JP4864370 B2 JP 4864370B2 JP 2005213141 A JP2005213141 A JP 2005213141A JP 2005213141 A JP2005213141 A JP 2005213141A JP 4864370 B2 JP4864370 B2 JP 4864370B2
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JP
Japan
Prior art keywords
layer
metal layer
temperature
crystal
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005213141A
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English (en)
Japanese (ja)
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JP2007036384A5 (enExample
JP2007036384A (ja
Inventor
光明 小山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP2005213141A priority Critical patent/JP4864370B2/ja
Priority to US11/989,127 priority patent/US20090268776A1/en
Priority to PCT/JP2006/314940 priority patent/WO2007011070A1/ja
Publication of JP2007036384A publication Critical patent/JP2007036384A/ja
Publication of JP2007036384A5 publication Critical patent/JP2007036384A5/ja
Application granted granted Critical
Publication of JP4864370B2 publication Critical patent/JP4864370B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005213141A 2005-07-22 2005-07-22 温度センサ Expired - Fee Related JP4864370B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005213141A JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ
US11/989,127 US20090268776A1 (en) 2005-07-22 2006-07-21 Piezoelectric Resonator and Temperature Sensor
PCT/JP2006/314940 WO2007011070A1 (ja) 2005-07-22 2006-07-21 圧電振動子及び温度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005213141A JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ

Publications (3)

Publication Number Publication Date
JP2007036384A JP2007036384A (ja) 2007-02-08
JP2007036384A5 JP2007036384A5 (enExample) 2010-05-06
JP4864370B2 true JP4864370B2 (ja) 2012-02-01

Family

ID=37668937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005213141A Expired - Fee Related JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ

Country Status (3)

Country Link
US (1) US20090268776A1 (enExample)
JP (1) JP4864370B2 (enExample)
WO (1) WO2007011070A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101890176B1 (ko) 2017-11-01 2018-09-28 주식회사 유라테크 온도 센서 모듈

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010074422A (ja) * 2008-09-17 2010-04-02 Nippon Dempa Kogyo Co Ltd 水晶振動子素子の製造方法、水晶振動子素子、水晶振動子及び水晶発振器
KR101240759B1 (ko) * 2011-04-14 2013-03-11 삼성전기주식회사 수정 진동자 및 수정 진동자의 전극 구조
KR100956244B1 (ko) 2008-09-26 2010-05-06 삼성전기주식회사 압전 진동자 및 압전 진동자의 전극 구조
US10634566B2 (en) 2016-06-30 2020-04-28 Intel Corporation Piezoelectric package-integrated temperature sensing devices
CN110995190A (zh) * 2019-11-14 2020-04-10 常州微泰格电子科技有限公司 零温漂谐振器的结构及制成方法

Family Cites Families (21)

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JPS539108B2 (enExample) * 1971-11-01 1978-04-03
FR2545669B1 (fr) * 1983-05-03 1985-08-09 France Etat Armement Oscillateur a quartz compense en temperature
US4592663A (en) * 1984-05-10 1986-06-03 Quartex, Inc. Resonator temperature transducer
JPH0622310B2 (ja) * 1986-02-21 1994-03-23 セイコ−電子部品株式会社 輪郭すべり水晶振動子
US5607236A (en) * 1987-02-27 1997-03-04 Seiko Epson Corporation Quartz oscillator temperature sensor
JP3010922B2 (ja) * 1992-08-28 2000-02-21 セイコーエプソン株式会社 温度検出用水晶振動子及びその製造方法
US5325574A (en) * 1987-02-27 1994-07-05 Seiko Epson Corporation Method of forming a quartz oscillator temperature sensor
JPS63284439A (ja) * 1987-05-15 1988-11-21 Sumitomo Metal Ind Ltd 水晶温度センサ
JPS6429722A (en) * 1987-07-24 1989-01-31 Toyo Communication Equip Temperature sensor
DE3744239C1 (de) * 1987-12-24 1989-06-01 Heraeus Gmbh W C Elektronisches Thermometer
GB9013056D0 (en) * 1990-06-12 1990-08-01 Stc Plc Temperature sensor
GB2251143B (en) * 1990-09-28 1994-10-12 Nec Corp A temperature detector and a temperature compensated oscillator using the temperature detector
JPH04276914A (ja) * 1991-03-05 1992-10-02 Seiko Epson Corp 厚み辷り水晶振動子
AT401837B (de) * 1993-03-04 1996-12-27 Avl Verbrennungskraft Messtech Piezoelektrisches kristallelement
JP3468373B2 (ja) * 1993-08-06 2003-11-17 日本電波工業株式会社 水晶振動子
JP3420090B2 (ja) * 1998-11-06 2003-06-23 日本電波工業株式会社 水晶振動子の電極構造及び表面実装用水晶振動子
JP3823647B2 (ja) * 1999-12-15 2006-09-20 セイコーエプソン株式会社 圧電振動子と圧電振動片の周波数調整方法及び周波数調整用の加工装置
JP4066614B2 (ja) * 2001-05-18 2008-03-26 セイコーエプソン株式会社 圧電デバイス、及び圧電振動片の製造方法
JP2003078383A (ja) * 2001-08-30 2003-03-14 Kyocera Corp 水晶振動子
JP2003149058A (ja) * 2001-11-14 2003-05-21 Toshiba Corp 温度センサ及びプラント温度計測装置
EP1644717A2 (en) * 2003-03-21 2006-04-12 Symyx Technologies, Inc. Mechanical resonator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101890176B1 (ko) 2017-11-01 2018-09-28 주식회사 유라테크 온도 센서 모듈

Also Published As

Publication number Publication date
US20090268776A1 (en) 2009-10-29
JP2007036384A (ja) 2007-02-08
WO2007011070A1 (ja) 2007-01-25

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